Wedge-shaped sliding block type coaxial adjusting mechanism

Abstract

The utility model relates to a wedge-shaped slide block type coaxial adjusting mechanism, which belongs to the technical field of optical element adjustment, and comprises a first light cylinder assembly, an adjusting switching assembly and a second light cylinder assembly, and the first light cylinder assembly is connected with the second light cylinder assembly through the adjusting switching assembly; the adjusting adapter assembly comprises a first adapter ring, a chute fixing block, a wedge-shaped pressing block, an adjusting screw rod and an adapter cylinder; the first adapter ring is connected with the first light cylinder assembly, the multiple inclined groove fixing blocks, the multiple wedge-shaped pressing blocks and the multiple adjusting screw rods are arranged in a one-to-one correspondence mode, and the multiple inclined groove fixing blocks are arranged at intervals in the circumferential direction and fixedly connected with the first adapter ring; the first end of the adapter cylinder is circumferentially provided with an inclined surface, and the second end of the adapter cylinder is connected with the second light cylinder assembly; each inclined groove fixing block is provided with an inclined groove, each wedge-shaped pressing block is in a wedge shape, wedge-shaped faces on the two sides of each wedge-shaped pressing block are matched with the inclined grooves and the inclined faces respectively, and the wedge-shaped pressing blocks and the corresponding inclined groove fixing blocks are pressed through adjusting screw rods.

Description

Technical Field

[0001] The utility model belongs to the technical field of optical element adjustment, and particularly relates to a wedge-shaped slider type coaxial adjustment mechanism. Background Art

[0002] Microjet laser processing equipment is widely used in semiconductor industry processing due to its excellent properties such as low heat influence, high efficiency, large working distance, and micron-level processing size. High-precision laser processing equipment needs to ensure beam coaxial alignment to achieve micron-level processing effect. Therefore, before water-light coupling, laser beam coaxial alignment is required.

[0003] Traditional coaxial adjustment mechanisms often adopt a mechanical structure with springs and screws, and achieve optical path calibration through single-axis sliding adjustment. However, such mechanisms are prone to coaxiality deviation due to spring yielding in a vibration or shock environment, and parallelism errors between components are easily introduced during the adjustment process, affecting processing accuracy and long-term stability. Therefore, there is an urgent need for an impact-resistant and multi-axis adjustable coaxial adjustment mechanism to solve the problems of insufficient stability and limited adjustment in the prior art. Summary of the Utility Model

[0004] In order to solve the above problems existing in the prior art, the utility model provides a wedge-shaped slider type coaxial adjustment mechanism. The technical problems to be solved by the utility model are realized through the following technical solutions:

[0005] The utility model provides a wedge-shaped slider type coaxial adjustment mechanism, including: a first light cylinder assembly, an adjustment adapter assembly, and a second light cylinder assembly. Among them, the first light cylinder assembly and the second light cylinder assembly are connected through the adjustment adapter assembly; the adjustment adapter assembly includes: a first adapter ring, an inclined slot fixing block, a wedge-shaped pressing block, an adjustment screw, and an adapter cylinder; the first adapter ring is connected to the first light cylinder assembly, and there are multiple inclined slot fixing blocks, wedge-shaped pressing blocks, and adjustment screws, which are arranged in one-to-one correspondence. The multiple inclined slot fixing blocks are circumferentially spaced and fixedly connected to the first adapter ring; the first end of the adapter cylinder is circumferentially provided with an inclined surface, and the second end of the adapter cylinder is connected to the second light cylinder assembly; each inclined slot fixing block is provided with an inclined slot, each wedge-shaped pressing block is wedge-shaped, the wedge-shaped surfaces on both sides of the wedge-shaped pressing block are respectively matched with the inclined slot and the inclined surface, and the wedge-shaped pressing block and the corresponding inclined slot fixing block are pressed through the adjustment screw.

[0006] In an embodiment of the utility model, the first light cylinder assembly includes: a light source outer cover and an annular light source. The annular light source is arranged inside the light source outer cover, and the light source outer cover is connected to the adjustment adapter assembly.

[0007] In one embodiment of the present utility model, the light source housing is threadedly connected to the first side of the first adapter ring.

[0008] In one embodiment of the present utility model, a plurality of the inclined slot fixing blocks are circumferentially and spacedly arranged on the second side of the first adapter ring.

[0009] In one embodiment of the present utility model, each of the inclined slot fixing blocks is fixedly connected to the second side of the first adapter ring by screws.

[0010] In one embodiment of the present utility model, the inclined slots of the plurality of inclined slot fixing blocks are arranged in the opposite direction to the inclined surface of the adapter cylinder.

[0011] In one embodiment of the present utility model, the angles of all the inclined slots and all the wedge-shaped surfaces are equal to the angle of the inclined surface.

[0012] In one embodiment of the present utility model, the wedge-shaped pressing block is provided with a waist-shaped hole, and the adjusting screw passes through the waist-shaped hole to press the wedge-shaped pressing block against the corresponding inclined slot fixing block.

[0013] In one embodiment of the present utility model, the end surface of the first end of the adapter cylinder is in contact with the second side of the first adapter ring, and a first beam splitter is arranged inside the adapter cylinder.

[0014] In one embodiment of the present utility model, the second light cylinder assembly includes: a second adapter ring and a second beam splitter, the second beam splitter is arranged inside the second adapter ring, and the second adapter ring is threadedly connected to the second end of the adapter cylinder.

[0015] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0016] The wedge-shaped slider type coaxial adjustment mechanism of the present utility model realizes coaxial adjustment through the cooperation of the wedge-shaped pressing block with the inclined slot and the inclined surface, combined with the mechanical locking of the adjusting screw. During adjustment, the wedge-shaped pressing block slides along the inclined slot, precisely pushing the adapter cylinder to translate and eliminating the parallelism deviation. The anti-impact ability is enhanced through the inclined surface cooperation and thread locking, ensuring stable coaxiality between the two light cylinder assemblies after adjustment. This mechanism has a compact structure and is easy to operate, is suitable for the coaxial calibration of high-precision laser processing equipment, and significantly improves the processing quality and equipment reliability.

[0017] The above description is only an overview of the technical solution of the present utility model. In order to be able to understand the technical means of the present utility model more clearly, it can be implemented according to the content of the description. And in order to make the above and other purposes, features and advantages of the present utility model more obvious and understandable, the following specific preferred embodiments are given and described in detail in conjunction with the accompanying drawings as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic structural diagram of a wedge-shaped slider type coaxial adjustment mechanism provided by an embodiment of the present utility model;

[0019] Figure 2 It is a schematic structural diagram (front view) of a wedge-shaped slider type coaxial adjustment mechanism provided by an embodiment of the present utility model;

[0020] Figure 3 It is provided by an embodiment of the present utility model Figure 2 Structural sectional view in the direction of A in;

[0021] Figure 4 It is provided by an embodiment of the present utility model Figure 2 Structural sectional view in the direction of B in;

[0022] Figure 5 It is a schematic structural diagram of an inclined groove fixing block provided by an embodiment of the present utility model;

[0023] Figure 6 It is a schematic structural diagram (bottom view) of an inclined groove fixing block provided by an embodiment of the present utility model;

[0024] Figure 7 It is provided by an embodiment of the present utility model Figure 6 Structural sectional view in the direction of C in;

[0025] Figure 8 It is a schematic structural diagram (bottom view) of a wedge-shaped pressing block provided by an embodiment of the present utility model;

[0026] Figure 9 It is a schematic structural diagram (front view) of a wedge-shaped pressing block provided by an embodiment of the present utility model;

[0027] Figure 10 It is a structural sectional view of an adapter tube provided by an embodiment of the present utility model;

[0028] Figure 11 It is provided by an embodiment of the present utility model Figure 10 Schematic structural diagram at position I in.

[0029] Reference numerals: 100 - First light tube assembly; 101 - Light source outer cover; 102 - Ring light source; 200 - Adjusting adapter assembly; 201 - First adapter ring; 202 - Inclined groove fixing block; 203 - Wedge-shaped pressing block; 204 - Adjusting screw; 205 - Adapter tube; 206 - First beam splitter; 300 - Second light tube assembly; 301 - Second adapter ring; 302 - Second beam splitter. Detailed implementation manners

[0030] In order to further elaborate on the technical means and effects adopted by the present utility model to achieve the intended utility model purpose, the following provides a detailed description of a wedge-shaped slider type coaxial adjustment mechanism proposed according to the present utility model in combination with the accompanying drawings and specific embodiments.

[0031] The foregoing and other technical contents, features, and effects of the present utility model can be clearly presented in the following detailed description of the specific embodiments in conjunction with the accompanying drawings. Through the description of the specific embodiments, a more in-depth and specific understanding of the technical means and effects adopted by the present utility model to achieve the intended purpose can be obtained. However, the attached drawings are only for reference and explanation, and are not used to limit the technical solution of the present utility model.

[0032] Embodiment 1

[0033] As shown in Figures 1 to Figure 10 as follows, Figure 1 is a schematic structural diagram of a wedge-shaped slider type coaxial adjustment mechanism provided by an embodiment of the present utility model; Figure 2 is a schematic structural diagram (front view) of a wedge-shaped slider type coaxial adjustment mechanism provided by an embodiment of the present utility model; Figure 3 is provided by an embodiment of the present utility model Figure 2 a structural sectional view in the direction of A in Figure 4 is provided by an embodiment of the present utility model Figure 2 a structural sectional view in the direction of B in Figure 5 is a schematic structural diagram of a slotted fixed block provided by an embodiment of the present utility model; Figure 6 is a schematic structural diagram (bottom view) of a slotted fixed block provided by an embodiment of the present utility model; Figure 7 is provided by an embodiment of the present utility model Figure 6 a structural sectional view in the direction of C in Figure 8 is a schematic structural diagram (bottom view) of a wedge-shaped pressing block provided by an embodiment of the present utility model Figure 9 is a schematic structural diagram (front view) of a wedge-shaped pressing block provided by an embodiment of the present utility model; Figure 10 is a schematic structural diagram of a transfer cylinder provided by an embodiment of the present utility model; Figure 11 is provided by an embodiment of the present utility model Figure 10 a schematic structural diagram at I in

[0034] In this embodiment, the wedge slider type coaxial adjustment mechanism includes: a first light cylinder assembly 100, an adjustment adapter assembly 200, and a second light cylinder assembly 300. Among them, the first light cylinder assembly 100 is connected to the second light cylinder assembly 300 through the adjustment adapter assembly 200; the adjustment adapter assembly 200 includes: a first adapter ring 201, an inclined groove fixing block 202, a wedge pressing block 203, an adjustment screw 204, and an adapter cylinder 205; the first adapter ring 201 is connected to the first light cylinder assembly 100, and there are multiple inclined groove fixing blocks 202, wedge pressing blocks 203, and adjustment screws 204, which are arranged in one-to-one correspondence. The multiple inclined groove fixing blocks 202 are arranged at intervals in the circumferential direction and fixedly connected to the first adapter ring 201; the first end of the adapter cylinder 205 is provided with an inclined surface in the circumferential direction, and the second end of the adapter cylinder 205 is connected to the second light cylinder assembly 300; each inclined groove fixing block 202 is provided with an inclined groove, each wedge pressing block 203 is wedge-shaped, and the wedge-shaped surfaces on both sides of the wedge pressing block 203 are respectively matched with the inclined groove and the inclined surface. The wedge pressing block 203 is pressed against the corresponding inclined groove fixing block 202 through the adjustment screw 204.

[0035] The principle lies in that the inclined groove of the inclined groove fixing block 202 plays a role in limiting and guiding. At the same time, the inclined surfaces of the wedge-shaped pressing block 203 are respectively in contact with the inclined groove and the inclined surface of the adapter cylinder 205. By applying pressure through the adjusting screw 204, the wedge-shaped pressing block 203 can, under the guidance of the inclined groove, push the adapter cylinder 205 to move closely against the lower side plane of the first adapter ring 201, and drive the second light cylinder assembly 300 to be coaxial with the first light cylinder assembly 100. Specifically, when the adjusting screw 204 is tightened, the adjusting screw 204 pulls the wedge-shaped pressing block 203 towards the first adapter ring 201. Since the inclined groove fixing block 202 is fixed to the first adapter ring 201, the inclined groove fixing block 202 will not move. At this time, the adapter cylinder 205 lacks circumferential limitation, so that the wedge-shaped pressing block 203 can push the adapter cylinder 205 to move along the lower side plane of the first adapter ring 201. Among them, the first side of the first adapter ring 201 is the upper side plane, and the second side is the lower side plane. Also, since the adjusting adapter assembly 200 plays a role in connecting the first light cylinder assembly 100 and the second light cylinder assembly 300, that is, the first adapter ring 201 connects the first light cylinder assembly 100, the first end of the adapter cylinder 205 is connected to the first adapter ring 201 through the inclined groove fixing block 202 and the wedge-shaped pressing block 203, and the second end of the adapter cylinder 205 is then connected to the second light cylinder assembly 300. Thus, when the adapter cylinder 205 moves, the positional relationship between the second light cylinder assembly 300 and the first light cylinder assembly 100 changes. By respectively adjusting a plurality of adjusting screws 204, multi-directional position adjustment is achieved until the first light cylinder assembly 100 and the second light cylinder assembly 300 are coaxial. Similarly, when the adjusting screw 204 is loosened, the limiting effect of the inclined groove fixing block 202 on the wedge-shaped pressing block 203 weakens, the wedge-shaped pressing block 203 moves away from the first adapter ring 201, and the adapter cylinder 205 moves along the lower side plane of the first adapter ring 201. By respectively adjusting a plurality of adjusting screws 204 until the first light cylinder assembly 100 and the second light cylinder assembly 300 are coaxial.

[0036] It can be understood that during the coaxial adjustment process, all the adjusting screws 204 can be tightened, or only some of the adjusting screws 204 can be tightened, and the remaining adjusting screws 204 can remain stationary or be loosened.

[0037] In an optional embodiment, the first light cylinder assembly 100 includes: a light source outer cover 101 and an annular light source 102. The annular light source 102 is arranged inside the light source outer cover 101, and the light source outer cover 101 is connected to the adjusting adapter assembly 200. Exemplarily, the light source outer cover 101 is threadedly connected to the first side of the first adapter ring 201.

[0038] In an optional embodiment, the end face of the first end of the adapter cylinder 205 is in contact with the second side of the first adapter ring 201, and a first beam splitter 206 is arranged inside the adapter cylinder 205.

[0039] In an alternative embodiment, the second light cylinder assembly 300 includes: a second adapter ring 301 and a second beam splitter 302. The second beam splitter 302 is disposed within the second adapter ring 301, and the second adapter ring 301 is threadedly connected to the second end of the adapter cylinder 205.

[0040] It can be understood that the process of coaxial adjustment is the process of making the annular light source 102, the first beam splitter 206, and the second beam splitter 302 coaxial. The adapter cylinder 205 functions to directly or indirectly connect the first light cylinder assembly 100 and the second light cylinder assembly 300. Since the adapter cylinder 205 is directly connected to the second light cylinder assembly 300, the adapter cylinder 205 is directly coaxial with the second beam splitter 302. Therefore, by adjusting the position of the adapter cylinder 205, the coaxiality of the annular light source 102, the first beam splitter 206, and the second beam splitter 302 can be finally achieved.

[0041] In an alternative embodiment, a plurality of inclined slot fixing blocks 202 are circumferentially and spacedly disposed on the second side of the first adapter ring 201. Exemplarily, each inclined slot fixing block 202 is fixedly connected to the second side of the first adapter ring 201 by screws.

[0042] In an alternative embodiment, the inclined slots of the plurality of inclined slot fixing blocks 202 are arranged in the opposite direction to the inclined surface of the adapter cylinder 205, so that the wedge-shaped surfaces on both sides of the wedge-shaped pressing block 203 are clamped between the inclined slots and the inclined surface. Exemplarily, the angles of all the inclined slots and the inclined surface angles of all the connecting cylinders are equal, and the angle of the wedge-shaped surface is equal to 2 . Preferably, the angle

[0043] can be set to 15°, and the adapter cylinder 205 can be continuously moved 2 mm along the horizontal plane within the full stroke adjustment range.

[0044] It should be noted that the wedge-shaped surfaces on both sides of the wedge-shaped pressing block 203 are respectively in contact with the inclined grooves of the inclined groove fixing block 202 and the inclined surfaces of the adapter cylinder 205, forming a multi-directional contact surface. When the mechanism is impacted, the impact force is decomposed, transmitted, and absorbed through the inclination angle. The sliding guiding characteristics of the inclined surface cooperation can buffer the instantaneous impact and avoid deformation or displacement caused by local stress concentration. At the same time, the adjusting screw 204 presses the wedge-shaped pressing block 203 against the inclined groove fixing block 202 through threaded connection. The self-locking characteristic of the thread ensures that there is no loosening after locking, and the impact force can be transmitted to the first adapter ring 201, avoiding the accumulation of impact energy at the connection position, thereby maintaining the structural stability. Generally speaking, the wedge-shaped slider type coaxial adjustment mechanism of the present utility model disperses the impact force through the inclined surface cooperation, reducing the peak force; adopts threaded locking to prevent component displacement through mechanical fixation. The combination of the two forms a protection mechanism of dynamic buffering + static locking, ensuring that the coaxiality between the two optical cylinder components is not affected in a vibration or impact environment.

[0045] The wedge-shaped slider type coaxial adjustment mechanism of the present utility model realizes coaxial adjustment through the cooperation of the wedge-shaped pressing block with the inclined groove and the inclined surface, combined with the mechanical locking of the adjusting screw. During adjustment, the wedge-shaped pressing block slides along the inclined groove, precisely pushing the adapter cylinder to translate and eliminating the parallelism deviation. The impact resistance is enhanced through the inclined surface cooperation and threaded locking, ensuring stable coaxiality between the two optical cylinder components after adjustment. This mechanism has a compact structure and is easy to operate, suitable for the coaxial calibration of high-precision laser processing equipment, significantly improving the processing quality and equipment reliability.

[0046] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant is intended to cover non-exclusive inclusion, so that an article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of another identical element in the article or device including the element. "Connection" or "connected" and other similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The orientation or positional relationship indicated by "up", "down", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model.

[0047] The above content is a further detailed description of the present utility model in combination with specific preferred embodiments. It cannot be determined that the specific implementation of the present utility model is only limited to these descriptions. For those of ordinary skill in the technical field to which the present utility model pertains, without departing from the concept of the present utility model, several simple deductions or substitutions can still be made, and all should be regarded as belonging to the protection scope of the present utility model.

Claims

1. A wedge-shaped slider type coaxial adjustment mechanism, characterized in that, Comprising: A first light cylinder assembly, an adjustment adapter assembly, and a second light cylinder assembly, wherein, The first light cylinder assembly and the second light cylinder assembly are connected by the adjustment adapter assembly; The adjustment adapter assembly includes: a first adapter ring, an inclined slot fixing block, a wedge pressing block, an adjustment screw, and an adapter cylinder; the first adapter ring connects the first light cylinder assembly, and there are multiple inclined slot fixing blocks, wedge pressing blocks, and adjustment screws, which are arranged in one-to-one correspondence. The multiple inclined slot fixing blocks are circumferentially spaced and fixedly connected to the first adapter ring; The first end of the adapter cylinder is circumferentially provided with an inclined surface, and the second end of the adapter cylinder connects the second light cylinder assembly; Each inclined slot fixing block is provided with an inclined slot, each wedge pressing block is wedge-shaped, and the wedge-shaped surfaces on both sides of the wedge pressing block are respectively matched with the inclined slot and the inclined surface. The wedge pressing block is pressed against the corresponding inclined slot fixing block by the adjustment screw.

2. The wedge slider type coaxial adjustment mechanism according to claim 1, characterized in that The first light cylinder assembly includes: a light source outer cover and an annular light source. The annular light source is arranged inside the light source outer cover, and the light source outer cover connects the adjustment adapter assembly.

3. The wedge slider type coaxial adjustment mechanism according to claim 2, characterized in that, The light source outer cover is threadedly connected to the first side of the first adapter ring.

4. The wedge slider type coaxial adjustment mechanism according to claim 1, characterized in that, The multiple inclined slot fixing blocks are circumferentially spaced on the second side of the first adapter ring.

5. The wedge slider type coaxial adjustment mechanism according to claim 1, characterized in that, Each inclined slot fixing block is fixedly connected to the second side of the first adapter ring by screws.

6. The wedge slider type coaxial adjustment mechanism according to claim 1, characterized in that, The inclined slots of the multiple inclined slot fixing blocks are arranged in the opposite direction to the inclined surface of the adapter cylinder.

7. The wedge slider type coaxial adjustment mechanism according to claim 1, characterized in that, The angles of all the inclined slots and all the wedge-shaped surfaces are equal to the angle of the inclined surface.

8. The wedge slider type coaxial adjustment mechanism according to claim 1, characterized in that, The wedge pressing block is provided with a kidney-shaped hole, and the adjustment screw passes through the kidney-shaped hole to press the wedge pressing block against the corresponding inclined slot fixing block.

9. The wedge slider type coaxial adjustment mechanism according to claim 1, wherein, The end surface of the first end of the adapter cylinder is attached to the second side of the first adapter ring, and a first beam splitter is arranged inside the adapter cylinder.

10. The wedge slider type coaxial adjustment mechanism according to claim 1, characterized in that, The second light cylinder assembly includes: a second adapter ring and a second beam splitter. The second beam splitter is arranged inside the second adapter ring, and the second adapter ring is threadedly connected to the second end of the adapter cylinder.

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