Physical testing equipment for electrical property of semiconductor material

Abstract

The utility model discloses physical testing equipment for electrical properties of semiconductor materials, relates to the technical field of testing equipment, and solves the problem that special testing equipment capable of testing the influence of illumination intensity on the electrical properties of the semiconductor materials is lacked in the prior art. The testing device comprises a testing box body, an electrical property tester is arranged on the testing box body, a supporting assembly used for supporting a semiconductor material is arranged in the testing box body, a heating unit is arranged on the supporting assembly, an illumination unit is arranged at the top of the testing box body, and a light intensity adjusting mechanism matched with the illumination unit is arranged on the testing box body. The illumination unit is arranged to provide a light source, the light intensity adjusting mechanism can be matched with the illumination unit to achieve adjustment of the illumination intensity, a certain experiment temperature can be maintained through the heating unit, and the experiment accuracy is improved. The device can test the electrical performance of the semiconductor material under different illumination intensity conditions, is convenient and controllable to adjust, and is flexible, simple and convenient to test.

Description

Technical Field

[0001] The utility model relates to the technical field of test equipment, in particular to a physical test equipment for the electrical properties of semiconductor materials. Background Art

[0002] Semiconductor materials are a class of electronic materials with semiconductor properties, which can be used to make semiconductor devices and integrated circuits. Semiconductor materials are the core components of modern electronic industry, and the accurate measurement of their electrical properties is of great significance for the R & D, production and use of electronic devices.

[0003] When the traditional physical test equipment for the electrical properties of semiconductors tests semiconductors, it can only perform electrical energy tests in one environment and cannot test the overall performance of semiconductors more comprehensively. Since the working environments of semiconductors are different, if the physical data of the electrical properties of semiconductors in more environments cannot be tested, it is easy to cause failures in semiconductor products during use, resulting in unnecessary economic losses.

[0004] The Chinese utility model patent with the publication number of CN216082673U discloses a physical test equipment for the electrical properties of semiconductor materials. By setting a test box and a sealing cover, the semiconductor materials can be tested in a normal environment to achieve the purpose of physically testing the electrical properties of semiconductors. Then, by using the heat provided by the heating coil and cooperating with the test plate, the semiconductor can be heated so that the semiconductor materials can perform physical tests on electrical properties in a high-temperature environment, playing a role in increasing the test environment of semiconductor materials and increasing the amount of physical test data of the electrical properties of semiconductor materials.

[0005] During the physical test of the electrical properties of semiconductors, the influence of light on the electrical properties is also an important factor. When testing the influence of light, it is necessary to manually or use other lighting equipment to simulate the light change environment. The above-mentioned existing patents and other existing technologies lack special test equipment that can test the influence of light intensity on the electrical properties of semiconductor materials. Summary of the Utility Model

[0006] Aiming at the deficiencies in the above background art, the utility model proposes a physical test equipment for the electrical properties of semiconductor materials, which solves the problem that there is a lack of special test equipment in the prior art that can test the influence of light intensity on the electrical properties of semiconductor materials.

[0007] The technical solution of the utility model is realized as follows: A physical test equipment for the electrical properties of semiconductor materials, including a test box body, on which an electrical property tester is provided. It is characterized in that: a support component for supporting semiconductor materials is arranged in the test box body, a heating unit is arranged on the support component, a lighting unit is arranged at the top of the test box body, and a light intensity adjusting mechanism cooperating with the lighting unit is arranged on the test box body.

[0008] Preferably, the test box body comprises a box body, an upper cover is hingedly connected to the upper part of the box body, and light-absorbing coatings are provided on the inner walls of both the box body and the upper cover.

[0009] Preferably, a groove is formed in the upper cover, and the light illumination unit comprises a light bar fixedly arranged in the groove.

[0010] Preferably, the light intensity adjusting mechanism comprises sliding grooves fixedly arranged on both sides of the groove, a light-shielding unit is slidably arranged on the sliding grooves, the light-shielding unit is in transmission connection with a driver arranged on the upper cover through a transmission mechanism, and the driver can drive the light-shielding unit to move along the sliding grooves.

[0011] Preferably, the light-shielding unit comprises a light-shielding plate slidably arranged on the sliding grooves. A plurality of intervals corresponding to the groove are arranged on the light-shielding plate, and the light transmittance of different intervals is different.

[0012] Preferably, the transmission mechanism comprises a rack slidably arranged on the upper cover, the rack is fixedly connected to the light-shielding plate, a gear is arranged at the output end of the driver and meshes with the rack. The driver is a driving motor.

[0013] Preferably, the support assembly comprises a test bench fixedly arranged in the box body, a placement groove is arranged on the test bench, and touch blocks are slidably arranged at both ends in the placement groove. The two touch blocks are respectively electrically connected to an electrical property tester. The heating unit comprises a heating wire wound around the test bench.

[0014] The beneficial effects of the present utility model are as follows: By providing the test box body, a test space that can provide support and prevent the influence of external light can be provided. By providing the support assembly, the semiconductor material to be tested can be supported. By providing the light illumination unit, a light source can be provided. By providing the light intensity adjusting mechanism, the adjustment of the light intensity can be realized in cooperation with the light illumination unit. By providing the heating unit, a certain experimental temperature can be maintained, and the experimental accuracy can be improved. Through this device, the electrical property test of the semiconductor material under different light intensity conditions can be realized, the adjustment is convenient and controllable, and the test is flexible and simple. Description of the Drawings

[0015] In order to more clearly illustrate the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0016] Figure 1 It is a three-dimensional structural schematic diagram of the present utility model;

[0017] Figure 2 It is a schematic diagram of the light intensity adjusting mechanism of the present utility model;

[0018] Figure 3 Schematic diagram of another perspective of the light intensity adjusting mechanism of the present utility model;

[0019] Figure 4 Schematic diagram of the structure of the support assembly of the present utility model;

[0020] In the figure: 1: test box body, 2: electrical property tester, 3: support assembly, 4: heating unit, 5: light illumination unit, 6: light intensity adjusting mechanism, 7: box body, 8: upper cover, 9: groove, 10: sliding groove, 11: driver, 12: light shielding plate, 13: interval, 14: rack, 15: test bench, 16: placement groove, 17: contact block. Specific embodiments

[0021] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0022] As shown in Figure 1 、 2 、3, Embodiment 1, a semiconductor material electrical property physical test device, including a test box body 1, the test box body can provide a support and installation foundation, and at the same time can prevent external light from affecting the light intensity of the internal test environment. An electrical property tester 2 is provided on the test box body 1, and a support assembly 3 is provided inside the test box body 1, and the support assembly can support the semiconductor material to be tested. A heating unit 4 is provided on the support assembly 3, and setting the heating unit can maintain a certain experimental temperature and improve the experimental accuracy. A light illumination unit 5 is provided on the top of the test box body 1, and a light intensity adjusting mechanism 6 cooperating with the light illumination unit 5 is provided on the test box body 1. During the experiment, a light source can be generated by the light illumination unit, and the light intensity in the test environment can be adjusted in cooperation with the light intensity adjusting mechanism.

[0023] When the device is in use, first place the semiconductor material to be tested on the support assembly, and connect the electrical property tester 2 to the semiconductor material for testing. Then adjust the light intensity adjusting mechanism to completely shield the light illumination unit, and then turn on the light illumination unit to generate light. Subsequently, according to the experimental settings, set the heating unit to maintain the temperature inside the test box body constant, gradually adjust the light intensity irradiated on the semiconductor material to be tested, and record the readings of the corresponding electrical property tester 2 to complete the experiment. Through this device, the electrical property test of semiconductor materials under different light intensity conditions can be realized, the adjustment is convenient and controllable, and the test is flexible and simple.

[0024] As a further embodiment, the test box 1 includes a box body 7, an upper cover 8 is hingedly connected to the upper part of the box body 7, and light-absorbing coatings are provided on the inner walls of both the box body 7 and the upper cover 8. The light-absorbing coating in this embodiment can be optionally a conventional extremely black light-absorbing coating to reduce the reflection of the light generated by the light unit in the box body and avoid making the light environment more complex and affecting the test environment. In addition, in this embodiment, a groove 9 is opened on the upper cover 8, and the light unit 5 includes a light bar fixedly arranged in the groove 9. The light intensity of the light bar in this embodiment is constant, and the intensity of the light irradiating on the semiconductor material is adjusted by adjusting the light-shielding efficiency of the light intensity adjusting mechanism.

[0025] Embodiment 2, a physical test device for the electrical properties of semiconductor materials, as Figure 2 , 3 shown, on the basis of Embodiment 1, the light intensity adjusting mechanism 6 includes sliding grooves 10 fixedly arranged on both sides of the groove 9, a light-shielding unit is slidably arranged on the sliding grooves 10, the light-shielding unit is in transmission connection with a driver 11 arranged on the upper cover 8 through a transmission mechanism, and the driver 11 can drive the light-shielding unit to move along the sliding groove.

[0026] Specifically, the light-shielding unit includes a light-shielding plate 12 slidably arranged on the sliding groove 10. In addition, a plurality of intervals 13 corresponding to the groove 9 are provided on the light-shielding plate 12, and the light transmittance of different intervals is different. In this embodiment, the light transmittance of the intervals on the light-shielding plate gradually increases or decreases from one side to the other side. The transmission mechanism includes a rack 14 slidably arranged on the upper cover 8, the rack 14 is fixedly connected to the light-shielding plate 12, and a gear is arranged at the output end of the driver 11 and meshes with the rack 14 through the gear. Among them, the driver 11 is a driving motor.

[0027] When this embodiment is in use, first, the interval with the highest light-shielding degree is corresponded to the light unit, and then when the experiment is carried out, the driving motor is turned on, and the rack is gradually driven to move through the gear, and then different intervals on the light-shielding plate are gradually corresponded to the light unit to realize the adjustment and control of the light intensity.

[0028] Embodiment 3, a physical test device for the electrical properties of semiconductor materials, as Figure 4 shown, on the basis of Embodiment 【2】, the support assembly 3 includes a test bench 15 fixedly arranged in the box body 7, a placement groove 16 is provided on the test bench 15, and touch blocks 17 are slidably arranged at both ends in the placement groove 16. The two touch blocks 17 are respectively electrically connected to the electrical property tester 2. In this embodiment, the two touch blocks are respectively connected to the electrical property tester through wires. In this embodiment, the touch blocks are made of conductive materials and are slidably placed at both ends of the placement groove. When the experiment is carried out, the semiconductor material to be tested is placed between the two touch blocks, and the electrical properties of the semiconductor material are measured by using the electrical property tester. The electrical property tester can be optionally a conventional resistivity tester.

[0029] As a further implementation manner, the heating unit 4 includes a heating wire wound around the test bench 15. Additionally, as an optional solution, a temperature sensor is provided on the test bench, and an exhaust fan is provided on the box body. The heating wire, the temperature sensor, and the exhaust fan are all electrically connected to the main control board provided on the box body, so that the main control board can adjust and control the heating power of the heating wire or the exhaust heat dissipation efficiency of the exhaust fan according to the temperature reading of the temperature sensor, thereby realizing the control of the internal test environment temperature.

[0030] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A physical test device for the electrical properties of a semiconductor material, comprising a test box body (1), and an electrical property tester (2) is provided on the test box body (1), characterized in that: Inside the test box body (1), there is a support component (3) for supporting semiconductor materials. A heating unit (4) is arranged on the support component (3). A lighting unit (5) is arranged at the top of the test box body (1), and a light intensity adjusting mechanism (6) cooperating with the lighting unit (5) is arranged on the test box body (1).

2. The physical testing device for the electrical properties of semiconductor materials according to claim 1, wherein: The test box body (1) includes a box body (7). The upper part of the box body (7) is hinged with an upper cover (8). Absorbing light coatings are arranged on the inner walls of the box body (7) and the upper cover (8).

3. The physical testing device for the electrical properties of the semiconductor material according to claim 2, characterized in that: A groove (9) is formed in the upper cover (8). The lighting unit (5) includes a lamp strip fixedly arranged in the groove (9).

4. The semiconductor material electrical property physical testing device according to claim 3, characterized in that: The light intensity adjusting mechanism (6) includes sliding grooves (10) fixedly arranged on both sides of the groove (9). A light shielding unit is slidably arranged on the sliding grooves (10). The light shielding unit is in transmission connection with a driver (11) arranged on the upper cover (8) through a transmission mechanism, and the driver (11) can drive the light shielding unit to move along the sliding grooves.

5. The physical test device for the electrical properties of the semiconductor material according to claim 4, wherein: The light shielding unit includes a light shielding plate (12) slidably arranged on the sliding grooves (10).

6. The physical test device for the electrical properties of a semiconductor material according to claim 5, wherein: A plurality of intervals (13) corresponding to the groove (9) are arranged on the light shielding plate (12), and the light transmittance of different intervals is different.

7. The physical test device for the electrical properties of a semiconductor material according to claim 6, wherein: The transmission mechanism includes a rack (14) slidably arranged on the upper cover (8). The rack (14) is fixedly connected with the light shielding plate (12). A gear is arranged at the output end of the driver (11) and meshes with the rack (14).

8. The physical test device for the electrical properties of a semiconductor material according to claim 7, characterized in that: The driver (11) is a driving motor.

9. The physical property testing device for the electrical properties of a semiconductor material according to any one of claims 2 to 8, characterized in that: The support component (3) includes a test bench (15) fixedly arranged in the box body (7). A placement groove (16) is arranged on the test bench (15). Contact blocks (17) are slidably arranged at both ends in the placement groove (16). The two contact blocks (17) are respectively electrically connected with an electrical property tester (2).

10. The physical property testing device for the electrical performance of a semiconductor material according to claim 9, wherein: The heating unit (4) includes a heating wire wound around the test bench (15).

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