High-impedance cooling pipeline for CVD (Chemical Vapor Deposition)

Abstract

The utility model discloses a high-impedance cooling pipeline for CVD (Chemical Vapor Deposition) and belongs to the technical field of evaporation equipment. The heat exchanger comprises an inner pipe used for circulating a medium; the outer pipe is arranged on the outer side of the inner pipe in a sleeving mode, a gap is formed between the inner pipe and the outer pipe so that a circulation channel can be formed, and a partition plate is arranged at the gap between the inner pipe and the outer pipe to divide the circulation channel into a water inlet side and a water outlet side which are communicated with each other; the connecting base is used for being connected with a high-temperature end, one end of the inner pipe and one end of the outer pipe are both connected with the connecting base, and a water inlet communicated with the water inlet side and a water outlet communicated with the water outlet side are further formed in the connecting base. A cooling medium enters through the water inlet, flows to the water inlet side, enters the water outlet side through the water inlet side and then flows out through the water outlet, so that the pipeline is cooled. The circulation channel of the cooling medium is located between the inner pipe and the outer pipe, when the cooling medium flows through the circulation channel, the cooling medium is tightly attached to the outer surface of the inner pipe, the attaching degree of the cooling medium and the high-impedance pipeline is improved, and the cooling effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation coating equipment, and more specifically, to a high-impedance cooling pipe for CVD. Background Art

[0002] CVD is chemical vapor deposition. Chemical vapor deposition refers to the process of introducing gaseous reactants or vapor of liquid reactants containing elements constituting the thin film and other gases required for the reaction into the reaction chamber, and generating a thin film by chemical reaction on the surface of the substrate. Due to the process requirements of the CVD evaporation coating equipment, the highest temperature inside its chamber can reach 360°C; both ends of the high-impedance pipe will be connected to the high-temperature section and the low-temperature section respectively, and its interior must be cooled.

[0003] In some existing methods, generally a water pipe is wound around the outside of the high-impedance pipe, and water circulation is used to cool it. However, the diameter of the cooling water pipe in this method cannot be made too large, the water flow rate is not high, and the cooling effect is poor; moreover, the fitting degree between the cooling water pipe and the outside of the high-impedance pipe is not high, and the cooling effect is low; at the same time, due to the large temperature difference between both ends of the high-impedance pipe, it is easy to cause the cooling water pipe to separate from the pipe or the interface to leak water; finally, the cooling water pipe in this method is exposed, and the appearance is not beautiful. Summary of the Utility Model

[0004] The utility model provides a high-impedance cooling pipe for CVD, and this solution can improve the fitting degree between the cooling water and the pipe, and improve the cooling effect on the high-impedance pipe.

[0005] To achieve the above object, the technical solution provided by the utility model is as follows:

[0006] A high-impedance cooling pipe for CVD, comprising:

[0007] An inner pipe for circulating a medium;

[0008] An outer pipe sleeved outside the inner pipe, and there is a gap between the inner pipe and the outer pipe to form a circulation channel. A partition is provided at the gap between the inner pipe and the outer pipe to divide the circulation channel into a communicating water inlet side and water outlet side;

[0009] A connection seat for connecting the high-temperature end. One end of both the inner pipe and the outer pipe is connected to the connection seat, and the connection seat is also provided with a water inlet communicating with the water inlet side and a water outlet communicating with the water outlet side.

[0010] A preferred embodiment is that the connection seat is provided with a water inlet groove communicating with the water inlet and a water outlet groove communicating with the water outlet. At the same time, the water inlet groove communicates with the water inlet side, and the water outlet groove communicates with the water outlet side.

[0011] A preferred embodiment is that the cross-sections of the water inlet tank and the water outlet tank are arc-shaped, and the size of the outlet of the water inlet tank matches the size of the opening of the water inlet side flow passage, and the size of the inlet of the water outlet tank matches the size of the opening of the water outlet side flow passage.

[0012] A preferred embodiment is that the partition plate includes a first partition plate and a second partition plate. One side of the first partition plate and the second partition plate is the water inlet side, and the other side is the water outlet side, and the cross-sectional area of the flow passage on the water inlet side is not less than the cross-sectional area of the flow passage on the water outlet side.

[0013] A preferred embodiment is that at one end away from the connecting seat, the end face of the partition plate is lower than the end face of the outer pipe, so that the water inlet side and the water outlet side can communicate.

[0014] A preferred embodiment is that at one end away from the connecting seat, the outer pipe and the inner pipe are hermetically connected through a sealing disc.

[0015] A preferred embodiment is that the inner pipe is divided into a second connection section, a cooling section and a first connection section; an external flange is provided on the second connection section for connecting to the low-temperature end; the flow passage is located at the cooling section; the first connection section is connected to the connecting seat.

[0016] A preferred embodiment is that a connection hole is opened on the connecting seat, and the first connection section extends into the connection hole and is connected to the inner wall of the connection hole.

[0017] A preferred embodiment is that a ring-shaped connection step protrudes from one side of the connecting seat close to the inner pipe, and the outer pipe is sleeved outside the connection step.

[0018] A preferred embodiment is that the fixed end of the partition plate is connected to the connection step, and the outlet of the water inlet tank and the inlet of the water outlet tank are opened on the connection step.

[0019] Adopting the technical solution provided by the present invention, compared with the prior art, it has the following beneficial effects:

[0020] (1) For the high-impedance cooling pipeline for CVD of the present invention, the outer pipe is sleeved outside the inner pipe, and there is a gap between the inner pipe and the outer pipe, and this gap forms a flow passage for the cooling medium. A partition plate is arranged at the gap between the inner pipe and the outer pipe, and the partition plate divides the flow passage into a communicating water inlet side and a water outlet side. The cooling medium enters through the water inlet, flows to the water inlet side, enters the water outlet side through the water inlet side, and then flows out through the water outlet, thereby cooling the pipeline. The flow passage of the cooling medium is located between the inner pipe and the outer pipe. When the cooling medium flows through the flow passage, the cooling medium closely adheres to the outer surface of the inner pipe, improving the adhesion degree of the cooling medium to the high-impedance pipeline and improving the cooling effect.

[0021] (2) A high-impedance cooling pipe for CVD of the present utility model. An inlet communicating with the water inlet side and an outlet communicating with the water outlet side are further provided on the connecting seat. The inlet and the outlet are arranged on the connecting seat, and the cooling water flows through the connecting seat, which can better cool the connecting seat connected to the high-temperature end.

[0022] (3) A high-impedance cooling pipe for CVD of the present utility model. The size of the outlet of the water inlet groove is completely matched with the size of the flow passage opening of the water inlet side, and the size of the inlet of the water outlet groove is completely matched with the size of the flow passage opening of the water outlet side, which can enable the cooling medium entering the water inlet groove through the inlet to quickly enter the water inlet side and then enter the water outlet side, thereby cooling the pipe. Description of the Drawings

[0023] Figure 1 It is a schematic cross-sectional structure diagram of the high-impedance cooling pipe;

[0024] Figure 2 It is a schematic structure diagram of the connecting seat;

[0025] Figure 3 It is a schematic structure diagram of the connecting seat from another angle;

[0026] Figure 4 It is a schematic structure diagram of the inner pipe;

[0027] Figure 5 It is a schematic diagram of the connection between the inner pipe and the partition board.

[0028] Label Description:

[0029] 1. Inner pipe; 11. First partition board; 12. Second partition board; 13. Sealing disk; 14. External flange; 15. First connection section; 16. Cooling section; 101. Water inlet side; 102. Water outlet side; 2. Outer pipe; 3. Connecting seat; 31. Inlet; 32. Outlet; 33. Connecting hole; 34. Connecting step; 311. Water inlet groove; 321. Water outlet groove;

[0030] 1001. First welding position; 1002. Second welding position; 1003. Third welding position. Detailed Embodiment

[0031] To further understand the content of the present utility model, the present utility model will be described in detail in combination with the drawings and embodiments.

[0032] The structures, proportions, sizes, etc. shown in the accompanying drawings of this specification are only used to cooperate with the content disclosed in the specification for those familiar with this technology to understand and read, and are not used to limit the conditions for the implementation of the present invention. Therefore, they do not have substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size, without affecting the effects that the present invention can produce and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed in this utility model.

[0033] At the same time, terms such as "upper", "lower", "left", "right", "middle", etc. cited in this specification are only for the convenience of clear narration and are not used to limit the scope of implementation. The change or adjustment of their relative relationship, without substantial change in the technical content, should also be regarded as the scope in which the present invention can be implemented.

[0034] It should be noted that the terms "first", "second", etc. in the specification, claims, and the above-mentioned accompanying drawings of this application are used to distinguish similar objects and do not necessarily need to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so as to implement the embodiments of the present application described here.

[0035] Embodiment 1

[0036] The high-impedance cooling pipe provided in this embodiment is used to transport reaction media. When in use, the high-impedance cooling pipe is installed on a CVD (Chemical Vapor Deposition) device. The connecting seat 3 is installed at the high-temperature end of the device, and the other end of the inner pipe 1 is installed at the low-temperature end.

[0037] Specifically, as Figure 1 shown, a high-impedance cooling pipe for CVD provided in this embodiment includes an inner pipe 1, an outer pipe 2, and a connecting seat 3. The inside of the pipe of the inner pipe 1 is used for the medium to flow through, and this medium is the medium required for chemical vapor deposition reaction.

[0038] The outer pipe 2 is sleeved outside the inner pipe 1, and there is a gap between the inner pipe 1 and the outer pipe 2, and this gap forms a circulation channel for the cooling medium. A partition is provided at the gap between the inner pipe 1 and the outer pipe 2, and the extending direction of the partition is the same as the extending directions of the inner pipe 1 and the outer pipe 2. The partition divides the circulation channel into a communicating water inlet side 101 and a water outlet side 102. One side of the connecting seat 3 is used to connect to the high-temperature end, one ends of the inner pipe 1 and the outer pipe 2 are both connected to the other side of the connecting seat 3, and at the same time, a water inlet 31 communicating with the water inlet side 101 and a water outlet 32 communicating with the water outlet side 102 are also provided on the connecting seat 3.

[0039] In this embodiment, a cooling medium, such as cooling water, enters through the water inlet 31 on the connecting seat 3, flows towards the water inlet side 101, enters the water outlet side 102 through the water inlet side 101, and then flows out through the water outlet 32 on the connecting seat 3, thereby cooling the pipeline. The water inlet 31 and the water outlet are arranged on the connecting seat 3. When the cooling water flows through the connecting seat 3, the connecting seat 3 connected to the high-temperature end can be better cooled. The circulation channel of the cooling medium is located between the inner pipe 1 and the outer pipe 2. When the cooling medium flows through the circulation channel, the cooling medium clings to the outer surface of the inner pipe 1, improving the fitting degree of the cooling medium to the high-impedance pipeline and enhancing the cooling effect. Moreover, the circulation channel covers the entire space between the inner pipe 1 and the outer pipe 2, increasing the flow rate of the cooling medium in the cooling cycle and further enhancing the cooling effect. Finally, the circulation channel of the cooling medium is located inside the outer pipe 2 and is not exposed, making the appearance of the pipeline better.

[0040] Combined with Figure 1 、 Figure 2 and Figure 3 As shown, an inlet groove 311 communicating with the water inlet 31 and an outlet groove 321 communicating with the water outlet 32 are formed on the connecting seat 3. At the same time, the inlet groove 311 communicates with the water inlet side 101, and the outlet groove 321 communicates with the water outlet side 102. Specifically, the water outlet of the inlet groove 311 and the water inlet of the outlet groove 321 both face one side of the pipeline. Moreover, the cross-sections of both the inlet groove 311 and the outlet groove 321 are arc-shaped, and the size of the outlet of the inlet groove 311 completely matches the size of the circulation channel opening of the water inlet side 101, and the size of the inlet of the outlet groove 321 completely matches the size of the circulation channel opening of the water outlet side 102, enabling the cooling medium entering the inlet groove 311 through the water inlet 31 to quickly enter the water inlet side 101 and then enter the water outlet side 102, thereby cooling the pipeline.

[0041] See Figure 4 As shown, the inner pipe 1 is divided into a second connection section, a cooling section 16, and a first connection section 15. An external flange 14 is provided on the second connection section for connecting to the low-temperature end. The outer pipe 2 is sleeved outside the cooling section 16, so that the circulation channel is located at the cooling section 16; the first connection section 15 is connected to the connecting seat 3.

[0042] In this embodiment, a connection hole 33 is formed on the connecting seat 3, and the first connection section 15 extends into the connection hole 33 and is connected to the inner wall of the connection hole 33.

[0043] Combined with Figure 2 shown, the connecting seat 3 in this embodiment is in the shape of a flange disc, in order to Figure 2Taking the middle view orientation as an example, the connecting seat 3 has a center line aa and a center line bb, and the center of the connecting hole 33 is located at the intersection of the center line aa and the center line bb. The water inlet groove 311 and the water outlet groove 321 are both arranged around the intersection of the center line aa and the center line bb. More specifically, the water inlet groove 311 and the water outlet groove 321 are respectively located on both sides of the center line aa, the water outlet 32 is located on the right center line bb and is connected to the water outlet groove 321, and the water inlet 31 is offset to the left of the center line aa and is connected to the water inlet groove 311. In other cases, the water inlet 31 and the water outlet 32 can also be arranged at other positions, as long as the water inlet 31 can be connected to the water inlet groove 311 and the water outlet 32 can be connected to the water outlet groove 321. In this embodiment, internal threads are provided on the inner sides of the water inlet 31 and the water outlet 32 for threaded connection with an external water pipe.

[0044] As shown in Figure 3 the figure, a ring-shaped connecting step 34 protrudes from the side of the connecting seat 3 close to the inner pipe 1, and the connecting step 34 is located outside the connecting hole 33. The outer pipe 2 is sleeved outside the connecting step 34, and the inner wall of the outer pipe 2 is closely attached to the outer wall of the connecting step 34.

[0045] As shown in combination with Figure 4 and Figure 5 the figure, the partition plate is fixedly connected to the outside of the inner pipe 1, and one end of the partition plate is fixedly connected to the connecting step 34. The outlet of the water inlet groove 311 and the inlet of the water outlet groove 321 are opened on the connecting step 34.

[0046] Furthermore, in this embodiment, the partition plate includes a first partition plate 11 and a second partition plate 12. One side of the first partition plate 11 and the second partition plate 12 is the water inlet side 101, and the other side is the water outlet side 102. Moreover, the flow channel area of the water inlet side 101 is the same as that of the water outlet side 102. Specifically, the first partition plate 11 and the second partition plate 12 are respectively arranged corresponding to the center line aa. The first partition plate 11 and the second partition plate 12 divide the flow channel between the inner pipe 1 and the outer pipe 2 into the water inlet side 101 and the water outlet side 102, so that the flow rates of the cooling medium on the water inlet side 101 and the water outlet side 102 are the same, which is convenient for controlling the flow rates on the water inlet side 101 and the water outlet side 102.

[0047] As shown in combination with Figure 4As shown, at one end away from the connecting seat 3, the end face of the partition plate is lower than the end face of the outer tube 2, enabling the water inlet side 101 and the water outlet side 102 to communicate. In this embodiment, at one end away from the connecting seat 3, the outer tube 2 and the inner tube 1 are hermetically connected through a sealing disk 13. A channel for communicating the water inlet side 101 and the water outlet side 102 is formed between the sealing disk 13 and the partition plate. The setting of the sealing disk 13 can seal the flow channel between the inner tube 1 and the outer tube 2 to prevent the cooling medium from flowing out. The cooling medium enters through the water inlet 31 on the connecting seat 3 and flows towards the water inlet side 101. After the cooling medium in the water inlet side 101 is full, the cooling medium reaches the communication part between the sealing disk 13 and the partition plate. After the cooling medium continues to flow into the water inlet side 101, the cooling medium enters the water outlet side 102 through this communication part, cools the pipeline at the water outlet side 102, and finally flows out through the water outlet 32 on the connecting seat 3. It should be noted that during the cooling process, the flow rate of the water outlet 32 needs to be controlled so that the height of the cooling medium filled in the water outlet side 102 is not lower than half of the height of the water outlet side 102. On the one hand, it enables the cooling medium to better cool the entire pipeline; on the other hand, the cooling medium does not overflow in the water outlet side 102, which can prevent the internal pressure in the flow channel between the inner tube 1 and the outer tube 2 from being too large and affecting the service life of the pipeline.

[0048] In this embodiment, the first connecting section 15 extends into the connecting hole 33 and is welded to the inner wall of the connecting hole 33 at the first welding position 1001. The inner wall of the outer tube 2 is closely attached to the outer side wall of the connecting step 34, and one end of the outer tube 2 is welded to the connecting seat 3 at the second welding position 1002. The outer tube 2 and the inner tube 1 are connected through a sealing disk 13. The sealing disk 13 is fixed on the inner tube 1, and the end of the sealing disk 13 is welded to the end of the outer tube 2 at the third welding position 1003. The connection by welding can make the flow channel have better sealing, and can also make the overall high-impedance cooling pipeline have better structural strength, ensuring that the cooling medium does not leak and guaranteeing the stable and continuous temperature reduction.

[0049] The high-impedance cooling pipeline in this embodiment is verified to cool by the cooling water flowing through the flow channel between the inner and outer pipelines, meeting the equipment performance requirements. The flow channel space between the inner and outer pipelines is large, the cooling water flow rate is large, and the appearance is better. After testing, the pressure is not lower than 55 psi, the flow rate is greater than 12 Lpm, and the cooling effect is better.

[0050] Embodiment 2

[0051] In this embodiment, the partition plate includes a first partition plate 11 and a second partition plate 12. One side of the first partition plate 11 and the second partition plate 12 is the water inlet side 101, and the other side is the water outlet side 102. Moreover, the flow passage area of the water inlet side 101 is larger than that of the water outlet side 102. The water inlet side 101 is communicated with the water inlet 31. The cooling water first enters the water inlet side 101 through the water inlet 31 and fills the entire water inlet side, which can make the contact area between the cooling water and the pipeline larger, the cooling effect better, and reduce the temperature difference between the water inlet side 101 and the water outlet side 102.

[0052] It should be noted that the size of the outlet of the water inlet tank 311 needs to be adaptively set and still be completely matched with the size of the flow passage opening of the water inlet side 101; similarly, the size of the inlet of the water outlet tank 321 also needs to be adaptively set so that it is still completely matched with the size of the flow passage opening of the water outlet side 102.

[0053] In this embodiment, other structures of the high-impedance cooling pipeline are the same as those in Embodiment 1.

[0054] The terms "installation", "setting", "provided with", "connection" herein should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or there can be internal communication between two devices, components or parts. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0055] The above schematically describes the present invention and its implementation manners. This description is not restrictive. What is shown in the drawings is only one of the implementation manners of the present invention, and the actual structure is not limited thereto. Therefore, if those of ordinary skill in the art are inspired by it and design similar structural manners and embodiments without creative efforts without departing from the creative concept of the present invention, they shall fall within the protection scope of the present invention.

Claims

1. A high-impedance cooling pipe for CVD, characterized in that: Comprising, An inner tube (1) for circulating a medium; An outer tube (2) sleeved outside the inner tube (1), and there is a gap between the inner tube (1) and the outer tube (2) to form a circulation channel. A partition is provided at the gap between the inner tube (1) and the outer tube (2) to divide the circulation channel into a connected water inlet side (101) and a water outlet side (102); A connecting seat (3) for connecting to the high-temperature end. One end of both the inner tube (1) and the outer tube (2) is connected to the connecting seat (3). The connecting seat (3) is also provided with a water inlet (31) communicating with the water inlet side (101) and a water outlet (32) communicating with the water outlet side (102).

2. The high-impedance cooling pipe for CVD according to claim 1, characterized in that: An inlet groove (311) communicating with the water inlet (31) and an outlet groove (321) communicating with the water outlet (32) are formed on the connecting seat (3). At the same time, the inlet groove (311) communicates with the water inlet side (101), and the outlet groove (321) communicates with the water outlet side (102).

3. The high-impedance cooling pipe for CVD according to claim 2, wherein: The cross-sections of the inlet groove (311) and the outlet groove (321) are arc-shaped, and the size of the outlet of the inlet groove (311) matches the size of the circulation channel opening of the water inlet side (101), and the size of the inlet of the outlet groove (321) matches the size of the circulation channel opening of the water outlet side (102).

4. The high-impedance cooling pipe for CVD according to any one of claims 1-3, characterized in that: The partition includes a first partition (11) and a second partition (12). One side of the first partition (11) and the second partition (12) is the water inlet side (101), and the other side is the water outlet side (102). And the circulation channel area of the water inlet side (101) is not less than the circulation channel area of the water outlet side (102).

5. The high-impedance cooling pipe for CVD according to claim 4, characterized in that: At one end far from the connecting seat (3), the end face of the partition is lower than the end face of the outer tube (2) so that the water inlet side (101) and the water outlet side (102) can communicate.

6. The high-impedance cooling pipe for CVD according to claim 5, characterized in that: At one end far from the connecting seat (3), the outer tube (2) and the inner tube (1) are sealed and connected through a sealing disk (13).

7. The high-impedance cooling pipe for CVD according to claim 2, characterized in that: The inner tube (1) is divided into a second connection section, a cooling section (16) and a first connection section (15); an external flange (14) is provided on the second connection section for connecting to the low-temperature end; the circulation channel is located at the cooling section (16); the first connection section (15) is connected to the connecting seat (3).

8. The high-impedance cooling pipe for CVD according to claim 7, characterized in that: A connection hole (33) is formed on the connecting seat (3), and the first connection section (15) extends into the connection hole (33) and is connected to the inner wall of the connection hole (33).

9. The high-impedance cooling pipe for CVD according to claim 7, characterized in that: A ring-shaped connection step (34) protrudes on the side of the connecting seat (3) close to the inner tube (1), and the outer tube (2) is sleeved outside the connection step (34).

10. The high-impedance cooling pipe for CVD according to claim 9, characterized in that: The fixed end of the partition is connected to the connection step (34), and the outlet of the inlet groove (311) and the inlet of the outlet groove (321) are formed on the connection step (34).

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