In-place precision detection device
By using XYZ laser sensors for non-contact measurement in semiconductor processing equipment, the problem of large errors and low automation in the motion axis position accuracy detection in the prior art is solved, and high-precision and fast motion axis end position accuracy detection is achieved.
Patent Information
- Application Number
- CN202422339737.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-25
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2034-09-25
AI Technical Summary
Prior Art In semiconductor processing equipment, contact measurement in placement accuracy detection of motion shafts is not suitable for high-speed sports, automatic measurement cannot be realized, and human operation errors and mechanical gap errors are present.
The laser sensor in three directions of XYZ is used to detect the end-initial accuracy of the motion axis through non-contact measurement, and combine it with integrated software for data analysis and report output.
It realizes high-precision and fast-responsive end-position accuracy detection of the motion axis, and can measure the position accuracy in three directions of XYZ at the same time, reduces artificial errors and mechanical clearance errors, and improves the motion efficiency and accuracy of the motion axis.
Smart Images
Figure CN223179485U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a device for detecting in-place accuracy. Background Art
[0002] In the field of semiconductor processing equipment, with the continuous improvement of the overall production beat requirements, the movement efficiency of the moving axis should not only be high but also the in-place accuracy should be good. Existing technologies such as using a pointer type micrometer for measurement, by contacting the measured part with the probe of the micrometer and observing the change in the reading of the meter to evaluate the in-place accuracy, the disadvantages of such technologies are as follows:
[0003] 1. Not applicable to high-speed movement occasions: Since it is a contact measurement, it is not applicable to the measurement of high-speed moving axes. During high-speed movement, there will be impacts during the contact process between the measured part and the pointer, affecting the measurement accuracy;
[0004] 2. Unable to achieve automated measurement; The pointer type micrometer cannot be connected to a computer, making it difficult to achieve automated measurement and data acquisition;
[0005] 3. There are human operation errors: The reading accuracy of using a pointer type micrometer is greatly affected subjectively. Different operators may have differences in the interpretation of the same measurement result due to factors such as eyesight and experience, thus affecting the measurement error.
[0006] There is also a technology using an encoder in the existing technology. Through the cooperation of the encoder of the motor and the motion controller system, the rotation angle or the motion position of the motor is measured, and the difference between the actual position and the expected position is evaluated and compared to evaluate its in-place accuracy. The disadvantage of this technology is that there are mechanical clearance errors and structural deformation errors in semi-closed loop control. In semi-closed loop control, the encoder is located at the end of the motor shaft. By measuring the angle change of the motor and converting it to the position accuracy at the end, however, there is usually a mechanical clearance error of the transmission components between the motor and the end, and there is a structural deformation accuracy of the structure, which cannot directly represent the in-place accuracy at the end. Summary of the Invention
[0007] The utility model provides a device for detecting in-place accuracy, aiming to solve the problems of low detection accuracy and large error in the existing technology.
[0008] The utility model provides a device for detecting in-place accuracy, including a base, an X-direction sensor installed on the base through a first mounting bracket and used for detecting the in-place accuracy of the end load of the measured shaft in the X direction, a Y-direction sensor installed on the base through a second mounting bracket and used for detecting the in-place accuracy of the end load of the measured shaft in the Y direction, and a Z-direction sensor installed on the base through a third mounting bracket and used for detecting the in-place accuracy of the end load of the measured shaft in the Z direction. The measured shaft is placed on the base.
[0009] As a further improvement of the present utility model, the X-axis sensor, the Y-axis sensor and the Z-axis sensor are all laser sensors.
[0010] As a further improvement of the present utility model, the first mounting bracket includes a first base, a first sensor mounting plate, a first moving slide, a first height adjustment plate and a first height slide. The first base is connected to the top of the base. The first moving slide is slidably connected to the top of the first base. The first height adjustment plate is vertically arranged on the top of the first moving slide. The first height slide is slidably connected to the first height adjustment plate. The first sensor mounting plate is connected to the first height slide.
[0011] As a further improvement of the present utility model, the X-axis sensor is arranged on the first sensor mounting plate, and the laser emitting end of the X-axis sensor is parallel to the X-axis of the measured shaft.
[0012] As a further improvement of the present utility model, the first mounting bracket further includes a first micrometer, a first nut block and a first guide block. The first micrometer is arranged on the first base. The first nut block is arranged on the screw rod of the first micrometer. The first nut block and the first guide block are connected to the same side of the first moving slide. The first guide block and the screw rod of the first micrometer are on the same straight line.
[0013] As a further improvement of the present utility model, the second mounting bracket includes a second base, a second sensor mounting plate, a second moving slide, a second height adjustment plate and a second height slide. The second base is connected to the top of the base. The second moving slide is slidably connected to the top of the second base. The second height adjustment plate is vertically arranged on the top of the second moving slide. The second height slide is slidably connected to the second height adjustment plate. The second sensor mounting plate is connected to the second height slide.
[0014] As a further improvement of the present utility model, the Y-axis sensor is arranged on the second sensor mounting plate, and the laser emitting end of the Y-axis sensor is parallel to the Y-axis of the measured shaft.
[0015] As a further improvement of the present utility model, the second mounting bracket further includes a second micrometer, a second nut block and a second guide block. The second micrometer is arranged on the second base. The second nut block is arranged on the screw rod of the second micrometer. The second nut block and the second guide block are connected to the same side of the second moving slide. The second guide block and the screw rod of the second micrometer are on the same straight line.
[0016] As a further improvement of the present utility model, the third mounting bracket includes a third base, a third sensor mounting plate, a third moving slide, a third height adjustment plate and a third height slide. The third base is connected to the top of the base. The third moving slide is slidably connected to the top of the third base. The third height adjustment plate is vertically arranged on the top of the third moving slide. The third height slide is slidably connected to the third height adjustment plate. The third sensor mounting plate is connected to the third height slide. The Z-axis sensor is arranged on the third sensor mounting plate, and the laser emitting end of the Z-axis sensor is parallel to the Z-axis of the measured shaft.
[0017] As a further improvement of the present utility model, the third mounting bracket further includes a third micrometer, a third nut block and a third guide block. The third micrometer is arranged on the third base. The third nut block is arranged on the screw rod of the third micrometer. The third nut block and the third guide block are connected to the same side of the third moving slide, and the third guide block and the screw rod of the third micrometer are on the same straight line.
[0018] The beneficial effects of the present utility model are as follows: Non-contact measurement is realized by using laser technology, which has the advantages of high precision, long-distance measurement and fast response. An XYZ three-direction measurement device is built based on a laser sensor, which can simultaneously detect the actual in-place accuracy of the XYZ three directions at the end of the moving shaft, and can help decompose the in-place accuracy into motion control accuracy and structural transmission accuracy, which is helpful to further improve the motion efficiency and in-place accuracy of the moving shaft. Description of the Drawings
[0019] Figure 1 is the overall view of the present utility model;
[0020] Figure 2 is the schematic diagram of the first mounting bracket of the present utility model;
[0021] Figure 3 is the schematic diagram of the second mounting bracket of the present utility model;
[0022] Figure 4 is the schematic diagram of the third mounting bracket of the present utility model;
[0023] Figure 5 is the top view of the present utility model.
[0024] Reference numerals: 1 - base, 2 - shaft to be measured, 3 - X - direction sensor, 4 - first mounting bracket, 5 - Y - direction sensor, 6 - second mounting bracket, 7 - Z - direction sensor, 8 - third mounting bracket, 40 - first base, 41 - first moving slide, 42 - first height - adjusting plate, 43 - first height slide, 44 - first sensor mounting plate, 45 - first micrometer, 46 - first nut block, 47 - first guiding block, 60 - second base, 61 - second moving slide, 62 - second height - adjusting plate, 63 - second height slide, 64 - second sensor mounting plate, 65 - second micrometer, 66 - second nut block, 67 - second guiding block, 80 - third base, 81 - third moving slide, 82 - third height - adjusting plate, 83 - third height slide, 8& - third sensor mounting plate, 85 - third micrometer, 86 - third nut block, 87 - third guiding block. Detailed implementation manners
[0025] In order to make the objectives, technical solutions and advantages of the present utility model more clear and understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be noted that the words "front", "rear", "left", "right", "up" and "down" used in the following description refer to the directions in the drawings, and the words "bottom surface" and "top surface", "inner" and "outer" respectively refer to the directions towards or away from the geometric center of a specific component.
[0026] As Figure 1 shown in Figure 5 the accompanying drawings, the present utility model provides a device for detecting the in - place accuracy, including a base 1, an X - direction sensor 3 mounted on the base 1 through a first mounting bracket 4 and used for detecting the in - place accuracy of the end load of the shaft to be measured 2 in the X direction, a Y - direction sensor 5 mounted on the base 1 through a second mounting bracket 6 and used for detecting the in - place accuracy of the end load of the shaft to be measured 2 in the Y direction, and a Z - direction sensor 7 mounted on the base 1 through a third mounting bracket 8 and used for detecting the in - place accuracy of the end load of the shaft to be measured 2 in the Z direction. The shaft to be measured 2 is placed on the base 1.
[0027] As an embodiment of the present utility model, the X - direction sensor 3, the Y - direction sensor 5 and the Z - direction sensor 7 are all laser sensors.
[0028] As Figure 2As shown in the figure, as another embodiment of the present utility model, the first mounting bracket 4 includes a first base 40, a first sensor mounting plate 44, a first moving slide 41, a first height adjustment plate 42 and a first height slide 43. The first base 40 is connected to the top of the base 1. The first moving slide 41 is slidably connected to the top of the first base 40. The first height adjustment plate 42 is vertically arranged on the top of the first moving slide 41. The first height slide 43 is slidably connected to the first height adjustment plate 42. The first sensor mounting plate 44 is connected to the first height slide 43.
[0029] As another embodiment of the present utility model, the X-direction sensor 3 is arranged on the first sensor mounting plate 44, and the laser emitting end of the X-direction sensor 3 is parallel to the X-axis of the measured shaft 2.
[0030] As another embodiment of the present utility model, the first mounting bracket 4 further includes a first micrometer 45, a first nut block 46 and a first guide block 47. The first micrometer 45 is arranged on the first base 40. The first nut block 46 is arranged on the screw rod of the first micrometer 45. The first nut block 46 and the first guide block 47 are connected to the same side of the first moving slide 41. The first guide block 47 and the screw rod of the first micrometer 45 are located on the same straight line.
[0031] During assembly, the X-direction sensor 3 is installed on the first sensor mounting plate 44 through a quick-release nut, which can achieve convenient installation. The first sensor mounting plate 44 is installed on the first height slide 43 through a quick-release nut. The first height slide 43 is slidably connected to the first height adjustment plate 42. The first height slide 43 and the first height adjustment plate 42 can slide relative to each other, and height translation adjustment and micro adjustment can be carried out. The first height slide 43 adjustment plate is installed on the first moving slide 41 through a quick-release nut. The first moving slide 41 is slidably connected to the top of the first base 40. The first moving slide 41 and the first base 40 can slide relative to each other. The first base 40 is connected to the base 1. Rotate the first micrometer 45 so that the screw rod advances in the direction of the first guide block 47. After contacting the first guide block 47 and continuing to rotate, the first guide block 47 will drive the first moving slide 41 to move, and the moving distance can be obtained according to the value on the first micrometer 45. The forward and reverse rotation of the first micrometer 45 can achieve the translation adjustment and micro adjustment of the front and rear distance of the first moving slide 41. The first nut block 46 plays a role in guiding and fixing the screw rod of the first micrometer 45.
[0032] As Figure 3As shown in the figure, as another embodiment of the present utility model, the second mounting bracket 6 includes a second base 60, a second sensor mounting plate 64, a second moving slide 61, a second height adjustment plate 62 and a second height slide 63. The second base 60 is connected to the top of the base 1. The second moving slide 61 is slidably connected to the top of the second base 60. The second height adjustment plate 62 is vertically arranged on the top of the second moving slide 61. The second height slide 63 is slidably connected to the second height adjustment plate 62. The second sensor mounting plate 64 is connected to the second height slide 63.
[0033] As another embodiment of the present utility model, the Y-direction sensor 5 is arranged on the second sensor mounting plate 64, and the laser emitting end of the Y-direction sensor 5 is parallel to the Y-axis of the measured shaft 2.
[0034] As another embodiment of the present utility model, the second mounting bracket 6 further includes a second micrometer 65, a second nut block 66 and a second guide block 67. The second micrometer 65 is arranged on the second base 60. The second nut block 66 is arranged on the screw rod of the second micrometer 65. The second nut block 66 and the second guide block 67 are connected to the same side of the second moving slide 61. The second guide block 67 and the screw rod of the second micrometer 65 are on the same straight line.
[0035] During assembly, the Y-direction sensor 5 is installed on the second sensor mounting plate 64 through a quick-release nut, which can achieve convenient installation. The second sensor mounting plate 64 is installed on the second height slide 63 through a quick-release nut. The second height slide 63 is slidably connected to the second height adjustment plate 62. The second height slide 63 and the second height adjustment plate 62 can slide relative to each other, and can perform height translation adjustment and micro adjustment. The second height slide 63 adjustment plate is installed on the second moving slide 61 through a quick-release nut. The second moving slide 61 is slidably connected to the top of the second base 60. The second moving slide 61 and the second base 60 can slide relative to each other. The second base 60 is connected to the base 1. Rotate the second micrometer 65 so that the screw rod advances in the direction of the second guide block 67. After contacting the second guide block 67 and continuing to rotate, the second guide block 67 will drive the second moving slide 61 to move, and the moving distance can be obtained according to the value on the second micrometer 65. The forward and reverse rotation of the second micrometer 65 can achieve the translation adjustment and micro adjustment of the front and rear distance of the second moving slide 61. The second nut block 66 plays a role in guiding and fixing the screw rod of the second micrometer 65.
[0036] As Figure 4As shown, as another embodiment of the present utility model, the third mounting bracket 8 includes a third base 80, a third sensor mounting plate 84, a third moving slide 81, a third height adjustment plate 82 and a third height slide 83. The third base 80 is connected to the top of the base 1. The third moving slide 81 is slidably connected to the top of the third base 80. The third height adjustment plate 82 is vertically arranged on the top of the third moving slide 81. The third height slide 83 is slidably connected to the third height adjustment plate 82. The third sensor mounting plate 84 is connected to the third height slide 83. The Z-axis sensor 7 is arranged on the third sensor mounting plate 84, and the laser emitting end of the Z-axis sensor 7 is parallel to the Z-axis of the measured shaft 2.
[0037] As another embodiment of the present utility model, the third mounting bracket 8 further includes a third micrometer 85, a third nut block 86 and a third guide block 87. The third micrometer 85 is arranged on the third base 80. The third nut block 86 is arranged on the screw rod of the third micrometer 85. The third nut block 86 and the third guide block 87 are connected to the same side of the third moving slide 81, and the third guide block 87 and the screw rod of the third micrometer 85 are on the same straight line.
[0038] During assembly, the Z-axis sensor 7 is installed on the third sensor mounting plate 84 through a quick-release nut, which can achieve convenient installation. The third sensor mounting plate 84 is installed on the third height slide 83 through a quick-release nut. The third height slide 83 is slidably connected to the third height adjustment plate 82, and the third height slide 83 and the third height adjustment plate 82 can slide relative to each other, enabling height translation adjustment and fine adjustment. The third height slide 83 adjustment plate is installed on the third moving slide 81 through a quick-release nut. The third moving slide 81 is slidably connected to the top of the third base 80, and the third moving slide 81 and the third base 80 can slide relative to each other. The third base 80 is connected to the base 1. Rotate the third micrometer 85 so that the screw rod advances towards the third guide block 87. After contacting the third guide block 87 and continuing to rotate, the third guide block 87 will drive the third moving slide 81 to move, and the moving distance can be obtained according to the value on the third micrometer 85. The forward and reverse rotation of the third micrometer 85 can achieve the translation adjustment and fine adjustment of the front and rear distance of the third moving slide 81, and the third nut block 86 plays a role in guiding and fixing the screw rod of the third micrometer 85.
[0039] During detection, the axis 2 to be measured is controlled to move to the target movement position on the base 1, and the heights and horizontal positions of the X-direction sensor 3, Y-direction sensor 5 and Z-direction sensor 7 are adjusted so that the sensing photoelectric of the laser sensor hits the end load of the axis 2 to be measured, and the laser sensor is adjusted to work correctly. Before detection, the position information that should appear on the end load of the axis 2 to be measured will be pre-entered, such as the duration of the return after the laser hits the end load. During detection, based on the data information transmitted back by the laser sensors in three directions, it can be analyzed whether the end load of the axis 2 to be measured is in place, what the gap from the precise position is, the in-place accuracy is obtained, and a report is output for the operator to adjust the equipment. Through the integrated software, the control of the axis to be measured, the sensor readings, the data analysis, and the output of the report are realized, and the in-place accuracy of the ends of the three-direction moving axes is detected. The axis 2 to be measured can be a linear motion axis or a rotary motion axis.
[0040] This technology detects the in-place accuracy of the end of the motion axis through a laser sensor and has the following advantages:
[0041] High accuracy: The laser sensor uses laser technology. Laser has characteristics such as high directivity, high monochromaticity and high brightness. These characteristics enable the laser sensor to achieve high-precision measurement;
[0042] High responsiveness: The laser sensor can measure the position and speed of an object in a very short time and can be applied to fast measurement occasions;
[0043] Non-contact measurement: The laser sensor can achieve non-contact measurement and will not affect the change of the load of the axis to be measured, thus affecting the measurement result;
[0044] Simultaneous measurement of the in-place accuracy in three directions: Through this device, laser sensors in the X, Y and Z directions can be installed. Combined with the software developed through integration, the simultaneous measurement in the X, Y and Z directions can be realized.
[0045] The above content is a further detailed description of the present utility model in combination with specific preferred embodiments. It cannot be determined that the specific implementation of the present utility model is only limited to these descriptions. For those of ordinary skill in the technical field to which the present utility model belongs, without departing from the concept of the present utility model, several simple deductions or substitutions can still be made, and all should be regarded as belonging to the protection scope of the present utility model.
Claims
1. A device for detecting the in-place accuracy, characterized in that, It includes a base, an X-direction sensor mounted on the base through a first mounting bracket and used to detect the in-place accuracy of the end load of the measured shaft in the X direction, a Y-direction sensor mounted on the base through a second mounting bracket and used to detect the in-place accuracy of the end load of the measured shaft in the Y direction, and a Z-direction sensor mounted on the base through a third mounting bracket and used to detect the in-place accuracy of the end load of the measured shaft in the Z direction. The measured shaft is placed on the base.
2. The in-place accuracy detection device according to claim 1, wherein The X-direction sensor, Y-direction sensor, and Z-direction sensor are all laser sensors.
3. The in-place accuracy detection device according to claim 1, characterized in that, The first mounting bracket includes a first base, a first sensor mounting plate, a first moving slide, a first height adjustment plate, and a first height slide. The first base is connected to the top of the base. The first moving slide is slidably connected to the top of the first base. The first height adjustment plate is vertically arranged on the top of the first moving slide. The first height slide is slidably connected to the first height adjustment plate. The first sensor mounting plate is connected to the first height slide.
4. The in-place accuracy detection device according to claim 3, characterized in that The X-direction sensor is arranged on the first sensor mounting plate, and the laser emission end of the X-direction sensor is parallel to the X-axis of the measured shaft.
5. The in-place accuracy detection device according to claim 3, characterized in that, The first mounting bracket further includes a first micrometer, a first nut block, and a first guide block. The first micrometer is arranged on the first base. The first nut block is arranged on the screw of the first micrometer. The first nut block and the first guide block are connected to the same side of the first moving slide, and the first guide block and the screw of the first micrometer are on the same straight line.
6. The in-place accuracy detection device according to claim 1, characterized in that, The second mounting bracket includes a second base, a second sensor mounting plate, a second moving slide, a second height adjustment plate, and a second height slide. The second base is connected to the top of the base. The second moving slide is slidably connected to the top of the second base. The second height adjustment plate is vertically arranged on the top of the second moving slide. The second height slide is slidably connected to the second height adjustment plate. The second sensor mounting plate is connected to the second height slide.
7. The in-place accuracy detection device according to claim 6, wherein The Y-direction sensor is arranged on the second sensor mounting plate, and the laser emission end of the Y-direction sensor is parallel to the Y-axis of the measured shaft.
8. An in-place accuracy detection device according to claim 6, characterized in that, The second mounting bracket further includes a second micrometer, a second nut block, and a second guide block. The second micrometer is arranged on the second base. The second nut block is arranged on the screw of the second micrometer. The second nut block and the second guide block are connected to the same side of the second moving slide, and the second guide block and the screw of the second micrometer are on the same straight line.
9. The in-place accuracy detection device according to claim 1, characterized in that, The third mounting bracket includes a third base, a third sensor mounting plate, a third moving slide, a third height adjustment plate, and a third height slide. The third base is connected to the top of the base. The third moving slide is slidably connected to the top of the third base. The third height adjustment plate is vertically disposed on the top of the third moving slide. The third height slide is slidably connected to the third height adjustment plate. The third sensor mounting plate is connected to the third height slide. The Z-axis sensor is disposed on the third sensor mounting plate, and the laser emitting end of the Z-axis sensor is parallel to the Z-axis of the measured shaft.
10. A device for detecting in-place accuracy according to claim 9, characterized in that, The third mounting bracket further includes a third micrometer, a third nut block, and a third guide block. The third micrometer is disposed on the third base. The third nut block is disposed on the screw of the third micrometer. The third nut block and the third guide block are connected to the same side of the third moving slide, and the third guide block is on the same straight line as the screw of the third micrometer.