Conveying equipment and cleaning system

Abstract

The utility model discloses a conveying device. The conveying equipment comprises a conveying mechanism and a plurality of supporting parts. The multiple supporting parts are arranged outside the conveying mechanism in a surrounding mode and can move synchronously with the conveying mechanism, the second supporting part can bear a to-be-conveyed component, the first supporting part can abut against the to-be-conveyed component and push the to-be-conveyed component to move, and therefore the to-be-conveyed component can move in the conveying direction of the conveying mechanism. By arranging the supporting parts, direct contact between the conveying equipment and the to-be-conveyed component can be avoided, the first supporting parts abut against the to-be-conveyed component, relative movement between the to-be-conveyed component and the supporting parts can be reduced, and therefore the risk that the to-be-conveyed component is clamped by the conveying mechanism in the conveying process can be reduced; and the risk that the conveying equipment breaks down can be reduced.

Description

Technical Field

[0001] The present application relates to the field of transmission mechanisms, and particularly to a conveying device and a cleaning system. Background Art

[0002] A conveying device is a device used to move components to be transported.

[0003] Currently, the conveying device usually uses rollers to achieve the conveying function. Generally, the conveying device includes a plurality of rollers, and there is a gap between two adjacent rollers. The component to be transported is placed on some of the rollers, and the rotation of the rollers can drive the component to be transported to move.

[0004] However, during the conveying process, relative movement is likely to occur between the component to be transported and the rollers, so the component to be transported is likely to get stuck at the gap, which increases the risk of failure of the conveying device. Summary of the Utility Model

[0005] Embodiments of the present application provide a conveying device and a cleaning system. The technical solution is as follows:

[0006] According to one aspect of the present application, a conveying device is provided. The conveying device includes: a conveying mechanism and a plurality of supporting parts;

[0007] The plurality of supporting parts are distributed around the conveying mechanism, and each of the supporting parts is connected to the conveying mechanism. The conveying mechanism is used to drive the plurality of supporting parts to move synchronously;

[0008] The plurality of supporting parts include: at least one first supporting part and a plurality of second supporting parts. At least some of the plurality of second supporting parts are used to carry the component to be transported, and the first supporting part is used to abut against the component to be transported to apply a driving force to the component to be transported.

[0009] Optionally, the plurality of supporting parts include at least two of the first supporting parts; in the conveying direction of the conveying mechanism, a plurality of the second supporting parts are distributed between two adjacent first supporting parts, and the plurality of second supporting parts distributed between two adjacent first supporting parts are used to carry one component to be transported;

[0010] Wherein, after the plurality of second supporting parts carry the component to be transported, in the conveying direction, the first supporting part distributed on one side of the component to be transported is used to apply the driving force to the component to be transported, and the first supporting part distributed on the other side of the component to be transported is used to block the component to be transported.

[0011] Optionally, the first support portion includes: a support portion body and a first baffle. The support portion body is used to carry the component to be transported, and the first baffle is connected to an end of the support portion body. The first baffle is used to abut against the component to be transported after the support portion body carries the component to be transported.

[0012] Optionally, the structural shape of the support portion body is the same as that of the second support portion.

[0013] Optionally, the conveying mechanism includes: an annular conveying component and a plurality of connecting platforms fixed on the annular conveying component. The plurality of connecting platforms are distributed around the annular conveying component.

[0014] The plurality of support portions correspond to the plurality of connecting platforms one by one, and the support portion is detachably connected to the corresponding connecting platform.

[0015] Optionally, a limiting groove is provided on a side of the second support portion facing away from the corresponding connecting platform.

[0016] Wherein, after the second support portion carries the component to be transported, a part of the component to be transported is located in the limiting groove.

[0017] Optionally, the annular conveying component includes: two chains extending in a ring shape; the plurality of connecting platforms are all distributed between the two chains, and each connecting platform is connected to the two chains.

[0018] Optionally, the annular conveying component further includes: a driving component and a supporting component; one ends of the two chains are both sleeved on the driving component, and the other ends of the two chains are both sleeved on the supporting component.

[0019] Wherein, the driving component is used to drive the two chains to rotate synchronously.

[0020] Optionally, the conveying device further includes: a base and at least one guiding mechanism. The at least one guiding mechanism and the conveying mechanism are both fixed on the base, and the at least one guiding mechanism is located on at least one side of the conveying mechanism in a first direction, so that the component to be transported moves along the conveying direction of the conveying mechanism. The first direction is parallel to the base and perpendicular to the conveying direction.

[0021] Optionally, the guiding mechanism includes: a mounting frame and a guiding rod connected to the mounting frame. The guiding rod extends along the conveying direction.

[0022] Wherein, after the second support portion carries the component to be transported, the guiding rod is used to guide the component to be transported to move along the conveying direction.

[0023] Optionally, the conveying device includes: two guiding mechanisms arranged oppositely, and each of the two guiding mechanisms includes: a first guiding rod and a second guiding rod, and the first guiding rod and the second guiding rod are respectively located on two sides of the conveying mechanism in the first direction;

[0024] At least one of the first guiding rod and the second guiding rod is movably connected to the mounting bracket, so that the distance between the first guiding rod and the second guiding rod in the first direction is greater than the thickness of the component to be transported in the first direction.

[0025] Optionally, in the first direction, the range of the distance between the first guiding rod and the second guiding rod is: 17.5 mm to 35 mm.

[0026] On the other hand, a cleaning system is provided, and the cleaning system includes: a conveying device and a cleaning device, and the conveying device is any one of the above-mentioned conveying devices.

[0027] Optionally, the component to be transported is plate-shaped, the component to be transported has an intersecting first side surface and a second side surface, the second supporting portion is used to contact the first side surface to carry the component to be transported, and the first supporting portion is used to abut against the second side surface to apply a driving force to the component to be transported.

[0028] Optionally, the cleaning device includes: a support pipe, and a plurality of nozzles communicated with the support pipe;

[0029] The component to be transported further has: a first plate surface and a second plate surface arranged oppositely, and a part of the plurality of nozzles faces the first plate surface, and another part of the plurality of nozzles faces the second plate surface.

[0030] The beneficial effects brought by the technical solution provided by the embodiments of the present application at least include:

[0031] A plurality of supporting portions are arranged around the conveying mechanism and can move synchronously with the conveying mechanism. Among them, the second supporting portion can carry the component to be transported, and the first supporting portion can abut against the component to be transported and push the component to be transported to move, so that the component to be transported can move along the conveying direction of the conveying mechanism. By arranging the supporting portions, direct contact between the conveying device and the component to be transported can be avoided, and the abutment of the first supporting portion against the component to be transported can reduce the relative movement between the component to be transported and the supporting portion, thereby reducing the risk of the component to be transported being stuck by the conveying mechanism during transportation, and further reducing the risk of the conveying device malfunctioning. Description of the Drawings

[0032] To more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the accompanying drawings required for the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on these drawings.

[0033] Figure 1 It is a schematic structural diagram of a conveying device provided by an embodiment of the present application;

[0034] Figure 2 is Figure 1 A schematic side view structure diagram of the provided conveying device;

[0035] Figure 3 It is a schematic structural diagram of another conveying device provided by an embodiment of the present application;

[0036] Figure 4 is Figure 3 A schematic top view structure diagram of a part of the provided conveying device;

[0037] Figure 5 is Figure 3 A schematic three - dimensional structure diagram of a part of the provided conveying device;

[0038] Figure 6 is Figure 3 A schematic side view structure diagram of the provided conveying device;

[0039] Figure 7 It is a schematic structural diagram of another conveying device provided by an embodiment of the present application;

[0040] Figure 8 is Figure 7 A schematic side view structure diagram of the provided conveying device;

[0041] Figure 9 It is a schematic side view structure diagram of another conveying device provided by an embodiment of the present application;

[0042] Figure 10 It is a schematic structural diagram of a cleaning system provided by an embodiment of the present application.

[0043] Through the above - mentioned accompanying drawings, the clear embodiments of the present application have been shown, and there will be more detailed descriptions later. These accompanying drawings and textual descriptions are not intended to limit the scope of the concept of the present application in any way, but to illustrate the concept of the present application to those skilled in the art by referring to specific embodiments. Specific embodiments

[0044] To make the objectives, technical solutions, and advantages of this application clearer, the following will further describe the embodiments of this application in detail with reference to the accompanying drawings.

[0045] An embodiment of this application provides a conveying device. Please refer to Figure 1 and Figure 2 , Figure 1 which is a schematic structural diagram of a conveying device provided by an embodiment of this application. Figure 2 is Figure 1 a schematic side view structural diagram of the conveying device provided by Figure 1 . The conveying device 10 includes a conveying mechanism 11 and a plurality of supporting parts 12. Here, there are various cases for the transmission mode of the conveying mechanism 11. Exemplarily, Figure 1 the transmission mode of the conveying mechanism 11 shown can be chain drive. Chain drive realizes the function of conveying the component 20 to be transmitted through the rotation of the chain. Chain drive has no elastic sliding and slipping phenomena, with high stability and high efficiency. In addition, the transmission mode of the conveying mechanism 11 can also be belt drive, and this application embodiment does not limit this. Moreover, compared with the roller-type conveying device in the related art, the conveying mechanism 11 provided by this application embodiment uses chain drive or belt drive, which can avoid using rollers, thereby avoiding the risk that the component 20 to be transmitted gets stuck in the gap between the rollers after deformation.

[0046] The plurality of supporting parts 12 are distributed around the conveying mechanism 11, and each supporting part 12 is connected to the conveying mechanism 11. The conveying mechanism 11 is used to drive the plurality of supporting parts 12 to move synchronously. Here, the supporting part 12 is used to support the component 20 to be transmitted. Since the conveying mechanism 11 can drive the plurality of supporting parts 12 to move synchronously, the plurality of supporting parts 12 can be used to drive the component 20 to be transmitted to move. The plurality of supporting parts 12 can be spaced apart and distributed outside the conveying mechanism 11. The supporting part 12 can prevent the component 20 to be transmitted from directly contacting the conveying mechanism 11, and thus can also reduce the risk of the component 20 to be transmitted getting stuck.

[0047] The plurality of supporting parts 12 include at least one first supporting part 12a and a plurality of second supporting parts 12b. At least some of the plurality of second supporting parts 12b are used to carry the component 20 to be transmitted, and the first supporting part 12a is used to abut against the component 20 to be transmitted to apply a driving force to the component 20 to be transmitted.

[0048] Here, since at least one first support portion 12a abuts against the component 20 to be transported, at least one first support portion 12a can not only be used to push the component 20 to be transported to move along the transport direction X1 of the transport mechanism 11, but also fix at least one end of the component 20 to be transported, reducing the relative movement between the component 20 to be transported and the support portion 12, thereby improving the stability during transportation. The number of the first support portions 12a includes multiple situations, that is, the multiple support portions 12 include one or more first support portions 12a, and the multiple first support portions 12a can correspond to different components 20 to be transported and apply a driving force to the corresponding components 20 to be transported, thereby improving the transport efficiency. [[ID=!]]

[0049] In addition, at least some of the multiple second support portions 12b can correspond to one component 20 to be transported, and the other parts of the multiple second support portions 12b can also respectively correspond to one or more other different components 20 to be transported and carry the corresponding components 20 to be transported, so that multiple components 20 to be transported can be transported simultaneously, thereby improving the transport efficiency.

[0050] In summary, the embodiment of the present application provides a transport device. The multiple support portions are arranged around the transport mechanism and can move synchronously with the transport mechanism. Among them, the second support portion can carry the component to be transported, and the first support portion can abut against the component to be transported and push the component to be transported to move, so that the component to be transported can move along the transport direction of the transport mechanism. By arranging the support portion, direct contact between the transport device and the component to be transported can be avoided, and the abutment of the first support portion and the component to be transported can reduce the relative movement between the component to be transported and the support portion, thereby reducing the risk that the component to be transported is stuck by the transport mechanism during transportation, and further reducing the risk of failure of the transport device.

[0051] In the present application, please refer to Figure 1 , the transport device 10 can transport the component 20 to be transported. Exemplarily, the component 20 to be transported can be a tray for loading semiconductor electronic products. For example, the component 20 to be transported can load an Organic Light-Emitting Diode (OLED) display panel. During the production and manufacturing process of semiconductor electronic products, the tray may be bent and deformed due to heat, long-term use, etc.

[0052] In the related art, the conveying device provided has poor adaptability to a deformed tray. This is because the conveying device realizes the conveying function through rollers. During the conveying process, the tray is in direct contact with the rollers. Then, the deformed tray is more likely to get stuck in the gap between the rollers, resulting in the problem of material jamming in the conveying device, which will increase the risk of faults in the conveying device, reduce the conveying efficiency of the conveying device, and increase the maintenance cost of the conveying device. The material jamming in the conveying device will also cause the rollers to rotate idly, thereby reducing the service life of the rollers. In addition, during the conveying process, the deformed tray rubs frequently against the conveying device, which may also cause further damage to the tray.

[0053] The conveying device 10 provided in this application has good adaptability to a deformed tray. On the one hand, the conveying device 10 drives the tray to move through the supporting portion 12, avoiding direct contact between the tray and the conveying mechanism 11. Even if the deformed tray gets stuck in the gap between adjacent supporting portions 12, it will not affect the conveying function of the conveying mechanism 11. On the other hand, the first supporting portion 12a also abuts against the deformed tray, reducing the relative displacement between the deformed tray and the supporting portion 12, increasing the transmission stability, and thus reducing the risk of faults in the conveying device 10.

[0054] The structure of the supporting portion will be described below:

[0055] Please refer to Figure 3 , Figure 3 FIG. is a schematic structural diagram of another conveying device provided in an embodiment of the present application. The plurality of supporting portions 12 include at least two first supporting portions 12a. In the transmission direction X1 of the conveying mechanism 11, a plurality of second supporting portions 12b are distributed between two adjacent first supporting portions 12a, and the plurality of second supporting portions 12b distributed between two adjacent first supporting portions 12a are used to carry a component 20 to be transmitted. Figure 2 The two adjacent first supporting portions 12a shown, as well as the plurality of second supporting portions 12b distributed between the two adjacent first supporting portions 12a, all correspond to a component 20 to be transmitted and are used to drive the component 20 to be transmitted to move. The conveying device 10 can also move a plurality of components 20 to be transmitted. The first supporting portions 12a and the second supporting portions 12b corresponding to the plurality of components 20 to be transmitted can refer to Figure 3 , and the embodiments of the present application will not elaborate here.

[0056] A plurality of second support portions 12b can be distributed at intervals along the transmission direction X1. In this way, not only can the number of second support portions 12b be reduced to save costs, but also the problem that the relatively dense second support portions 12b connected to the transmission mechanism 11 affect the rotation of the transmission mechanism 11 can be avoided, so that the normal operation of the transmission mechanism 11 can be ensured. The distance between two adjacent second support portions 12b in the transmission direction X1 can be small, so as to improve the stability of supporting the component 20 to be transmitted.

[0057] Exemplarily, please refer to Figure 3 and Figure 4 , Figure 4 is Figure 3 a schematic top view structure diagram of part of the structure in the provided transmission device. The transmission mechanism 11 can include: a chain 1111 formed by connecting a plurality of link units A1 in series. The link unit A1 includes: an inner link A11, an outer link A12, a chain roller A13, and a pin shaft A14. Two adjacent second support portions 12b can be spaced apart by a plurality of outer links A12 to ensure that the chain 1111 can rotate normally. For example, in the transmission direction X1, the size of the second support portion 12b is similar to the size of an outer link A12, and two adjacent second support portions 12b can be spaced apart by one outer link A12, so as to further improve the stability of carrying the component 20 to be transmitted on the basis of ensuring the continuity and stability of the chain 1111 during rotation.

[0058] Wherein, after a plurality of second support portions 12b carry the component 20 to be transmitted, in the transmission direction X1, the first support portion 12a distributed on one side of the component 20 to be transmitted is used to apply a driving force to the component 20 to be transmitted, and the first support portion 12a distributed on the other side of the component 20 to be transmitted is used to block the component 20 to be transmitted.

[0059] Exemplarily, for Figure 3 the shown transmission device 10, during the transmission of the component 20 to be transmitted, the left first support portion 12a can be in contact with the component 20 to be transmitted and push the component 20 to be transmitted to move along the transmission direction X1, and the right first support portion 12a can block the component 20 to be transmitted to avoid the relative movement amplitude of the component 20 to be transmitted and the support portion 12 from being too large, so as to improve the transmission stability and transmission efficiency.

[0060] It should be noted that during the transmission of the component 20 to be transmitted, the embodiments of the present application do not require the component 20 to be transmitted to be in contact with both adjacent first support portions 12a, that is, there can be a certain gap between the component 20 to be transmitted and the two adjacent first support portions 12a, so as to ensure the transmission stability and at the same time adapt to the deformation of the component 20 to be transmitted.

[0061] In this application, the structures of the first support portion and the second support portion include various cases. The following is an exemplary embodiment:

[0062] Please refer to Figure 3 and Figure 5 , Figure 5 is Figure 3 a schematic three-dimensional structure diagram of a part of the structure in the provided conveying device ( Figure 5 which may be Figure 3 a schematic three-dimensional diagram of the support portion in the provided conveying device). The first support portion 12a includes: a support portion body 12a1 and a first baffle 12a2. The support portion body 12a1 is used to carry the component to be transported 20, and the first baffle 12a2 is connected to the end of the support portion body 12a1. The first baffle 12a2 is used to abut against the component to be transported 20 after the support portion body 12a1 carries the component to be transported 20.

[0063] Exemplarily, the first support portion 12a may be in an "L" shape. The support surface of the support portion body 12a1 may be parallel to the transport direction X1, so as to facilitate the connection between the support portion body 12a1 and the conveying mechanism 11 and to carry the component to be transported 20. The first baffle 12a2 may be perpendicular to the transport direction X1, then the contact surface between the first baffle 12a2 and the component to be transported 20 is larger, which can facilitate the first baffle 12a2 to apply a driving force to the component to be transported 20.

[0064] Optionally, the structural shape of the support portion body 12a1 is the same as that of the second support portion 12b. In this way, it can facilitate the manufacturing of the first support portion 12a and the second support portion 12b, but the embodiments of this application are not limited thereto.

[0065] Exemplarily, both the support portion body 12a1 and the second support portion 12b may be plate bodies. Or, both the support portion body 12a1 and the second support portion 12b may also be plate bodies provided with limiting grooves 12b1. The limiting grooves 12b1 may be grooves penetrating along the transport direction X1. In this way, for the support portion body 12a1 and multiple second support portions 12b corresponding to the same component to be transported 20, their limiting grooves 12b1 are connected, so as to facilitate carrying the component to be transported 20. After the second support portion 12b carries the component to be transported 20, a part of the component to be transported 20 is located in the limiting groove 12b1. In this way, the possibility of swinging and offset during the transport of the component to be transported 20 can be reduced, and thus the transport stability can be improved.

[0066] The structure of the conveying mechanism will be described below:

[0067] Please refer to Figure 3 and Figure 6 , Figure 6 is Figure 3Schematic side view structure of the provided conveying device. The conveying mechanism 11 includes: an annular conveying member 111, and a plurality of connecting platforms 112 fixed on the annular conveying member 111. The plurality of connecting platforms 112 are distributed around the annular conveying member 111.

[0068] Among them, the plurality of connecting platforms 112 are used to arrange a plurality of supporting parts 12. Therefore, the arrangement mode of the plurality of connecting platforms 112 can refer to the arrangement mode of the plurality of supporting parts 12. Exemplarily, in the transmission direction X1, the plurality of connecting platforms 112 are equidistantly distributed. The distance between two adjacent connecting platforms 112 can refer to the above-mentioned embodiment and will not be elaborated here. Since the connecting platform 112 is connected to the supporting part body 12a1 of the second supporting part 12a and the connecting platform 112 is connected to the second supporting part 12b, by setting the structural shape of the supporting part body 12a1 to be the same as that of the second supporting part 12b, that is, the structural shapes of the plurality of connecting platforms 112 can be the same, the manufacturing and assembly difficulties can be reduced.

[0069] The plurality of supporting parts 12 correspond to the plurality of connecting platforms 112 one by one, and the supporting part 12 is detachably connected to the corresponding connecting platform 112, so that the installation and disassembly of the supporting part 12 can be facilitated. Exemplarily, in the embodiment of the present application, the distance between two adjacent first supporting parts 12a can be adjusted by adjusting the position of the first supporting part 12a, so as to adapt to the to-be-transported parts 11 of different size specifications.

[0070] In addition, the embodiment of the present application can implement the detachable connection between the supporting part 12 and the corresponding connecting platform 112 in various implementation manners. Exemplarily, the supporting part 12 and the corresponding connecting platform 112 can have corresponding connection holes, and the connection structure is connected to the connected connection holes, which can not only realize the quick installation and disassembly of the supporting part 12, but also facilitate the daily maintenance of the conveying device.

[0071] Optionally, please refer to Figure 5 and Figure 6 , a limiting groove 12b1 is provided on the side of the second supporting part 12b facing away from the corresponding connecting platform 112. Among them, after the second supporting part 12b bears the to-be-transported part 20, a part of the to-be-transported part 20 is located in the limiting groove 12b1. The limiting groove 12b1 can reduce the possibility of swinging and offset during the transmission of the to-be-transported part 20, and thus can improve the transmission stability.

[0072] Optionally, please refer to Figure 4 and Figure 6 , the annular conveying member 111 includes: two annularly extending chains 1111. The plurality of connecting platforms 112 are all distributed between the two chains 1111, and each connecting platform 112 is connected to the two chains 1111.

[0073] Among them, the chain 1111 can be formed by connecting multiple link units A1 in series. Each link unit A1 includes: two inner link plates A11, two outer link plates A12, a chain roller A13, and a pin shaft A14. Both ends of each inner link plate A11 have inner pin holes. The two outer link plates A12 are respectively arranged on the outer sides of the two inner link plates A11. Both ends of each outer link plate A12 have outer pin holes. The chain roller A13 is located between the two inner link plates A11, and the chain roller A13 has a through hole. The pin shaft A14 can be connected to the interconnected inner pin holes, outer pin holes, and through holes, thereby forming a link unit A1. Moreover, two adjacent link units A1 can also adopt the same connection method, thereby forming the chain 1111. Exemplarily, the material of the chain 1111 can include a metal material, such as stainless steel, so as to ensure corrosion resistance and durability during long-term use and cleaning.

[0074] Here, by providing two chains 1111 and connecting the connection platform 112 to both chains 1111, it is possible to ensure the stability when the chains 1111 drive the support portion 12 to move synchronously, thereby improving the smoothness and continuity of the component 20 to be transported during the transportation process.

[0075] Optionally, please refer to Figure 3 , the annular transmission component 111 further includes: a driving component 1112 and a supporting component 1113. One end of each of the two chains 1111 is sleeved on the driving component 1112, and the other end of each of the two chains 1111 is sleeved on the supporting component 1113.

[0076] Among them, the driving component 1112 is used to drive the two chains 1111 to rotate synchronously. The driving component 1112 can include: a driving motor and a driving wheel. The driving wheel is connected to the transmission bearing of the driving motor, and the driving motor can drive the driving wheel to rotate. The supporting component 1113 can include: a driven wheel. Since the two chains 1111 are sleeved on both the driving wheel and the driven wheel, after the driving motor drives the driving wheel to rotate, the driven wheel can be driven to rotate through the two chains 1111, thereby realizing the transmission function of the annular transmission component 111. In addition, the supporting component 1113 can also include other structures for supporting the chain 1111, so as to ensure that the chain 1111 can be tensioned and avoid the problem of the chain 1111 falling off.

[0077] The embodiment of the present application also provides another transmission device. Please refer to Figure 7 and Figure 8 , Figure 7 is a schematic structural diagram of another transmission device provided by the embodiment of the present application. Figure 8 is Figure 7A schematic side view structure of a provided conveying device, the conveying device including: a conveying mechanism 11, a plurality of supporting parts 12, a base 13, and at least one guiding mechanism 14.

[0078] Among them, at least one guiding mechanism 14 and the conveying mechanism 11 are both fixed on the base 13, that is, the base 13 can be used to carry each mechanism in the conveying device 10 to improve the overall stability of the conveying device 10. To clearly show the structure of the conveying mechanism 11, Figure 7 The specific way in which the conveying mechanism 11 is fixed on the base 13 is not shown. Exemplarily, the conveying mechanism 11 may further include a housing that wraps around the outside of the annular conveying member 111 and is used to protect the annular conveying member 111, and this housing is fixed on the base 13.

[0079] At least one guiding mechanism 14 is located on at least one side of the conveying mechanism 11 in the first direction X2, so that the component to be conveyed 20 moves along the conveying direction X1 of the conveying mechanism 11. The first direction X2 is parallel to the base 13 and perpendicular to the conveying direction X1. The guiding mechanism 14 can be used to guide the moving direction of the component to be conveyed 20 to prevent the component to be conveyed 20 from deviating from the conveying direction X1. Exemplarily, the component to be conveyed 20 can be a vertically placed tray for facilitating the cleaning of the tray. However, during the high-speed operation of the conveying mechanism 11, the vertically placed tray is prone to swing, and the guiding mechanism 14 can at least play a role in blocking the swing and guiding on one side of the conveying mechanism 11.

[0080] Optionally, the guiding mechanism 14 includes: a mounting frame 142 and a guiding rod 141 connected to the mounting frame 142, and the guiding rod 141 extends along the conveying direction X1. The mounting frame 142 is used to mount the guiding rod 141 so that the guiding rod 141 can face the component to be conveyed 20, thereby playing a role in blocking and guiding the component to be conveyed 20.

[0081] Among them, after the second supporting part 12b bears the component to be conveyed 20, the guiding rod 141 is used to guide the component to be conveyed 20 to move along the conveying direction X1. The guiding rod 141 can be a continuously smooth rod, thereby avoiding interfering with the conveyance of the component to be conveyed 20 during the conveyance process.

[0082] In addition, in a guiding mechanism 14, the number of guiding rods 141 connected to the mounting bracket 142 can vary, and can be specifically determined according to the shape of the component 20 to be transported. Exemplarily, the component 20 to be transported can be a vertically placed tray. Since the areas of the two surfaces of such a placed tray in the first direction X2 are relatively large, a guiding mechanism 14 can include multiple guiding rods 141. For example, a guiding mechanism 14 can include two guiding rods 141, and the two guiding rods 141 are distributed in a direction perpendicular to the base 13, thereby further avoiding the swinging of the tray and improving the transfer stability.

[0083] Optionally, please refer to Figure 9 , Figure 9 FIG. is a schematic side view structure diagram of another transfer device provided by an embodiment of the present application. The transfer device includes: two guiding mechanisms 14 arranged opposite to each other. The two guiding mechanisms 14 respectively include: a first guiding rod 141a and a second guiding rod 141b. The first guiding rod 141a and the second guiding rod 141b are respectively located on both sides of the transfer mechanism 11 in the first direction X2. The two guiding mechanisms 14 arranged opposite to each other can further reduce the swinging and offset of the component 20 to be transported during the transfer process, thereby improving the transfer stability.

[0084] At least one of the first guiding rod 141a and the second guiding rod 141b is movably connected to the mounting bracket 142, so that the distance between the first guiding rod 141a and the second guiding rod 141b in the first direction X2 is greater than the thickness of the component 20 to be transported in the first direction X2. By setting at least one of the first guiding rod 141a and the second guiding rod 141b to be movably connected to the mounting bracket 142, it is convenient to adjust the distance between the first guiding rod 141a and the second guiding rod 141b in the first direction X2, thereby adapting to components 20 to be transported with different thicknesses and sizes, and enhancing the applicable range and adjustability of the transfer device 10.

[0085] The present application can achieve the movable connection between the guiding rod 141 and the mounting bracket 142 through various implementation manners. Exemplarily, the mounting bracket 142 can have a connection hole. One end of the guiding rod 141 is connected to a movable connecting member. The movable connecting member can be a screw rod. The screw rod passes through the connection hole and is movably connected to the connection hole. By turning the screw rod, the position of the guiding rod 141 can be adjusted.

[0086] Optionally, in the first direction X2, the range of the distance d1 between the first guide rod 141a and the second guide rod 141b is: 17.5 mm to 35 mm. By adjusting the distance d1 within this range, the conveying device 10 can also be applicable to convey the component to be conveyed 20 with a thickness dimension within this range. It should be noted that the range of this distance d1 can be applied to the case where the component to be conveyed 20 is a tray, but the embodiments of the present application are not limited thereto, and specifically can be flexibly adjusted according to the form of the component to be conveyed 20.

[0087] In summary, the embodiments of the present application provide a conveying device. A plurality of supporting parts are arranged around the conveying mechanism and can move synchronously with the conveying mechanism. Among them, the second supporting part can carry the component to be conveyed, and the first supporting part can abut against the component to be conveyed and push the component to be conveyed to move, so that the component to be conveyed can move along the conveying direction of the conveying mechanism. By providing the supporting parts, direct contact between the conveying device and the component to be conveyed can be avoided, and the abutment of the first supporting part against the component to be conveyed can reduce the relative movement between the component to be conveyed and the supporting parts, thereby reducing the risk of the component to be conveyed being stuck by the conveying mechanism during the conveying process, and further reducing the risk of the conveying device malfunctioning.

[0088] On the other hand, the embodiments of the present application also provide a cleaning system. Please refer to Figure 10 , Figure 10 which is a schematic structural diagram of a cleaning system provided by the embodiments of the present application. The cleaning system 30 includes: a conveying device 10 and a cleaning device 31, and the conveying device 10 is the conveying device 10 provided in any of the above embodiments. The conveying device is used to convey the component to be conveyed 20, and the cleaning device 31 is used to clean the component to be conveyed 20 during the conveying process, so as to achieve the effect of automatic cleaning.

[0089] In the present application, the component to be conveyed 20 can be a tray for loading semiconductor electronic products. Through the cleaning system 30, the tray can be cleaned, so as to ensure the safety and cleanliness of the semiconductor electronic products during the production process, and further improve the quality of the semiconductor electronic products.

[0090] Optionally, please refer to Figure 3 and Figure 9 , the component to be conveyed 20 is in a plate shape, the component to be conveyed 20 has an intersecting first side surface and a second side surface S2, the second supporting part 12b is used to contact the first side surface to carry the component to be conveyed, and the first supporting part 12a is used to abut against the second side surface S2 to apply a driving force to the component to be conveyed 20. With such a setting, the exposed surface area of the plate-shaped component to be conveyed 20 is larger, so as to improve the cleaning effect of the cleaning device 31 on the plate-shaped component to be conveyed 20.

[0091] Optionally, the cleaning device 31 includes: a support pipe 311, and a plurality of spray heads 312 communicated with the support pipe 311. The support pipe 311 can be connected to a water supply device and used for introducing a cleaning agent, and then the plurality of spray heads 312 can spray the cleaning agent onto the tray, so that the cleaning function can be realized. Exemplarily, the cleaning agent can be deionized water. In addition, the support pipe 311 can also be connected to a blower device, and then the plurality of spray heads 312 can blow air to remove foreign matters on the surface of the component 20 to be transported.

[0092] The component 20 to be transported also has: a first plate surface S3 and a second plate surface S4 which are oppositely arranged, a part of the plurality of spray heads 312 faces the first plate surface S3, and another part of the plurality of spray heads 312 faces the second plate surface S4. Exemplarily, for the plate-shaped component 20 to be transported, the first plate surface S3 and the second plate surface S4 can be respectively the front surface and the back surface with the largest area on the surface of the component 20 to be transported, so as to ensure the cleaning effect of the cleaning device 31 on the component 20 to be transported.

[0093] In summary, the embodiment of the present application provides a cleaning system. A plurality of supporting parts are arranged around the conveying mechanism and can move synchronously with the conveying mechanism. Among them, the second supporting part can carry the component to be transported, and the first supporting part can abut against the component to be transported and push the component to be transported to move, so that the component to be transported can move along the conveying direction of the conveying mechanism. By arranging the supporting parts, it is possible to avoid direct contact between the conveying device and the component to be transported, and the abutment of the first supporting part against the component to be transported can reduce the relative movement between the component to be transported and the supporting part, so as to reduce the risk that the component to be transported is stuck by the conveying mechanism during the transportation process, and further reduce the risk of failure of the cleaning system.

[0094] It should be noted that in the drawings, the dimensions of layers and regions may be exaggerated for clarity of illustration. Moreover, it can be understood that when an element or layer is referred to as being "on" another element or layer, it can be directly on the other element, or there may be an intermediate layer. Additionally, it can be understood that when an element or layer is referred to as being "under" another element or layer, it can be directly under the other element, or there may be more than one intermediate layer or element. Additionally, it can also be understood that when a layer or element is referred to as being "between" two layers or two elements, it can be the only layer between the two layers or two elements, or there may be more than one intermediate layer or element. Like reference numerals throughout indicate like elements.

[0095] In the present application, the terms "first", "second", "third" and "fourth" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. The term "plurality" means two or more, unless otherwise clearly defined.

[0096] The above are only alternative embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included within the protection scope of the present application.

Claims

1. A conveying device, characterized in that, The conveying device includes: a conveying mechanism and a plurality of supporting parts; The plurality of supporting parts are distributed around the conveying mechanism, and each of the supporting parts is connected to the conveying mechanism, and the conveying mechanism is used to drive the plurality of supporting parts to move synchronously; The plurality of supporting parts include: at least one first supporting part and a plurality of second supporting parts, and at least some of the plurality of second supporting parts are used to carry the parts to be conveyed, and the first supporting part is used to abut against the parts to be conveyed to apply a driving force to the parts to be conveyed.

2. The conveying device according to claim 1, characterized in that, The plurality of supporting parts include at least two of the first supporting parts; in the conveying direction of the conveying mechanism, a plurality of the second supporting parts are distributed between two adjacent first supporting parts, and the plurality of second supporting parts distributed between two adjacent first supporting parts are used to carry one of the parts to be conveyed; Wherein, after the plurality of second supporting parts carry the parts to be conveyed, in the conveying direction, the first supporting part distributed on one side of the parts to be conveyed is used to apply the driving force to the parts to be conveyed, and the first supporting part distributed on the other side of the parts to be conveyed is used to block the parts to be conveyed.

3. The conveying device according to claim 1, characterized in that, The first supporting part includes: a supporting part body and a first baffle, the supporting part body is used to carry the parts to be conveyed, and the first baffle is connected to the end of the supporting part body, and the first baffle is used to abut against the parts to be conveyed after the supporting part body carries the parts to be conveyed.

4. The conveying device according to claim 3, wherein, The structural shape of the supporting part body is the same as that of the second supporting part.

5. The conveying device according to any one of claims 1 to 4, characterized in that The conveying mechanism includes: an annular conveying part, and a plurality of connecting platforms fixed on the annular conveying part, and the plurality of connecting platforms are distributed around the annular conveying part; The plurality of supporting parts correspond to the plurality of connecting platforms one by one, and the supporting part is detachably connected to the corresponding connecting platform.

6. The conveying device according to claim 5, wherein One side of the second supporting part facing away from the corresponding connecting platform has a limiting groove; Wherein, after the second supporting part carries the parts to be conveyed, a part of the parts to be conveyed is located in the limiting groove.

7. The conveying device according to claim 5, characterized in that, The annular conveying part includes: two chains extending in a ring shape; the plurality of connecting platforms are all distributed between the two chains, and each of the connecting platforms is connected to the two chains.

8. The conveying device according to claim 7, characterized in that The annular conveying part further includes: a driving component and a supporting component; one end of each of the two chains is sleeved on the driving component, and the other end of each of the two chains is sleeved on the supporting component; Wherein, the driving component is used to drive the two chains to rotate synchronously.

9. The conveying device according to any one of claims 1 to 4, 6 to 8, characterized in that The conveying device further includes: a base and at least one guiding mechanism, the at least one guiding mechanism and the conveying mechanism are both fixed on the base, and the at least one guiding mechanism is located on at least one side of the conveying mechanism in a first direction, so that the parts to be conveyed move along the conveying direction of the conveying mechanism, and the first direction is parallel to the base and perpendicular to the conveying direction.

10. The conveying device according to claim 9, characterized in that, The guiding mechanism includes: a mounting bracket and a guiding rod connected to the mounting bracket, and the guiding rod extends along the conveying direction; Wherein, after the second supporting portion bears the component to be transported, the guide rod is configured to guide the component to be transported to move along the transport direction.

11. The conveying device according to claim 10, characterized in that, The conveying device includes: two of the guiding mechanisms arranged oppositely, and each of the two guiding mechanisms includes: a first guide rod and a second guide rod, and the first guide rod and the second guide rod are respectively located on two sides of the conveying mechanism in the first direction; At least one of the first guide rod and the second guide rod is movably connected to the mounting bracket, so that the distance between the first guide rod and the second guide rod in the first direction is greater than the thickness of the component to be transported in the first direction.

12. The conveying device according to claim 11, characterized in that, In the first direction, the range of the distance between the first guide rod and the second guide rod is: 17.5 millimeters to 35 millimeters.

13. A cleaning system, characterized in that, The cleaning system includes: a conveying device and a cleaning device, and the conveying device is the conveying device according to any one of claims 1 to 12.

14. The cleaning system according to claim 13, characterized in that, The component to be transported is in a plate shape, and the component to be transported has an intersecting first side surface and a second side surface. The second supporting portion is configured to contact the first side surface to bear the component to be transported, and the first supporting portion is configured to abut against the second side surface to apply a driving force to the component to be transported.

15. The cleaning system according to claim 14, wherein, The cleaning device includes: a support pipe, and a plurality of nozzles communicated with the support pipe; The component to be transported further has: a first plate surface and a second plate surface arranged oppositely, and a part of the plurality of nozzles faces the first plate surface, and another part of the plurality of nozzles faces the second plate surface.

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