Constant-pressure feeding device and wax pasting equipment

Abstract

The utility model relates to a constant-pressure feeding device and wax pasting equipment. The constant-pressure feeding device comprises a base, a first temperature control clamp, at least two first linear driving parts, a guide frame and a second linear driving part, wherein the first temperature control clamp and the at least two first linear driving parts are arranged on the base; the guide frame is mounted at the moving ends of the at least two first linear driving parts; the sliding frame is connected to the guide frame in a sliding mode and arranged at the moving end of the second linear driving piece, and the second temperature control clamp is arranged on the sliding frame. The wax pasting equipment comprises the flexible driving device. According to the constant-pressure feeding device, the pressure between the temperature control clamps can be accurately controlled through bidirectional pressure regulation and control, then the thickness of a wax layer is accurately controlled, the requirement of wax pasting equipment for the high-precision wax pasting technology can be met, the automation degree of the wax pasting process can be remarkably improved, manual intervention is reduced, and production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing, in particular to a constant pressure feeding device and wax applying equipment. Background Art

[0002] In the silicon carbide ingot processing process, laser slicing technology is a new method for producing silicon carbide wafers, which is expected to replace the traditional diamond wire saw slicing process. In a dry environment, laser slicing technology focuses a pulsed laser on a cutting surface parallel to the base surface. The local transient high temperature produces a high density of dislocations, forming a very thin (<50μm) modified layer mixed with amorphous silicon, amorphous carbon, and amorphous silicon carbide. In the modified layer, the molecular bonding of the material is destroyed and the connection between the materials is weakened. It is then split into two and peeled off to prepare for the next grinding operation. Based on the processing quality requirements of silicon carbide wafers, fixed fixtures are required to support and fix workpieces such as ingots or wafers to assist in processing. At this time, paraffin wax is needed to bond the workpiece and the fixed fixture.

[0003] The Chinese patent with authorization announcement number CN115410979B recently applied for by the applicant discloses a method for stripping wafers, which uses a stripping device to complete the loading, clamping, fixing and stripping steps; the stripping device includes a workbench, a linear drive module, a constant pressure adjustment mechanism, a pair of temperature control clamps, and a control module; the constant pressure adjustment mechanism includes a pressure detection module and a linear bearing arranged at the output end of the linear drive module, and an abutment rod slidably penetrated on the linear bearing, the pressure detection module is electrically connected to the control module, one end of the abutment rod abuts against the detection end of the pressure detection module, and the other end is connected to one of the temperature control clamps.

[0004] During the subsequent research and development process, the applicant converted the above-mentioned stripping device to a waxing device. This pair of temperature-controlled fixtures was used to install the workpiece and the fixed fixture, respectively, to complete the waxing fixation between the workpiece and the fixed fixture. During the waxing process, the applicant found that the above-mentioned constant pressure regulating mechanism could only complete the constant pressure feeding of the linear drive module, but could not complete the precise adjustment of the pressure at the temperature-controlled fixture, which resulted in fluctuations in the contact pressure between the workpiece and the fixed fixture, and in turn, caused the waxing thickness to be inconsistent between a batch of workpieces, affecting the accuracy and quality of subsequent processing. In addition, the adjustment range of the above-mentioned constant pressure regulating mechanism is limited, and it cannot adapt to workpieces of different thicknesses and materials, resulting in unstable waxing effects. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the first purpose of the present invention is to provide a constant pressure feeding device, which can accurately control the pressure between the temperature control clamps through bidirectional pressure regulation, and thus accurately control the thickness of the wax layer.

[0006] The second object of the present utility model is to provide a waxing device, which has the advantage of accurately controlling the thickness of the wax layer.

[0007] To achieve the above first object, the present utility model provides the following technical solutions:

[0008] A constant-pressure feeding device, comprising a base, a first temperature-controlled fixture and at least two first linear driving members arranged on the base, a guiding frame mounted on the moving ends of the at least two first linear driving members, a second linear driving member arranged on the guiding frame, a sliding frame slidably connected to the guiding frame and arranged on the moving end of the second linear driving member, and a second temperature-controlled fixture arranged on the sliding frame.

[0009] By adopting the above technical solutions, the base, the guiding frame and the sliding frame form an integral frame structure, and the first temperature-controlled fixture sequentially supports and fixes the fixing tooling, the binder and the workpiece. Preferably, the first temperature-controlled fixture and the second temperature-controlled fixture can fix the fixing tooling and the workpiece by means of vacuum adsorption or jaw clamping. During feeding, mainly the second linear driving member generates a downward pressing driving force on the second temperature-controlled fixture, and at least two first linear driving members are supplemented to generate an upward floating adjusting force on the second temperature-controlled fixture. At this time, the pressure between the fixing tooling and the workpiece is the weight of the sliding frame, the second temperature-controlled fixture and the workpiece, plus the driving force of the second linear driving member, and minus the adjusting force of the first linear driving member. Thus, the precise adjustment of the pressure at the first temperature-controlled fixture and the second temperature-controlled fixture can be completed through the dual-driving structure, and then the thickness of the wax layer can be accurately controlled, realizing that the thickness of the wax layer is controlled within 10-300 μm, and the change in the thickness of the wax layer is small, ensuring that the TTV of the wax layer after bonding is within 100 μm, preferably within 30 μm. Then, through the temperature adjustment of the first temperature-controlled fixture and the second temperature-controlled fixture, heat or cold is conducted from the fixing tooling and the workpiece to the binder, so that the binder is bonded and fixed to form a wax layer.

[0010] The present utility model is further provided that: a clamping groove for fitting with the workpiece or the fixing tooling is formed on the surface of the first temperature-controlled fixture.

[0011] By adopting the above technical solutions, it is convenient to install the fixing tooling.

[0012] The present utility model is further provided that: the first temperature-controlled fixture is installed on the base through a plurality of leveling fasteners, and the second temperature-controlled fixture is installed on the sliding frame through a plurality of leveling fasteners.

[0013] By adopting the above technical solutions, the leveling fasteners are set as a bolt and nut combination structure, and mainly the precise leveling of the first temperature-controlled fixture and the second temperature-controlled fixture is realized by adjusting the rotation of the bolts, ensuring that the contact surface between the workpiece and the fixing tooling is flat, thereby improving the uniformity of the wax layer.

[0014] The present utility model is further configured as: further comprising a temperature controller and a first relay, the temperature controller and the first relay are respectively electrically connected to the first temperature control jig and the second temperature control jig.

[0015] By adopting the above technical solution, the temperature controller preferably adopts a temperature control instrument, which can monitor and adjust the temperatures of the first temperature control jig and the second temperature control jig in real time, ensuring that the temperature of the binder remains in the optimal state during the wax application process, thereby improving the bonding effect and stability of the wax layer; the first relay is used to control the power on and off of the first temperature control jig and the second temperature control jig, ensuring the safe operation of the equipment.

[0016] The present utility model is further configured as: further comprising a cooling fan and a second relay, the cooling fan is installed on the base in a manner that the air outlet faces the first temperature control jig, and the temperature controller and the second relay are respectively electrically connected to the cooling fan.

[0017] By adopting the above technical solution, the setting of the cooling fan can effectively reduce the heat generated by the temperature control jig during long-term operation, preventing the temperature from being too high and affecting the performance of the binder and the wax application effect; the second relay is used to control the start and stop of the cooling fan, ensuring that the cooling fan is started in time when the temperature of the temperature control jig is too high and stops working when the temperature is appropriate, thereby achieving the purpose of energy saving and extending the service life of the equipment; in addition, the cooling fan can also quickly take away heat during the cooling and solidification stage of the binder, accelerating the cooling process and reducing the time required for the binder to cool and solidify.

[0018] The present utility model is further configured as: the first linear driving member and the second linear driving member are each independently configured as a cylinder, a hydraulic cylinder, a linear motor module or an electric push rod.

[0019] By adopting the above technical solution, a suitable driving method can be selected according to actual application requirements to achieve precise displacement control and pressure regulation; cylinders and hydraulic cylinders are suitable for occasions where a large driving force is required, while linear motor modules and electric push rods are suitable for occasions where fast response and high-precision control are required; by flexibly selecting the driving method, different workpiece and process requirements can be met, improving the applicability and efficiency of the wax application equipment.

[0020] The present utility model is further configured as: the first linear driving member and the second linear driving member are each independently configured as a cylinder with a precision pressure reducing valve.

[0021] By adopting the above technical solutions, the precision pressure reducing valve can finely adjust the output pressure of the cylinder, ensuring stable and accurate pressure output under different working conditions; through the adjustment of the precision pressure reducing valve, it can effectively avoid the instability of the contact pressure between the workpiece and the fixed tooling caused by pressure fluctuations, thereby ensuring the consistency of the wax layer thickness; in addition, the setting of the precision pressure reducing valve can also reduce the noise during the operation of the equipment and improve the comfort of the operating environment.

[0022] The present utility model is further configured as: the guide frame is floatingly connected to the moving ends of the at least two first linear driving members.

[0023] By adopting the above technical solutions, the guide frame is floatingly connected to the moving ends of at least two first linear driving members, which can ensure that the guide frame can maintain stability and balance when subjected to forces in different directions; this floating connection method enables the guide frame to flexibly adjust its position within a certain limit when subjected to the downward pressure of the second linear driving member and the upward adjustment force of the first linear driving member, thereby achieving precise control of the second temperature control fixture; at the same time, the floating connection structure can absorb part of the vibration and impact, reduce potential damage to the workpiece and the fixed tooling, and further improve the stability and reliability of the wax application process.

[0024] The present utility model is further configured as: further comprising a safety light curtain, the safety light curtain is installed on the base in a manner that the detection end faces the second temperature control fixture, and the safety light curtain is electrically connected to the second linear driving member.

[0025] By adopting the above technical solutions, the setting of the safety light curtain can effectively prevent operators from accidentally entering the dangerous area during the operation of the equipment, ensuring the safety of operators; when an obstacle is detected entering the detection area of the second temperature control fixture, the safety light curtain will immediately send a signal to trigger the second linear driving member to stop working, thereby avoiding possible accidents; in addition, the setting of the safety light curtain can also improve the automation level of the equipment, reduce manual intervention, and improve production efficiency.

[0026] To achieve the second object above, the present utility model provides the following technical solutions:

[0027] A wax application device, comprising the above constant pressure feeding device.

[0028] By adopting the above technical solutions, the wax application device can achieve uniform heating and rapid cooling of the paraffin on the surface of the workpiece, thereby improving the wax application efficiency and quality. The first temperature control fixture and the second temperature control fixture respectively ensure the uniform distribution and rapid curing of the paraffin on the surface of the workpiece through the combined use of heat and cold, avoiding the problem of inconsistent wax layer thickness caused by uneven temperature.

[0029] In summary, the beneficial technical effects of the present utility model are:

[0030] 1. By precisely controlling the temperature and pressure of the temperature-controlled fixture, high-precision adjustment of the wax layer thickness is achieved, thus ensuring the stability and reliability of the wax application process;

[0031] 2. By adopting a dual-drive mode and a precision pressure reducing valve, the applicability and efficiency of the equipment are improved, meeting the requirements of different workpieces and processes;

[0032] 3. By setting up a safety grating and a floating connection structure, the safety of the operator and the stability of the equipment are improved, reducing potential damage;

[0033] 4. By real-time monitoring and adjusting the temperature of the temperature-controlled fixture, the optimal state of the binder is ensured, improving the bonding effect and stability of the wax layer;

[0034] 5. By setting up a cooling fan and a second relay, the heat generated by the temperature-controlled fixture during long-term operation is effectively reduced, achieving uniform heating and rapid cooling of the paraffin on the workpiece surface, and improving the wax application efficiency and quality. Description of the Drawings

[0035] Figure 1 is a schematic structural diagram of the wax application equipment of the present utility model.

[0036] Figure 2 is a schematic structural diagram of the wax application equipment of the present utility model.

[0037] Figure 3 is a schematic diagram of the connection relationship between the first temperature-controlled fixture, the first linear drive member, the second temperature-controlled fixture, and the second linear drive member of the present utility model.

[0038] Figure 4 is a schematic diagram of the connection relationship between the first temperature-controlled fixture and the leveling fastener of the present utility model.

[0039] In the figure, 1, frame; 2, control unit; 21, safety grating; 22, temperature controller; 23, first relay; 24, cooling fan; 25, second relay; 3, base; 4, first temperature-controlled fixture; 41, card slot; 5, first linear drive member; 6, guide frame; 7, second linear drive member; 8, sliding frame; 9, second temperature-controlled fixture; 10, leveling fastener. Detailed Embodiments

[0040] In order to make the technical means, creative features, achieved purposes, and functions of the present utility model clearer and easier to understand, the present utility model will be further described below in conjunction with the drawings and specific embodiments.

[0041] Refer to Figure 1, a wax pasting device disclosed by the present utility model, includes a frame 1 and a constant pressure feeding device disposed on the frame 1. Refer to Figure 2 and Figure 3 , wherein, the constant pressure feeding device includes a control unit 2, a base 3 disposed on the frame 1, a first temperature control clamp 4 and three first linear driving members 5 disposed on the base 3, a clamping groove 41 opened on the surface of the first temperature control clamp 4 and engaged with a workpiece or a fixing tooling, a guiding frame 6 floatingly connected to the moving ends of the three first linear driving members 5, a second linear driving member 7 disposed on the guiding frame 6, a sliding frame 8 slidably connected to the guiding frame 6 and disposed on the moving end of the second linear driving member 7, and a second temperature control clamp 9 disposed on the sliding frame 8.

[0042] The base 3, the guiding frame 6 and the sliding frame 8 form an integral frame structure, and the fixing tooling, the adhesive and the workpiece are sequentially supported by the first temperature control clamp 4. During feeding, the second linear driving member 7 mainly generates a downward pressing driving force on the second temperature control clamp 9, and at least two first linear driving members 5 assist in generating an upward floating adjusting force on the second temperature control clamp 9. At this time, the pressure between the fixing tooling and the workpiece is the weight of the sliding frame 8, the second temperature control clamp 9 and the workpiece, plus the driving force of the second linear driving member 7, and minus the adjusting force of the first linear driving member 5. Thus, the precise adjustment of the pressure at the first temperature control clamp 4 and the second temperature control clamp 9 can be completed through the dual-driving structure, and further the thickness of the wax layer can be precisely controlled, realizing that the thickness of the wax layer is controlled within 10 - 300 μm, and the change in the thickness of the wax layer is small, ensuring that the TTV of the wax layer after bonding is within 100 μm, preferably within 30 μm. Then, through the temperature adjustment of the first temperature control clamp 4 and the second temperature control clamp 9, the adhesive is bonded and fixed to form a wax layer.

[0043] In addition, the guiding frame 6 is floatingly connected to the moving ends of at least two first linear driving members 5, which can ensure that the guiding frame 6 can maintain stability and balance when subjected to forces in different directions; this floating connection method enables the guiding frame 6 to flexibly adjust its position within a certain limit when subjected to the downward pressure of the second linear driving member 7 and the upward floating adjusting force of the first linear driving member 5, so as to realize the precise control of the second temperature control clamp 9; at the same time, the floating connection structure can absorb part of the vibration and impact, reduce the potential damage to the workpiece and the fixing tooling, and further improve the stability and reliability of the wax pasting process.

[0044] Refer to Figure 2, the control unit 2 includes a safety light curtain 21, a temperature controller 22, a first relay 23, a cooling fan 24 and a second relay 25. Among them, the safety light curtain 21 is installed on the base 3 in a way that the detection end faces the second temperature control fixture 9, and the safety light curtain 21 is electrically connected to the second linear drive 7; the temperature controller 22 and the first relay 23 are respectively electrically connected to the first temperature control fixture 4 and the second temperature control fixture 9; the cooling fan 24 is installed on the base 3 in a way that the air outlet faces the first temperature control fixture 4, and the temperature controller 22 and the second relay 25 are respectively electrically connected to the cooling fan 24.

[0045] The setting of the safety light curtain 21 can effectively prevent operators from accidentally entering the dangerous area during the operation of the equipment, ensuring the safety of the operators; when an obstacle is detected entering the detection area of the second temperature control fixture 9, the safety light curtain 21 will immediately send a signal to trigger the second linear drive 7 to stop working, thus avoiding possible accidents; in addition, the setting of the safety light curtain 21 can also improve the automation level of the equipment, reduce manual intervention and improve production efficiency. The temperature controller 22 preferably adopts a temperature control instrument, which can monitor and adjust the temperatures of the first temperature control fixture 4 and the second temperature control fixture 9 in real time, ensuring that the temperature of the adhesive remains in the optimal state during the wax application process, thereby improving the bonding effect and stability of the wax layer; the first relay 23 is used to control the power on and off of the first temperature control fixture 4 and the second temperature control fixture 9 to ensure the equipment operates in a safe state. The setting of the cooling fan 24 can effectively reduce the heat generated by the temperature control fixture during long-term operation, preventing the temperature from being too high and affecting the performance of the adhesive and the wax application effect; the second relay 25 is used to control the start and stop of the cooling fan 24 to ensure that the cooling fan 24 is started in time when the temperature of the temperature control fixture is too high and stops working when the temperature is appropriate, so as to achieve the purpose of energy saving and extending the service life of the equipment; in addition, the cooling fan 24 can also quickly remove heat during the cooling and solidification stage of the adhesive, accelerating the cooling process and reducing the time required for the adhesive to cool and solidify.

[0046] To improve the adjustment accuracy of the wax layer thickness, the first linear drive 5 and the second linear drive 7 are each independently set as cylinders with precision pressure reducing valves. The precision pressure reducing valve can finely adjust the output pressure of the cylinder, ensuring a stable and precise pressure output under different working conditions; through the adjustment of the precision pressure reducing valve, it can effectively avoid the instability of the contact pressure between the workpiece and the fixed tooling caused by pressure fluctuations, thus ensuring the consistency of the wax layer thickness; in addition, the setting of the precision pressure reducing valve can also reduce the noise during the operation of the equipment and improve the comfort of the operating environment.

[0047] Refer to Figure 4, meanwhile, the first temperature control fixture 4 is installed on the base 3 through a plurality of leveling fasteners 10, and the second temperature control fixture 9 is installed on the sliding frame 8 through a plurality of leveling fasteners 10. The leveling fastener 10 is set as a combination structure of a bolt (not shown in the figure) and a nut, and mainly realizes the precise leveling of the first temperature control fixture 4 and the second temperature control fixture 9 by adjusting the rotation of the bolt, ensuring the flatness of the contact surface between the workpiece and the fixing tooling, thereby improving the uniformity of the wax layer.

[0048] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention, and they should all be covered within the scope of the claims of the present invention.

Claims

1. A constant pressure feeding device, characterized in that: It includes a base (3), a first temperature control fixture (4) disposed on the base (3), at least two first linear drive members (5), a guide frame (6) mounted on the moving ends of the at least two first linear drive members (5), a second linear drive member (7) disposed on the guide frame (6), a sliding frame (8) slidably connected to the guide frame (6) and disposed on the moving end of the second linear drive member (7), and a second temperature control fixture (9) disposed on the sliding frame (8).

2. The constant pressure feeding device according to claim 1, wherein: A slot (41) for engaging with a workpiece or a fixing fixture is formed on the surface of the first temperature control fixture (4).

3. The constant pressure feeding device according to claim 1, wherein: The first temperature control fixture (4) is mounted on the base (3) through a plurality of leveling fasteners (10), and the second temperature control fixture (9) is mounted on the sliding frame (8) through a plurality of leveling fasteners (10).

4. A constant pressure feeding device according to claim 1, characterized in that: It further includes a temperature controller (22) and a first relay (23), and the temperature controller (22) and the first relay (23) are electrically connected to the first temperature control fixture (4) and the second temperature control fixture (9) respectively.

5. A constant pressure feeding device according to claim 4, characterized in that: It further includes a cooling fan (24) and a second relay (25), the cooling fan (24) is mounted on the base (3) with its air outlet facing the first temperature control fixture (4), and the temperature controller (22) and the second relay (25) are electrically connected to the cooling fan (24) respectively.

6. The constant pressure feeding device according to claim 1, wherein: The first linear drive member (5) and the second linear drive member (7) are each independently set as a cylinder, a hydraulic cylinder, a linear motor module or an electric push rod.

7. The constant pressure feeding device according to claim 6, characterized in that: The first linear drive member (5) and the second linear drive member (7) are each independently set as a cylinder with a precision pressure reducing valve.

8. The constant pressure feeding device according to claim 6, characterized in that: The guide frame (6) is floatingly connected to the moving ends of the at least two first linear drive members (5).

9. The constant pressure feeding device according to claim 1, characterized in that: It further includes a safety light curtain (21), the safety light curtain (21) is mounted on the base (3) with its detection end facing the second temperature control fixture (9), and the safety light curtain (21) is electrically connected to the second linear drive member (7).

10. A waxing device, characterized in that: It includes a constant pressure feeding device according to any one of claims 1 to 9.

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