High-purity clean filling equipment for photoresist diluent production

Abstract

The utility model discloses high-purity clean filling equipment for photoresist diluent production, which comprises a worktable, a filling machine is mounted at one end of the top of the worktable, a discharge pipe is mounted at the bottom of the filling machine, an isolation hood is mounted at the top of the worktable, one end of the isolation hood extends to the position right below the discharge pipe, and the other end of the isolation hood extends to the position right below the discharge pipe. The bottom end of the discharging pipe extends into the isolation hood, a linear module is arranged in the isolation hood and embedded in the top of the workbench, a clamping mechanism is installed on the top of a sliding table of the linear module, and an operation door is hinged to the end, away from the filling machine, of the isolation hood. According to the utility model, the isolation cover is arranged at the top of the working table, and a container is arranged in the isolation cover during filling operation, so that physical isolation of a filling environment is realized, dust, particles and other impurities in an external environment are effectively prevented from entering a filling area, the cleanliness of the filling environment is ensured, and the filling efficiency is improved. Therefore, the risk that the diluent is polluted is obviously reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of filling equipment, in particular to a high-purity and clean filling equipment for the production of photoresist diluent. Background Art

[0002] Photoresist, also known as photoresist, is a corrosion-resistant thin film material whose solubility changes significantly after being irradiated or radiated by light sources such as ultraviolet light, electron beam, ion beam, and X-ray. It consists of main components such as photosensitive resin, photoinitiator, and solvent, and may contain other additives to adjust its performance. Photoresist plays an important role in forming circuit patterns and pixel structures in fields such as semiconductor manufacturing, display panels, and PCBs (printed circuit boards). Photoresist diluent is an important component used to adjust the viscosity and fluidity of photoresist during the production process. It must maintain high purity and cleanliness to ensure that the final performance of the photoresist is not affected.

[0003] When some existing diluent filling equipment is in use, there is no separately isolated operation space provided on it, and the filling operation process is directly carried out in the air. Dust, particles, or other impurities in the air may take the opportunity to enter the diluent, inevitably resulting in a certain degree of contamination of the diluent.

[0004] For example, a diluent filling equipment disclosed in the patent with the publication number CN209759006U. In the diluent filling equipment of this patent, the connecting rod inside the syringe barrel is connected to the piston rod of the cylinder, and the connecting rod inside the syringe barrel can be pumped up and down by the cylinder to carry out perfusion in the tank body. It has the advantages of low cost and simple operation. The utility model has the advantages of simple structure, reasonable setting, and low manufacturing cost.

[0005] Although the above-mentioned diluent filling equipment design takes into account the convenience of operation and the stability of the equipment in many aspects, since its filling operation process is directly carried out in the air, when the diluent flows into the filling barrel through the discharge pipe, dust, particles, or other impurities in the air may take the opportunity to enter the diluent, inevitably resulting in a certain degree of contamination of the diluent.

[0006] Therefore, it is necessary to invent a high-purity and clean filling equipment for the production of photoresist diluent to solve the above problems. Summary of the Utility Model

[0007] The purpose of the utility model is to provide a high-purity and clean filling equipment for the production of photoresist diluent to solve the problems in the above technology.

[0008] To achieve the above object, the present utility model provides the following technical solution: A high-purity and clean filling device for the production of photoresist diluent, including a workbench, at one end of the top of the workbench, a filling machine is installed, at the bottom of the filling machine, a discharge pipe is installed, on the top of the workbench, an isolation cover is installed, one end of the isolation cover extends to directly below the discharge pipe, the bottom end of the discharge pipe extends into the interior of the isolation cover, inside the isolation cover, a linear module is provided, the linear module is embedded on the top of the workbench, on the top of the slide of the linear module, a clamping mechanism is installed, at the end of the isolation cover away from the filling machine, an operation door is hingedly provided, at one end of the isolation cover close to the operation door, a blocking plate is provided, the top end of the blocking plate extends to the outside of the isolation cover and is fixedly connected to a first carrier plate, on both sides of the top of the workbench close to the isolation cover, a first electric push rod is installed, the top ends of the two first electric push rods are fixedly connected to the first carrier plate, on one side of the top of the workbench, a vacuum pump is installed, at the input end of the vacuum pump, an air suction pipe is installed, the input end of the air suction pipe is communicated with the interior of the isolation cover, and the input end of the air suction pipe is located between the operation door and the blocking plate.

[0009] By installing an isolation cover on the workbench to isolate the photoresist diluent filling process, the stability and safety of the filling operation are ensured.

[0010] Preferably, one end of the linear module is arranged close to the operation door, and the other end of the linear module is located directly below the discharge pipe.

[0011] The position layout of the linear module optimizes the filling process. One end close to the operation door facilitates the placement and removal of the container, and the other end located directly below the discharge pipe ensures the accurate alignment of the filling head, improving the filling efficiency.

[0012] Preferably, a telescopic hose is provided inside the isolation cover, a filling valve is installed in the middle of the discharge pipe, and the bottom end of the discharge pipe is connected to the top end of the telescopic hose.

[0013] Introducing the telescopic hose as the connection between the discharge pipe and the filling head increases the flexibility of the filling head, enabling it to more accurately extend into the container, reducing the splashing and waste of the diluent.

[0014] Preferably, a filling head is installed at the bottom end of the telescopic hose, a second carrier plate is fixedly connected to the outer side of the bottom end of the telescopic hose, a second electric push rod is installed on the inner top surface of the isolation cover, and the bottom end of the second electric push rod is fixedly connected to the second carrier plate.

[0015] By controlling the telescopic movement of the telescopic hose through the second electric push rod, the automatic adjustment of the height of the filling head is realized, further improving the accuracy and automation degree of filling.

[0016] Preferably, the clamping mechanism includes a fixed seat, and the fixed seat is installed on the top of the slide of the linear module.

[0017] The clamping mechanism is installed on the sliding table of the linear module through a fixed seat, with a stable structure and is convenient to move along with the linear module.

[0018] Preferably, three-way electric push rods are installed on both sides of the fixed seat, and clamping plates are installed at the working ends of the two three-way electric push rods.

[0019] Driving the clamping plate with a three-way electric push rod realizes the quick clamping and release of the container, improving the filling efficiency.

[0020] Preferably, the shape of the clamping plate is arc-shaped, and a rubber anti-slip pad is installed on the clamping surface of the clamping plate.

[0021] The arc-shaped clamping plate cooperates with the rubber anti-slip pad, which not only increases the clamping stability but also reduces the damage to the surface of the container, protecting the integrity of the container.

[0022] Preferably, a feeding port is installed at the top of the filling machine, and the isolation cover is made of transparent material.

[0023] The feeding port design at the top of the filling machine facilitates the addition of diluent, and the transparent material isolation cover allows operators to observe the filling process without opening the operation door, improving the safety and convenience of operation.

[0024] In the above technical solution, the technical effects and advantages provided by the present utility model are as follows:

[0025] 1. By installing an isolation cover on the top of the workbench and placing the container inside the isolation cover during the filling operation, physical isolation of the filling environment is achieved. This isolation design effectively prevents dust, particles, and other impurities in the external environment from entering the filling area, thus significantly reducing the risk of contamination of the diluent. Before filling, the inside of the isolation cover is evacuated through a vacuum pump and an air extraction pipe to further remove air pollutants that may be brought in when opening the door, ensuring the cleanliness of the filling environment;

[0026] 2. By setting up a telescopic hose and a filling head, and cooperating with the precise control of the second electric push rod, the filling head can accurately extend into the top opening of the container to achieve precise filling. This design not only improves the accuracy and efficiency of filling but also avoids the overflow or splashing of the diluent caused by the mismatch between the filling head and the container mouth. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is the overall structural schematic diagram of the first perspective of the present utility model;

[0028] Figure 2 is the overall structural schematic diagram of the second perspective of the present utility model;

[0029] Figure 3 This is a schematic diagram of the overall structure when the operation door of the present utility model is opened;

[0030] Figure 4 This is a partial structural cross-sectional view of the present utility model;

[0031] Figure 5 This is the present utility model Figure 4 An enlarged view of the structure of part A in it.

[0032] Explanation of reference numerals:

[0033] 1. Workbench; 2. Filling machine; 3. Discharge pipe; 4. Isolation cover; 5. Linear module; 6. Clamping mechanism; 7. Operation door; 8. Sealing plate; 9. First carrier plate; 10. First electric push rod; 11. Vacuum pump; 12. Suction pipe; 13. Telescopic hose; 14. Filling valve; 15. Filling head; 16. Second carrier plate; 17. Second electric push rod; 18. Fixed seat; 19. Third electric push rod; 20. Clamping plate. Specific embodiments

[0034] In order to enable those skilled in the art to better understand the technical solutions of the present utility model, the present utility model will be further introduced in detail below with reference to the accompanying drawings.

[0035] The present utility model provides a high-purity and clean filling device for the production of photoresist diluent as shown in Figures 1-5 Figure, which includes a workbench 1. One end of the top of the workbench 1 is provided with a filling machine 2. The bottom of the filling machine 2 is provided with a discharge pipe 3. The top of the workbench 1 is provided with an isolation cover 4. One end of the isolation cover 4 extends to directly below the discharge pipe 3. The bottom end of the discharge pipe 3 extends into the interior of the isolation cover 4. A linear module 5 is arranged inside the isolation cover 4. The linear module 5 is embedded in the top of the workbench 1. The top of the slide of the linear module 5 is provided with a clamping mechanism 6. One end of the isolation cover 4 away from the filling machine 2 is hinged with an operation door 7. One end of the interior of the isolation cover 4 close to the operation door 7 is provided with a sealing plate 8. The top end of the sealing plate 8 extends to the outside of the isolation cover 4 and is fixedly connected to a first carrier plate 9. Both sides of the top of the workbench 1 close to the isolation cover 4 are provided with first electric push rods 10. The top ends of the two first electric push rods 10 are fixedly connected to the first carrier plate 9. One side of the top of the workbench 1 is provided with a vacuum pump 11. The input end of the vacuum pump 11 is provided with a suction pipe 12. The input end of the suction pipe 12 is communicated with the interior of the isolation cover 4. The input end of the suction pipe 12 is located between the operation door 7 and the sealing plate 8.

[0036] In one aspect of this embodiment, one end of the linear module 5 is arranged close to the operation door 7, and the other end of the linear module 5 is located directly below the discharge pipe 3. A telescopic hose 13 is arranged inside the isolation cover 4. A filling valve 14 is installed in the middle of the discharge pipe 3. The bottom end of the discharge pipe 3 is connected to the top end of the telescopic hose 13. A filling head 15 is installed at the bottom end of the telescopic hose 13. A second carrier plate 16 is fixedly connected to the outer side of the bottom end of the telescopic hose 13. A second electric push rod 17 is installed on the inner top surface of the isolation cover 4. The bottom end of the second electric push rod 17 is fixedly connected to the second carrier plate 16. The clamping mechanism 6 includes a fixed seat 18. The fixed seat 18 is installed on the top of the sliding table of the linear module 5. Third electric push rods 19 are installed on both sides of the fixed seat 18. Clamping plates 20 are installed at the working ends of the two third electric push rods 19. The shape of the clamping plate 20 is arc-shaped. A rubber anti-slip pad is installed on the clamping surface of the clamping plate 20. A feeding port is installed on the top of the filling machine 2. The isolation cover 4 is made of a transparent material.

[0037] The working principle of the present utility model:

[0038] Refer to the attached Figures 1-5 description. When using the present utility model, first fill the filling machine 2 with photoresist diluent through the feeding port, then open the operation door 7, place the container to be filled at the central position on the top of the clamping mechanism 6, and push the two clamping plates 20 towards the middle by the two third electric push rods 19 until the rubber anti-slip pads on the clamping plates 20 are closely attached to the outer wall of the container, using the rubber anti-slip pads to increase the friction force to ensure the container is firmly clamped;

[0039] Close the operation door 7 to ensure the inside of the isolation cover 4 is closed. Start the vacuum pump 11, and perform a vacuum treatment on the space between the operation door 7 and the plugging plate 8 through the air extraction pipe 12 to remove the dust and impurities brought in by the air when opening the door, and ensure the cleanliness of the filling environment;

[0040] After that, push the first carrier plate 9 upward by the first electric push rod 10, and then drive the plugging plate 8 to lift, so that the internal space of the isolation cover 4 is connected to prepare for the filling operation. Control the movement of the sliding table of the linear module 5 to move the clamping mechanism 6 and the container on its top to directly below the discharge pipe 3;

[0041] Start the second electric push rod 17 to push the second carrier plate 16 downward, and then drive the telescopic hose 13 to extend downward until the filling head 15 completely extends into the top opening of the container. Open the filling valve 14, and the diluent inside the filling machine 2 starts to be injected into the container through the discharge pipe 3, the telescopic hose 13 and the filling head 15;

[0042] After the container is filled, close the filling valve 14 to stop the injection of the diluent. Lift the filling head 15 back to its original position through the second electric push rod 17 to avoid contact with the container. Use the linear module 5 to move the container back to the initial position. Restore the blocking plate 8 to its original position through the first electric push rod 10 to re-isolate the internal space of the isolation cover 4 and maintain the cleanliness of its internal environment. Then open the operation door 7, and the staff can cover the sealing cap on the top of the container to ensure the sealing performance. Finally, pull the clamping plate 20 away from the container through the third electric push rod 19 to facilitate the removal of the container from the clamping mechanism 6.

Claims

1. A high-purity and clean filling device for the production of photoresist diluent, including a workbench (1), characterized in that: At one end of the top of the workbench (1), a filling machine (2) is installed. At the bottom of the filling machine (2), a discharge pipe (3) is installed. At the top of the workbench (1), an isolation cover (4) is installed. One end of the isolation cover (4) extends to directly below the discharge pipe (3). The bottom end of the discharge pipe (3) extends into the isolation cover (4). Inside the isolation cover (4), a linear module (5) is arranged. The linear module (5) is embedded in the top of the workbench (1). At the top of the slide of the linear module (5), a clamping mechanism (6) is installed. At one end of the isolation cover (4) away from the filling machine (2), an operation door (7) is hinged. At one end of the isolation cover (4) near the operation door (7), a sealing plate (8) is arranged. The top end of the sealing plate (8) extends outside the isolation cover (4) and is fixedly connected to a first carrier plate (9). On both sides of the top of the workbench (1) near the isolation cover (4), first electric push rods (10) are installed. The top ends of the two first electric push rods (10) are fixedly connected to the first carrier plate (9). On one side of the top of the workbench (1), a vacuum pump (11) is installed. At the input end of the vacuum pump (11), an air extraction pipe (12) is installed. The input end of the air extraction pipe (12) is communicated with the inside of the isolation cover (4). The input end of the air extraction pipe (12) is located between the operation door (7) and the sealing plate (8).

2. The high-purity and clean filling equipment for the production of a photoresist diluent according to claim 1, wherein: One end of the linear module (5) is arranged near the operation door (7), and the other end of the linear module (5) is located directly below the discharge pipe (3).

3. A high-purity and clean filling device for the production of a photoresist thinner according to claim 1, characterized in that: Inside the isolation cover (4), a telescopic hose (13) is arranged. In the middle of the discharge pipe (3), a filling valve (14) is installed. The bottom end of the discharge pipe (3) is connected to the top end of the telescopic hose (13).

4. A high-purity and clean filling device for the production of a photoresist diluent according to claim 3, characterized in that: At the bottom end of the telescopic hose (13), a filling head (15) is installed. On the outer side of the bottom end of the telescopic hose (13), a second carrier plate (16) is fixedly connected. On the inner top surface of the isolation cover (4), a second electric push rod (17) is installed. The bottom end of the second electric push rod (17) is fixedly connected to the second carrier plate (16).

5. A high-purity and clean filling device for the production of a photoresist diluent according to claim 1, characterized in that: The clamping mechanism (6) includes a fixed seat (18). The fixed seat (18) is installed on the top of the slide of the linear module (5).

6. The high-purity and clean filling equipment for the production of a photoresist diluent according to claim 5, wherein: On both sides of the fixed seat (18), third electric push rods (19) are installed. The working ends of the two third electric push rods (19) are both installed with clamping plates (20).

7. A high-purity and clean filling device for the production of a photoresist diluent according to claim 6, characterized in that: The shape of the clamping plate (20) is arc-shaped, and a rubber anti-slip pad is installed on the clamping surface of the clamping plate (20).

8. A high-purity and clean filling device for the production of a photoresist diluent according to claim 1, characterized in that: At the top of the filling machine (2), a feeding port is installed. The isolation cover (4) is made of transparent material.

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