Sputtering feeding buffer mechanism
By designing the sputtering loading cache mechanism, using visual recognition and automated diversion technology, the problem of low manual loading efficiency is solved, efficient automatic loading is achieved, product shortages and equipment downtime, and overall production efficiency is improved.
Patent Information
- Application Number
- CN202422025149.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-20
- Publication Date
- 2025-07-29
- Estimated Expiration
- 2034-08-20
AI Technical Summary
The artificial loading efficiency in existing sputtering equipment is low, which can easily lead to a shortage of products of one or more specifications, affect production efficiency and may cause equipment downtime.
A sputtering loading cache mechanism is designed, including a first rack, a first sorting and transfer component, a cache module and a cache visual identification component. By visually identifying product specifications and automatically diversion to the corresponding cache components and silos, automatic loading is achieved.
Improve feeding efficiency, avoid product shortages caused by manual errors, ensure continuous operation of the production line, save time and reduce labor costs.
Smart Images
Figure CN223162661U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of sputtering equipment, in particular to a sputtering loading buffer mechanism. Background Art
[0002] Sputtering, usually referring to magnetron sputtering, belongs to the high-speed low-temperature sputtering method. This process requires a vacuum degree of about 1×10-3 Torr, that is, an inert gas argon (Ar) is filled in a vacuum state of 1.3×10-3 Pa, and a high-voltage direct current is applied between a plastic substrate (anode) and a metal target (cathode). Due to the electrons generated by glow discharge exciting the inert gas, plasma is generated. The plasma bombards the atoms of the metal target and deposits them on the plastic substrate.
[0003] Before sputtering, the products to be sputtered need to be placed in a certain area, and the jig is covered on the products. After sputtering is completed, the jig is removed from the products, and finally the sputtered products are moved to the next process. To improve the sputtering efficiency, multiple specifications of products need to be loaded simultaneously during sputtering loading. On each tray conveyed to the sputtering equipment, products of each specification need to be evenly placed. If the quantity of any one specification of products is insufficient, it will cause the sputtering equipment in the subsequent process to wait. The above work is now completed manually, and the processing speed cannot keep up with the loading speed, affecting the loading efficiency. And long-term repetitive work will cause the operators to be sleepy and numb, resulting in a shortage of one or several products, thus causing the sputtering equipment to stop waiting, greatly reducing the production efficiency. Summary of the Utility Model
[0004] In view of the above-mentioned disadvantages of the prior art, the purpose of the present utility model is to provide a sputtering loading buffer mechanism for solving the technical problem of low manual loading efficiency in the prior art.
[0005] To achieve the above purpose and other related purposes, the present utility model provides a sputtering loading buffer mechanism, including:
[0006] A first frame;
[0007] A first sorting and conveying component, arranged on the first frame and used for conveying products in a first direction;
[0008] A cache module is provided on the first rack. The cache module includes a first cache component, a second cache component, a third cache component, and a fourth cache component arranged side by side in the second direction. The first cache component, the second cache component, the third cache component, and the fourth cache component are respectively used to convey and store products of different specifications. The first cache component is connected to the first sorting and conveying component. The first cache component, the second cache component, the third cache component, and the fourth cache component all include a bin for storing products, a first cache conveying unit for conveying products in the first direction, and a second cache conveying unit for conveying products in the second direction. The bin cooperates with the first cache conveying unit. The first direction, the second direction, and the third direction are respectively perpendicular to each other in pairs.
[0009] A cache vision recognition component is provided on the first rack and cooperates with the first sorting and conveying component to identify the specifications of products and drive the corresponding first cache conveying unit and the corresponding second cache conveying unit to convey the products to the corresponding bin.
[0010] Optionally, the first cache component, the second cache component, the third cache component, and the fourth cache component all further include a bin driving member. The bin is connected to the driving end of the bin driving member. The bin driving member is used to drive the bin to be movably arranged on the first cache conveying unit in the third direction.
[0011] Optionally, the bin includes a bin frame and multiple groups of product support members provided on the bin frame. The multiple groups of product support members are arranged in the third direction.
[0012] Optionally, the first cache component is located between two adjacent ones of the second cache component, the third cache component, and the fourth cache component.
[0013] Optionally, the first cache component and the second cache component are located between the third cache component and the fourth cache component.
[0014] Optionally, the heights of the third cache component and the fourth cache component are higher than those of the first cache component and the second cache component. Each of the second cache conveying units is movably arranged on the corresponding first cache conveying unit in the third direction.
[0015] Optionally, the first cache component and the second cache component have equal heights.
[0016] Optionally, a baffle assembly is provided on the first cache conveying unit of the first cache assembly, and the baffle assembly includes a baffle driving member and a baffle, and the baffle is provided on the driving end of the baffle driving member, and the baffle driving member is used to drive the baffle to move along a third direction, and the baffle is used to block the products conveyed on the first cache conveying unit.
[0017] Optionally, the sputtering loading cache mechanism also includes a first product transfer module, which is movably arranged on the first frame along the first direction, the second direction and the third direction, and is located behind each of the material bins along the first direction. The first product transfer module is used to move the products on the two middle groups along the second direction of the first cache component, the second cache component, the third cache component and the fourth cache component to the other two groups.
[0018] Optionally, the number of the first product transfer modules is two groups arranged in parallel along the second direction.
[0019] As described above, the sputtering feeding buffer mechanism of the present invention has the following beneficial effects:
[0020] The product is conveyed on the first sorting conveying component, and after the cache visual recognition component identifies the specifications of the product, the product is conveyed from the first sorting conveying component to the first cache conveying unit of the first cache component connected thereto. If the product is a product of the corresponding specification of the first cache component, the first cache conveying unit directly conveys the product backward along the first direction to the silo of the first cache component. If it is a product of other specifications, the second cache conveying unit of the first cache component conveys the product to the corresponding cache component along the second direction, and sends the product into the corresponding silo, where the product waits for subsequent loading and retrieval. This solution first replaces manual operation with equipment, reduces labor costs, improves loading efficiency, and can also avoid shortages of one or more specifications of products due to errors in manual feeding, thereby improving overall feeding efficiency. This solution sets up silos to store and supply products of various specifications, so that when a product of a certain specification is in short supply on the production line, it can be supplied in a timely manner, avoiding chaos in the production line and shutdown of the entire production line due to shortage of a certain specification, saving time, and improving loading efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 This is a schematic structural diagram of an embodiment of the present utility model;
[0022] Figure 2 This is a schematic structural diagram from another angle of an embodiment of the present utility model;
[0023] Figure 3 A top view of an embodiment of the present utility model;
[0024] Figure 4 Another perspective structural schematic diagram of the embodiment of the present utility model.
[0025] Part label description
[0026] 11 - Buffer vision recognition component; 12 - First sorting and conveying component; 131 - First buffer component; 132 - Second buffer component; 133 - Third buffer component; 134 - Fourth buffer component; 135 - First buffer conveying unit; 136 - Second buffer conveying unit; 137 - Silo; 137a - Silo rack; 137b - Product support part; 14 - First product transfer module; 15 - First rack. Specific implementation manners
[0027] The following uses specific specific examples to illustrate the implementation manners of the present utility model. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model.
[0028] It should be noted that the diagrams provided in this embodiment only schematically illustrate the basic concept of the present utility model. Therefore, only the components related to the present utility model are shown in the diagrams, rather than being drawn according to the number, shape, and size of the components in actual implementation. The types, quantities, and ratios of the components in actual implementation can be arbitrarily changed, and the component layout type may also be more complex. The structures, ratios, sizes, etc. shown in the diagrams of this specification are only used to cooperate with the content disclosed in the specification for those skilled in this technology to understand and read, and are not used to limit the limiting conditions under which the present utility model can be implemented. Therefore, they do not have technical essential significance. Any modification of the structure, change of the proportional relationship, or adjustment of the size, without affecting the effects that the present utility model can produce and the purposes that can be achieved, should still fall within the scope that can be covered by the technical content disclosed in the present utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle", and "one" cited in this specification are only for the convenience of clear description and are not used to limit the scope under which the present utility model can be implemented. The change or adjustment of their relative relationships, without substantial change in the technical content, should also be regarded as the scope under which the present utility model can be implemented.
[0029] Please refer to Figures 1 to 4, in this embodiment, the first direction is the length direction of the sputtering loading buffer mechanism production line, the second direction is the width direction of the sputtering loading buffer mechanism production line, and the third direction is the height direction of the sputtering loading buffer mechanism production line. This embodiment provides a sputtering loading buffer mechanism, which is used to simultaneously provide several different specifications of products to be sputtered for subsequent equipment on an external assembly line. Exemplarily, this embodiment can simultaneously provide four different specifications of products to be sputtered. The sputtering loading buffer mechanism includes a first frame 15, a first sorting and conveying component 12, a buffer module, and a buffer vision recognition component 11. The first sorting and conveying component 12 is arranged on the first frame 15 and is used to convey products along the first direction. The buffer module is arranged on the first frame 15 and is arranged behind the first sorting and conveying component 12 along the first direction. The buffer module includes a first buffer component 131, a second buffer component 132, a third buffer component 133, and a fourth buffer component 134 that are arranged side by side and closely arranged along the second direction, that is, the first buffer component 131, the second buffer component 132, the third buffer component 133, and the fourth buffer component 134 all extend along the first direction. The first buffer component 131, the second buffer component 132, the third buffer component 133, and the fourth buffer component 134 can convey products backward along the first direction, and the products stored and conveyed by the first buffer component 131, the second buffer component 132, the third buffer component 133, and the fourth buffer component 134 are of different specifications. The first buffer component 131 is docked and connected to the first sorting and conveying component 12, and the products on the first sorting and conveying component 12 are first conveyed to the first buffer component 131 and then diverted. The first buffer component 131, the second buffer component 132, the third buffer component 133, and the fourth buffer component 134 all include a bin 137 for storing products, a first buffer conveying unit 135 for conveying products along the first direction, and a second buffer conveying unit 136 for conveying products along the second direction. The bin 137 cooperates with the first buffer conveying unit 135. The bin 137 can be arranged on the first buffer conveying unit 135 or directly arranged on the first frame 15. The bin 137 can stack and store products along the first direction, the second direction, or the third direction, and the bin 137 can also move correspondingly along the first direction, the second direction, or the third direction to realize feeding and discharging. The first direction, the second direction, and the third direction are perpendicular to each other. The buffer vision recognition component 11 is arranged on the first frame 15 and cooperates with the first sorting and conveying component 12. It is arranged directly above the first sorting and conveying component 12 and is used to identify the specifications of products when the first sorting and conveying component 12 conveys products. The buffer vision recognition component 11 is arranged in front of the buffer module along the first direction. Exemplarily, before the products are fed into the first sorting and conveying component 12, a two-dimensional code needs to be pasted, and the specifications and other information of the products can be identified by scanning the two-dimensional code on the products through the buffer vision recognition component 11.The caching vision recognition component 11 is an industrial camera. The industrial camera converts the target captured by digital images into image signals and transmits them to a dedicated image processing system. The image system performs various operations on these signals to extract the features of the target, and then controls the actions of the on-site equipment according to the discrimination results. Specifically, the image processing system can be a part of this embodiment and is built into the caching vision recognition component 11. Recognizing the specifications of products through the industrial camera and the image processing system connected thereto, and then controlling the actions of the caching module are technical means that have been publicly disclosed in the prior art. The bins 137 of the third caching component 133 and the fourth caching component 134 are not shown in the figure.
[0030] In this embodiment, an operator or an upstream device feeds materials onto the first sorting conveyor assembly 12. The products include four specifications, and each product is affixed with a QR code that can identify the specific information of the product. The number of buffer components can also be increased to accommodate products of more specifications. The products are conveyed along a first direction on the first sorting conveyor assembly 12 and continue to be conveyed forward after the buffer vision recognition component 11 recognizes the specifications of the products. The first buffer conveyor unit 135 of the first buffer component 131 is docked with the first sorting conveyor assembly 12, and the products are conveyed from the first sorting conveyor assembly 12 onto the first buffer conveyor unit 135 of the first buffer component 131. The buffer vision recognition component 11 drives the corresponding buffer component to act according to the recognized product specifications, conveys the products into the corresponding bin 137, or the products directly pass through the bin 137 and are conveyed backward along the first direction. Exemplarily, if the specification of the product is the same as the product specification stored in the first buffer component 131, after the product reaches the first buffer conveyor unit 135 of the first buffer component 131, it is directly conveyed backward along the first direction to reach the bin 137 of the first buffer component 131; if the specification of the product is the same as the product specification stored in the second buffer component 132, after the product reaches the first buffer conveyor unit 135 of the first buffer component 131, the second buffer conveyor unit 136 of the first buffer component 131 acts to transfer the product in the second direction towards the second buffer component 132 until it is transferred onto the first buffer conveyor unit 135 of the second buffer component 132 and then conveyed into the bin 137 of the second buffer component 132 for storage, and the products wait in the bin 137 for subsequent feeding and use; or, when there is a shortage of products of a certain specification, the products of this specification pass through the bin 137 and do not stay in the bin 137, but are directly conveyed backward along the first direction to subsequent equipment. In this embodiment, the equipment first replaces manual operation, reduces labor costs, improves feeding efficiency, and can also avoid shortages of one or more specifications of products caused by incorrect manual feeding, thereby improving the overall feeding efficiency. This solution sets up a bin 137 to store and supply products of each specification, so that when a certain specification of products is in short supply on the production line, it can be supplied in a timely manner, avoiding chaos on the production line and the entire production line waiting for downtime caused by the shortage of a certain specification, saving time, and improving the feeding efficiency.
[0031] In one embodiment, the first buffer component 131, the second buffer component 132, the third buffer component 133, and the fourth buffer component 134 further include a silo drive member. The silo 137 is connected to the drive end of the silo drive member, and the silo drive member is configured to drive the silo 137 to move in the third direction. The silo 137 stacks and stores products in the third direction, and the silo drive member is a motor. The first buffer transfer unit 135 is a rotating roller arranged in the first direction. The rotating roller of the first buffer transfer unit 135 is driven by a motor to rotate, and the silo 137 can rise and fall between adjacent rotating rollers of the first buffer transfer unit 135. Sensors such as proximity sensors, optical path sensors, or pressure sensors are correspondingly arranged in front of and behind each silo 137 in the first direction for correspondingly sensing the approach and departure of products. The part of the silo 137 above the first buffer transfer unit 135 is used to store products and is full, and the part below the first buffer transfer unit 135 is empty. Before the product reaches the silo 137, the sensor senses the approach of the product, and the silo 137 rises. The product enters the bottommost part of the silo 137 above the first buffer transfer unit 135. At this time, if the subsequent process requires this specification of product, this product is continuously transferred forward by the first buffer transfer unit 135. The product at the bottommost part of the silo 137 descends onto the first buffer transfer unit 135 and waits to supply materials to the subsequent process. At this time, if the subsequent process does not require this specification of product, the silo 137 remains stationary. Each silo 137 is provided with no less than ten grids in the third direction, and each grid can accommodate one product. Briefly summarized, before each product enters the silo 137, the silo 137 rises by one grid; when a product flows out of the silo 137, the silo 137 descends by one grid, ensuring that there is always a product at the bottommost part of the silo 137 on the first buffer transfer unit 135 so that the product can be transferred forward in the first direction at any time. The above structural arrangement can make the silo 137 more convenient when storing products and supplying materials, improve the fault tolerance of material supply, and avoid equipment shutdown caused by the shortage of a certain specification of product.
[0032] In one embodiment, as Figure 1As shown in the figure, the silo 137 includes a silo frame 137a and multiple groups of product support members 137b arranged on the silo frame 137a in the third direction. The silo frame 137a is slidably arranged on the side of the first buffer transfer unit 135 in the third direction, or slidably arranged on the side of the first rack 15 and cooperates with the first buffer transfer unit 135. Each group of product support members 137b includes at least two product support rods arranged in the first direction. The product support rods are horizontally arranged in the second direction. Each product support rod is arranged between two adjacent rotating rollers of the first buffer transfer unit 135, and the product support rods are arranged parallel to the rotating rollers of the first buffer transfer unit 135. The above setting method has a simple structure and low cost, and can also avoid interference between the silo 137 and the first buffer transfer unit 135 during lifting and lowering.
[0033] In one embodiment, as Figures 1 to 4 shown, the first buffer assembly 131 is arranged between two adjacent ones of the second buffer assembly 132, the third buffer assembly 133, and the fourth buffer assembly 134 in the second direction. Exemplarily, the first buffer assembly 131 is arranged between the second buffer assembly 132 and the third buffer assembly 133 in the second direction; or, the first buffer assembly 131 is arranged between the second buffer assembly 132 and the fourth buffer assembly 134 in the second direction; or, the first buffer assembly 131 is arranged between the fourth buffer assembly 134 and the third buffer assembly 133 in the second direction. The above setting method can shorten the distance for the first buffer assembly 131 to transfer products to other buffer assemblies in the second direction, shorten the transfer time, and thus improve the feeding efficiency.
[0034] In one embodiment, as Figures 1 to 4 shown, the first buffer assembly 131 and the second buffer assembly 132 are arranged between the third buffer assembly 133 and the fourth buffer assembly 134 in the second direction. The above setting method can shorten the distance for the first buffer assembly 131 to transfer products to other buffer assemblies in the second direction, shorten the transfer time, and thus improve the feeding efficiency.
[0035] In one embodiment, as Figures 2 to 4As shown, the heights of the third cache component 133 and the fourth cache component 134 are higher than those of the first cache component 131 and the second cache component 132. Each second cache transfer unit 136 is movably disposed in a corresponding first cache transfer unit 135 along the third direction. The third cache component 133 and the fourth cache component 134 are docked and connected to subsequent external pipeline devices. Raising the heights of the third cache component 133 and the fourth cache component 134 can facilitate the backward transfer of products. The second cache transfer unit 136 can be lifted to facilitate the transfer of products to adjacent cache components. Exemplarily, the second cache transfer unit 136 includes a transfer rack and multiple groups of conveyor belts disposed on the transfer rack. The conveyor belts of each group of the second cache transfer unit 136 are spaced apart and arranged along the first direction, that is, the conveyor belts of each group of the second cache transfer unit 136 extend along the second direction and operate along the second direction to transfer products. When it is necessary to transfer products to an adjacent cache component, the second cache transfer unit 136 carrying the products rises to the same height as the adjacent cache component, transfers the products to the second cache transfer unit 136 of the adjacent cache component, and then resets. In another embodiment, when the second cache transfer unit 136 rises to the same height as the adjacent cache component, the second cache transfer unit 136 of the adjacent cache component also rises to pick up the transferred products, and then moves the products along the second direction to a position where it is convenient for the products to be transferred forward. Each conveyor belt of the second cache transfer unit 136 is respectively disposed between adjacent rotating rollers of the first cache transfer unit 135, so that each conveyor belt of the second cache transfer unit 136 can be lifted between adjacent rotating rollers, avoiding interference during the operation between the first cache transfer unit 135 and the second cache transfer unit 136.
[0036] In one embodiment, as Figures 2 to 4 shown, the heights of the first cache component 131 and the second cache component 132 are equal, that is, the first cache transfer unit 135 of the first cache component 131 is equal in height to the first cache transfer unit 135 of the second cache component 132, facilitating the transfer of products from the first cache component 131 to the second cache component 132.
[0037] In one embodiment, a baffle assembly is provided on the first buffer transfer unit 135 of the first buffer component 131. The baffle assembly includes a baffle drive and a baffle. The baffle is provided on the drive end of the baffle drive. The baffle drive can drive the baffle to move in the third direction. The baffle drive is a motor or a cylinder. The baffle is used to block the products conveyed on the first buffer transfer unit 135. The baffle is located between two adjacent rotating rollers of the first buffer transfer unit 135, and the baffle can rise and fall under the drive of the baffle drive. Under normal conditions, the baffle is higher than the rotating rollers of the first buffer transfer unit 135. The baffle can block the products conveyed at high speed from the first sorting transfer component 12, preventing products of all specifications from entering the bin 137 of the first buffer component 131 under the action of inertia and causing chaos. When the product conveyed from the first sorting transfer component 12 is the product corresponding to the first buffer component 131, the baffle descends under the drive of the baffle drive, enabling the product to pass through smoothly and enter the bin 137 of the first buffer component 131. The setting of the baffle assembly can prevent products of all specifications from directly entering the bin 137 of the first buffer component 131 and causing chaos in subsequent feeding.
[0038] In one embodiment, as Figures 1 to 4As shown, the sputtering loading buffer mechanism further includes a first product transfer module 14. The first product transfer module 14 is movably arranged on the first rack 15 along the first direction, the second direction, and the third direction, and is located behind all the bins 137 along the first direction. The first product transfer module 14 is used to move the products on the two middle groups among the first buffer component 131, the second buffer component 132, the third buffer component 133, and the fourth buffer component 134 to the other two groups. Exemplarily, the third buffer component 133, the second buffer component 132, the first buffer component 131, and the fourth buffer component 134 are arranged in sequence along the second direction. The first buffer transfer units 135 of the third buffer component 133 and the fourth buffer component 134 located on the outermost side along the second direction are respectively docked with the subsequent process equipment outside. To facilitate the continuous transfer of the products on the first buffer transfer unit 135 of the first buffer component 131 and the first buffer transfer unit 135 of the second buffer component 132 to the subsequent process, the first product transfer module 14 picks up the products on the first buffer transfer unit 135 of the first buffer component 131 and the first buffer transfer unit 135 of the second buffer component 132, and moves them to the first buffer transfer unit 135 of the third buffer component 133 and the first buffer transfer unit 135 of the fourth buffer component 134 for transfer to the subsequent process equipment outside. The first product transfer module 14 includes a motor and a suction cup assembly driven by the motor. The suction cup assembly can hold the product more firmly. By respectively arranging tracks along the first direction, the second direction, and the third direction on the first rack 15, the suction cup assembly can move along the first direction, the second direction, and the third direction on the first rack 15.
[0039] In one embodiment, as Figures 1 to 4 shown, the number of the first product transfer modules 14 is two groups arranged in parallel along the second direction. One group is responsible for picking up and moving the products on the first buffer transfer unit 135 of the first buffer component 131, and the other group is responsible for picking up and moving the products on the first buffer transfer unit 135 of the second buffer component 132, so as to improve the loading efficiency when the demand for product loading is large.
[0040] The above embodiments are only illustrative of the principles and effects of the present invention, and are not used to limit the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed by the present invention should still be covered by the claims of the present invention.
Claims
1. A sputtering feeding buffer mechanism, characterized in that, Comprising: The first rack; The first sorting and conveying assembly, arranged on the first rack and used for conveying products in the first direction; The buffer module, arranged on the first rack. The buffer module includes a first buffer assembly, a second buffer assembly, a third buffer assembly, and a fourth buffer assembly arranged side by side in the second direction. The first buffer assembly, the second buffer assembly, the third buffer assembly, and the fourth buffer assembly are respectively used for conveying and storing products of different specifications. The first buffer assembly is connected to the first sorting and conveying assembly. The first buffer assembly, the second buffer assembly, the third buffer assembly, and the fourth buffer assembly all include a bin for storing products, a first buffer conveying unit for conveying products in the first direction, and a second buffer conveying unit for conveying products in the second direction. The bin cooperates with the first buffer conveying unit. The first direction, the second direction, and the third direction are respectively perpendicular to each other in pairs; The buffer vision recognition assembly, arranged on the first rack and cooperating with the first sorting and conveying assembly, used for identifying the specifications of products, and driving the corresponding first buffer conveying unit and the corresponding second buffer conveying unit to convey the products to the corresponding bin.
2. The sputtering feeding buffer mechanism according to claim 1, wherein The first buffer assembly, the second buffer assembly, the third buffer assembly, and the fourth buffer assembly all further include a bin driving member. The bin is connected to the driving end of the bin driving member. The bin driving member is used for driving the bin to be movably arranged on the first buffer conveying unit in the third direction.
3. The sputtering loading buffer mechanism according to claim 2, characterized in that, The bin includes a bin frame and multiple groups of product support members arranged on the bin frame. The multiple groups of product support members are arranged in the third direction.
4. The sputtering feeding buffer mechanism according to claim 1, wherein The first buffer assembly is located between two adjacent ones of the second buffer assembly, the third buffer assembly, and the fourth buffer assembly.
5. The sputtering feeding buffer mechanism according to claim 1, wherein, The first buffer assembly and the second buffer assembly are located between the third buffer assembly and the fourth buffer assembly.
6. The sputtering feeding buffer mechanism according to claim 5, wherein, The heights of the third buffer assembly and the fourth buffer assembly are higher than those of the first buffer assembly and the second buffer assembly. Each of the second buffer conveying units is movably arranged on the corresponding first buffer conveying unit in the third direction.
7. The sputtering feeding buffer mechanism according to claim 5 or 6, characterized in that, The heights of the first buffer assembly and the second buffer assembly are equal.
8. The sputtering feeding buffer mechanism according to claim 1, wherein A baffle assembly is arranged on the first buffer conveying unit of the first buffer assembly. The baffle assembly includes a baffle driving member and a baffle. The baffle is arranged on the driving end of the baffle driving member. The baffle driving member is used for driving the baffle to move in the third direction. The baffle is used for blocking the products conveyed on the first buffer conveying unit.
9. The sputtering feeding buffer mechanism according to claim 1, wherein, The sputtering loading buffer mechanism further includes a first product transfer module, which is movably arranged on the first rack in the first direction, the second direction, and the third direction, and is located behind each bin in the first direction. The first product transfer module is used for moving the products on the two middle groups in the second direction among the first buffer assembly, the second buffer assembly, the third buffer assembly, and the fourth buffer assembly to the other two groups.
10. The sputtering feeding buffer mechanism according to claim 9, wherein The number of the first product transfer modules is two groups arranged side by side in the second direction.