Sputtering feeding and discharging equipment

Abstract

The utility model relates to the technical field of sputtering coating equipment, in particular to sputtering coating loading and unloading equipment, which comprises a sorting loading mechanism, a sputtering coating unloading mechanism and a sputtering coating unloading mechanism, the sputtering covering and taking jig mechanism is connected with the sorting and feeding mechanism; and the sorting and labeling mechanism is connected with the sputtering covering and taking jig mechanism and is used for sorting and correspondingly labeling the sputtered products. According to the scheme, the work of sputtering product sorting, feeding and discharging, labeling and the like is changed into full-automatic treatment from manual treatment, the treatment efficiency is improved, the labor cost is reduced, the product yield is improved, and the production cost is reduced. All the steps of feeding and discharging are carried out at the same time, it is avoided that some mechanisms or modules need to stop and wait, a large amount of shutdown waiting time is saved, the feeding and discharging efficiency is further improved, the time needed for feeding and discharging is shortened, and therefore the overall production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of sputtering equipment, in particular to a sputtering loading and unloading device. Background Art

[0002] Sputtering, usually referring to magnetron sputtering, belongs to the high-speed low-temperature sputtering method. This process requires a vacuum degree of about 1×10-3 Torr, that is, an inert gas argon (Ar) is filled in a vacuum state of 1.3×10-3 Pa, and a high-voltage direct current is applied between a plastic substrate (anode) and a metal target (cathode). Due to the electrons generated by glow discharge exciting the inert gas, plasma is generated, and the plasma bombards the atoms of the metal target and deposits them on the plastic substrate.

[0003] Before sputtering, it is necessary to transfer the product to a designated area for loading, then place the product to be sputtered in the designated area, cover the fixture on the product. After sputtering is completed, the fixture is removed from the product, and finally the sputtered product is moved to the next process. In the prior art, the above steps are all completed manually. Due to the limited manual processing speed, the production cycle of sputtering is long, the efficiency is low, and the labor intensity of employees is high. And in the case of mixing multiple products, it is easy for manual workers to cover the fixture on the wrong product, resulting in product scrapping and reducing the product yield. Summary of the Utility Model

[0004] In view of the above-mentioned disadvantages of the prior art, the purpose of the utility model is to provide a sputtering loading and unloading device, which is used to solve the problems of low manual operation efficiency and low product yield in the prior art.

[0005] To achieve the above purpose and other related purposes, the utility model provides a sputtering loading and unloading device, including:

[0006] A sorting and loading mechanism, which is used to sort the products to be sputtered and convey them along the first direction;

[0007] A sputtering cover and fixture taking mechanism, which is connected to the sorting and loading mechanism;

[0008] A sorting and labeling mechanism, which is connected to the sputtering cover and fixture taking mechanism, and is used to sort the sputtered products and label them correspondingly;

[0009] Among them, the sputtering cover and fixture taking mechanism includes:

[0010] A frame;

[0011] The transfer module is arranged on the frame and includes a loading transfer unit, an unloading transfer unit, and a stock preparation transfer unit. The loading transfer unit is used to transfer the product to be sputtered along a first direction. The unloading transfer unit is used to transfer the sputtered product along the first direction. The stock preparation transfer unit is used to transfer the tray carrying the sputtered product to the frame and transfer the tray carrying the product to be sputtered to an external sputtering device.

[0012] The product transfer module is movably arranged on the frame along the first direction, the second direction, and the third direction, and the first direction, the second direction, and the third direction are perpendicular to each other in pairs. The product transfer module is used to move the product to be sputtered on the loading transfer unit to the stock preparation transfer unit and move the sputtered product on the stock preparation transfer unit to the unloading transfer unit.

[0013] The fixture transfer module is movably arranged on the frame along the first direction, the second direction, and the third direction, and is used to remove the fixture covering the sputtered product and cover the fixture on the product to be sputtered on the stock preparation transfer unit.

[0014] Optionally, the stock preparation transfer unit includes an upper layer transfer component and a lower layer transfer component arranged along the third direction, and the transfer directions of the upper layer transfer component and the lower layer transfer component are opposite. A supporting component is arranged between the upper layer transfer component and the lower layer transfer component, and the supporting component is used to drive the tray to descend from the upper layer transfer component to the lower layer transfer component.

[0015] Optionally, the upper layer transfer component includes a return transfer part and a transition transfer part arranged in sequence along its transfer direction. The transition transfer part is arranged directly above the supporting component. The transition transfer part includes a transition driving part and two relatively arranged transition guide rails. Rotating rollers are respectively arranged on the opposite sides of the two transition guide rails, and the rollers are in transmission connection with the driving end of the transition driving part. The transition driving part is used to drive the two transition guide rails to approach and separate from each other. The supporting component includes a supporting driving part and a supporting part, and the supporting part is in transmission connection with the driving end of the supporting driving part. The supporting driving part is used to drive the supporting part to rise and fall.

[0016] Optionally, the product transfer module includes a first rotation driving part, a suction cup assembly, and a first vision component. The suction cup assembly is in transmission connection with the driving end of the first rotation driving part. The first rotation driving part is used to drive the suction cup assembly to rotate horizontally. The first vision component is used to identify the posture of the product and drive the first rotation driving part to act. The suction cup assembly includes a disc and at least two suction cups. The suction cups are arranged on the disc, and the suction cups are evenly distributed along the circumference of the disc. The disc is in transmission connection with the driving end of the first rotation driving part.

[0017] Optionally, a plurality of sucker support rods are arranged on the disc, and the suckers and the sucker support rods are arranged in one-to-one correspondence. A long hole extending along the length direction of the sucker support rod is arranged on the sucker support rod. One end of the sucker passes through the long hole and is movably arranged in the long hole along the extending direction of the long hole. A fastener is sleeved on the end of the sucker passing through the long hole.

[0018] Optionally, the fixture transfer module includes a fixture transfer driving member and a clamping assembly. The clamping assembly includes two clamping blocks. The fixture transfer driving member has two driving ends, and the two driving ends are respectively in transmission connection with the two clamping blocks and can drive the two clamping blocks to approach and separate from each other.

[0019] Optionally, the fixture transfer module further includes a fixture transfer support assembly, a second vision assembly, and a second rotation driving member. The driving end of the second rotation driving member is in transmission connection with the fixture transfer support assembly and can drive the fixture transfer support assembly to rotate horizontally. The clamping assembly is arranged on the fixture transfer support assembly and can rotate horizontally with the fixture transfer support assembly. The second vision assembly is used to identify the posture of the fixture and drive the second rotation driving member to act.

[0020] Optionally, the loading conveyor unit and the unloading conveyor unit are arranged along a third direction, and the conveying directions of the loading conveyor unit and the unloading conveyor unit are opposite.

[0021] Optionally, the sorting and loading mechanism includes a first support frame, a first sorting assembly, a third vision assembly, a first alignment assembly, and a sorting conveyor assembly. The sorting conveyor assembly is arranged on the first support frame. The third vision assembly and the first alignment assembly are arranged on the sorting conveyor assembly. The first sorting assembly is movably arranged on the first support frame along a second direction. The first alignment assembly is used to push the product along the second direction to align the product. The third vision assembly is used to sort the product according to the product specifications and drive the sorting conveyor assembly.

[0022] Optionally, the sorting and labeling mechanism includes a second support frame, a second sorting assembly, a fourth vision assembly, a second alignment assembly, a labeling assembly, and an outflow conveyor assembly. The outflow conveyor assembly is arranged on the second support frame. The fourth vision assembly and the second alignment assembly are arranged on the outflow conveyor assembly. The second sorting assembly and the labeling assembly are movably arranged on the second support frame along a second direction. The second alignment assembly is used to push the product along the second direction to align the product. The fourth vision assembly is used to sort the product according to the product specifications and drive the second sorting conveyor assembly. The labeling assembly is used to label the products of different specifications correspondingly.

[0023] As described above, the sputtering loading and unloading equipment of the present utility model has the following beneficial effects:

[0024] The sorting and loading mechanism, the sputtering cover picking fixture mechanism, and the sorting and labeling mechanism are arranged in sequence along the first direction. The products to be sputtered are placed on the sorting and loading mechanism. After being sorted according to the specifications of the products by the sorting and loading mechanism, they are conveyed to the sputtering cover picking fixture mechanism. The sorting and loading mechanism conveys the products to the loading conveyor unit, and then the loading conveyor unit conveys them to the stockpiling conveyor unit. Then, the product transfer module moves the products to be sputtered (products without fixtures) from the loading conveyor unit to the stockpiling conveyor unit. The fixture transfer module removes the fixture covering the sputtered product and covers the fixture on the product to be sputtered. The above-mentioned fixture transfer operations are all completed on the stockpiling conveyor unit. The stockpiling conveyor unit and the transfer module operate simultaneously. The stockpiling conveyor unit conveys the tray carrying the sputtered product to the rack. After the fixture transfer module removes the fixture from the sputtered product, the product to be sputtered covered with the fixture is conveyed by the stockpiling conveyor unit to the subsequent sputtering equipment, and the sputtered product after the fixture is removed is moved by the product transfer module to the unloading conveyor unit and conveyed to the sorting and labeling mechanism. Then, the tray originally carrying the sputtered product becomes empty, continues to load the products to be sputtered grabbed by the product transfer module, and then the fixture transfer module removes the fixture from the sputtered product and covers it on the product to be sputtered, repeating the cycle. The above process can be simply described as: removing the fixture from the sputtered product (while moving the product to be sputtered to the stockpiling conveyor unit) → covering the fixture on the product to be sputtered → moving the sputtered product to the unloading conveyor unit and conveying it to the sorting and labeling mechanism → conveying the product to be sputtered covered with the fixture to the subsequent sputtering equipment for sputtering operation. After the sputtered product is conveyed to the sorting and labeling mechanism, it is sorted and corresponding labels are affixed, and then it continues to be conveyed along the first direction to the next process. The sorting and loading mechanism can screen and classify the products to be sputtered according to the specifications and then convey them to the sputtering cover picking fixture mechanism, improving the processing efficiency of the downstream sputtering cover picking fixture mechanism. The sorting and labeling mechanism can screen and classify the sputtered products and affix corresponding labels, improving the labeling efficiency.

[0025] This solution enables the sorting, loading and unloading, and labeling of sputtered products to be changed from manual to fully automated processing, improving the processing efficiency, reducing the labor cost, and avoiding product damage caused by fatigue operation of operators. The equipment operation replaces manual operation, with more precise operation, improving the product yield rate and reducing the production cost. All the steps of loading and unloading are carried out simultaneously, avoiding some of the mechanisms or modules from having to stop and wait, saving a large amount of downtime waiting time, further improving the loading and unloading efficiency, reducing the time required for loading and unloading, and thus improving the overall production efficiency. Description of the Drawings

[0026] Figure 1 is a schematic diagram of the overall structure of an embodiment of the present utility model;

[0027] Figure 2 is a side view of an embodiment of the present utility model;

[0028] Figure 3 is a front view of an embodiment of the present utility model;

[0029] Figure 4 is a top view of an embodiment of the present utility model;

[0030] Figure 5 is a three - dimensional view of a sputtering cover picking and fixture mechanism of an embodiment of the present utility model from one angle;

[0031] Figure 6 is a three - dimensional view of a sputtering cover picking and fixture mechanism of an embodiment of the present utility model from another angle;

[0032] Figure 7 is a schematic diagram of the product transfer module structure of an embodiment of the present utility model;

[0033] Figure 8 is a schematic diagram of a fixture transfer module structure of an embodiment of the present utility model from one angle;

[0034] Figure 9 is a schematic diagram of a fixture transfer module structure of an embodiment of the present utility model from another angle;

[0035] Figure 10 is a schematic diagram of a fixture transfer module structure of an embodiment of the present utility model from yet another angle;

[0036] Part number description

[0037] 1 - Sorting and feeding mechanism; 11 - First support frame; 12 - First alignment component; 13 - Sorting conveyor component; 14 - Third vision component; 15 - First sorting component; 16 - Sorting transfer component; 2 - Sputtering cover picking and fixture mechanism; 21 - Frame; 22 - Fixture transfer module; 221 - Fixture transfer driving part; 222 - Clamping block; 221a - Groove; 223 - Fixture transfer support component; 224 - Second rotation driving part; 225 - Second vision component; 23 - Product transfer module; 231 - First rotation driving part; 232 - First vision component; 233 - Disc; 234 - Suction cup; 235 - Suction cup support rod; 235a - Long slot; 24 - Feeding conveyor unit; 25 - Discharging conveyor unit; 26 - Stocking conveyor unit; 261 - Upper - layer conveyor component; 261a - Return conveyor part; 261b - Transition conveyor part; 262 - Lower - layer conveyor component. Detailed implementation manners

[0038] The following describes the implementation manners of the present utility model through specific examples. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model.

[0039] It should be noted that the illustrations provided in this embodiment only schematically illustrate the basic concept of the present utility model. Therefore, only the components related to the present utility model are shown in the drawings, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the layout type of its components may also be more complex. The structures, ratios, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those skilled in this technology to understand and read, and are not used to limit the limiting conditions under which the present utility model can be implemented. Therefore, they do not have technical substantial significance. Any modification of the structure, change of the proportional relationship, or adjustment of the size, without affecting the effects that the present utility model can produce and the purposes that can be achieved, should still fall within the scope that can be covered by the technical content disclosed in the present utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle", and "one" cited in this specification are only for the convenience of clear narration and are not used to limit the scope under which the present utility model can be implemented. The change or adjustment of their relative relationships, without substantial change in the technical content, should also be regarded as the scope under which the present utility model can be implemented.

[0040] Please refer to Figures 1 to 10 , in this embodiment, the first direction is the length direction of the sputtering loading and unloading device, the second direction is the width direction of the sputtering loading and unloading device, and the third direction is the height direction of the sputtering loading and unloading device. This embodiment provides a sputtering loading and unloading device, which includes a sorting and loading mechanism 1, a sputtering cover picking and jigging mechanism 2, and a sorting and labeling mechanism that are sequentially connected along the first direction. The sorting and labeling mechanism is not shown in the drawings. The sorting and loading mechanism 1 is used to sort products according to the specifications of the products. The sorting and loading mechanism 1 includes multiple conveyor belts parallel along the first direction. Products of the same specification are conveyed on the conveyor belts of the same sorting and loading mechanism 1 so that the subsequent sputtering cover picking and jigging mechanism 2 can directly perform picking and moving operations. After sorting, the products to be sputtered are conveyed along the first direction to the loading conveyor unit 24 of the sputtering cover picking and jigging mechanism 2. The sorting and loading mechanism 1 is connected to the loading conveyor unit 24 of the sputtering cover picking and jigging mechanism 2.

[0041] The sputtering cover picking and fixture mechanism 2 includes a frame 21, a conveying module, a product transfer module 23 and a fixture transfer module 22, and the conveying module, the product transfer module 23 and the fixture transfer module 22 are all arranged on the frame 21. The conveying module includes a loading conveying unit 24, an unloading conveying unit 25 and a stockpiling conveying unit 26. This embodiment can simultaneously handle the loading and unloading of at least two specifications of products. In one embodiment, the conveying directions of the loading conveying unit 24 and the unloading conveying unit 25 are the same. The loading conveying unit 24 includes multiple conveyor belts parallel to each other in the first direction. Each conveyor belt of the loading conveying unit 24 corresponds to conveying one specification of product, and the number of conveyor belts of the loading conveying unit 24 is the same as the number of product specifications. The parallel conveyance of multiple product specifications can improve the efficiency of loading and sputtering. The two ends of the frame 21 in the first direction are respectively connected to the sorting and loading mechanism 1 and the sorting and labeling mechanism. That is, both the upstream and downstream of the sputtering cover picking and fixture mechanism 2 are respectively connected to the sorting and loading mechanism 1 and the sorting and labeling mechanism. The product to be sputtered is conveyed from the sorting and loading mechanism 1 to the loading conveying unit 24. The heights of the parts where the loading conveying unit 24 is docked with the sorting and loading mechanism 1 are equal, which can facilitate the loading conveying unit 24 to receive the product and improve the loading efficiency of the loading conveying unit 24. The loading conveying unit 24 is used to convey the product to be sputtered in the first direction, and the unloading conveying unit 25 is used to convey the sputtered product in the first direction. In one embodiment, the unloading conveying unit 25 includes multiple parallel conveyor belts, which convey the sputtered product to an external sputtering device. The parallel conveyance of products of multiple specifications can improve the unloading efficiency, thereby improving the product production efficiency. There are pallets placed on the stockpiling conveying unit 26. The stockpiling conveying unit 26 is used to convey the pallet carrying the sputtered product from an external sputtering device to the frame 21 of this embodiment, and then convey the pallet carrying the product to be sputtered to the external sputtering device. The product transfer module 23 can move on the frame 21 in the first direction, the second direction and the third direction, so as to facilitate the picking and placing of the product to be sputtered. Tracks for the product transfer module 23 to move are respectively arranged on the frame 21 in the first direction, the second direction and the third direction. Tracks for the fixture transfer module 22 to move are also respectively arranged on the frame 21 in the first direction, the second direction and the third direction.

[0042] In a loading and unloading cycle, the product transfer module 23 first moves the product to be sputtered on the loading conveyor unit 24 to the tray of the stock preparation conveyor unit 26, and the stock preparation conveyor unit 26 conveys it to an external sputtering device for sputtering operation. Then, the product transfer module 23 moves the sputtered product on another tray of the stock preparation conveyor unit 26 to the unloading conveyor unit 25, and the unloading conveyor unit 25 conveys it to the sorting and labeling mechanism. The jig transfer module 22 can move on the frame 21 along the first direction, the second direction, and the third direction, and is used to remove the jig covering the sputtered product and cover it on the product to be sputtered on the stock preparation conveyor unit 26. The stock preparation conveyor unit 26 conveys the tray carrying the sputtered product from the external sputtering device to the frame 21 of this embodiment, and at the same time, the product transfer module 23 moves the product to be sputtered on the loading conveyor unit 24 to the stock preparation conveyor unit 26. The jig transfer module 22 removes the jig covering the sputtered product and covers it on the product to be sputtered on the stock preparation conveyor unit 26. After the sputtered product is conveyed to the sorting and labeling mechanism, the sorting and labeling mechanism sorts it according to the specifications of the product and correspondingly labels it, and finally flows to the subsequent processing process outside this embodiment.

[0043] In this embodiment, the sorting and loading mechanism 1, the sputtering cover picking and jigging mechanism 2, and the sorting and labeling mechanism are arranged in sequence along the first direction. The products to be sputtered are placed on the sorting and loading mechanism 1. After being sorted according to the specifications of the products by the sorting and loading mechanism 1, they are conveyed to the sputtering cover picking and jigging mechanism 2. The sorting and loading mechanism 1 conveys the products to the loading conveyor unit 24, and then the loading conveyor unit 24 conveys them to the stockpiling conveyor unit 26. Then, the product transfer module 23 moves the products to be sputtered (products without jigs) from the loading conveyor unit 24 to the stockpiling conveyor unit 26. The jig transfer module 22 removes the jig covering the sputtered product and covers the jig on the product to be sputtered on the stockpiling conveyor unit 26. The stockpiling conveyor unit 26 and the transfer module operate simultaneously. The stockpiling conveyor unit 26 conveys the tray carrying the sputtered product to the rack 21. After the jig transfer module 22 removes the jig from the sputtered product, the product to be sputtered with the jig is conveyed by the stockpiling conveyor unit 26 to the subsequent sputtering equipment, and the sputtered product after the jig is removed is moved by the product transfer module 23 to the unloading conveyor unit 25 and conveyed to the sorting and labeling mechanism. Then, the tray originally carrying the sputtered product becomes empty, continues to load the products to be sputtered grabbed by the product transfer module 23, and then the jig transfer module 22 removes the jig from the sputtered product and covers it on the product to be sputtered, repeating the cycle. The above process can be simply described as: removing the jig from the sputtered product (simultaneously moving the product to be sputtered on the loading conveyor unit 24 to the stockpiling conveyor unit 26) → covering the jig on the product to be sputtered on the stockpiling conveyor unit 26 → moving the sputtered product to the unloading conveyor unit 25 and conveying it to the sorting and labeling mechanism → conveying the product to be sputtered with the jig to the subsequent sputtering equipment for sputtering operation. After the sputtered product is conveyed to the sorting and labeling mechanism, it is sorted and labeled correspondingly, and then continues to be conveyed along the first direction to the next process. The sorting and loading mechanism 1 can screen and classify the products to be sputtered according to the specifications and then convey them to the sputtering cover picking and jigging mechanism 2, improving the processing efficiency of the downstream sputtering cover picking and jigging mechanism 2. The sorting and labeling mechanism can screen and classify the sputtered products and label them correspondingly, improving the labeling efficiency.

[0044] This embodiment enables the sorting, loading and unloading, and labeling of sputtered products to be transformed from manual to fully automated processing, improving the processing efficiency, reducing the labor cost, and improving the product yield, reducing the production cost. All the steps of loading and unloading are carried out simultaneously, avoiding the need for some mechanisms or modules to stop and wait, saving a large amount of downtime waiting time, further improving the loading and unloading efficiency, reducing the time required for loading and unloading, and thus improving the overall production efficiency. And this embodiment can process products of multiple specifications simultaneously, improving the processing efficiency of the subsequent sputtering process.

[0045] In one embodiment, as Figure 3As shown, the stock preparation transfer unit 26 includes an upper transfer assembly 261 and a lower transfer assembly 262 arranged along the third direction (vertical direction). The upper transfer assembly 261 is disposed directly above the lower transfer assembly 262. The transfer directions of the upper transfer assembly 261 and the lower transfer assembly 262 are opposite. A supporting assembly is provided between the upper transfer assembly 261 and the lower transfer assembly 262. The supporting assembly is used to drive the tray to descend from the upper transfer assembly 261 to the lower transfer assembly 262. The upper transfer assembly 261 is used to transfer the tray full of the products after sputtering on the external sputtering device to the frame 21 of this embodiment. The lower transfer assembly 262 is used to transfer the tray full of the products to be sputtered to the external sputtering device. Both the upper transfer assembly 261 and the lower transfer assembly 262 extend along the first direction. One end of the upper transfer assembly 261 away from the frame 21 of this embodiment is connected to the external sputtering device, and one end of the lower transfer assembly 262 away from the frame 21 of this embodiment is also connected to the external sputtering device, and the connection positions are different. The fixture transfer module 22 removes the fixture on the product after sputtering, and the product transfer module 23 removes the product after sputtering on the tray. The product transfer module 23 moves the product to be sputtered onto the tray, the fixture transfer module 22 covers the fixture on the product to be sputtered, the supporting assembly drives the tray to descend onto the lower transfer assembly 262, and the lower transfer assembly 262 transfers the tray full of the products to be sputtered to the external sputtering device. The above structural arrangement can save the space occupied by the equipment and reduce the overall volume and floor area of this embodiment.

[0046] In one embodiment, as Figure 3 and Figure 4As shown, the upper transfer component 261 includes a return transfer part 261a and a transition transfer part 261b arranged in sequence along its transfer direction. The transition transfer part 261b is arranged directly above the support component. A tray filled with products after sputtering (covered with fixtures) is arranged on the return transfer part 261a, and an empty tray is arranged on the transition transfer part 261b. And the product transfer module 23 transfers the product to be sputtered onto the empty tray of the transition transfer part 261b. The transition transfer part 261b includes a transition driving part and two relatively arranged transition guide rails. Rotating rollers are respectively arranged on the opposite sides of the two transition guide rails, and the rollers are in transmission connection with the driving end of the transition driving part. The transition driving part is used to drive the two transition guide rails to approach and separate from each other. The number of transition driving parts can be one or multiple. The transition driving part can be a driving device such as a motor. The transition driving part can drive the rollers to rotate through a transmission structure already disclosed in the prior art, or directly drive. When directly driving, the number of transition driving parts is multiple. The return transfer part 261a includes a return driving part and a rotating roller. The driving end of the return driving part is in transmission connection with the rotating roller. The return driving part drives the rotating roller to rotate through a transmission structure already disclosed in the prior art, or directly drive. When directly driving, the number of return driving parts is multiple. The tray is transferred by being arranged on the rotating roller when passing through the return driving part, and is transferred by being arranged on its rollers when passing through the transition transfer part 261b. The tray filled with products after sputtering stays on the return transfer part 261a. After the fixture and the products after sputtering are removed, the tray is transferred to the transition transfer part 261b (meanwhile, the tray filled with products after sputtering is transferred from the external sputtering device to the transition transfer part 261b). The product transfer module 23 then places the product to be sputtered on the tray, and the fixture transfer module 22 covers the fixture on the product to be sputtered. The two transition guide rails separate from each other, the support component drives the tray to descend onto the lower transfer component 262, the two transition guide rails close, and the lower transfer component 262 transfers the tray filled with products to be sputtered to the external sputtering device. Through the above structure, each link of this embodiment can be more closely connected, and the waiting time between each link can be minimized as much as possible, thereby improving the feeding and discharging efficiency and the sputtering production efficiency.

[0047] In one embodiment, the supporting component includes a supporting driving member and a supporting member. The driving end of the supporting driving member is in transmission connection with the supporting member. The supporting driving member is used to drive the supporting member to rise and fall. The supporting driving member can be a driving device such as a motor or a cylinder. The supporting driving member can drive the supporting member to rise and fall through a transmission structure disclosed in the prior art, or directly drive the supporting member to rise and fall. The supporting member can be two vertically arranged rectangular frames, respectively abutted against the bottoms of both ends of the tray along the length direction. The lower conveying component 262 can also be driven by a driving device such as a motor to drive the rotating roller to rotate. The supporting member can rise and fall between adjacent rotating rollers of the lower conveying component 262 to avoid interference therewith. The supporting member can rise from between adjacent rotating rollers of the lower conveying component 262 to abut against the bottom of the tray, or can fall from between adjacent rotating rollers of the lower conveying component 262 below the rotating rollers of the lower conveying component 262 to place the tray on the lower conveying component 262. The above structural arrangement can reduce the occupied space while connecting the upper conveying component 261 and the lower conveying component 262, and also improve the conveying efficiency of the tray.

[0048] In one embodiment, as Figure 7 shown, the product transfer module 23 includes a first rotation driving member 231, a suction cup assembly, and a first vision component 232. The suction cup assembly is in transmission connection with the driving end of the first rotation driving member 231. The first rotation driving member 231 is used to drive the suction cup assembly to rotate horizontally. The first vision component 232 is used to detect and identify the posture of the product (the posture of the product refers to whether the product is placed along the first direction or the second direction) and drive the first rotation driving member 231 to act. The first vision component 232 is connected to an image processing system, and the action of the first rotation driving member 231 is controlled through the image processing system. The image processing system can be set at any position in this embodiment or outside this embodiment. The suction cup assembly sucks and moves the product by contacting the top surface of the product. Due to the structural arrangement of the product, the suction cup assembly can avoid damaging the product and improve the moving efficiency of the product. The sizes, shapes, etc. of products of different specifications are different. In order to increase the number of products placed on each tray, the tray is a rectangular tray, and the placement directions of products of different specifications are different. The first vision component 232 can include an industrial camera. The industrial camera converts the target captured by digital image into an image signal and transmits it to a dedicated image processing system. The image system performs various operations on these signals to extract the features of the target, and then controls the actions of on-site equipment according to the discrimination results. So that in this embodiment, the direction of the product can be identified, and the first rotation driving member 231 can be driven to rotate horizontally to place the product to be sputtered on the specified position on the tray. When taking the sputtered product, the sputtered product can also be adjusted to the required posture and then placed on the blanking conveying unit 25, which is convenient for subsequent process processing.

[0049] In one embodiment, the first vision component 232 can also identify the specifications of the product to be sputter-coated through the QR code on the product, so as to move the product to be sputter-coated to the corresponding position on the tray, thereby improving the feeding efficiency and accuracy.

[0050] In one embodiment, as Figure 7 shown, the suction cup assembly includes a disc 233 and at least two suction cups 234. The suction cups 234 are arranged on the bottom of the disc 233, and the suction cups 234 are evenly distributed along the circumferential direction of the disc 233. The driving end of the first rotation driving member 231 is in transmission connection with the top of the disc 233. The first rotation driving member 231 drives the suction cup assembly to rotate by driving the disc 233 to rotate. The first rotation driving member 231 can be a driving device such as a motor. The above setting method can improve the stability of sucking and moving the product, thereby improving the feeding and discharging efficiency, and also preventing the product from falling and being damaged during movement, which affects the normal operation of this embodiment.

[0051] In one embodiment, as Figure 7 shown, a plurality of horizontally arranged suction cup support rods 235 are evenly distributed along the circumferential direction on the bottom of the disc 233. The suction cups 234 and the suction cup support rods 235 are respectively arranged in one-to-one correspondence. A long hole 235a extending along its length direction is arranged on the suction cup support rod 235. The top end of the suction cup 234 passes through the long hole 235a and is movably arranged in the long hole 235a along the extending direction of the long hole 235a. A fastener is sleeved on the part of the top end of the suction cup 234 passing through the long hole 235a. The suction cup 234 is arranged on the disc 233 through the suction cup support rod 235. By adjusting the horizontal position of the suction cup 234 in the long hole 235a in the above structure, the relative positions between the suction cups 234 can be adjusted to match products of different specifications and sizes, improving the adaptability of this embodiment. The fastener can adjust the tightness of the suction cup 234 in the long hole 235a, loosen it when the position needs to be adjusted, and tighten it when it needs to be fastened.

[0052] In one embodiment, as Figures 8 to 10As shown, the fixture transfer module 22 includes a fixture transfer driving member 221 and a clamping assembly. The clamping assembly includes two clamping blocks 222 arranged back to back. The fixture transfer driving member 221 has two driving ends arranged back to back. The two driving ends are respectively in transmission connection with the two clamping blocks 222 and can drive the two clamping blocks 222 to approach and separate from each other. The fixture transfer driving member 221 can be a double-acting cylinder in the prior art, and the two driving ends of the double-acting cylinder are respectively arranged at both ends of the cylinder. The two clamping blocks 222 respectively extend into two holes of the fixture. The double-acting cylinder drives the two clamping blocks 222 to separate from each other to complete the clamping of the fixture. When it is necessary to place down the fixture, the double-acting cylinder drives the two clamping blocks 222 to approach each other, that is, the fixture can be released. The above structure can improve the stability of picking up the fixture and avoid the fixture falling off during the movement of the fixture, which affects the normal progress of loading and unloading.

[0053] In one embodiment, as Figures 8 to 10 shown, horizontal grooves 221a are respectively arranged on the back sides of the two clamping blocks 222. When clamping the fixture, the grooves 221a are stuck in the hole walls of the fixture, further improving the clamping stability of the fixture.

[0054] In one embodiment, as Figures 8 to 10 shown, the fixture transfer module 22 further includes a fixture transfer support assembly 223, a second vision assembly 225 and a second rotation driving member 224. The fixture transfer driving member 221 is arranged on the fixture transfer support assembly 223. The driving end of the second rotation driving member 224 is in transmission connection with the fixture transfer support assembly 223 and can drive the fixture transfer support assembly 223 to rotate horizontally. The clamping assembly is arranged on the fixture transfer support assembly 223 and can rotate horizontally with the fixture transfer support assembly 223. The second vision assembly 225 is used to detect and identify the posture of the fixture (placed along the first direction or the second direction) and drive the second rotation driving member 224 to act. Correspondingly, the fixture transfer module 22 can also identify the postures of the fixture and the product, and adjust the horizontal position of the clamping assembly through the above structure to pick up the fixture more accurately and cover the fixture on the product to be sputtered. The second vision assembly 225 can also be an industrial camera, and the second vision assembly 225 is also connected to an image recognition system to drive the second rotation driving member 224 to act through the image recognition system. The fixture transfer support assembly 223 can be a support frame.

[0055] In one embodiment, as Figures 2 to 6 shown, the loading conveyor unit 24 and the unloading conveyor unit 25 are arranged along the third direction (vertical direction). The loading conveyor unit 24 is arranged above the unloading conveyor unit 25, and the conveying directions of the loading conveyor unit 24 and the unloading conveyor unit 25 are opposite. It can reduce the overall volume of this embodiment, reduce the floor space and improve the applicability.

[0056] In one embodiment, the stock preparation transfer unit 26 is arranged in the middle of the frame 21 along the first direction. The loading transfer unit 24 may include two transfer lines and is respectively arranged on both sides of the stock preparation transfer unit 26 along the first direction; the unloading transfer unit 25 may also include two transfer lines and is respectively arranged on both sides of the stock preparation transfer unit 26 along the first direction. This makes the layout of this embodiment reasonable, facilitates the cooperation between various modules, improves the loading and unloading efficiency, and avoids interference.

[0057] In one embodiment, the loading transfer unit 24 is divided into several sections along the first direction, and baffles capable of lifting in the vertical direction are arranged between the sections. The baffles can be driven to lift by a motor. The setting of the baffles can rise to block the subsequent products from being transferred forward when the number of products in the front is sufficient; when the number of products in the front is insufficient, it can descend to enable the products to continue to be transferred forward.

[0058] In one embodiment, parallel running rails are respectively arranged on both sides of the frame 21 along the first direction. The product transfer module 23 is arranged at the bottom of the running rails and can move along the running rails in the first direction. The fixture transfer module 22 is arranged on the opposite side of the running rails and can move along the running rails in the first direction. The above setting method can save space, avoid interference between the product transfer module 23 and the fixture transfer module 22, and improve the operation efficiency of this embodiment.

[0059] In one embodiment, both the product transfer module 23 and the fixture transfer module 22 include tracks in the second direction and the third direction and corresponding driving members, so that the operating ends of the product transfer module 23 and the fixture transfer module 22 can move in the second direction and the third direction.

[0060] In one embodiment, as Figures 2 to 6 shown, both the product transfer module 23 and the fixture transfer module 22 are multiple and are evenly distributed on both sides of the frame 21 along the first direction, so that the product transfer module 23 can simultaneously pick up and deliver multiple products to be sputtered or sputtered products, and the fixture transfer module 22 can simultaneously pick up and deliver multiple fixtures, improving the loading and unloading efficiency.

[0061] In one embodiment, as Figure 1As shown in the figure, the sorting and feeding mechanism 1 includes a first support frame 11, a first sorting component 15, a third vision component 14, a first alignment component 12, and a sorting conveyor component 13. The sorting conveyor component 13 is arranged on the first support frame 11. The sorting conveyor component 13 can be multiple conveyor belts arranged in parallel along the first direction, and the number of conveyor belts is the same as the number of product specifications. The third vision component 14 and the first alignment component 12 are arranged on the sorting conveyor component 13. The first sorting component 15 is movably arranged on the first support frame 11 along the second direction. The first alignment component 12 is used to push the product along the second direction to align the product. The third vision component 14 is used to sort the product according to the product specifications and drive the sorting conveyor component 13. The third vision component 14 can be an industrial camera, and its working principle is the same as that of the first vision component 232 and the second vision component 225. The first alignment component 12 includes a cylinder and a pushing member. The driving end of the cylinder is in transmission connection with the pushing member. The driving end of the cylinder drives the pushing member to move along the second direction to align the product on the sorting conveyor component 13, so that the third vision component 14 can recognize the QR code on the product, thereby sorting the product. The first sorting component 15 includes a suction cup 234 that can suck the product. Before the product enters the sorting and feeding mechanism 1, it is pasted with an identifiable QR code in the previous process, and then passes through the first sorting component 15 on the sorting conveyor component 13, and the product is pushed along the second direction to align the product. Then the product passes through the third vision component 14 to identify the specifications, and is sorted by the sorting conveyor component 13 to different conveyor belts of the sorting conveyor component 13, and then conveyed to the feeding conveyor unit 24 of the sputtering cover picking fixture mechanism 2. A sensor can be arranged in front of the first alignment component 12 along the first direction. After the sensor senses the product, it drives the cylinder of the first alignment component 12 to perform the alignment operation. The sensor can be a proximity sensor, an optical path sensor, a pressure sensor, etc.

[0062] In one embodiment, as Figure 1 shown, the sorting and feeding mechanism 1 further includes two groups of sorting transfer components 16 movably arranged on the first support frame 11 along the second direction. The two groups of sorting transfer components 16 are both located behind the first sorting component 15 along the product transfer direction. The two groups of sorting transfer components 16 can be arranged in parallel along the second direction. The sorting transfer component 16 also includes a suction cup 234. The multiple conveyor belts of the feeding conveyor unit 24 are arranged at intervals along the second direction. The conveyor belts of the sorting conveyor component 13 are closely arranged along the second direction. The conveyor belts of the sorting conveyor component 13 are arranged between two adjacent conveyor belts of the multiple conveyor belts of the feeding conveyor unit 24. When the height of the conveyor belt of the sorting conveyor component 13 is different from the height of the feeding conveyor unit 24, when the first sorting component 15 finishes sorting the product, the two groups of sorting transfer components 16 respectively move different specifications of products to different conveyor belts of the feeding conveyor unit 24. It is convenient to connect the sorting and feeding mechanism 1 and the sputtering cover picking fixture mechanism 2, thereby improving the feeding efficiency.

[0063] In one embodiment, the specific structure of the sorting and labeling mechanism is not shown in the accompanying drawings. The sorting and labeling mechanism includes a second support frame, a second sorting component, a fourth vision component, a second alignment component, a labeling component, and an outflow conveyor component. The outflow conveyor component is arranged on the second support frame. The outflow conveyor component can be multiple conveyor belts arranged in parallel along a first direction. The number of conveyor belts is the same as the number of product specifications. The outflow conveyor component is connected to the unloading conveyor unit 25, and the sputtered products are transferred from the unloading conveyor unit 25 to the outflow conveyor component. The fourth vision component and the second alignment component are arranged on the outflow conveyor component. There are two sets of second alignment components, one of which is arranged in front of the fourth vision component along the conveying direction of the outflow conveyor component. The second alignment component also includes a cylinder and a pusher. The cylinder drives the pusher to push the sputtered products in the second direction to align them so that the fourth vision component can recognize the QR code on the products and sort the products. The fourth vision component is an industrial camera and operates on the same principle as the first vision component 232 and the second vision component 225. The fourth visual component can recognize the QR code on the sputtered products and drive the second sorting component to sort the sputtered products, placing identical products on the same conveyor belt of the outflow conveyor component for subsequent labeling. The second sorting component may include a suction cup 234 capable of picking up the products. After sputtering and sorting, the products are placed on the corresponding conveyor belt of the outflow conveyor component. Another set of second alignment components then aligns the sputtered products along the second direction. The labeling component then labels the sputtered products with a QR code label that records information such as the sputtering time, production line, and product specifications, facilitating subsequent production tracking. The number of labeling components is the same as the number of conveyor belts of the outflow conveyor component, meaning that each product specification corresponds to one conveyor belt of the outflow conveyor component and one set of labeling components. The labeling component includes a cylinder, a labeling rack, and a vertically arranged labeling rod. The labeling rod is mounted on the labeling rack and driven by a drive device such as a motor to move the labeling rod along the second direction. The driving end of the pneumatic cylinder is in transmission connection with the labeling rod, capable of driving the rod in a vertical direction. After the labeling rod picks up a label, the labeling rack drives the labeling rod in a second direction to above the product. The pneumatic cylinder drives the labeling rod downward to apply the label to the sputtered product. The pneumatic cylinder then drives the labeling rod upward to reset. The motor or other drive device drives the labeling rack back, allowing the labeling rod to pick up the label, and the cycle repeats. A sensor can be positioned before the second alignment assembly moves in the first direction. When the sensor senses the product, it drives the pneumatic cylinder of the second alignment assembly to perform the alignment operation. The sensor can be a proximity sensor, optical path sensor, or pressure sensor, among others.

[0064] The above embodiments are only illustrative of the principles and effects of the present utility model, and are not intended to limit the present utility model. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present utility model. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed by the present utility model should still be covered by the claims of the present utility model.

Claims

1. A sputtering loading and unloading device, characterized in that, Including: A sorting and loading mechanism for sorting products to be sputter-coated and conveying them in a first direction; A sputter-coating cover picking and jigging mechanism connected to the sorting and loading mechanism; A sorting and labeling mechanism connected to the sputter-coating cover picking and jigging mechanism for sorting sputter-coated products and correspondingly labeling them; Wherein, the sputter-coating cover picking and jigging mechanism includes: A frame; A conveying module disposed on the frame, including a loading conveying unit, an unloading conveying unit, and a stockpiling conveying unit. The loading conveying unit is used for conveying products to be sputter-coated in the first direction, the unloading conveying unit is used for conveying sputter-coated products in the first direction, and the stockpiling conveying unit is used for conveying trays carrying sputter-coated products to the frame and conveying trays carrying products to be sputter-coated to an external sputter-coating device; A product transfer module movably disposed on the frame in the first direction, the second direction, and the third direction, where the first direction, the second direction, and the third direction are perpendicular to each other pairwise. The product transfer module is used for moving products to be sputter-coated on the loading conveying unit to the stockpiling conveying unit and moving sputter-coated products on the stockpiling conveying unit to the unloading conveying unit; A jig transfer module movably disposed on the frame in the first direction, the second direction, and the third direction for removing the jig covering the sputter-coated product and covering it on the product to be sputter-coated on the stockpiling conveying unit.

2. The sputtering loading and unloading equipment according to claim 1, characterized in that, The stockpiling conveying unit includes an upper-layer conveying component and a lower-layer conveying component arranged in the third direction, and the conveying directions of the upper-layer conveying component and the lower-layer conveying component are opposite. A supporting component is disposed between the upper-layer conveying component and the lower-layer conveying component, and the supporting component is used for driving the tray to descend from the upper-layer conveying component to the lower-layer conveying component.

3. The sputtering loading and unloading device according to claim 2, characterized in that, The upper-layer conveying component includes a return conveying part and a transition conveying part arranged in sequence along its conveying direction. The transition conveying part is disposed directly above the supporting component. The transition conveying part includes a transition driving part and two oppositely arranged transition guide rails. Rotating rollers are respectively disposed on the opposite sides of the two transition guide rails, and the rollers are in transmission connection with the driving end of the transition driving part. The transition driving part is used for driving the two transition guide rails to approach and move away from each other. The supporting component includes a supporting driving part and a supporting member, and the supporting member is in transmission connection with the driving end of the supporting driving part. The supporting driving part is used for driving the supporting member to rise and fall.

4. The sputtering loading and unloading equipment according to claim 1, characterized in that, The product transfer module includes a first rotation driving part, a suction cup assembly, and a first vision component. The suction cup assembly is in transmission connection with the driving end of the first rotation driving part. The first rotation driving part is used for driving the suction cup assembly to rotate horizontally. The first vision component is used for identifying the posture of the product and driving the first rotation driving part to act. The suction cup assembly includes a disc and at least two suction cups. The suction cups are disposed on the disc, and each of the suction cups is evenly distributed along the circumference of the disc. The disc is in transmission connection with the driving end of the first rotation driving part.

5. The sputtering loading and unloading equipment according to claim 4, wherein, A plurality of sucker support rods are arranged on the disc, and the suckers and the sucker support rods are arranged in one-to-one correspondence. A long hole extending along the length direction of the sucker support rod is arranged on the sucker support rod. One end of the sucker passes through the long hole and is movably arranged in the long hole along the extending direction of the long hole. A fastener is sleeved on the end of the sucker passing through the long hole.

6. The sputtering loading and unloading equipment according to claim 1, characterized in that, The fixture transfer module includes a fixture transfer driving member and a clamping assembly. The clamping assembly includes two clamping blocks. The fixture transfer driving member has two driving ends, and the two driving ends are respectively in transmission connection with the two clamping blocks and can drive the two clamping blocks to approach and separate from each other.

7. The sputtering loading and unloading equipment according to claim 6, wherein The fixture transfer module further includes a fixture transfer support assembly, a second vision assembly, and a second rotation driving member. The fixture transfer driving member is arranged on the fixture transfer support assembly. The driving end of the second rotation driving member is in transmission connection with the fixture transfer support assembly and can drive the fixture transfer support assembly to rotate horizontally. The clamping assembly is arranged on the fixture transfer support assembly and can rotate horizontally along with the fixture transfer support assembly. The second vision assembly is used to identify the posture of the fixture and drive the second rotation driving member to act.

8. The sputtering loading and unloading equipment according to claim 1, wherein, The loading conveyor unit and the unloading conveyor unit are arranged along the third direction, and the conveying directions of the loading conveyor unit and the unloading conveyor unit are opposite.

9. The sputtering loading and unloading equipment according to claim 1, characterized in that, The sorting and loading mechanism includes a first support frame, a first sorting component, a third vision component, a first alignment component, and a sorting conveyor component. The sorting conveyor component is arranged on the first support frame. The third vision component and the first alignment component are arranged on the sorting conveyor component. The first sorting component is movably arranged on the first support frame along the second direction. The first alignment component is used to push the product along the second direction to align the product. The third vision component is used to sort the product according to the product specifications and drive the sorting conveyor component.

10. The sputtering loading and unloading equipment according to claim 1, characterized in that, The sorting and labeling mechanism includes a second support frame, a second sorting component, a fourth vision component, a second alignment component, a labeling component, and an outflow conveyor component. The outflow conveyor component is arranged on the second support frame. The fourth vision component and the second alignment component are arranged on the outflow conveyor component. The second sorting component and the labeling component are movably arranged on the second support frame along the second direction. The second alignment component is used to push the product along the second direction to align the product. The fourth vision component is used to sort the product according to the product specifications and drive the second sorting component. The labeling component is used to label the products of different specifications correspondingly.

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