Anti-arcing electrode block structure

Abstract

The utility model provides an anti-arcing electrode block structure, which is used for providing current for a graphite boat, and comprises an electrode block main body and an electric connecting rod arranged on the electrode block main body, and the electric connecting rod is connected with a power supply. A through mounting hole is formed in the electrode block main body, the outer side of the electrode block main body is provided with an electric connection surface and a supporting surface which face a graphite boat, the electric connection surface is provided with a plurality of graphite bulges, and the plurality of graphite bulges form a contact surface which is in contact with the graphite boat. According to the arrangement, the high conductivity of the graphite bulges is utilized, so that current can be quickly conducted away, and current concentration is prevented; in addition, by means of multi-point contact of the graphite protrusions and the graphite boat, the hidden danger of poor contact caused by foreign matter appearing on the contact face can be effectively eliminated, arcing is prevented, and therefore the high-frequency generation frequency is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to an arc-proof electrode block structure. Background Art

[0002] In the silicon wafer coating process, the connection between the boat and the electrode block usually needs to ensure good electrical conductivity and structural stability. In a specific high-temperature and strong-current discharge environment during coating, the electrical conductivity often decreases due to foreign objects appearing between the contact surfaces of the boat and the electrode block, and the current cannot be dissipated in time, resulting in arcing and damaging the surface where the electrode block contacts the boat foot. After the contact surface of the electrode block is damaged, it becomes uneven, further exacerbating the arcing, leading to an increase in the output of high-frequency boats, increasing the power consumption per single silicon wafer, not only reducing the production capacity but also increasing the production cost.

[0003] Therefore, it is necessary to design an arc-proof electrode block structure to solve the above problems. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an arc-proof electrode block structure that prevents the phenomenon of arcing caused by current concentration.

[0005] To achieve the above purpose, the utility model adopts the following technical scheme: an arc-proof electrode block structure for supplying current to a graphite boat, the arc-proof electrode block structure includes an electrode block body and an electrical connection part arranged on the electrode block body, the electrical connection part is connected to a power supply, the inside of the electrode block body has a through installation hole, the outside of the electrode block body has an electrical connection surface and a support surface facing the graphite boat, and a plurality of graphite protrusions are arranged on the electrical connection surface, and the plurality of graphite protrusions form a contact surface that contacts the graphite boat.

[0006] As a further improved technical scheme of the utility model, the graphite protrusions are arranged in a matrix.

[0007] As a further improved technical scheme of the utility model, the graphite protrusions are cylindrical, ellipsoidal, or prismatic, and the graphite protrusions are partially embedded in the electrode block body.

[0008] As a further improved technical scheme of the utility model, the cross-sectional size of the graphite protrusions is 4 - 10 mm.

[0009] As a further improved technical scheme of the utility model, the height of the graphite protrusions protruding from the electrical connection surface is 0.5 - 2 mm.

[0010] As a further improved technical scheme of the utility model, the material of the electrode block body is stainless steel, copper, or iron.

[0011] As a further improved technical solution of the present utility model, an electric connecting rod is further provided between the electric connection part and the electrode block main body, and the length direction of the electric connecting rod is parallel to the axial direction of the mounting hole.

[0012] As a further improved technical solution of the present utility model, the inner side wall of the electric connecting rod is an arc-shaped concave surface, and the arc-shaped concave surface is integrally connected with the inner wall of the mounting hole.

[0013] As a further improved technical solution of the present utility model, a guiding groove parallel to the axial direction of the mounting hole is provided on the inner wall of the mounting hole.

[0014] It can be seen from the above technical solutions that the arc-proof electrode block structure of the present utility model forms a multi-point contact surface by arranging a plurality of graphite protrusions on the side of the electrode block electrically connected to the graphite boat. By utilizing the high electrical conductivity of the graphite protrusions, the current can be quickly conducted away to prevent current concentration. In addition, by using the multi-point contact between the graphite protrusions and the graphite boat, the hidden danger of poor contact caused by foreign objects on the contact surface can be effectively eliminated, preventing arcing, and thus reducing the high-frequency occurrence frequency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a three-dimensional view of the arc-proof electrode block structure according to an embodiment of the present utility model.

[0016] Figure 2 is Figure 1 a schematic diagram of the cooperation between the arc-proof electrode block structure in and the graphite boat.

[0017] Figure 3 is a three-dimensional view of the arc-proof electrode block structure according to another embodiment of the present utility model. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0018] In order to make the objectives, technical solutions and advantages of the present utility model clearer, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0019] Please refer Figure 1 and Figure 2 As shown, the present utility model provides an arc-proof electrode block structure 100, which is used to supply current to the graphite boat 200 and cooperate with the support rod to support the graphite boat 200 to ensure that the graphite boat 200 is horizontally placed on the support rod. The arc-proof electrode block structure 100 includes an electrode block main body 10 and an electric connection part 20 provided on the electrode block main body 10, and the electric connection part 20 is connected to a power source.

[0020] The material of the electrode block body 10 is stainless steel, copper or iron, preferably stainless steel. The interior of the electrode block body 10 has a through installation hole 11 for the support rod to pass through. On the inner wall of the installation hole 11, there is a guiding groove 111 parallel to the axial direction of the installation hole 11. When the arc-proof electrode block structure 100 is installed with an external support rod, the guiding groove 111 can prevent the arc-proof electrode block structure 100 from rotating circumferentially along the support rod, making the installation of the arc-proof electrode block structure 100 stable.

[0021] The outer side of the electrode block body 10 has an electrical connection surface 12 and a support surface 13 facing the graphite boat 200. There are multiple graphite protrusions 30 on the electrical connection surface 12, and the multiple graphite protrusions 30 form a multi-point contact surface in contact with the graphite boat 200, so that multi-point contact is formed between the graphite boat 200 and the graphite protrusions. The graphite protrusions 30 are preferably arranged in a matrix, and in this embodiment, they are arranged in a 3×4 matrix. The graphite protrusions 30 can be designed as cylindrical, elliptical cylindrical, prismatic, etc. In this embodiment, they are preferably cylindrical, and the top surface of the cylinder is in contact with the graphite boat. The graphite protrusions 30 are partially embedded in the electrode block body. The size of the cross-section of the graphite protrusions is 4-10 mm.

[0022] The height of the graphite protrusions 30 protruding from the electrical connection surface is 0.5-2 mm. Within this height range, not only can the graphite boat be stably placed on the electrode block structure, but also the influence of foreign objects existing on the electrical connection surface 12 on the contact effect can be effectively avoided.

[0023] Please refer Figure 3 As shown, the arc-proof electrode block structure 100' of another embodiment of the present invention has a structure similar to that of the arc-proof electrode block structure 100, except that an electrical connection rod 40' is further provided between the electrical connection part 20' and the electrode block body 10', and the length direction of the electrical connection rod 40' is parallel to the axial direction of the installation hole 11'. The inner side wall 41' of the electrical connection rod 40' is an arc-shaped concave surface, and the arc-shaped concave surface is integrally connected to the inner wall of the installation hole 11'. With such a setting, when the support rod passes through the installation hole 11', both the inner wall of the installation block 11' and the inner side wall 41' of the electrical connection rod 40' are in contact with the support rod, and the electrical connection rod 40' prevents the arc-proof electrode block structure 100' from swinging axially, further strengthening the stability of the installation between the arc-proof electrode block structure 100' and the support rod.

[0024] Compared with the conventional electrode block, the arc-proof electrode block structure of this embodiment has high durability, and the service life is increased by about 2 times, which can effectively extend the replacement cycle, reduce the maintenance time, and increase the production output; the electrical conductivity of the arc-proof electrode block structure of this embodiment is increased by about 4 times, which can reduce the arcing phenomenon caused by foreign objects or poor electrical conductivity of the material itself on the contact surface.

[0025] During operation, two support rods are set on the left and right, and an arc-proof electrode block structure is installed on each support rod. The graphite boat is placed on the two arc-proof electrode block structures. Preferably, the two arc-proof electrode blocks are located at opposite corners of the graphite boat. During the operation, when discharging occurs, due to the contact between the graphite protrusion and the boat corner, the graphite has better conductivity and can quickly conduct away the current. Even if there are foreign objects on the electrical connection surface, the contact between the multi-point graphite protrusions and the boat corner is not affected, preventing potential contact problems caused by foreign objects and instantly conducting away the current, achieving the effect of reducing high frequency.

[0026] Spatial relative position terms such as "inner" and "outer" used in this document are for the purpose of facilitating the description of the relationship between one feature and another as shown in the drawings. It can be understood that depending on the different placement positions of the product, the spatial relative position terms may be intended to include different orientations other than those shown in the figures, and should not be construed as a limitation on the claims.

[0027] In addition, the above embodiments are only used to illustrate the present invention and do not limit the technical solutions described in the present invention. The understanding of this specification should be based on those skilled in the art of the relevant technical field. Although this specification has described the present invention in detail with reference to the above embodiments, those of ordinary skill in the art should understand that those skilled in the relevant technical field can still modify the present invention or make equivalent substitutions, and all technical solutions and their improvements that do not depart from the spirit and scope of the present invention should be covered within the scope of the claims of the present invention.

Claims

1. An arc-proof electrode block structure for supplying current to a graphite boat, characterized in that: It includes an electrode block body and an electrical connection part provided on the electrode block body. The electrical connection part is connected to a power source. The inside of the electrode block body has a through installation hole. The outside of the electrode block body has an electrical connection surface and a support surface facing the graphite boat. A plurality of graphite protrusions are provided on the electrical connection surface, and the plurality of graphite protrusions form a contact surface that contacts the graphite boat.

2. The arc-proof electrode block structure according to claim 1, characterized in that: The graphite protrusions are arranged in a matrix.

3. The arc-proof electrode block structure according to claim 2, characterized in that: The graphite protrusions are cylindrical, ellipsoidal cylindrical, or prismatic, and part of the graphite protrusions are embedded in the electrode block body.

4. The arc-proof electrode block structure according to claim 3, wherein: The size of the cross-section of the graphite protrusion is 4-10 mm.

5. The arc-proof electrode block structure according to claim 1, characterized in that: The height by which the graphite protrusion protrudes from the electrical connection surface is 0.5-2 mm.

6. The arc-proof electrode block structure according to claim 1, characterized in that: The material of the electrode block body is stainless steel, copper, or iron.

7. The arc-proof electrode block structure according to claim 1, characterized in that: An electrical connection rod is further provided between the electrical connection part and the electrode block body, and the length direction of the electrical connection rod is parallel to the axial direction of the installation hole.

8. The arc-proof electrode block structure according to claim 7, characterized in that: The inner side wall of the electrical connection rod is an arc-shaped concave surface, and the arc-shaped concave surface is integrally connected to the inner wall of the installation hole.

9. The arc-proof electrode block structure according to claim 1, characterized in that: Guide grooves parallel to the axial direction of the installation hole are provided on the inner wall of the installation hole.

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