Pipeline cleaning device

Abstract

The utility model relates to the technical field of chip manufacturing, in particular to a pipeline cleaning device which comprises a lavage connecting pipe, a first connector and a second connector are arranged at the two ends of the lavage connecting pipe respectively, a first exhaust channel and a first cleaning channel are arranged in the first connector, and the first exhaust channel is communicated with the lavage connecting pipe; a second exhaust channel and a second cleaning channel are arranged in the second connector, and the second exhaust channel is communicated with the lavage connecting pipe; the waste gas pipeline cleaning device has the advantages that the inside of the waste gas pipeline can be cleaned without disassembling the pipeline, manpower and time are saved, and safety is good.

Description

Technical Field

[0001] The utility model relates to the technical field of chip manufacturing, in particular to a pipeline cleaning device. Background Art

[0002] In the process of chip manufacturing, after the deposition step, the wafer is coated with a photosensitive material, photoresist, and the designed circuit pattern is transferred to the wafer through photolithography technology. Then, through steps such as etching and ion implantation, the circuit pattern is further processed into components with specific functions such as transistors, which is the so-called photolithography and etching. In this process, on the one hand, some high-risk and high-concentration chemicals are often used, such as solvents or other acid-base substances like cleaning agents, resists, stripping solutions, etc. On the other hand, the purity of the light source required in the photolithography process is very high. When purifying the light beam, a vacuum chamber is used to pump away gas molecules and other impurities in the light beam to reduce the scattering and absorption of the light beam. Therefore, the by-product materials generated by these chemicals, such as waste chemicals, waste gas, and the impurity part in the light beam, need to be discharged downward to the waste gas treatment equipment (such as gas purification equipment, scrubbers, etc.) through a dry pump (responsible for vacuum pumping of the pipeline) and multiple waste gas discharge pipelines (Pumpingline), and then discharged to the atmosphere through equipment such as an acid discharge scrubber and an acid-base exhaust fan.

[0003] Over time, chemical waste gas particles and impurities contained in the light beam will accumulate on the inner wall of the waste gas discharge pipeline, gradually blocking the exhaust passage and affecting the discharge efficiency. Therefore, it is necessary to regularly disassemble the pipeline for cleaning. However, disassembling the discharge pipeline is not only time-consuming and laborious, but also the residual waste gas, waste residue on the pipeline wall, etc. may have an adverse impact on the health of maintenance personnel during the disassembly process.

[0004] Therefore, how to efficiently and safely clean the Pumpingline waste gas discharge pipeline used in the chip manufacturing process has become a problem to be solved. Summary of the Utility Model

[0005] To solve the problems that when cleaning the waste gas discharge pipelines of equipment such as lithography machines and etching machines in the prior art, it is necessary to disassemble the pipelines, which is not only time-consuming and laborious, but also there are problems adverse to personal health during the maintenance process, the utility model provides a pipeline cleaning device, which has the characteristics of being able to flush the inside of the waste gas pipeline without disassembling the pipeline, saving manpower, time, and having good safety.

[0006] To achieve the above object, the utility model provides the following technical solutions:

[0007] A pipeline cleaning device includes a flushing connecting pipe. The two ends of the flushing connecting pipe are respectively provided with a first connector and a second connector. A first exhaust passage and a first cleaning passage are provided inside the first connector, and the first exhaust passage is communicated with the flushing connecting pipe; a second exhaust passage and a second cleaning passage are provided inside the second connector, and the second exhaust passage is communicated with the flushing connecting pipe; the first cleaning passage and the second cleaning passage are communicated through a cleaning connecting pipe.

[0008] Further, the first exhaust passage on the first connector includes through holes that are vertically offset and communicated; the first cleaning passage includes side holes and bottom holes located on the side and bottom surfaces of the first connector, and the side holes and the bottom holes are communicated with each other.

[0009] Further, the second connector includes an outer cylinder and an inner cylinder with openings at the bottom. The inner cylinder is arranged inside the outer cylinder, and there is a gap between the outer wall of the inner cylinder and the inner wall of the outer cylinder; the second exhaust passage penetrates through the outer cylinder and the inner cylinder, the second cleaning passage penetrates through the outer cylinder and is communicated with the above-mentioned gap, one end of the cleaning connecting pipe is communicated with the first cleaning passage, and the other end is communicated with the above-mentioned gap.

[0010] Further, a water equalizing sleeve is installed outside the inner cylinder, and the outer edge of the water equalizing sleeve is provided with a flanging that extends into the gap between the inner cylinder and the outer cylinder and has a spacing from the inner wall of the outer cylinder.

[0011] Further, an air supplementing pipe is also connected to the upper part of the first connector. The pipe wall of the air supplementing pipe is provided with a first air supplementing hole extending upward, and the bottom of the first air supplementing hole is provided with a second air supplementing hole that penetrates the side wall of the air supplementing pipe and is communicated with the first air supplementing hole.

[0012] Further, the first connector and the connecting pipe are connected through a flange. The outside of the flange is fixed by a hoop pipe clamp, and a sealing ring is sleeved between the flanges.

[0013] Further, the flushing connecting pipe is a transparent pipe body.

[0014] Further, a lighting device is also installed on the flushing connecting pipe.

[0015] The beneficial effects of the present utility model are as follows: 1. When flushing the exhaust gas discharge pipeline, close the bottom channel of the exhaust gas discharge pipeline, install one end of the second connector of the flushing connecting pipe on the upper interface of the exhaust gas discharge pipeline, and then inject water, liquid medicine, etc. into the exhaust gas discharge pipeline below through the first cleaning passage to carry out a neutralization reaction on the chemical drug crystals formed by the residual exhaust gas particles on the inner wall of the exhaust gas discharge pipeline and flush the inner pipe wall; after flushing, open the bottom channel of the exhaust gas discharge pipeline to discharge the reaction waste water.

[0016] 2. Connect the first exhaust passage of the first connector to the HV exhaust pipeline. To prevent the formation of negative pressure in the waste gas discharge pipeline and the flushing connecting pipe during the air extraction process, a supplementary air pipeline is also connected to the outside of the first connector. During the flushing process, when there is reaction waste gas in the pipeline, the waste gas generated by the reaction is drawn upward by the HV exhaust pipeline through the waste gas discharge pipeline, the second exhaust passage, and the first exhaust passage, and is discharged to the atmosphere after purification treatment. When there is no reaction waste gas in the pipeline, the HV exhaust pipeline can also be used for air extraction to drain the moisture on the inner wall of the waste gas discharge pipeline. It is precisely due to the existence of the supplementary air pipeline that the HV exhaust pipeline and the supplementary air pipeline can be connected and sealed, preventing the HV exhaust pipeline from sucking up the reaction wastewater, thus avoiding the reaction wastewater dripping onto the machine equipment beside the waste gas discharge pipeline, preventing corrosion of the surface of the machine equipment, and avoiding the entry of wastewater into the machine interior and causing equipment failures.

[0017] 3. At the interface connected to the waste gas discharge pipeline, when flushing is not required, the cleaning passage can be closed, which does not affect the normal downward discharge of waste gas from the waste gas discharge pipeline. It has the characteristics of being able to flush the inside of the waste gas pipeline without disassembling the pipeline, saving manpower, time, and having good safety.

[0018] 4. To prevent the water and liquid medicine levels injected into the waste gas discharge pipeline from continuously rising and overflowing from the top of the flushing connecting pipe, a lighting device is also provided at the flushing connecting pipe. When the liquid level reaches the inside of the flushing connecting pipe, the staff can close the valve on the first cleaning passage; if the valve fails, since the valve uses a self-closing quick-connect male and female head, after pulling out the valve plug, the valve core automatically closes, and the injection of flushing can be stopped; it has a dual closing function. Description of the Drawings

[0019] Appendix Figure 1 is the overall structural schematic diagram of the flushing device in the present utility model;

[0020] Appendix Figure 2 is the sectional view of the flushing device in the present utility model;

[0021] Appendix Figure 3 is an exploded structural schematic diagram of the flushing device in the present utility model;

[0022] Appendix Figure 4 is another exploded structural schematic diagram of the flushing device in the present utility model;

[0023] Appendix Figure 5 is the structural diagram of the first connector of the flushing device in the present utility model;

[0024] Appendix Figure 6 is the structural diagram of the second connector of the flushing device in the present utility model;

[0025] Appendix Figure 7This is the structural diagram of the hoop pipe clamp in the present utility model;

[0026] Appendix Figure 8 This is the sectional structural diagram of the air supply pipeline;

[0027] In the figure: 1. Flushing connecting pipe; 2. First connector; 3. Second connector; 4. First exhaust channel; 5. First cleaning channel; 6. Second exhaust channel; 7. Second cleaning channel; 8. Cleaning connecting pipe; 301. Outer cylinder; 302. Inner cylinder; 303. Gap; 9. Water equalizing sleeve; 10. Flange; 201. Through hole; 203. Side hole; 204. Bottom hole; 11. Air supply pipeline; 12. First air supply hole; 13. Second air supply hole; 14. Lighting device; 15. Flange plate; 16. Sealing ring; 17. Valve; 18. Hoop pipe clamp; 19. Flange adapter; 20. Threaded sleeve; 21. Bellows; 22. HV exhaust pipeline; 23. Fluorescent part. Specific embodiments

[0028] The following further describes a pipeline cleaning device of the present utility model in conjunction with specific embodiments.

[0029] As Figure 1 , 2 , shown in Figure 3, a pipeline cleaning device includes a flushing connecting pipe 1. The two ends of the flushing connecting pipe 1 are respectively provided with a first connector 2 and a second connector 3. The first connector 2 is internally provided with a first exhaust channel 4 and a first cleaning channel 5, and the first exhaust channel 4 is communicated with the flushing connecting pipe 1; the second connector 3 is internally provided with a second exhaust channel 6 and a second cleaning channel 7, and the second exhaust channel 6 is communicated with the flushing connecting pipe 1; the first cleaning channel 5 and the second cleaning channel 7 are communicated through a cleaning connecting pipe 8.

[0030] One end of the second connector of this device is installed on the interface of the waste gas discharge pipeline. Among them, the first exhaust channel 4 of the first connector 2 is communicated with the HV exhaust pipeline 22, and the first cleaning channel 5 is communicated with the flushing connecting pipe 1; among them, the HV exhaust pipeline 22 is usually composed of a vacuum pump, an exhaust pipeline, a filter, etc., which can extract the gas inside the lithography machine and filter out the harmful substances through the filter, and finally discharge the clean gas into the external environment.

[0031] Specifically, the flushing connecting pipe 1 is made of acrylic material. Flange plates 15 integrally formed can be provided at both ends of the first connector 2. A flange adapter 19 is installed on the flushing connecting pipe 1. A sealing ring 16 is sleeved between the flange plate 15 at the end of the first connector 2 and the flange adapter 19, and the flange plate 15 at the end of the first connector 2 and the flange adapter 19 are fixed by a hoop pipe clamp 18 on the outside. The flange adapter 19 is threadedly connected inside the flushing connecting pipe 1.

[0032] In other embodiments, the flange adapter 19 can also be installed inside the lavage connecting pipe 1 through a threaded sleeve 20. The inner part of the threaded sleeve 20 is provided with an internal thread that matches the external thread at one end of the flange adapter 19. The inner wall of the end of the lavage connecting pipe 1 is provided with a mounting base that matches the size of the threaded sleeve 20. The threaded sleeve 20 is installed at the end of the lavage connecting pipe 1 through interference fit or bonding.

[0033] In other embodiments, a flange plate 15 can also be provided at the end of the lavage connecting pipe 1. After adding a sealing ring 16 between the flange plates 15 of the first connector 2, it is fixed with a hoop pipe clamp 18. The second connector 3 is connected to the bottom of the lavage cleaning pipe through a thread.

[0034] The second connector 3 is threadedly connected to the inner wall of the lavage connecting pipe 1, or is installed at the bottom of the lavage connecting pipe 1 by means of bonding, interference fit, etc. A flange adapter 19 is installed at the bottom of the lavage connecting pipe 1. Specifically, the upper part of the flange adapter 19 is provided with a thread that matches the bottom of the lavage connecting pipe 1, and the lower part is provided with a flange. The flange plate 15 here is connected to the flange at the upper part of the corrugated pipe 21 through a hoop pipe clamp 18. The flange at the lower part of the corrugated pipe 21 is connected to the interface of the exhaust gas discharge pipeline through a hoop pipe clamp 18.

[0035] During lavage, the bottom of the exhaust gas discharge pipeline is closed. By injecting water, liquid medicine, etc. into the first cleaning channel 5, the water, liquid medicine, etc. are communicated with the second cleaning channel 7 at the bottom of the lavage connecting pipe 1 through the cleaning connecting pipe 8. The water and liquid medicine flow out through the second cleaning channel 7, so as to neutralize and wash the crystals formed by the residual chemical medicine exhaust gas particles inside the wall of the exhaust gas discharge pipeline at the bottom of the lavage connecting pipe 1. After the flushing is completed, the bottom channel of the exhaust gas discharge pipeline is opened again to discharge the reaction waste water.

[0036] As Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 8 shown, the inner wall of the air supply pipeline 11 is provided with a first air supply hole 12 extending upward. The bottom of the first air supply hole 12 is provided with a second air supply hole 13 that penetrates the side wall of the air supply pipeline 11 and is communicated with the first air supply hole 12.

[0037] Specifically, in this embodiment, the number of the first air supply holes 12 and the second air supply holes 13 are both 4, and they are evenly distributed on the outer wall of the air supply pipeline 11. When this equipment is in use, the pipeline of the HV exhaust pipeline 22 can be sleeved on the top of the air supply pipeline 11, and the second air supply hole 13 is exposed and communicated with the clean air source, so that the pipeline of the HV exhaust pipeline 22 is communicated with the inside of the first exhaust channel 4, the lavage connecting pipe 1, the second exhaust channel 6, and the exhaust gas discharge pipeline at the bottom of the lavage connecting pipe 1.

[0038] On the one hand, during the flushing process, the water and liquid medicine used for flushing react chemically with the residues on the pipe wall to produce excess reaction gas. The reaction gas can be promptly pumped upward through the HV exhaust pipe and discharged into the atmosphere after being purified by exhaust gas treatment equipment. When there is no or only a small amount of reaction gas, in order to prevent the formation of negative pressure in the pipe during the HV exhaust pipe exhaust process, in this embodiment, clean air is also added to the HV exhaust pipe 22 through the air supply hole. On the other hand, after the flushing is completed, the inside of the exhaust gas discharge pipe is in a wet state. After flushing, it is necessary to continue to use the HV exhaust pipe to pump air upward to drain the moisture on the pipe wall. At the same time, the first air supply hole 12 and the second air supply hole 13 continue to supply air to the HV exhaust pipe. It is precisely because of the existence of the air supply pipe 11 that the HV exhaust pipe 22 and the air supply pipe 11 can be connected and sealed, which can prevent the HV exhaust pipe 22 from pumping the reaction wastewater upward, thereby preventing the reaction wastewater from dripping onto the machine equipment next to the exhaust gas discharge pipeline, avoiding corrosion of the machine equipment surface, and preventing wastewater from entering the interior of the machine and causing equipment failure.

[0039] like Figure 5 As shown, the first exhaust channel 4 on the first connector includes vertically offset, interconnected through-holes 201. The first cleaning channel 5 includes side holes 203 and bottom holes 204 located on the side and bottom surfaces of the first connector 2. The side holes 203 and bottom holes 204 are interconnected. In this embodiment, the side holes 203 on the first cleaning channel 5 are used to install valves 17 for flushing the exhaust gas discharge pipeline. Through valve 17, water, liquid chemicals, or high-purity air can be injected into the flushing pipeline of the flushing connecting pipe 1. When the exhaust gas discharge pipeline is not needed for flushing, valve 17 can be closed to prevent exhaust gas from flowing in.

[0040] The valve 17 is connected to the side hole 203 by a thread to facilitate installation and replacement. The bottom hole 204 is used to connect to the cleaning connecting pipe 8. In this embodiment, a pipe joint is used to connect the bottom hole 204 to the cleaning connecting pipe 8; the upper part of the pipe joint is connected to the inside of the bottom hole 204 by a thread, and the lower part is fixed to the upper end of the cleaning connecting pipe 8 by the external convex groove. In this embodiment, the valve 17 adopts a self-closing quick-plug male and female connector, and the specific model is but not limited to the Peret push-pull carbon steel high-pressure quick connector. When the liquid level reaches the inside of the irrigation connecting pipe, the staff can close the valve on the first washing channel 5 to stop the irrigation; if the valve fails, since the valve adopts a self-closing quick-plug male and female connector, after unplugging the valve plug, the male valve core of the irrigation end automatically closes, and the injection irrigation can be stopped; it has a double closing function.

[0041] like Figure 2 、 Figure 6As shown, the second connector 3 includes an outer cylinder 301 and an inner cylinder 302 both with openings at the bottom. The inner cylinder 302 is arranged inside the outer cylinder 301, and there is a gap 303 between the outer wall of the inner cylinder 302 and the inner wall of the outer cylinder 301. One end of the cleaning connecting pipe 8 communicates with the first cleaning channel 5, and the other end communicates with the above-mentioned gap 303. The second exhaust channel 6 penetrates through the outer cylinder 301 and the inner cylinder 302 for passing reaction waste gas. The second cleaning channel 7 penetrates through the outer cylinder 301. One end of the second cleaning channel 7 communicates with the cleaning connecting pipe 8, and the other end communicates with the above-mentioned gap 303, so as to wash the inner wall of the waste gas exhaust pipe at the lower part of the flushing connecting pipe 1 with water and liquid medicine for flushing along the side wall of the inner cylinder 302 and the above-mentioned gap 303. The water flows out from the outer side wall of the inner cylinder 302, and it can also reduce the backflow phenomenon caused by the air extraction of the upper HV exhaust pipe.

[0042] A water equalizing sleeve 9 is installed outside the inner cylinder 302. The outer edge of the water equalizing sleeve 9 is provided with a flanging 10 extending into the gap 303 between the inner cylinder 302 and the outer cylinder 301 and having a distance from the inner wall of the outer cylinder 301. The water and liquid medicine flowing downward from the second cleaning channel 7 flow out along the outer wall of the inner cylinder 302 and impact on the flanging 10 of the water equalizing sleeve 9, so that the water and liquid medicine can be evenly flushed downward along the edge of the flanging 10.

[0043] In this embodiment, as Figure 2 shown, the water equalizing sleeve 9 can be threadedly connected to the inner cylinder 302. The flushing connecting pipe 1 is a transparent pipe body, and specifically, it can be made of acrylic material to facilitate the staff to observe the liquid level inside the flushing connecting pipe 1. When the cleaning waste water liquid level enters the inside of the flushing connecting pipe 1, it will affect the flushing effect. The staff can connect the waste gas exhaust pipeline with the waste gas treatment equipment in time to discharge the waste water and lower the liquid level.

[0044] As Figure 4 shown, in order to facilitate observing the liquid level position in a dim light environment, a lighting device 14 is also installed on the flushing connecting pipe 1. The lighting device 14 can adopt light emitting diodes or light emitting strips, and is fixed on the outer wall of the flushing connecting pipe 1 by bundling or embedding. In other embodiments, a fluorescent part 23 is sleeved on the cleaning connecting pipe 8.

[0045] The purity of the light source required in the lithography process is very high. When purifying the light beam, a vacuum chamber is used to pump away gas molecules and other impurities in the light beam to reduce the scattering and absorption of the light beam. This equipment can also flush this type of waste gas discharge pipeline. During the flushing process, ultra-clean air is used to flush and clean the waste gas discharge pipeline used by the lithography machine downward through the first cleaning pipeline, the cleaning connecting pipe 8, and the second cleaning pipeline.

Claims

1. A pipeline cleaning device, characterized in that, It includes a lavage connecting pipe (1). The two ends of the lavage connecting pipe (1) are respectively provided with a first connector (2) and a second connector (3). A first exhaust channel (4) and a first cleaning channel (5) are arranged inside the first connector (2). The first exhaust channel (4) is communicated with the lavage connecting pipe (1). A second exhaust channel (6) and a second cleaning channel (7) are arranged inside the second connector (3). The second exhaust channel (6) is communicated with the lavage connecting pipe (1). The first cleaning channel (5) and the second cleaning channel (7) are communicated through a cleaning connecting pipe (8).

2. The pipeline cleaning device according to claim 1, characterized in that, The first exhaust channel (4) on the first connector includes through holes (201) that are vertically offset and communicated. The first cleaning channel (5) includes side holes (203) and bottom holes (204) located on the side and bottom of the first connector (2). The side holes (203) and the bottom holes (204) are communicated with each other.

3. The pipeline cleaning device according to claim 1 or 2, characterized in that, The second connector (3) includes an outer cylinder (301) and an inner cylinder (302) both with openings at the bottom. The inner cylinder (302) is arranged inside the outer cylinder (301), and there is a gap (303) between the outer wall of the inner cylinder (302) and the inner wall of the outer cylinder (301). The second exhaust channel (6) runs through the outer cylinder (301) and the inner cylinder (302). The second cleaning channel (7) runs through the outer cylinder (301) and is communicated with the above-mentioned gap (303). One end of the cleaning connecting pipe (8) is communicated with the first cleaning channel (5), and the other end is communicated with the above-mentioned gap (303).

4. The pipeline cleaning device according to claim 3, characterized in that, A water equalizing sleeve (9) is installed on the outside of the inner cylinder (302). The outer edge of the water equalizing sleeve (9) is provided with a flange (10) that extends into the gap (303) between the inner cylinder (302) and the outer cylinder (301) and has a spacing from the inner wall of the outer cylinder (301).

5. The pipeline cleaning device according to claim 1, 2 or 4, characterized in that, An air supplement pipe (11) is also connected to the upper part of the first connector (2).

6. The pipeline cleaning device according to claim 3, characterized in that, An air supplement pipe (11) is also connected to the upper part of the first connector (2).

7. The pipeline cleaning device according to claim 5, characterized in that, A first air supplement hole (12) extending upward is arranged inside the pipe wall of the air supplement pipe (11). The bottom of the first air supplement hole (12) is provided with a second air supplement hole (13) that penetrates the side wall of the air supplement pipe (11) and is communicated with the first air supplement hole (12).

8. The pipeline cleaning device according to claim 6, wherein, A first air supplement hole (12) extending upward is arranged inside the pipe wall of the air supplement pipe (11). The bottom of the first air supplement hole (12) is provided with a second air supplement hole (13) that penetrates the side wall of the air supplement pipe (11).

9. The pipeline cleaning device according to claim 1, 2, 4, 6, 7 or 8, characterized in that, The lavage connecting pipe (1) is a transparent pipe body.

10. The pipeline cleaning device according to claim 9, characterized in that, A lighting device (14) is also installed on the lavage connecting pipe (1).

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