Shared bearing table for 6-inch wafer box and 8-inch wafer box
By designing a shared carrier for 6-inch and 8-inch wafer boxes, the problem of multiple carriers for wafer boxes of different sizes is solved, and cost reduction and practical improvements are achieved.
Patent Information
- Application Number
- CN202422382649.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-27
- Publication Date
- 2025-07-29
- Estimated Expiration
- 2034-09-27
AI Technical Summary
Wafer boxes of different sizes require different carriers, resulting in high production costs for enterprises.
A 6-inch wafer box and 8-inch wafer box share a bearing table, with a symmetrical limiting recess and a give way slot on the structure, which can adapt to wafer boxes of different sizes and realize the sharing of one bearing table.
The sharing of 6-inch and 8-inch wafer boxes is achieved through a carrier, which reduces the production costs of the enterprise and improves practicality and flexibility.
Smart Images
Figure CN223167451U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor processing, and specifically relates to a common carrier for 6-inch and 8-inch wafer boxes. Background Art
[0002] The production and manufacturing process of semiconductor products requires many process steps, and each process step is completed by a corresponding process machine. After the process step of a batch of wafers is completed on a process machine, the robotic arm of the process machine places the batch of wafers into a wafer box, and then the operator moves the wafer box from the process machine to the warehousing system. Then, the wafer box is transmitted to the next process machine through the warehousing system and the transportation system. The robotic arm of the next process machine takes out the wafers from the wafer box, transmits them into the process reaction chamber for process reaction, and after the process reaction ends, the wafers are sent back and placed back into the wafer box to carry out subsequent process steps.
[0003] Wafers of different sizes correspond to different wafer boxes. For example, 6-inch wafers are placed in 6-inch wafer boxes, and 8-inch wafers are placed in 8-inch wafer boxes. When the wafers are placed in the wafer box, the wafer box needs to be stable. Therefore, different-sized wafer boxes require different carriers for correspondence. In this way, multiple-sized wafer boxes require multiple styles of carriers for corresponding matching. Thus, the production cost of the enterprise is high, so it is necessary to improve. Summary of the Utility Model
[0004] In order to solve the above problems of the prior art, the utility model provides a common carrier for 6-inch and 8-inch wafer boxes, which has a simple structure and strong practicability.
[0005] To achieve the above object, the utility model adopts the following technical solutions:
[0006] As one aspect of the utility model, a common carrier for 6-inch and 8-inch wafer boxes is proposed, which includes: a carrier body, on which a first limiting recess and a second limiting recess are provided, and the first limiting recess and the second limiting recess are symmetrically arranged with the Y-axis of the carrier body as the center; the structure of the second limiting recess is symmetrical to the structure of the first limiting recess; the first limiting recess includes a first groove, a second groove and a third groove which are connected in sequence from back to front, the width of the rear end of the first groove is smaller than the width of the front end of the first groove; the width of the third groove is smaller than the width of the second groove.
[0007] Optionally, the inner side edge of the first groove is a first inner straight edge, and the outer side edge of the first groove is a first inclined edge that gradually becomes larger from the rear end to the front end in the outer direction, and a first outer straight edge is formed at the part of the first inclined edge close to the rear end.
[0008] Optionally, the inner side edge of the second groove is a second inner straight edge, one end of the second inner straight edge is integrally formed with the first inner straight edge, and the second inner straight edge and the first inner straight edge are on the same straight line; the outer side edge of the second groove is a second outer straight edge, and one end of the second outer straight edge is connected to the first inclined edge.
[0009] Optionally, the inner side edge of the third groove is a third inner straight edge, one end of the third inner straight edge is connected to the other end of the second inner straight edge through a third inclined edge; the third inner straight edge is located outside the second inner straight edge; the outer side edge of the third groove is a third outer straight edge, one end of the third outer straight edge is connected to the second outer straight edge, and the third outer straight edge and the second outer straight edge are on the same straight line;
[0010] A limiting boss is formed on the front end of the third groove, and there is a preset relief groove between the limiting boss and the third inner straight edge, and the width of the preset relief groove is smaller than the width of the third groove; a transverse limiting groove is provided on the outer side edge of the third groove.
[0011] Optionally, a relief through groove is provided on the carrier body, and the first limiting recess and the second limiting recess are communicated through the relief through groove.
[0012] Optionally, a plurality of mounting holes are provided on the carrier body.
[0013] Optionally, a relief hole is provided on the carrier body.
[0014] The 6-inch wafer cassette and the 8-inch wafer cassette of the present utility model share a carrier. The beneficial effects are specifically reflected in that: by using one carrier for both the 6-inch wafer cassette and the 8-inch wafer cassette, there is no need for dedicated use, which can reduce the production cost of enterprises, has strong practicability and high flexibility. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] The accompanying drawings forming a part of this application are used to provide a further understanding of the present utility model. The schematic embodiments and descriptions thereof of the present utility model are used to explain the present utility model and do not constitute an improper limitation to the present utility model.
[0016] Figure 1 It is the main structural view of the carrier shared by the 6-inch wafer cassette and the 8-inch wafer cassette of the present utility model;
[0017] Figure 2 It is the three-dimensional structural view of the carrier shared by the 6-inch wafer cassette and the 8-inch wafer cassette of the present utility model;
[0018] Figure 3 It is the installation explosion schematic diagram of the 6-inch wafer cassette and the carrier of the present utility model;
[0019] Figure 4Explosion diagram of the installation of the 8-inch wafer cassette and the carrier stage of the present utility model;
[0020] Figure 5 Schematic diagram of the installation state of the 6-inch wafer cassette and the carrier stage of the present utility model;
[0021] Figure 6 Schematic diagram of the installation state of the 8-inch wafer cassette and the carrier stage of the present utility model. Detailed implementation manners
[0022] To make the objectives, technical solutions and advantages of the present utility model clearer, the technical solutions of the present utility model will be clearly and completely described below in conjunction with the specific embodiments of the present utility model and the corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.
[0023] A 6-inch wafer cassette and an 8-inch wafer cassette of an embodiment of the present application share a carrier stage. As Figure 1 - Figure 2 shown, it includes: a carrier stage body 1, a first limiting recess 11 and a second limiting recess 12 are provided on the carrier stage body 1, and the first limiting recess 11 and the second limiting recess 12 are symmetrically arranged with the Y-axis of the carrier stage body 1 as the center; the structure of the second limiting recess 12 is symmetrical to the structure of the first limiting recess 11; the first limiting recess 11 includes a first groove 111, a second groove 112 and a third groove 113 that are connected in sequence from back to front, and the width of the rear end of the first groove 111 is smaller than the width of the front end of the first groove 111; the width of the third groove 113 is smaller than the width of the second groove 112;
[0024] The inner side edge of the first groove 111 is a first inner straight edge, and the outer side edge of the first groove 111 is a first inclined edge that gradually becomes larger from the rear end to the front end in the outer direction, and a first outer straight edge is formed at the part of the first inclined edge close to the rear end;
[0025] The inner side edge of the second groove 112 is a second inner straight edge, one end of the second inner straight edge is integrally formed with the first inner straight edge, and the second inner straight edge and the first inner straight edge are on the same straight line; the outer side edge of the second groove 112 is a second outer straight edge, one end of the second outer straight edge is connected to the first inclined edge, and the connection part is arc-transition connected;
[0026] The inner side of the third groove 113 is a third inner straight edge. One end of the third inner straight edge is connected to the other end of the second inner straight edge through a third inclined edge 1131, and the connection part is in arc transition connection. The third inner straight edge is located outside the second inner straight edge. The outer side of the third groove 113 is a third outer straight edge. One end of the third outer straight edge is connected to the second outer straight edge, and the third outer straight edge and the second outer straight edge are on the same straight line.
[0027] A limiting boss 1132 is formed on the front end of the third groove 113. There is a preset relief groove 1133 between the limiting boss 1132 and the third inner straight edge, and the width of the preset relief groove 1133 is smaller than the width of the third groove 113. A transverse limiting groove 1134 is formed on the outer side of the third groove 113.
[0028] In one embodiment, as Figure 3 - Figure 4 shown, a relief through groove 13 is formed on the carrier table body 1. The relief through groove 13 connects the first limiting recess 11 and the second limiting recess 12. The relief through groove 13 serves as a relief for the first support rod 21 at the bottom of the 6-inch wafer cassette 2 or the second support rod 31 at the bottom of the 8-inch wafer cassette 3, so as to facilitate the 6-inch wafer cassette 2 or the 8-inch wafer cassette 3 to be arranged on the carrier table. It should be noted that the structures of the 6-inch wafer cassette 2 and the 8-inch wafer cassette 3 are prior arts and will not be elaborated here.
[0029] In one embodiment, a plurality of mounting holes 14 are formed on the carrier table body 1 to facilitate the installation of the carrier table to a predetermined position.
[0030] In one embodiment, a relief hole 15 is formed on the carrier table body 1 for the relief of laser induction.
[0031] During installation, as Figure 1 - Figure 6 shown, the first longitudinal support members 22 on both sides of the bottom of the 6-inch wafer cassette 2 are matched with the third inner straight edges of the corresponding third grooves 113. At the same time, the first support rod 21 at the bottom of the 6-inch wafer cassette 2 is matched with the relief through groove 13 to realize the connection between the 6-inch wafer cassette 2 and the carrier table.
[0032] The second longitudinal support members 32 on both sides of the bottom of the 8-inch wafer cassette 3 are matched with the limiting edges formed by the first inner straight edge, the second inner straight edge and the third inclined edge 1131 corresponding to the first groove 111 and the second groove 112. The third longitudinal support members 33 on both sides of the bottom of the 8-inch wafer cassette 3 are matched with the second outer straight edge corresponding to the second groove 112 and the third outer straight edge corresponding to the third groove 113. At the same time, the second support rod 31 at the bottom of the 8-inch wafer cassette 3 is matched with the relief through groove 13, and the limiting support edges 34 at the front end of the 8-inch wafer cassette 3 are matched with the corresponding transverse limiting grooves 1134 to realize the connection between the 8-inch wafer cassette 3 and the carrier table.
[0033] In summary, the present application enables the shared use of 6-inch wafer cassettes 2 and 8-inch wafer cassettes 3 through a carrier stage, eliminating the need for dedicated use, reducing the production costs of enterprises, and having strong practicality.
[0034] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0035] Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that for the convenience of description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and devices should be regarded as part of the specification. In all the examples shown and discussed herein, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
[0036] In the description of the present application, it should be understood that the orientation or positional relationships indicated by orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal", and "top, bottom" are generally based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description. Without contrary instructions, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus should not be construed as limiting the protection scope of the present application; the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.
[0037] For ease of description, spatial relative terms such as "above", "over", "on the upper surface", "upper", etc. can be used here to describe the spatial positional relationship of a device or feature shown in the figure with other devices or features. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation described in the figure of the device. For example, if the device in the attached drawing is inverted, the device described as "above or over other devices or structures" will then be positioned as "below or under other devices or structures". Thus, the exemplary term "above" can include both the orientations of "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations should be made for the spatial relative descriptions used here.
[0038] In addition, it should be noted that the use of words such as "first", "second", etc. to define components is only for the convenience of differentiating the corresponding components. Without additional statements, the above words have no special meanings, so they should not be construed as limiting the protection scope of this application.
[0039] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, terms such as "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.
[0040] The above are only the preferred embodiments of the present utility model, and all equivalent changes and modifications made according to the scope of the patent application of the present utility model shall fall within the scope covered by the present utility model.
Claims
1. A common carrier for 6-inch and 8-inch wafer cassettes, characterized in that, It includes: A carrier table body, on which a first limiting recess and a second limiting recess are provided. The first limiting recess and the second limiting recess are symmetrically arranged with the Y-axis of the carrier table body as the center; the structure of the second limiting recess is symmetrical to the structure of the first limiting recess; the first limiting recess includes a first groove, a second groove and a third groove that are sequentially connected from back to front. The width of the rear end of the first groove is smaller than the width of the front end of the first groove; the width of the third groove is smaller than the width of the second groove.
2. The common carrier for 6-inch and 8-inch wafer cassettes according to claim 1, characterized in that, The inner side edge of the first groove is a first inner straight edge, and the outer side edge of the first groove is a first inclined edge that gradually becomes larger from the rear end to the front end in the outer direction. The part of the first inclined edge close to the rear end forms a first outer straight edge.
3. The common carrier for 6-inch and 8-inch wafer cassettes as claimed in claim 2, wherein The inner side edge of the second groove is a second inner straight edge, one end of the second inner straight edge is integrally formed with the first inner straight edge, and the second inner straight edge and the first inner straight edge are on the same straight line; the outer side edge of the second groove is a second outer straight edge, and one end of the second outer straight edge is connected to the first inclined edge.
4. The common carrier for 6-inch and 8-inch wafer cassettes according to claim 3, wherein The inner side edge of the third groove is a third inner straight edge, one end of the third inner straight edge is connected to the other end of the second inner straight edge through a third inclined edge; the third inner straight edge is located outside the second inner straight edge; the outer side edge of the third groove is a third outer straight edge, one end of the third outer straight edge is connected to the second outer straight edge, and the third outer straight edge and the second outer straight edge are on the same straight line; A limiting boss is formed on the front end of the third groove. There is a preset relief groove between the limiting boss and the third inner straight edge, and the width of the preset relief groove is smaller than the width of the third groove; a transverse limiting groove is opened on the outer side edge of the third groove.
5. The 6-inch and 8-inch wafer cassettes sharing a carrier stage according to claim 1, wherein, A relief through groove is opened on the carrier table body, and the first limiting recess and the second limiting recess are connected through the relief through groove.
6. The common carrier for 6-inch and 8-inch wafer cassettes as claimed in claim 1, wherein A number of mounting holes are opened on the carrier table body.
7. The common carrier for 6-inch and 8-inch wafer cassettes according to claim 1, characterized in that, A relief hole is opened on the carrier table body.