Continuous feeding device

Abstract

The utility model discloses a continuous feeding device. A first storage mechanism and a second storage mechanism in the device are connected in the vertical direction. The vacuum extraction mechanism is connected to the upper portion of the first storage mechanism through a first pipeline, and the upper portion of the second storage mechanism communicates with the first pipeline through a second pipeline. The gas storage mechanism is connected to the second pipeline through a third pipeline; and the gas storage mechanism is transversely connected to the process cavity through a fourth pipeline via the bottom output end of the second material storage mechanism. Powder is injected into the first material storage mechanism, the first material storage mechanism and the second material storage mechanism are vacuumized through the vacuum extraction mechanism, then the air pressure is adjusted to atmospheric pressure through the air storage mechanism, the powder is conveyed to the second material storage mechanism through the first material storage mechanism, and the powder is conveyed to the fourth pipeline through the bottom output end. Process gas is provided by the gas storage mechanism to blow the powder to the process cavity. Therefore, continuous feeding is achieved under the condition that equipment does not need to be disassembled, and the operation and maintenance cost is effectively reduced.

Description

Technical Field

[0001] The utility model relates to the field of material supply, in particular to a continuous feeding device. Background Art

[0002] Feeding is the start of all processes in the production process, and its feeding quality and efficiency will affect the quality of the entire production process.

[0003] At present, in the chemical vapor deposition (CVD) reaction furnace and vapor transport deposition (VTD) evaporation process on the market, the supply of evaporation materials is usually carried out by feeding through a fixed crucible bin, with limited capacity. After each material consumption, it is necessary to stop the machine for feeding.

[0004] Since each feeding requires the shutdown and disassembly of equipment such as the above-mentioned crucible bin, the operating rate of the equipment is reduced. At the same time, due to frequent disassembly, it is easy to cause the loosening of equipment parts, affecting the service life of the equipment. Summary of the Utility Model

[0005] The embodiment of the utility model discloses a continuous feeding device, which is used to solve the technical problems that the existing feeding device needs to stop and disassemble equipment such as the above-mentioned crucible bin during each feeding, resulting in a reduction in the operating rate of the equipment. At the same time, due to frequent disassembly, it is easy to cause the loosening of equipment parts, affecting the service life of the equipment, and increasing the operation and maintenance costs.

[0006] The embodiment of the utility model provides a continuous feeding device, which includes a first storage mechanism, a second storage mechanism, a vacuum extraction mechanism and a gas storage mechanism;

[0007] The first storage mechanism is connected to the second storage mechanism in the vertical direction;

[0008] The vacuum extraction mechanism is connected to the upper part of the first storage mechanism through a first pipeline, and the upper part of the second storage mechanism is communicated with the first pipeline through a second pipeline;

[0009] The gas storage mechanism is connected to the second pipeline through a third pipeline;

[0010] The gas storage mechanism is horizontally connected to the process cavity through a fourth pipeline via the bottom output end of the second storage mechanism.

[0011] Optionally, a powder opening is provided at the top end of the first storage mechanism for injecting powder;

[0012] The powder opening is provided with a detachable top cover.

[0013] Optionally, the top cover is locked by a sealing fixture.

[0014] Optionally, a first on-off valve is provided between the first storage mechanism and the second storage mechanism for controlling the opening and closing of the powder material conveyance between the first storage mechanism and the second storage mechanism.

[0015] Optionally, a regulating valve is further provided at the bottom output end for regulating the powder output rate of the second storage mechanism.

[0016] Optionally, a second on-off valve is further provided between the regulating valve and the process cavity for controlling the opening and closing of the introduction of the powder material.

[0017] Optionally, a third on-off valve and a fourth on-off valve are provided on the first pipeline;

[0018] One end of the second pipeline is connected between the third on-off valve and the fourth on-off valve, and the other end is connected to the second storage mechanism for communicating the first storage mechanism and the second storage mechanism until the background vacuum requirement is met.

[0019] Optionally, a filtering mechanism is further provided between the fourth on-off valve and the vacuum extraction mechanism.

[0020] Optionally, a first angle valve is further provided on the third pipeline for controlling the opening and closing of the connection between the second storage mechanism and the gas storage mechanism;

[0021] A second angle valve is further provided on the second pipeline for controlling the connection between the first storage mechanism and the second storage mechanism when the third on-off valve is opened.

[0022] Optionally, a gas flowmeter is further provided on the fourth pipeline for detecting the blowing gas flow of the gas storage assembly in real time.

[0023] It can be seen from the above technical solutions that the embodiments of the present utility model have the following advantages:

[0024] An embodiment of the present utility model provides a continuous feeding device, which includes a first storage mechanism, a second storage mechanism, a vacuum extraction mechanism, and a gas storage mechanism; the first storage mechanism and the second storage mechanism are connected vertically; the vacuum extraction mechanism is connected to the upper part of the first storage mechanism through a first pipeline, and the upper part of the second storage mechanism is communicated with the first pipeline through a second pipeline; the gas storage mechanism is connected to the second pipeline through a third pipeline; the gas storage mechanism is horizontally connected to the process cavity through a fourth pipeline via the bottom output end of the second storage mechanism. After injecting powder into the first storage mechanism, by controlling the opening and closing of the valves on each pipeline, the vacuum extraction mechanism evacuates the first storage mechanism and the second storage mechanism, adjusts the air pressure to atmospheric pressure through the gas storage mechanism, then transports the powder from the first storage mechanism to the second storage mechanism, transports the powder to the fourth pipeline through the bottom output end of the second storage mechanism, and finally provides process gas through the gas storage mechanism to blow the powder into the process cavity. Thus, continuous feeding is achieved without disassembling the equipment, effectively reducing the operation and maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0026] Figure 1 FIG. is a schematic structural diagram of a continuous feeding device provided by an embodiment of the present utility model;

[0027] Reference numerals: 1 - process chamber, 2 - first on-off valve, 3 - second storage mechanism, 4 - regulating valve, 5 - second on-off valve, 6 - fourth pipeline, 7 - vacuum extraction mechanism, 8 - gas storage mechanism, 9 - gas flowmeter, 10 - first pipeline, 11 - first angle valve, 12 - second pipeline, 13 - second angle valve, 14 - third pipeline, 15 - filtering mechanism, 16 - fourth on-off valve, 17 - third on-off valve, 18 - top cover, 19 - chain clamp, 20 - first storage mechanism. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0028] An embodiment of the present utility model discloses a continuous feeding device, which is used to solve the technical problems that the existing feeding device needs to stop and disassemble equipment such as the crucible bin during each feeding, resulting in a reduction in the equipment utilization rate. At the same time, due to frequent disassembly, the equipment components are prone to looseness, affecting the service life of the equipment, and increasing the operation and maintenance costs.

[0029] Please refer to Figure 1 , Figure 1Schematic structural diagram of a continuous feeding device provided by an embodiment of the present utility model.

[0030] A continuous feeding device provided by the present utility model includes a first storage mechanism, a second storage mechanism, a vacuum extraction mechanism, and a gas storage mechanism;

[0031] The first storage mechanism and the second storage mechanism are connected in the vertical direction;

[0032] The vacuum extraction mechanism is connected to the upper part of the first storage mechanism through a first pipeline, and the upper part of the second storage mechanism is communicated with the first pipeline through a second pipeline;

[0033] The gas storage mechanism is connected to the second pipeline through a third pipeline;

[0034] The gas storage mechanism is horizontally connected to the process chamber through a fourth pipeline via the bottom output end of the second storage mechanism.

[0035] The process chamber refers to a reaction chamber for forming a coating on a workpiece contained therein through a vapor deposition technique. The vapor deposition technique can be VTD or CVD, etc. It utilizes physical and chemical processes occurring in the gas phase to change the surface composition of the workpiece and form a metal or compound coating with special properties (such as a superhard wear-resistant layer or special optical and electrical properties) on the surface.

[0036] Since in the prior art, feeding the process chamber requires disassembling and adding mechanisms, which easily affects the service life of the equipment, and the process chamber in this embodiment is in a vacuum environment, a continuous feeding device is provided to achieve continuous feeding of the vacuum process chamber.

[0037] In this embodiment, the continuous feeding process includes two stages: a vacuum treatment air pressure adjustment stage and a feeding stage. In the vacuum treatment air pressure adjustment stage, to prevent the original gas inside the first storage mechanism and the second storage mechanism from having an adverse impact on the realization of the process flow, by setting the vacuum extraction mechanism, it is connected to the upper part of the first storage mechanism through the first pipeline. At the same time, the second storage mechanism is communicated with the first pipeline through the second pipeline, and the gas storage mechanism is connected to the upper part of the second storage mechanism through the third pipeline and is communicated with the second pipeline. After the first storage mechanism is filled with materials, the first pipeline and the second pipeline are simultaneously conducted, and the first storage mechanism and the second storage mechanism are evacuated through the vacuum extraction mechanism until the environment inside the two mechanisms meets the background vacuum requirements. Then, the vacuum extraction of the vacuum extraction mechanism is stopped and the first pipeline is closed. Then, the third pipeline is conducted, and the gas storage mechanism transports process gas to the second storage mechanism through this third pipeline. At the same time, since the second pipeline is still in a conducted state, the process gas enters the first storage mechanism along the second pipeline, so that the air pressures of the first storage mechanism and the second storage mechanism are kept consistent and adjusted to the atmospheric pressure, and then the second pipeline is closed, thus completing the preparatory operation before feeding.

[0038] In the feeding stage, operations such as feeding and storing materials are carried out through the first storage mechanism. The second storage mechanism located below is only turned on when receiving the feeding from the first storage mechanism, and is horizontally connected to the process cavity via the bottom output end. At the same time, the gas storage mechanism is connected to the bottom output end through the fourth pipeline. When the process gas in the gas storage mechanism is output, it drives the powder material output from the bottom output end to be transported to the process cavity. When the powder material in the second storage mechanism is consumed to the material level warning line, the connection between the first storage mechanism and the second storage mechanism is turned on, so that the powder material in the first storage mechanism falls under the action of gravity to the second storage mechanism until it reaches the specified position and then is turned off. Repeat the above operations until the powder material in the first storage mechanism is consumed, and then refill the powder material into the first storage mechanism and repeat the vacuum treatment air pressure adjustment stage.

[0039] Among them, since the fourth pipeline only needs to output gas, in order to increase the pressure of the process gas and thus improve the conveying efficiency, its pipe diameter can be smaller than that of the first pipeline, the second pipeline, and the third pipeline, and the pipe diameters of the first pipeline, the second pipeline, and the third pipeline can be equal. The on or off of each pipeline and mechanism can be achieved through valve control or other means.

[0040] It should be noted that both the first storage mechanism and the second storage mechanism can be storage tanks or storage boxes. The size of the first storage mechanism is larger than that of the second storage mechanism to store a large amount of powder materials and reduce the filling times. The small-size structure of the second storage mechanism makes the process of inputting the powder material into the process cavity easier to control and reduces the powder material loss. In addition, the first storage mechanism and the second storage mechanism are detachably connected to the pipeline and are provided with sealing rings, which is convenient for replacement while ensuring the air pressure stability. The gas storage mechanism can be a gas storage tank, and devices such as a pressure gauge can be set on it to detect the internal air pressure in real time. The vacuum extraction mechanism can be a vacuum pump. The background vacuum requirement refers to the background vacuum degree, that is, in vacuum coating, the vacuum pumping system is used to make the gas in a certain space reach a certain vacuum degree, and this vacuum degree exactly meets the vacuum degree required for the deposition of the coated object.

[0041] In an example of the present utility model, a powder material opening is provided at the top of the first storage mechanism for injecting powder materials; the powder material opening is provided with a top cover that can be fitted.

[0042] Among them, the top cover is locked through a sealing fixture.

[0043] In the embodiment of the present utility model, in order to facilitate the injection of powder materials, a powder material opening can be provided at the top of the first storage mechanism. The powder material opening can be provided with a top cover that matches its shape and can be fitted, and the powder materials can be injected into the first storage mechanism through the powder material opening.

[0044] In addition, to further improve the sealing performance of the first storage mechanism, the top cover can be further tightened by a sealing clamp. Specifically, both the top cover and the powder opening of the first storage mechanism can be KF flange interfaces. Meanwhile, a seal is provided under the top cover and tightened by a chain clamp bolt, so as to seal the top cover and the powder opening.

[0045] It should be noted that the size of the powder opening can be adjusted according to different first storage mechanisms, and there are also different sealing methods for this powder opening. For example, for small-sized powder openings with a diameter of 30 mm - 100 mm, a quick clamp can be selected as the sealing clamp; for large-sized powder openings, such as 100 mm - 350 mm, a quick chain clamp or a chain-type clamp can be selected as the sealing clamp.

[0046] In an example of the present utility model, a first on-off valve is provided between the first storage mechanism and the second storage mechanism for controlling the opening and closing of the powder transportation between the first storage mechanism and the second storage mechanism.

[0047] In this embodiment, the bottom end of the first storage mechanism is connected to the top end of the second storage mechanism through a pipeline. To facilitate the addition of powder to the second storage mechanism, a first on-off valve is provided on this pipeline, and the opening and closing of this first on-off valve are controlled to conduct / close the pipeline connection between the two.

[0048] In an example of the present utility model, a regulating valve is further provided at the bottom output end for regulating the powder output rate of the second storage mechanism.

[0049] The regulating valve is different from the above-mentioned on-off valve or angle valve. It is used to regulate process parameters such as the flow rate, pressure, temperature, and liquid level of the medium in the field of industrial automation process control. According to the control signal in the automation system, it automatically adjusts the opening degree of the valve, thereby realizing the regulation of the flow rate, pressure, temperature, and liquid level of the medium.

[0050] In this embodiment, the powder is directly output from the bottom output end of the second storage mechanism to the fourth pipeline and is transported to the process cavity by the push of the process gas. To improve the adjustment flexibility of the powder output rate, the powder output rate can be adjusted by setting a regulating valve at the bottom output end.

[0051] Among them, since the transportation of the powder also needs to consider the flow rate of the process gas, after the processor receives the data of the gas flowmeter, the opening degree of the regulating valve can be adjusted according to the gas flow rate.

[0052] Optionally, a second on-off valve is further provided between the regulating valve and the process cavity for controlling the opening and closing of the powder introduction.

[0053] To improve the flexibility of the feeding device, a second on-off valve can be provided between the regulating valve and the process chamber. When initializing the device, such as during vacuum treatment and air pressure adjustment, the second on-off valve is closed to interrupt the connection between the device and the process chamber.

[0054] When powder feeding is required, the second on-off valve, the gas storage mechanism, and the regulating valve can be opened in sequence. At this time, the powder falls from the second storage mechanism through the regulating valve to the fourth pipeline, and the process gas output of the gas storage mechanism enters the process chamber through the second on-off valve for feeding.

[0055] Optionally, a third on-off valve and a fourth on-off valve are provided on the first pipeline;

[0056] One end of the second pipeline is connected between the third on-off valve and the fourth on-off valve, and the other end is connected to the second storage mechanism, for connecting the first storage mechanism and the second storage mechanism until the background vacuum requirement is met.

[0057] In this embodiment, the third on-off valve and the fourth on-off valve are sequentially installed on the first pipeline. The third on-off valve is closer to the first storage mechanism. One end of the second pipeline is connected between the third on-off valve and the fourth on-off valve and is connected to the upper part of the first storage mechanism via the third on-off valve.

[0058] During vacuum treatment, by simultaneously opening the third on-off valve, the fourth on-off valve, and the second angle valve, the upper part of the first storage mechanism, the upper part of the second storage mechanism, and the vacuum extraction mechanism are connected. The vacuum extraction mechanism is used to evacuate them until the first storage mechanism and the second storage mechanism meet the background vacuum requirement, and the fourth on-off valve is closed to interrupt the connection between the vacuum extraction mechanism and the two storage mechanisms.

[0059] Optionally, a filtering mechanism is further provided between the fourth on-off valve and the vacuum extraction mechanism.

[0060] As the feeding process continues and powder is continuously injected, whether it is the first storage mechanism or the second storage mechanism, some powder may remain. To protect the vacuum extraction mechanism from being affected by the powder during vacuum evacuation of the two, a filtering mechanism can be installed on the first pipeline between the fourth on-off valve and the vacuum extraction mechanism, and the trace powder during vacuum extraction is filtered through this filtering mechanism.

[0061] Among them, the filtering mechanism can be an air filter or a pipeline filter, etc.

[0062] Optionally, a first angle valve is further provided on the third pipeline, for opening and closing the connection between the second storage mechanism and the gas storage mechanism;

[0063] A second angle valve is further provided on the second pipeline, for controlling the connection between the first storage mechanism and the second storage mechanism when the third on-off valve is opened.

[0064] In this embodiment, the third pipeline is connected to the upper part of the second storage mechanism via the second pipeline, and a first angle valve is installed on the third pipeline to control the connection between the second storage mechanism and the gas storage mechanism through the opening and closing of the first angle valve.

[0065] In addition, a second angle valve is further provided on the second pipeline. The second angle valve is arranged above the connection point of the third pipeline and the second pipeline. Through the opening and closing control of the second angle valve, the connection between the upper part of the first storage mechanism and the upper part of the second storage mechanism can be notified when the third on-off valve is opened.

[0066] When air pressure adjustment is required, the first angle valve, the second angle valve, and the third on-off valve can be opened simultaneously to connect the upper parts of the first storage mechanism and the second storage mechanism, and further through the output of the process gas of the gas storage mechanism, so that the air pressures of the first storage mechanism and the second storage mechanism in a vacuum state are adjusted to the atmospheric pressure while remaining consistent, and then the first angle valve is closed to interrupt the connection between the gas storage mechanism and the two storage mechanisms.

[0067] It should be noted that the first angle valve and the second angle valve refer to angle globe valves, whose outlet and inlet form a 90-degree right angle, also called angle valves, corner valves, and angle stop valves.

[0068] In an example of the present utility model, a gas flowmeter is further provided on the fourth pipeline for real-time detection of the blowing flow rate of the gas storage assembly.

[0069] The gas flowmeter refers to a device used to be installed in a pipeline to record the amount of gas flowing through. In this embodiment, it is used to detect the blowing flow rate of the process gas output by the gas storage assembly in real time. The fourth pipeline can be a process gas pipe.

[0070] In addition, the gas flowmeter can also upload the blowing flow rate to the processor to facilitate real-time monitoring of the powder flow rate of the feeding. When the powder flow rate deviates, the output gas volume of the process gas of the gas storage assembly is adjusted.

[0071] Among them, the first on-off valve, the second on-off valve, the third on-off valve, the fourth on-off valve, the first angle valve, the second angle valve, and the regulating valve, etc. can be solenoid valves, electric valves, pneumatic valves, hydraulic valves or other control valves that can receive PLC instructions or manual operations for opening and closing.

[0072] In an embodiment of the present utility model, a continuous feeding device is provided, which includes a first storage mechanism, a second storage mechanism, a vacuum extraction mechanism, and a gas storage mechanism; the first storage mechanism and the second storage mechanism are connected vertically; the vacuum extraction mechanism is connected to the upper part of the first storage mechanism through a first pipeline, and the upper part of the second storage mechanism is communicated with the first pipeline through a second pipeline; the gas storage mechanism is connected to the second pipeline through a third pipeline; the gas storage mechanism is horizontally connected to the process chamber through a fourth pipeline via the bottom output end of the second storage mechanism. After injecting powder into the first storage mechanism, the first storage mechanism and the second storage mechanism are evacuated by the vacuum extraction mechanism, the air pressure is adjusted to the atmospheric pressure by the gas storage mechanism, and then the powder is conveyed from the first storage mechanism to the second storage mechanism, and the powder is transported to the fourth pipeline through the bottom output end of the second storage mechanism. Finally, process gas is provided by the gas storage mechanism to blow the powder into the process chamber. Thus, continuous feeding can be achieved without disassembling the equipment, effectively reducing the operation and maintenance costs.

[0073] Finally, it should also be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, article or device including the said element.

[0074] The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The various embodiments can be combined as needed, and the same or similar parts can be referred to each other.

[0075] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present utility model. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present utility model. Therefore, the present utility model will not be limited to the embodiments shown herein, but will be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A continuous feeding device, characterized in that, It includes a first storage mechanism, a second storage mechanism, a vacuum extraction mechanism and a gas storage mechanism; The first storage mechanism is connected to the second storage mechanism in the vertical direction; The vacuum extraction mechanism is connected to the upper part of the first storage mechanism through a first pipeline, and the upper part of the second storage mechanism is communicated to the first pipeline through a second pipeline; The gas storage mechanism is connected to the second pipeline through a third pipeline; The gas storage mechanism is horizontally connected to the process chamber through a fourth pipeline via the bottom output end of the second storage mechanism.

2. The continuous feeding device according to claim 1, wherein A powder opening is provided at the top end of the first storage mechanism for injecting powder; The powder opening is provided with a lid that can be fitted.

3. The continuous feeding device according to claim 2, wherein, The lid is locked by a sealing clamp.

4. The continuous feeding device according to claim 1, wherein, A first on-off valve is provided between the first storage mechanism and the second storage mechanism for controlling the powder transfer between the first storage mechanism and the second storage mechanism.

5. The continuous feeding device according to claim 1, characterized in that, A regulating valve is further provided at the bottom output end for regulating the powder output rate of the second storage mechanism.

6. The continuous feeding device according to claim 5, wherein A second on-off valve is further provided between the regulating valve and the process chamber for controlling the opening and closing of the powder introduction.

7. The continuous feeding device according to claim 1, characterized in that, A third on-off valve and a fourth on-off valve are provided on the first pipeline; One end of the second pipeline is connected between the third on-off valve and the fourth on-off valve, and the other end is connected to the second storage mechanism for communicating the first storage mechanism and the second storage mechanism until the background vacuum requirement is met.

8. The continuous feeding device according to claim 7, characterized in that, A filtering mechanism is further provided between the fourth on-off valve and the vacuum extraction mechanism.

9. The continuous feeding device according to claim 7, wherein A first angle valve is further provided on the third pipeline for controlling the connection between the second storage mechanism and the gas storage mechanism; A second angle valve is further provided on the second pipeline for controlling the connection between the first storage mechanism and the second storage mechanism when the third on-off valve is opened.

10. The continuous feeding device according to claim 1, characterized in that, A gas flowmeter is further provided on the fourth pipeline for real-time detecting the blowing gas flow rate of the gas storage mechanism.

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