Semiconductor power module inspection jig

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a semiconductor power module inspection jig which comprises a jig body. The jig body is provided with a positioning structure for positioning the power module; a plurality of detection structures are arranged on the jig body, and the detection structures are matched with pins of a power module positioned on the jig body one by one. When the power module is placed in the positioning groove, the number and the position of each detection structure are in one-to-one correspondence based on the pins of the power module, and when one or more pins are biased, the pins do not correspond to the corresponding detection structures, so that whether the postures of the pins of the power module are correct or not is detected, standardized detection is facilitated, and the detection efficiency is improved. And the detection efficiency and the detection effect are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, and particularly relates to a semiconductor power module inspection fixture. Background Art

[0002] A power module is a module formed by combining power electronic devices according to a certain function and then encapsulating them. Power modules are widely used in industries such as rail transit, aerospace, new energy vehicles, and wind power generation.

[0003] The power module is provided with pins (PINs). The functions of the pins of the power module mainly include the input of control signals, the output of current, and the monitoring of voltage. The pin design and functions of the power module are to achieve efficient power conversion and control. They play a crucial role in electronic devices and are an indispensable part.

[0004] Whether the posture of the pins of the power module is correct directly affects the use of the power module. Therefore, in the encapsulation process, it is necessary to check the pins of the power module to confirm the product quality. The existing detection method is usually manual visual inspection. This test method takes a long time and is prone to the phenomenon of abnormal pin escape, and the detection effect has great uncertainty.

[0005] For this reason, the utility model provides a semiconductor power module inspection fixture, which uniformly detects the pins of the power module through this fixture, improving the detection efficiency and detection effect. Summary of the Utility Model

[0006] The purpose of the utility model is to provide a semiconductor power module inspection fixture, which uniformly detects the pins of the power module through this fixture, improving the detection efficiency and detection effect.

[0007] The utility model provides a semiconductor power module inspection fixture, including: a fixture body;

[0008] The fixture body is provided with a positioning structure for positioning the power module;

[0009] The fixture body is provided with a plurality of detection structures, and each of the detection structures is in one-to-one correspondence with the pins of the power module positioned on the fixture body.

[0010] Optionally, the positioning structure is a positioning groove opened on the fixture body and adapted to the shape of the power module.

[0011] Optionally, the detection structure is a detection hole opened on the fixture body for the pins to be inserted.

[0012] Optionally, when the positioning structure is a positioning groove, the detection hole is opened at the bottom of the positioning groove.

[0013] Optionally, a pick-and-place groove is provided on the fixture body, and both the pick-and-place groove and the positioning groove are provided on the first side of the fixture body;

[0014] The pick-and-place groove is located on at least one side of the positioning groove along a first direction, the first direction is parallel to the first side, and the pick-and-place groove communicates with the positioning groove along the first direction.

[0015] Optionally, the pick-and-place groove is located on both sides of the positioning groove along the first direction;

[0016] And / or, the pick-and-place groove communicates along the first direction to the outer wall of the fixture body;

[0017] And / or, the length of the pick-and-place groove along a second direction is less than the length of the positioning groove along the second direction, the second direction is parallel to the first side and perpendicular to the first direction.

[0018] Optionally, two sets of spaced support structures are provided at the bottom of the positioning groove, the height of the support structure is less than the depth of the positioning groove, and the detection structure is arranged in the area between the two sets of support structures at the bottom of the positioning groove.

[0019] Optionally, the support structure is a support step protruding from the bottom of the positioning groove, and the support step is connected to the side wall of the positioning groove.

[0020] Optionally, an avoidance groove is provided on the fixture body.

[0021] Optionally, an anti-reverse mark is provided on the fixture body.

[0022] With such a configuration, when the power module is placed in the positioning groove, the number and position of each detection structure correspond one by one to the pins of the power module. When one or more pins are offset, the pins do not correspond to the corresponding detection structures. Based on this, the posture of each pin of the power module is detected for correctness. This fixture can detect all the pins on the power module at one time, can quickly complete the pin detection, improve the detection efficiency and reduce the labor intensity of the workers; and this fixture is conducive to realizing the standardized detection of the pins, improving the detection effect and improving the phenomenon of abnormal pin detection escape. Description of the Drawings

[0023] Figure 1 It is a schematic structural diagram of a semiconductor power module inspection fixture according to an embodiment of the present invention;

[0024] Figure 2 It is a schematic top view structural diagram of a semiconductor power module inspection fixture according to an embodiment of the present invention;

[0025] Figure 3Schematic cross-sectional structure diagram of a semiconductor power module inspection fixture according to an embodiment of the present utility model.

[0026] Among them, in the drawings:

[0027] 10 - fixture body; 101 - first side wall; 11 - detection hole; 12 - positioning groove; 13 - picking and placing groove; 14 - avoidance groove; 15 - support step; 16 - support leg; 17 - arrow mark;

[0028] a - first direction; b - second direction. Detailed implementation manners

[0029] The semiconductor power module inspection fixture proposed by the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the present utility model will be clearer. It should be noted that the accompanying drawings are all in a very simplified form and use non-precise scales, only for the purpose of facilitating and clearly assisting in explaining the purpose of the embodiments of the present utility model.

[0030] As used in the present utility model, the singular forms "a", "an" and "the" include plural objects, the term "or" is generally used in the sense of including "and / or", the term "several" is generally used in the sense of including "at least one", the term "at least two" or "multiple" is generally used in the sense of including "two or more", in addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second", "third" may explicitly or implicitly include one or at least two of such features. In addition, as used in the present utility model, "installed", "connected", "coupled", an element "disposed" on another element should be understood in a broad sense, usually only indicating that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the two elements can be directly or indirectly connected, coupled, cooperated or transmitted through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, an element can be inside, outside, above, below or on one side of another element, etc. in any orientation, unless otherwise explicitly specified in the content. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used with respect to the exemplary embodiments as shown in the figures, with the upward or upper direction towards the top of the corresponding figure and the downward or lower direction towards the bottom of the corresponding figure.

[0031] In this embodiment, a semiconductor power module inspection fixture is provided.

[0032] Please refer to Figures 1 to 3 As shown, the semiconductor power module inspection fixture includes: a fixture body 10;

[0033] In this embodiment, the fixture body 10 has a flat cuboid structure.

[0034] Four raised feet 16 are provided at the four corners of the bottom of the fixture body 10.

[0035] The fixture body 10 is provided with a positioning structure for positioning the power module.

[0036] Combined with Figure 1 As shown, in this embodiment, the upper end surface of the fixture body 10 serves as the first side wall 101, and the positioning structure is a positioning groove 12 opened on the first side wall 101 and adapted to the shape of the power module.

[0037] In this embodiment, the power module is a cuboid, so the positioning groove 12 is also a rectangular groove as a whole. When the power module is placed in the positioning groove 12, the power module is naturally positioned. In other alternative embodiments, the specific shape of the positioning groove 12 can be adjusted adaptively based on the shape of the actual power module.

[0038] In this embodiment, the positioning structure uses a groove-shaped structure that can accommodate the entire power module to position the power module. In other alternative embodiments, the positioning structure can use a positioning pin to cooperate with the recessed position on the power module, or use a positioning hole to cooperate with the protruding position on the power module to position the power module. The positioning structure can be adjusted adaptively based on the actual structure of the power module.

[0039] Please continue to refer to Figure 1 and Figure 2 As shown, a plurality of detection structures are provided on the fixture body 10, and each of the detection structures is in one-to-one correspondence with the pins of the power module positioned on the fixture body 10.

[0040] In this embodiment, the detection structure is a detection hole 11 opened at the bottom of the positioning groove 12 for the pins to be inserted, and the detection hole 11 penetrates through the fixture body 10.

[0041] The number and positions of the respective detection holes 11 are set based on the pins of the power module. When the power module is placed with its pins facing down in the positioning groove 12 and positioned, its respective pins are adaptively inserted into the detection holes 11. When one or more pins are offset, the pins do not correspond to the corresponding detection holes 11, so the pins cannot be inserted into the detection holes 11. Based on this, the attitude of each pin of the power module is detected for correctness. This fixture can detect all the pins on the power module at one time, quickly complete the pin detection, improve the detection efficiency and reduce the labor intensity of workers; and this fixture is conducive to realizing the standardized detection of pins, improving the detection effect, and improving the phenomenon of abnormal pin detection escape.

[0042] In this embodiment, the detection hole 11 is a circular hole. In other alternative embodiments, the detection hole 11 can be an elliptical hole, a polygonal hole, etc., as long as it is ensured that the cross-section of the detection hole 11 is slightly larger than the end face of the pin for the pin to be inserted.

[0043] In this embodiment, the detection holes 11 are provided at the bottom of the positioning groove 12. When the power module is placed in the positioning groove 12, the pins can be inserted into the detection holes 11 with the pins facing down. In other alternative embodiments, the fixture body 10 can also be a two-piece structure that can move relative to each other. The positioning groove 12 is provided on one of the two-piece structures, and the detection holes 11 are provided on the other two-piece structure. Then, when the power module is placed in the positioning groove 12, the pins face up and are aligned with the detection holes 11 of the other two-piece structure. Then, by driving the other two-piece structure to move closer to the power module, the pins are inserted into the respective detection holes 11 to achieve the detection of the pins. The relative positional relationship between the detection holes 11 and the positioning groove 12 can be adjusted adaptively based on the actual structure of the fixture body 10.

[0044] In this embodiment, the detection structure uses the detection holes 11 to detect the positions of the respective pins. In other alternative embodiments, the detection structure can also be a plurality of electrical connection structures. When each pin is in direct contact with the electrical connection structure, electrical conduction is achieved. When one of the pins is offset and does not contact the electrical connection structure, electrical conduction cannot be achieved. The detection of the pins is achieved by detecting the number of electrical conductions. Or the detection structure can also use other known detection structures, which will not be elaborated here.

[0045] Please continue to refer to Figures 1 to 3 As shown, a pick-and-place groove 13 is provided on the fixture body 10, and both the pick-and-place groove 13 and the positioning groove 12 are provided on the first side 101 of the fixture body 10;

[0046] There are two pick-and-place grooves 13, and the two pick-and-place grooves 13 are respectively located on both sides of the positioning groove 12 along the first direction a. The first direction a is parallel to the first side 101, and the first direction a corresponds to the width direction of the positioning groove 12. The pick-and-place groove 13 communicates with the positioning groove 12 along the first direction a, and the pick-and-place groove 13 communicates to the outer wall of the fixture body 10 along the first direction a.

[0047] The pick-and-place groove 13 is a rectangular groove, and it is located at the middle position of the positioning groove 12 along the second direction b. The second direction b is parallel to the first side 101 and perpendicular to the first direction a, and the second direction b corresponds to the length direction of the positioning groove 12.

[0048] In this embodiment, the bottom of the pick-and-place groove 13 is higher than the bottom of the positioning groove 12. The length of the pick-and-place groove 13 along the second direction b is less than the length of the positioning groove 12 along the second direction b, so as to ensure that the setting of the pick-and-place groove 13 does not affect the positioning function of the positioning groove 12.

[0049] The above setting of the pick-and-place groove 13 forms an avoidance structure on both sides of the positioning groove 12 along the first direction a, which is beneficial for holding by hand or for the robotic arm to clamp the power module through the positioning groove, facilitating the pick-and-place of the power module.

[0050] In this embodiment, the pick-and-place groove 13 is a rectangular groove. In other alternative embodiments, the pick-and-place groove 13 can be set as an arc or other special-shaped grooves, and the shape of the pick-and-place groove 13 should be set based on meeting the pick-and-place of the power module.

[0051] In this embodiment, the pick-and-place groove 13 is located on both sides of the positioning groove 12 along the first direction a. In other alternative embodiments, the pick-and-place groove 13 can be located on one side of the positioning groove 12 along the first direction a, or the pick-and-place groove 13 can be arranged around the positioning groove 12.

[0052] In this embodiment, the pick-and-place groove 13 communicates with the positioning groove 12 in the first direction a and communicates to the outer side wall of the fixture body 10. In other alternative embodiments, the pick-and-place groove 13 can only communicate with the positioning groove 12 and may not communicate with the outer wall of the fixture body 10. At this time, the pick-and-place groove 13 retains an appropriate width along the first direction a for fingers or the robotic arm to grab the power module.

[0053] Please continue to refer to Figures 1 to 3 As shown, there are two groups of spaced support structures provided at the bottom of the positioning groove 12. The height of the support structure is less than the depth of the positioning groove 12, and the detection structure (detection hole 11) is provided in the area between the two groups of support structures at the bottom of the positioning groove 12.

[0054] In this embodiment, the support structure is a support step 15 protruding from the bottom of the positioning groove 12. Two support steps 15 are arranged along the second direction b, and the two support steps 15 are respectively connected to two opposite side walls of the positioning groove 12 along its length direction (the second direction b). The dimension of the support step 15 along the first direction a is the same as that of the positioning groove 12 along the first direction a, that is, the length of the support step 15 is the same as the width dimension of the positioning groove 12, and the support step 15 fills the width direction of the positioning groove 12. The height of the support step 15 is less than the depth of the positioning groove 12, so that when both sides of the power module are supported on the support step 15, a part of the power module is located inside the positioning groove 12. The heights of the two support steps 15 are the same, so that the support surfaces ( Figure 1 the upper surfaces of the support steps 15 in

[0055] The above setting of the support step 15 enables the two length sides of the power module placed in the positioning groove 12 to be supported on the support step 15, that is, there is a certain distance between the position of the pins in the middle of the power module and the bottom of the positioning groove 12. In addition, the height of the support step 15 should be less than the length of the pins to ensure that when the power module is supported on the support step 15, the pins can be inserted into the corresponding detection holes 11.

[0056] Through the above setting of the support structure, the root of the pin does not interfere with the bottom of the positioning groove 12, which is convenient for pin detection.

[0057] In other alternative embodiments, the support structure can be several independent bosses protruding from the bottom of the positioning groove 12 or a support member connected to the side wall of the positioning groove 12. The specific structure of the support structure can be adjusted adaptively based on the actual structure.

[0058] Please continue to refer to Figures 1 to 3 As shown, an anti-reverse mark is provided on the fixture body 10. The anti-reverse mark is an arrow mark 17 provided on the first side 101 of the fixture body 10, and the arrow mark 17 corresponds to a corner of the positioning groove 12. The anti-reverse mark can mark the left-right direction and up-down direction of the fixture body 10 to prevent the fixture body 10 from being placed reversely.

[0059] In other alternative embodiments, the anti-reverse mark can be a structure with significant features such as a protrusion, a groove or a color mark provided on the first side 101. The anti-reverse mark can be adjusted adaptively based on the actual structure of the fixture body 10.

[0060] Please continue to refer to Figures 1 to 3 As shown, an avoidance groove 14 is provided on the fixture body 10. The avoidance groove 14 penetrates through the fixture body 10 in a direction perpendicular to the first side 101. The avoidance groove 14 is used to avoid the protruding structure on the power module.

[0061] In this embodiment, the avoidance groove 14 is a circular hole structure, a part of which penetrates through the bottom of the positioning groove 12, a part penetrates through the support step 15, and a part penetrates outside the positioning groove 12. The avoidance groove 14 is located at the middle position of the positioning groove 12 along the first direction a, and the avoidance groove 14 is symmetrically arranged along the second direction b.

[0062] The setting of the avoidance groove 14 is used to avoid the protruding structure on the power module placed in the positioning groove 12. In this embodiment, the shape of the avoidance groove 14 is adapted to the protruding structure on the power module. Therefore, the avoidance groove 14 not only plays an avoidance role, but also plays a role in positioning the power module.

[0063] In other alternative embodiments, the shape and setting position of the avoidance groove 14 can be adaptively adjusted based on actual avoidance and positioning requirements.

[0064] In this specification, each embodiment is described in a progressive manner. The key point of each embodiment is to illustrate the differences from other embodiments. For the same or similar parts among the embodiments, reference can be made to each other.

[0065] The above description is only a description of the preferred embodiments of the present invention, and does not limit the scope of the present invention in any way. Any changes and modifications made by those of ordinary skill in the art of the present invention according to the above disclosure are within the protection scope of the claims.

Claims

1. A semiconductor power module inspection fixture, characterized in that Including: The fixture body; A positioning structure for positioning the power module is provided on the fixture body; A plurality of detection structures are provided on the fixture body, and each of the detection structures is in one-to-one correspondence with the pins of the power module positioned on the fixture body.

2. The semiconductor power module inspection fixture according to claim 1, characterized in that, The positioning structure is a positioning groove formed on the fixture body and adapted to the shape of the power module.

3. The semiconductor power module inspection fixture according to claim 1 or 2, characterized in that, The detection structure is a detection hole formed on the fixture body for the insertion of pins.

4. The semiconductor power module inspection fixture according to claim 3, wherein, When the positioning structure is a positioning groove, the detection hole is formed at the bottom of the positioning groove.

5. The semiconductor power module inspection jig according to claim 2, wherein A pick-and-place groove is provided on the fixture body, and both the pick-and-place groove and the positioning groove are provided on the first side of the fixture body; The pick-and-place groove is located on at least one side of the positioning groove along a first direction, the first direction is parallel to the first side, and the pick-and-place groove communicates with the positioning groove along the first direction.

6. The semiconductor power module inspection fixture according to claim 5, wherein, The pick-and-place groove is located on both sides of the positioning groove along the first direction; And / or, the pick-and-place groove communicates with the outer wall of the fixture body along the first direction; And / or, the length of the pick-and-place groove along a second direction is less than the length of the positioning groove along the second direction, the second direction is parallel to the first side and perpendicular to the first direction.

7. The semiconductor power module inspection fixture according to claim 2, characterized in that, Two sets of spaced support structures are provided at the bottom of the positioning groove, the height of the support structure is less than the depth of the positioning groove, and the detection structure is provided in the area between the two sets of support structures at the bottom of the positioning groove.

8. The semiconductor power module inspection fixture according to claim 7, wherein, The support structure is a support step protruding from the bottom of the positioning groove, and the support step is connected to the side wall of the positioning groove.

9. The semiconductor power module inspection fixture according to claim 1, wherein, An avoidance groove is provided on the fixture body.

10. The semiconductor power module inspection fixture according to claim 1, characterized in that, An anti-reverse mark is provided on the fixture body.

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