Modularized electric heating structure

Abstract

The utility model provides a modularized electric heating structure which comprises a heating body, the heating body is composed of a plurality of heating modules, the heating modules are arranged at equal intervals, each heating module comprises a shell, an electric heating pipe is arranged on the shell, a clamping part is arranged between the electric heating pipe and the shell, and a limiting mechanism is arranged between every two adjacent shells. By means of the limiting mechanism, the two shells can be limited together, meanwhile, the clamping parts are matched, the electric heating pipes are fastened to the shells, splicing of the heating main body is achieved, the two shells at the two ends can be fixed to the diffusion furnace through external bolts, and rapid installation of the heating main body is achieved; modularized splicing of the heating body is achieved, overall replacement is not needed, the cost is saved, the two butt-joint shells are matched with the limiting mechanism, the butt-joint shells can be fixed, and then the electric heating pipes can be protected in the transportation process.

Description

Technical Field

[0001] The utility model relates to the field of diffusion furnaces, and more specifically, to a modular electric heating structure. Background Art

[0002] A diffusion furnace is one of the important process equipment in the front process of a semiconductor production line, and is used for processes such as diffusion, oxidation, annealing, alloying, and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices, and optical fibers.

[0003] Currently, due to the large size of the diffusion furnace, the electric heating equipment inside the diffusion furnace needs to match its internal size. When the electric heating equipment fails, it needs to be replaced as a whole, which not only increases the cost, but also is not convenient for transportation, and has low practicability.

[0004] Therefore, we make improvements and propose a modular electric heating structure. Summary of the Invention

[0005] The purpose of the utility model is to address the current situation where, due to the large size of the diffusion furnace, the electric heating equipment inside the diffusion furnace needs to match its internal size. When the electric heating equipment fails, it needs to be replaced as a whole, which not only increases the cost, but also is not convenient for transportation, and has low practicability.

[0006] To achieve the above-mentioned invention purpose, the utility model provides a modular electric heating structure to improve the above problems.

[0007] Specifically, this application is as follows:

[0008] It includes a heating main body, which is composed of several heating modules, and the several heating modules are arranged at equal intervals. Each heating module includes a housing, an electric heating tube is arranged on the housing, a clamping part is arranged between the electric heating tube and the housing, and a limiting mechanism is arranged between adjacent two housings.

[0009] As a preferred technical solution of this application, the housing is composed of a U-shaped part, two connecting plates, and a clamping block.

[0010] As a preferred technical solution of this application, a slot for placing the electric heating tube is opened in the middle of one side of the U-shaped part. The two connecting plates are respectively fixedly connected to the two ends of the U-shaped part. A first threaded groove is opened in the middle of the connecting plate. The clamping block is fixedly installed on one side of the U-shaped part, and a slot matching the clamping block is opened on the other side of the U-shaped part.

[0011] As a preferred technical solution of this application, the clamping part is composed of two clamping components.

[0012] As a preferred technical solution of the present application, the two engaging members are respectively engaged and connected to both sides of the slot, and the electric heating tube is located between the engaging member and the slot. A second threaded groove is provided at the top end of the engaging member.

[0013] As a preferred technical solution of the present application, the limiting mechanism is composed of a first limiting portion and a second limiting portion.

[0014] As a preferred technical solution of the present application, the first limiting portion includes a limiting column. The bottom end of the limiting column is fixedly connected to one side of the top end of the U-shaped member, and a movable rod is inserted through the limiting column.

[0015] As a preferred technical solution of the present application, the first limiting portion further includes a limiting round block. The bottom end of the limiting round block is fixedly connected to the top end of the limiting column.

[0016] As a preferred technical solution of the present application, the second limiting portion is a bolt. The bolt is inserted through one side of the movable rod. A third threaded groove matching the bolt is provided on the other side of the top end of the U-shaped member, and the third threaded groove matches the second threaded groove.

[0017] As a preferred technical solution of the present application, an opening is provided on the engaging member.

[0018] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0019] In the solution of the present application:

[0020] In order to solve the problem in the prior art that due to the large size of the diffusion furnace, the electric heating equipment inside the diffusion furnace needs to match its internal size. When the electric heating equipment fails, it needs to be replaced as a whole, which not only increases the cost but also is not convenient for transportation and has low practicability. In the present application, through the provided limiting mechanism, the two shells can be limited together. At the same time, in cooperation with the engaging portion, the electric heating tube is fastened to the shell, realizing the splicing of the heating main body. By externally connecting bolts, the two shells at both ends can be fixed to the diffusion furnace, realizing the rapid installation of the heating main body. Through this setting, the modular splicing of the heating main body is realized, and thus there is no need to replace as a whole, saving costs. And through the two butt-jointed shells, in cooperation with the limiting mechanism, the butt-jointed shells can be fixed, and thus the electric heating tube can be protected during transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic structural diagram of the modular electric heating structure provided by the present application;

[0022] Figure 2 It is a partial structural diagram of the modular electric heating structure provided by the present application;

[0023] Figure 3Schematic diagram of the split structure of the limiting mechanism and the engaging part of the modular electric heating structure provided by this application;

[0024] Figure 4 Schematic diagram of the docking structure of two shells of the modular electric heating structure provided by this application.

[0025] Labels in the figure:

[0026] 1. Heating main body;

[0027] 2. Heating module;

[0028] 3. Shell; 301. U-shaped part; 302. Connecting plate; 303. Clamping block;

[0029] 4. Electric heating tube;

[0030] 5. Engaging part; 501. Engaging piece;

[0031] 6. Limiting mechanism; 601. Limiting column; 602. Movable rod; 603. Limiting round block; 604. Bolt. Detailed implementation manners

[0032] In order to enable those skilled in the art to better understand the solution of this utility model, the technical solutions in the embodiments of this utility model will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of this utility model. Obviously, the described embodiments are only a part of the embodiments of this utility model, rather than all of the embodiments. Based on the embodiments in this utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of this utility model.

[0033] As described in the background art, due to the large size of the diffusion furnace, the electric heating equipment in the diffusion furnace needs to match the internal size. When the electric heating equipment fails, it needs to be replaced as a whole, which not only increases the cost, but also is not convenient for transportation and has low practicability.

[0034] To solve this technical problem, this utility model provides a modular electric heating structure, which is applied to a diffusion furnace.

[0035] Specifically, please refer to Figures 1-4 , the modular electric heating structure specifically includes:

[0036] A heating main body 1, the heating main body 1 is composed of a plurality of heating modules 2, and the plurality of heating modules 2 are arranged at equal intervals. The heating module 2 includes a shell 3, an electric heating tube 4 is arranged on the shell 3, a engaging part 5 is arranged between the electric heating tube 4 and the shell 3, and a limiting mechanism 6 is arranged between two adjacent shells 3.

[0037] The modular electric heating structure provided by the present utility model can limit two shells together through the provided limiting mechanism. At the same time, in cooperation with the engaging part, the electric heating tube is fastened to the shell, realizing the splicing of the heating main body. By externally connecting bolts, the two shells at both ends can be fixed to the diffusion furnace, realizing the rapid installation of the heating main body. Through this setting, the modular splicing of the heating main body is realized, and thus there is no need for overall replacement, saving costs. And through the two butt-jointed shells, in cooperation with the limiting mechanism, the butt-jointed shells can be fixed, and thus the electric heating tube can be protected during transportation.

[0038] In order to enable those skilled in the art to better understand the solution of the present utility model, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings.

[0039] It should be noted that, without conflict, the embodiments in the present utility model and the features and technical solutions in the embodiments can be combined with each other.

[0040] It should be noted that similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0041] Example 1, please refer to Figure 1 、 Figure 2 and Figure 4 , a modular electric heating structure, the shell 3 of which is composed of a U-shaped part 301, two connecting plates 302 and a clamping block 303.

[0042] Please refer to Figure 1 、 Figure 2 and Figure 4 , a modular electric heating structure, in the middle of one side of the U-shaped part 301, a slot for placing the electric heating tube 4 is opened. The two connecting plates 302 are respectively fixedly connected to the two ends of the U-shaped part 301. A first threaded groove is opened in the middle of the connecting plate 302. The clamping block 303 is fixedly installed on one side of the U-shaped part 301, and a slot matching the clamping block 303 is opened on the other side of the U-shaped part 301.

[0043] Example 2, further optimize the modular electric heating structure provided in Example 1. Specifically, as Figures 1-3 shown, the engaging part 5 is composed of two engaging members 501.

[0044] Furthermore, as Figures 1-3 shown, the two engaging members 501 are respectively engaged and connected to both sides of the slot, and the electric heating tube 4 is located between the engaging member 501 and the slot. A second threaded groove is opened at the top of the engaging member 501.

[0045] Example 3 further optimizes the modular electric heating structure provided in Example 1 or 2. Specifically, as Figures 1-4 shown, the limiting mechanism 6 consists of a first limiting part and a second limiting part.

[0046] Furthermore, as Figures 1-4 shown, the first limiting part includes a limiting column 601. The bottom end of the limiting column 601 is fixedly connected to one side of the top end of the U-shaped part 301, and a movable rod 602 is inserted through the limiting column 601.

[0047] Furthermore, as Figures 1-4 shown, the first limiting part further includes a limiting round block 603. The bottom end of the limiting round block 603 is fixedly connected to the top end of the limiting column 601.

[0048] Example 4 further optimizes the modular electric heating structure provided in the above embodiments. As Figures 1-4 shown, the second limiting part is a bolt 604. The bolt 604 is inserted and connected to one side of the movable rod 602, and a third thread groove matching the bolt 604 is opened on the other side of the top end of the U-shaped part 301, and the third thread groove matches the second thread groove.

[0049] Furthermore, as Figures 1-3 shown, an opening is opened on the engaging part 501, and through the opening, it is convenient to take out the engaging part 501 from the slot.

[0050] The using process of the modular electric heating structure provided by the present utility model is as follows:

[0051] When transporting, dock two U-shaped parts 301 so that the slots of the two U-shaped parts 301 communicate with each other, and then accommodate the electric heating tube 4 in the cavity formed by the two slots. At this time, through the limit post 601, cooperate with the limit round block 603, rotate an active rod 602 to be perpendicular to the other U-shaped part 301, and turn the bolt 604 so that the bolt 604 sequentially rotates through the corresponding third thread groove and the second thread groove, thereby fixing the two shells 3, so that the electric heating tube 4 can be protected during transportation. When installing the heating main body 1, engage the clamping block 303 on one U-shaped part 301 with the clamping groove on the other U-shaped part 301, so that the two shells 3 are initially limited together. At this time, rotate an active rod 602 so that the active rod 602 is parallel to the other U-shaped part 301, and turn the bolt 604 to fix the two U-shaped parts 301, and at the same time fix the engaging part 501 to the other U-shaped part 301, realizing the assembly of multiple heating modules 2. After the organization is completed, through the external bolt, cooperate with the first thread groove, fix the two shells 3 at both ends to the diffusion furnace, realizing the installation of the heating main body 1. When a certain electric heating tube 4 fails, turn the corresponding bolt 604 so that the bolt 604 is separated from the engaging part 501, and take out the engaging part 501 through the opening, thereby facilitating the replacement of the electric heating tube 4 and improving the practicability.

[0052] In the present invention, unless otherwise clearly defined and limited, terms such as "installation", "connection", "connection", "fixation" and other terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection, an electrical connection or communication with each other; it can be directly connected, or indirectly connected through an intermediate medium, and can be the internal communication of two components or the interaction relationship between two components, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0053] Obviously, the above-described embodiments are only a part of the embodiments of the present invention, rather than all embodiments. The drawings show the preferred embodiments of the present invention, but do not limit the patent scope of the present invention. The present invention can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosed content of the present invention more thorough and comprehensive. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing specific embodiments, or perform equivalent replacements on some of the technical features. Any equivalent structure made directly or indirectly using the specification and drawings of the present invention in other related technical fields is equally within the scope of the patent protection of the present invention.

Claims

1. A modular electric heating structure, characterized in that, It includes a heating body (1), the heating body (1) is composed of a number of heating modules (2), and the number of heating modules (2) are arranged at equal intervals. The heating module (2) includes a housing (3), an electric heating tube (4) is provided on the housing (3), and a clamping portion (5) is provided between the electric heating tube (4) and the housing (3). A limiting mechanism (6) is provided between two adjacent housings (3).

2. The modular electric heating structure according to claim 1, characterized in that, The housing (3) is composed of a U-shaped member (301), two connecting plates (302) and a clamping block (303).

3. The modular electric heating structure according to claim 2, wherein A slot for placing the electric heating tube (4) is opened in the middle of one side of the U-shaped member (301). The two connecting plates (302) are respectively fixedly connected to both ends of the U-shaped member (301). A first threaded groove is opened in the middle of the connecting plate (302). The clamping block (303) is fixedly installed on one side of the U-shaped member (301), and a slot matching the clamping block (303) is opened on the other side of the U-shaped member (301).

4. A modular electric heating structure according to claim 3, characterized in that, The clamping portion (5) is composed of two clamping members (501).

5. The modular electric heating structure according to claim 4, wherein, The two clamping members (501) are respectively clamped and connected to both sides of the slot, and the electric heating tube (4) is located between the clamping member (501) and the slot. A second threaded groove is opened at the top of the clamping member (501).

6. A modular electric heating structure according to claim 5, characterized in that, The limiting mechanism (6) is composed of a first limiting portion and a second limiting portion.

7. The modular electric heating structure according to claim 6, characterized in that, The first limiting portion includes a limiting column (601). The bottom end of the limiting column (601) is fixedly connected to one side of the top end of the U-shaped member (301). A movable rod (602) is inserted through the limiting column (601).

8. A modular electric heating structure according to claim 7, characterized in that, The first limiting portion further includes a limiting round block (603). The bottom end of the limiting round block (603) is fixedly connected to the top end of the limiting column (601).

9. The modular electric heating structure according to claim 8, characterized in that, The second limiting portion is a bolt (604). The bolt (604) is inserted and connected to one side of the movable rod (602). A third threaded groove matching the bolt (604) is opened on the other side of the top end of the U-shaped member (301), and the third threaded groove matches the second threaded groove.

10. A modular electric heating structure according to claim 9, characterized in that, An opening is opened on the clamping member (501).

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