Target material sintering furnace

Abstract

The utility model relates to the technical field of target material production, in particular to a target material sintering furnace which comprises a furnace body, a placing table is arranged in the furnace body, vertically-arranged blocking strip plates are arranged on the periphery of the placing table at equal intervals in a surrounding mode, a plurality of placing plates used for placing target materials are arranged on the placing table, and vertically-through air holes are formed in the placing plates. An air inlet cavity is formed in the side wall of the furnace body, a heater is arranged on the side wall of the air inlet cavity, an upper air conveying opening communicated with the air inlet cavity is formed in the upper portion of the outer side of the furnace body, a lower air inlet and a middle air inlet which are communicated with the air inlet cavity are formed in the inner side wall of the furnace body, the lower air inlet is located below the middle air inlet, and the lower air inlet is lower than the air holes. According to the utility model, the temperature in the furnace body is uniform, and the yield of target materials is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of target production, in particular to a target sintering furnace. Background Art

[0002] Target sintering is a technology used in semiconductor manufacturing to produce thin film materials. It involves placing a target embryo (usually made of a mixture of metal or ceramic powders) into a sintering furnace, heating it to a high temperature, and then cooling it through solid solution sintering to form a target.

[0003] For example, on October 1, 2021, a patent with the publication number CN113465393A and the title of a novel IGZO atmosphere preheating sintering furnace was published. By adding a preheating pipeline inside the sintering furnace, the sintering atmosphere is preheated inside the furnace; and by modifying the installation position and installation method of the air outlet of the preheating pipeline, the atmosphere inside the furnace can flow evenly; however, in the above literature, heating gas is input from the upper part inside the sintering furnace, and it is relatively difficult for the hot gas to sink inside the sintering furnace, resulting in uneven temperature inside the sintering furnace, and the uniformity of the target needs to be improved. Summary of the Invention

[0004] In view of this, the purpose of the present utility model is to provide a target sintering furnace to solve the problem of poor uniformity of the target.

[0005] Based on the above purpose, the present utility model provides a target sintering furnace, which includes a furnace body. A placement table is arranged inside the furnace body. Heating rods are arranged inside the furnace body between the placement table and the inner side wall of the furnace body. The placement table is connected to the bottom of the furnace body through support columns. The periphery of the placement table is equidistantly surrounded by vertically arranged baffle plates. On the opposite sides of two adjacent baffle plates facing each other, a front guide plate and a rear guide plate are respectively arranged. The included angle between the front guide plate and the baffle plate is greater than the included angle between the rear guide plate and the baffle plate. The end of the front guide plate not connected to the baffle plate is located on one side of the rear guide plate. A plurality of placement plates for placing targets are arranged on the placement table. Through holes penetrating up and down are opened on the placement plates. An air intake cavity is arranged inside the side wall of the furnace body. A heater is arranged on the side wall of the air intake cavity. An upper air supply port communicating with the air intake cavity is arranged on the upper part outside the furnace body. Lower air intake ports and middle air intake ports communicating with the air intake cavity are opened on the inner side wall of the furnace body. The lower air intake port is located below the middle air intake port. The height of the lower air intake port is lower than the height of the through holes.

[0006] Optionally, temperature sensors are provided both in the upper and lower parts of the furnace body. A controller connected to the temperature sensors is provided outside the furnace body. Lower control valves and middle control valves both connected to the controller are respectively provided at the lower air inlet and the middle air inlet. The temperature sensors detect the temperature of the furnace body. When the temperature in the upper part of the furnace body is higher than that in the lower part of the furnace body, the controller controls the lower control valve to open and the middle control valve to close. When the temperature in the upper part of the furnace body is lower than that in the lower part of the furnace body, the controller controls the middle control valve to open and the lower control valve to close.

[0007] Optionally, an outer ring at the upper part of the air vent is provided with a frustum-shaped placement groove opened on the placement table for placing the target.

[0008] Optionally, a support step is provided on the inclined side wall of the frustum-shaped placement groove, and the target is placed on the support step.

[0009] Optionally, a frustum-shaped diversion hole is opened at the lower part of the air vent.

[0010] Optionally, a plurality of inclined downward inclined guide plates are provided on the inner side wall of the furnace body.

[0011] Optionally, an upper exhaust port and a lower exhaust port are respectively provided at the upper and lower ends of the furnace body. Both the upper exhaust port and the lower exhaust port are communicated with the intake cavity through exhaust pipes. A control air pump is provided on the exhaust pipes. A discharge port communicated with the exhaust pipes is opened on the outer side wall of the furnace body.

[0012] Advantages of the present utility model: A target sintering furnace provided by the present utility model places the target on the placement plate on the placement table, and the target is aligned with the air vent, so that the central hole position of the target and the air vent are coaxially placed on the placement plate. The intake cavity is heated by a heater, and the furnace body is heated by a heating rod. The upper gas inlet is connected to a blower, and gas is introduced into the intake cavity through the upper gas inlet. The gas is heated in the intake cavity and then enters the furnace body through the lower air inlet and / or the middle air inlet. The gas entering the furnace body through the lower air inlet reaches below the placement table and enters the middle part of the target through the air vents on the placement plate, and then moves upward to the upper part of the furnace body, making the temperature in the furnace body uniform, capable of reducing the temperature difference in the furnace body, effectively ensuring the sintering temperature range of the target, making the density and grain size of the target more uniform, improving the stability and uniformity of the target, reducing the sintering time, saving energy, and improving the yield rate of the target. Description of the Drawings

[0013] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0014] Figure 1 is a schematic structural diagram of the present invention;

[0015] Figure 2 is a schematic structural diagram of the placement table of the present invention;

[0016] Figure 3 is Figure 2 an enlarged schematic structural diagram of part A in

[0017] Figure 4 is a partial schematic structural diagram of the placement table of the present invention.

[0018] In the figure: 1. furnace body; 2. lower air inlet; 3. middle air inlet; 4. upper air delivery port; 5. air inlet cavity; 6. upper exhaust port; 7. lower exhaust port; 8. exhaust pipe; 9. discharge port; 10. inclined guide plate; 11. placement table; 12. placement plate; 13. inverted frustum placement groove; 14. support step; 15. ventilation hole; 16. baffle plate; 17. heater; 18. heating rod. Specific embodiments

[0019] To make the objectives, technical solutions, and advantages of the present invention clearer and more understandable, the following will further elaborate on the present invention in detail with reference to specific embodiments and the accompanying drawings.

[0020] It should be noted that unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present invention should have the ordinary meaning understood by those of ordinary skill in the field to which the present invention belongs. The "first", "second", and similar terms used in the present invention do not indicate any order, quantity, or importance, but are only used to distinguish different components. The terms such as "comprising" or "including" mean that the elements or objects appearing before this term cover the elements or objects listed after this term and their equivalents, without excluding other elements or objects. The terms such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The terms such as "upper", "lower", "left", "right", etc. are only used to represent relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0021] Such as Figures 1 to 4As shown, a target sintering furnace includes a furnace body 1, a placing table 11 is provided in the furnace body 1, a heating rod 18 is provided in the furnace body 1 between the placing table 11 and the inner wall of the furnace body 1, the placing table 11 is connected to the bottom of the furnace body 1 through a support column, and vertical baffles 16 are arranged around the outer periphery of the placing table 11 at equal intervals. A front guide plate and a rear guide plate are respectively provided on the side where two adjacent baffles 16 are arranged facing each other, and the angle between the front guide plate and the baffle plate 16 is greater than the angle between the rear guide plate and the baffle plate 16, and the front guide plate is not connected to the baffle plate 1. One end of 6 is located on one side of the rear guide plate, and a plurality of placement plates 12 for placing target materials are provided on the placement table 11, and an air vent 15 is provided on the placement plate 12 running through the upper and lower parts. An air inlet cavity 5 is provided in the side wall of the furnace body 1, and a heater 17 is provided on the side wall of the air inlet cavity 5. An upper air delivery port 4 communicating with the air inlet cavity 5 is provided on the upper outer side of the furnace body 1, and a lower air inlet 2 and a middle air inlet 3 communicating with the air inlet cavity 5 are provided on the inner side wall of the furnace body 1. The lower air inlet 2 is located below the middle air inlet 3, and the height of the lower air inlet 2 is lower than the height of the air vent 15.

[0022] When in use, the target is placed on the placement plate 12 on the placement table 11, and the target is aligned with the air hole 15 so that the middle hole of the target is coaxial with the air hole 15 and placed on the placement plate 12. The air inlet cavity 5 is heated by the heater 17, and the heating rod 18 heats the furnace body 1. The upper air inlet 4 is connected to the fan, and gas is introduced into the air inlet cavity 5 through the upper air inlet 4. The gas is heated in the air inlet cavity 5 and then enters the furnace body 1 through the lower air inlet 2 and / or the middle air inlet 3. The gas entering the furnace body 1 through the lower air inlet 2 comes to the bottom of the placement table 11 and enters through the air hole 15 on the placement plate 12. The target material is heated and cooled, and the target is cooled and cooled. The target material is cooled and cooled. The target material is cooled and cooled. The target material is cooled and cooled. The target material is cooled and cooled.

[0023] Temperature sensors are provided at the upper and lower parts of the furnace body 1, and a controller connected to the temperature sensors is provided outside the furnace body 1. A lower control valve and a middle control valve connected to the controller are respectively provided at the lower air inlet 2 and the middle air inlet 3. The temperature sensor detects the temperature of the furnace body 1. When the temperature of the upper part of the furnace body 1 is higher than the temperature of the lower part of the furnace body 1, the controller controls the lower control valve to open and the middle control valve to close, so that the heated gas comes to the bottom of the placement table 11, and then the heated gas moves upward through the air vent 15. When the temperature of the upper part of the furnace body 1 is lower than the temperature of the lower part of the furnace body 1, the controller controls the middle control valve to open and the lower control valve to close, and the heated gas comes to the middle part of the furnace body 1 and then moves upward, reducing the heating gas at the lower part of the furnace body 1, so that the temperature inside the furnace body 1 is uniform, and the temperature difference inside the furnace body 1 can be reduced.

[0024] The upper outer ring of the air vent 15 is provided with an inverted truncated cone placement groove 13 opened on the placement table 11 for placing the target material, in order to reduce the occurrence of the target material's lower end expanding outward during the sintering process and improve the target material yield.

[0025] A supporting step 14 is provided on the oblique side wall of the inverted truncated cone placement groove 13 , and the target is placed on the supporting step 14 . The supporting step 14 facilitates the placement of the target and reduces the possibility of the target tipping over.

[0026] A truncated cone-shaped guide hole is provided at the lower portion of the air vent 15 to facilitate quicker entry of the gas below the placement table 11 into the air vent 15 , thereby increasing the flow rate of the gas and reducing the amount of gas retained below the placement table 11 .

[0027] A plurality of downwardly inclined guide plates 10 are provided on the inner side wall of the furnace body 1. In order to facilitate the gas in the upper part of the furnace body 1 to move toward the side wall of the furnace body 1 and then quickly reach the middle part of the furnace body 1, the inclined guide plates 10 facilitate the diversion of the gas.

[0028] The upper and lower ends of the furnace body 1 are respectively provided with an upper exhaust port 6 and a lower exhaust port 7, and the upper exhaust port 6 and the lower exhaust port 7 are both connected to the air inlet cavity 5 through an exhaust pipe 8. The exhaust pipe 8 is provided with a control air pump connected to the controller, and an exhaust port 9 connected to the exhaust pipe 8 is opened on the outer wall of the furnace body 1. In order to improve the air circulation in the furnace body 1, the controller starts the control air pump, and the gas in the furnace body 1 enters the exhaust pipe 8 through the upper exhaust port 6 or the lower exhaust port 7, and then enters the furnace body 1 again through the air inlet cavity 5, which improves the fluidity of the gas and facilitates the insulation of the furnace body 1.

[0029] Those of ordinary skill in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present utility model is limited to these examples; under the concept of the present utility model, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations in different aspects of the present utility model as described above, and for the sake of brevity, they are not provided in detail.

[0030] Embodiments of the present utility model are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A target sintering furnace, comprising a furnace body (1), wherein a placing table (11) is arranged inside the furnace body (1), and is characterized in that, A heating rod (18) is arranged inside the furnace body (1) between the placing table (11) and the inner side wall of the furnace body (1). The placing table (11) is connected to the bottom of the furnace body (1) through support columns. A vertically arranged baffle plate (16) is equidistantly arranged around the periphery of the placing table (11). A front guide plate and a rear guide plate are respectively arranged on one side of two adjacent baffle plates (16) facing each other. The included angle between the front guide plate and the baffle plate (16) is greater than the included angle between the rear guide plate and the baffle plate (16). One end of the front guide plate not connected to the baffle plate (16) is located on one side of the rear guide plate. A plurality of placing plates (12) for placing target materials are arranged on the placing table (11). Air permeation holes (15) penetrating up and down are formed in the placing plates (12). An air inlet cavity (5) is arranged inside the side wall of the furnace body (1). A heater (17) is arranged on the side wall of the air inlet cavity (5). An upper air delivery port (4) communicated with the air inlet cavity (5) is arranged on the upper part of the outer side of the furnace body (1). A lower air inlet (2) and a middle air inlet (3) communicated with the air inlet cavity (5) are formed in the inner side wall of the furnace body (1). The lower air inlet (2) is located below the middle air inlet (3). The height of the lower air inlet (2) is lower than the height of the air permeation holes (15).

2. The target sintering furnace according to claim 1, characterized in that, Temperature sensors are arranged on both the upper and lower parts of the furnace body (1). A controller connected to the temperature sensors is arranged outside the furnace body (1). A lower control valve and a middle control valve both connected to the controller are respectively arranged at the lower air inlet (2) and the middle air inlet (3). The temperature sensors detect the temperature of the furnace body (1). When the temperature of the upper part of the furnace body (1) is greater than the temperature of the lower part of the furnace body (1), the controller controls the lower control valve to open and the middle control valve to close. When the temperature of the upper part of the furnace body (1) is less than the temperature of the lower part of the furnace body (1), the controller controls the middle control valve to open and the lower control valve to close.

3. A target sintering furnace according to claim 1, characterized in that An inverted frustum placing groove (13) for placing target materials and formed in the placing table (11) is arranged on the outer ring of the upper part of the air permeation holes (15).

4. A target sintering furnace according to claim 3, characterized in that, Support steps (14) are arranged on the inclined side wall of the inverted frustum placing groove (13). The target material is placed on the support steps (14).

5. A target sintering furnace according to claim 1, characterized in that, A frustum-shaped diversion hole is formed in the lower part of the air permeation holes (15).

6. The target sintering furnace according to claim 1, wherein A plurality of inclined downward inclined guide plates (10) are arranged on the inner side wall of the furnace body (1).

7. A target sintering furnace according to claim 1, characterized in that, An upper exhaust port (6) and a lower exhaust port (7) are respectively arranged at the upper and lower ends of the furnace body (1). Both the upper exhaust port (6) and the lower exhaust port (7) are communicated with the air inlet cavity (5) through exhaust pipes (8). A control air pump is arranged on the exhaust pipes (8). An exhaust outlet (9) communicated with the exhaust pipes (8) is formed in the outer side wall of the furnace body (1).

Images