Coating equipment

Abstract

The utility model provides coating equipment, which is used in the field of photovoltaic technology, and particularly relates to coating equipment, which comprises a process cavity, a first through hole is formed in the cavity bottom plate, and a second through hole is formed in the cavity bottom plate; the heating plate is fixedly arranged on the cavity bottom plate, a second through hole is formed in the heating plate, and the carrier plate can be placed on the heating plate; and the jacking mechanism comprises a driving device and a jacking rod, the driving device is arranged below the process cavity, and the jacking rod is arranged in the first through hole and the second through hole in a penetrating mode and can be driven by the driving device to jack up the carrier plate placed on the heating plate. According to the coating equipment, the jacking rod of the jacking mechanism penetrates through the heating plate to independently jack the carrier plate, so that the jacking weight is greatly reduced, the driving load is reduced, the structure of the jacking mechanism is reduced, and the cost is reduced.

Description

Technical Field

[0001] The present application relates to the field of photovoltaic technology, and in particular to a coating device. Background Art

[0002] Plate-type PECVD, the production equipment for heterojunction batteries, requires a process chamber lifting system that lifts both the heating plate and the carrier placed on it to complete the coating process. The existing system requires lifting both the heating plate and the carrier simultaneously, which requires a large lifting weight and high drive power. Furthermore, welded bellows are used to seal the lifting mechanism and the process chamber floor, resulting in high material costs. Utility Model Content

[0003] In view of this, the present application provides a coating device, which greatly reduces the lifting weight and the driving load by passing the lifting rod of the lifting mechanism through the heating plate to lift the carrier plate separately, thereby reducing the structure of the lifting mechanism and reducing the cost.

[0004] In order to achieve the above objectives, this application provides the following technical solutions:

[0005] A coating device, comprising:

[0006] The process chamber comprises a chamber bottom plate, wherein the chamber bottom plate is provided with a first through hole;

[0007] A heating plate, fixedly arranged on the bottom plate of the cavity, wherein a second through hole is provided on the heating plate, and a carrier plate can be placed on the heating plate;

[0008] The lifting mechanism includes a driving device and a lifting rod. The driving device is arranged below the process chamber. The lifting rod is passed through the first through hole and the second through hole and can lift the carrier plate placed on the heating plate under the drive of the driving device.

[0009] Optionally, a transmission component is also included, which includes a sliding component, a vertical slide rail, and a threaded ball screw and a screw nut. The ball screw is connected to the drive device, and the lifting rod is connected to the screw nut through the sliding component. The sliding component can slide up and down along the vertical slide rail.

[0010] Optionally, the sliding component includes a top plate, a bottom plate and a slider connected between the top plate and the bottom plate, there is a gap between the top plate and the bottom plate, the bottom plate is mounted on the ball screw and fixed on the top of the screw nut, the bottom end of the lifting rod is connected to the top plate, and the slider is slidably connected to the vertical slide rail.

[0011] Optionally, a limit block is provided on the top of the ball screw, and the base plate is provided between the limit block and the screw nut.

[0012] Optionally, the driving device is a servo motor, and the input shaft of the servo motor is in transmission connection with the ball screw.

[0013] Optionally, a jacking plate is further arranged at the top of the jacking rod, and the shape of the jacking plate is circular.

[0014] Optionally, the jacking plate is in threaded connection with the jacking rod.

[0015] Optionally, a dynamic seal ring is used to seal between the jacking rod and the first through hole.

[0016] Optionally, an annular groove is formed on the inner side surface of the first through hole, and the dynamic seal ring is arranged in the annular groove.

[0017] Optionally, it includes a plurality of the jacking mechanisms, the plurality of jacking mechanisms are arranged in a matrix below the process chamber, and the driving devices of the plurality of jacking mechanisms are in communication connection.

[0018] For the coating equipment provided by the present application, the jacking rod of the jacking mechanism can sequentially pass through the cavity bottom plate and the heating plate and separately jack up the carrier plate, without the need to set a special heating plate frame for jacking up the heating plate, which greatly reduces the jacking weight, reduces the driving load, and further reduces the structure of the jacking mechanism and the cost. Description of the Drawings

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained according to the provided drawings without creative efforts.

[0020] Figure 1 Is a three-dimensional schematic diagram of the coating equipment of the present application;

[0021] Figure 2 Is a cross-sectional view of the coating equipment of the present application;

[0022] Figure 3 Is Figure 2 The enlarged view in the circle;

[0023] Figure 4 Is a schematic diagram of the jacking mechanism of the present application.

[0024] In Figures 1-4 :

[0025] 1. Heating plate; 2. Cavity bottom plate; 3. Jacking mechanism; 4. Dynamic sealing ring; 5. Carrier plate; 6. Servo motor; 7. Ball screw; 8. Jacking plate; 9. Jacking rod; 10. Slide rail; 11. Limit block. Detailed implementation manners

[0026] The present application provides a coating device for plate-type PECVD. By passing the jacking rod of the jacking mechanism through the heating plate to separately jack up the carrier plate, the jacking weight is greatly reduced, the driving load is decreased, and thus the structure of the jacking mechanism is reduced and the cost is lowered.

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without making creative efforts shall fall within the protection scope of the present application.

[0028] As Figure 1 and Figure 2 shown, the embodiments of the present application provide a coating device, including:

[0029] A process chamber for processing the carrier plate 5, the process chamber including a cavity bottom plate 2, and a first through hole is provided on the cavity bottom plate 2;

[0030] Both the heating plate 1 and the carrier plate 5 are arranged in the above-mentioned process chamber. Specifically, the heating plate 1 is fixedly arranged on the cavity bottom plate 2 of the process chamber, and there is a gap between the heating plate 1 and the cavity bottom plate 2 to prevent the heat of the heating plate 1 from being conducted to the cavity bottom plate 2 and lost; a second through hole is provided on the heating plate 1, and the carrier plate 5 can be placed on the upper surface of the heating plate 1;

[0031] A jacking mechanism 3, including a driving device and a jacking rod 9, the driving device is arranged below the process chamber, and the jacking rod 9 is inserted into the first through hole and the second through hole and can jack up the carrier plate 5 placed on the heating plate 1 under the drive of the driving device.

[0032] In this way, the jacking rod 9 of the jacking mechanism 3 can sequentially pass through the cavity bottom plate 2 and the heating plate 1 and separately jack up the carrier plate 5, without the need to set up a special heating plate frame for the heating plate 1 for jacking it up, greatly reducing the jacking weight, decreasing the driving load, and thus reducing the structure of the jacking mechanism 3 and lowering the cost.

[0033] In a preferred embodiment, as Figure 2 and Figure 4As shown, it further includes a transmission component connected between the driving device and the jacking rod 9. The transmission component includes a sliding component, a vertical slide rail 10, and a ball screw and a screw nut in threaded fit. The lower end of the ball screw is connected to the driving device, and the jacking rod 9 is connected to the screw nut through the sliding component. The sliding component can slide up and down along the vertical slide rail 10.

[0034] The driving device and the ball screw cooperate to convert the rotational motion into the linear motion of the screw nut. The screw nut drives the sliding component to move up and down in the vertical direction along the slide rail 10. On the other hand, the sliding component and the slide rail 10 cooperate with each other to limit the movement track of the jacking rod 9 connected to the sliding component in the vertical direction. The structure of this jacking mechanism 3 is simple and occupies little space.

[0035] In a preferred embodiment, as Figure 4 shown, the sliding component includes a top plate, a bottom plate arranged in parallel, and two sliders respectively connected between the two ends of the top plate and the bottom plate. The two sliders are respectively slidably connected to the two vertical slide rails 10; the bottom plate is sleeved on the ball screw and fixed on the top of the screw nut. The bottom end of the jacking rod 9 is connected to the top plate, and there is a gap between the top plate and the bottom plate to raise the jacking rod 9 and reduce its stroke.

[0036] In this embodiment, the top plate, the bottom plate, and the sliders on both sides together form a frame-shaped sliding component. The sliders on both sides of the frame-shaped sliding component can slide along the slide rails 10 on both sides, and the jacking rod 9 can be arranged at the top plate, that is, it is arranged above the ball screw 7 and the screw nut through the frame-shaped sliding component, with a compact structure and better saving the space below the process chamber.

[0037] In a preferred embodiment, as Figure 4 shown, a limit block 11 for preventing the bottom plate from disengaging from the top of the ball screw 7 is provided at the top of the ball screw 7, and the bottom plate is arranged between the limit block 11 and the screw nut.

[0038] In a preferred embodiment, the driving device is a servo motor 6. The input shaft of the servo motor 6 is in transmission connection with the ball screw. The forward and reverse rotation of the servo motor 6 can drive the jacking rod 9 to rise and fall, and jack up or lower the carrier plate 5 relative to the heating plate 1.

[0039] In a preferred embodiment, as Figure 4 shown, in order to increase the contact area between the jacking plate 8 and the carrier plate 5, a jacking plate 8 is further provided at the top of the jacking rod 9. The shape of the jacking plate 8 is preferably circular, and of course it can also be square or other shapes. A rubber layer or a silica gel layer for shock absorption and increasing friction can be provided on the upper surface of the jacking plate 8.

[0040] In a preferred embodiment, the jacking plate 8 is threadedly connected to the jacking rod 9, so that the jacking plate 8 and the jacking rod 9 are detachably connected, facilitating the installation and removal of the jacking rod 9 passing through the cavity bottom plate 2 and the heating plate 1.

[0041] In a preferred embodiment, as Figure 2 and Figure 3 shown, a dynamic seal ring 4 is used to seal between the jacking rod 9 and the first through hole.

[0042] In this embodiment, the dynamic seal ring 4 is adopted to replace the relatively costly bellows sealing method in the prior art, and the dynamic seal ring 4 occupies less space and has a good sealing effect.

[0043] Furthermore, as Figure 2 and Figure 3 shown, an annular groove capable of accommodating the dynamic seal ring 4 is formed on the inner side surface of the first through hole, and a plurality of dynamic seal rings 4 are coaxially arranged in the annular groove to seal the gap between the jacking rod 9 and the first through hole.

[0044] In a preferred embodiment, as Figure 1 and Figure 2 shown, it includes a plurality of jacking mechanisms 3. The plurality of jacking mechanisms 3 jointly support the carrier plate 5, which can improve the stability of the carrier plate 5; the plurality of jacking mechanisms 3 are arranged in a matrix below the process chamber, and the driving devices of the plurality of jacking mechanisms 3 are communicatively connected to enable the jacking mechanisms 3 to lift and lower synchronously.

[0045] Movement process

[0046] 1) When the carrier plate 5 needs to be lifted, the servo motor 6 is started, the ball screw 7 is rotated, driving the jacking rod 9 and the jacking plate 8 to rise; when the jacking rod 9 moves upward, due to the dynamic seal, the cavity of the process chamber can be kept sealed; the jacking plate 8 directly abuts against and jacks up the carrier plate 5, causing the carrier plate 5 to rise.

[0047] 2) When the carrier plate 5 needs to be lowered, the servo motor 6 is started in the reverse direction, the ball screw 7 is rotated, driving the jacking rod 9 and the jacking plate 8 to descend; when the jacking rod 9 moves downward, due to the dynamic seal, the cavity of the process chamber can also be kept sealed; the descent of the jacking rod 9 drives the jacking plate 8 and the carrier plate 5 to descend.

[0048] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present application are only examples and not limitations. It cannot be considered that these advantages, advantages, effects, etc. are essential for each embodiment of the present application. In addition, the above-disclosed specific details are only for the purpose of illustration and easy understanding, rather than limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.

[0049] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any way. Words such as "including", "comprising", "having", etc. are open-ended terms, meaning "including but not limited to", and can be used interchangeably with each other. The word "or" and "and" used herein refer to the word "or" and can be used interchangeably with each other, unless the context clearly indicates otherwise. The phrase "such as" used herein refers to the phrase "such as but not limited to" and can be used interchangeably with each other.

[0050] It should also be noted that in the devices, equipment, and methods of this application, each component or each step can be decomposed or recombined. These decompositions or recombinations should be regarded as equivalent solutions of this application.

[0051] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

[0052] It should be understood that the qualifiers "first", "second", "third", "fourth", "fifth", and "sixth" used in the description of the embodiments of this application are only for more clearly elaborating the technical solutions and cannot be used to limit the protection scope of this application.

[0053] The above description has been given for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions, and sub-combinations thereof.

Claims

1. A coating device, characterized in that, Comprising: A process chamber, including a chamber bottom plate, on which a first through hole is provided; A heating plate, fixedly arranged on the chamber bottom plate, on which a second through hole is provided, and a carrier plate can be placed on the heating plate; A lifting mechanism, including a driving device and a lifting rod, the driving device is arranged below the process chamber, and the lifting rod passes through the first through hole and the second through hole and can lift the carrier plate placed on the heating plate under the drive of the driving device.

2. The coating equipment according to claim 1, characterized in that, It further includes a transmission component, which includes a sliding component, a vertical slide rail, and a ball screw and a lead screw nut in threaded cooperation. The ball screw is connected to the driving device, the lifting rod is connected to the lead screw nut through the sliding component, and the sliding component can slide up and down along the vertical slide rail.

3. The coating equipment according to claim 2, wherein The sliding component includes a top plate, a bottom plate, and a slider connected between the top plate and the bottom plate. There is a gap between the top plate and the bottom plate. The bottom plate is sleeved on the ball screw and fixed on the top of the lead screw nut. The bottom end of the lifting rod is connected to the top plate, and the slider is slidably connected to the vertical slide rail.

4. The coating equipment according to claim 3, characterized in that, A limit block is arranged at the top of the ball screw, and the bottom plate is arranged between the limit block and the lead screw nut.

5. The coating device according to claim 2, characterized in that, The driving device is a servo motor, and the input shaft of the servo motor is in transmission connection with the ball screw.

6. The coating equipment according to claim 1, characterized in that A lifting plate is further arranged at the top of the lifting rod, and the shape of the lifting plate is circular.

7. The coating equipment according to claim 6, characterized in that, The lifting plate is in threaded connection with the lifting rod.

8. The coating device according to claim 1, characterized in that A dynamic seal ring is used for sealing between the lifting rod and the first through hole.

9. The coating equipment according to claim 8, characterized in that, An annular groove is formed on the inner side surface of the first through hole, and the dynamic seal ring is arranged in the annular groove.

10. The coating equipment according to claim 1, characterized in that, It includes a plurality of the lifting mechanisms, and the plurality of lifting mechanisms are arranged in a matrix below the process chamber, and the driving devices of the plurality of lifting mechanisms are communicatively connected.

Images