Auxiliary structure for preventing fine lines of mask from being broken

Abstract

The utility model discloses an auxiliary structure for preventing a fine line of a mask from being broken, which comprises a plurality of strip-shaped connectors, two ends of each connector are respectively a first connecting end and a second connecting end, and the first connecting ends and the second connecting ends are respectively used for being connected with sharp corners of two plate lines with sharp corners, which are independently arranged on the mask. The problem that a sharp corner area of a plate line which is arranged in an isolated mode and provided with a sharp corner of a mask plate is prone to breakage in the cleaning process can be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of anti-breakage of mask plate lines, and particularly relates to an auxiliary structure for preventing fine lines of a mask plate from breaking. Background Technique

[0002] In the screen semiconductor industry, due to the continuous progress of science and technology, the graphic design of integrated circuits is getting smaller and smaller, and the accuracy requirements are getting higher and higher. As a key upstream material in the screen semiconductor manufacturing process, the supporting process of the mask plate also needs to be further developed and improved to better meet the needs of customers. With the continuous reduction of the critical dimension of the pattern, the ability of the plate line to resist transverse shear is getting lower and lower. Especially for the sharp corner area of the isolated plate line, the risk of breakage during the brush cleaning process increases significantly. Content of the Utility Model

[0003] The purpose of the utility model is to provide an auxiliary structure for preventing fine lines of a mask plate from breaking, and solve the problem that the sharp corner area of the plate line with sharp corners isolatedly arranged on the mask plate is prone to breakage during the cleaning process.

[0004] The utility model is realized by the following technical solutions:

[0005] An auxiliary structure for preventing fine lines of a mask plate from breaking, comprising a plurality of connecting bodies. The connecting bodies are strip-shaped. The two ends of the connecting body are respectively a first connecting end and a second connecting end. The first connecting end and the second connecting end are respectively used for connecting with the sharp corners of two isolated plate lines with sharp corners on the mask plate.

[0006] Optionally, the included angle formed at the connection between the first connecting end and the plate line with a sharp corner is an acute angle; the included angle formed at the connection between the second connecting end and the plate line with a sharp corner is an obtuse angle.

[0007] Optionally, the connecting body comprises a first connecting section and a second connecting section. Both the first connecting section and the second connecting section are straight line segments. One end of the first connecting section is connected to one end of the second connecting section; the end of the first connecting section far from the second connecting section is the first connecting end; the end of the second connecting section far from the first connecting section is the second connecting end.

[0008] Optionally, the included angle between the first connecting section and the second connecting section is an obtuse angle.

[0009] Optionally, the length of the first connecting section is less than the length of the second connecting section.

[0010] Optionally, the number of the connectors is 1; the two sharp-cornered plate lines connected to the connector are a first plate line and a second plate line respectively, and the length of the first plate line is longer than that of the second plate line; the roots of the first plate line and the second plate line are both connected to the same edge of the mask plate, and the sharp corners of the first plate line and the second plate line extend towards the middle of the mask plate; the included angle between the first plate line and the second plate line is an acute angle, so as to form a setting space between the sharp corner of the first plate line and the sharp corner of the second plate line; the connector is located in the setting space, so that the first plate line and the second plate line are connected into a closed triangular shape.

[0011] Optionally, the mask plate is a rectangular plate; the roots of the first plate line and the second plate line are both connected to the first long side of the mask plate; based on the first long side, the slope of the first connection segment is greater than that of the first plate line.

[0012] Optionally, the slope of the second connection segment is less than that of the second plate line.

[0013] Optionally, a perpendicular line is drawn from the sharp corner of the first plate line to the first long side to obtain a reference perpendicular line; the distance between the second connection segment and the reference perpendicular line gradually increases along the direction close to the second plate line.

[0014] Optionally, the connector is in the shape of a strip with a uniform width, and the width of the connector is less than the width of the sharp-cornered plate line isolatedly arranged on the mask plate; the width of the connector is 0.4-0.6 μm; the distance between the connection point of the first connection segment and the second connection segment and the adjacent plate line on the mask plate is > 2.2 μm.

[0015] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0016] The auxiliary structure for preventing the fine lines of the mask plate from breaking provided by the present invention, by arranging a strip-shaped connector, and connecting the two ends of the connector to the sharp corners of the two sharp-cornered plate lines isolatedly arranged on the mask plate respectively, on the one hand, increases the lateral width at the sharp corners of the sharp-cornered plate lines isolatedly arranged, so as to effectively improve the shear resistance, and on the other hand, connects the two sharp-cornered plate lines isolatedly arranged into one body through the connector, so that the two support each other through the connector, and at the same time improves the structural performance at the sharp corners of the two, thereby effectively solving the problem that the sharp corner area of the sharp-cornered plate lines isolatedly arranged on the mask plate is prone to breakage during the cleaning process. Description of the Drawings

[0017] The drawings described herein are used to provide a further understanding of the embodiments of the present invention, form a part of this application, and do not limit the embodiments of the present invention. In the drawings:

[0018] Figure 1Schematic diagram of an auxiliary structure for preventing fine lines on a mask from breaking provided by an embodiment of the present utility model;

[0019] Figure 2 Schematic diagram of a mask provided by an embodiment of the present utility model;

[0020] Figure 3 Schematic diagram of the auxiliary structure for preventing fine lines on a mask from breaking provided by an embodiment of the present utility model, which is arranged behind the mask;

[0021] Figure 4 is Figure 3 partial enlarged view of.

[0022] Labels in the drawings and corresponding component names:

[0023] 1 - First board line; 2 - Second board line; 10 - Connector; 101 - First connection segment; 102 - Second connection segment; 11 - First connection end; 12 - Second connection end. Specific implementation manners

[0024] To make the objectives, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below in conjunction with embodiments and drawings. The illustrative embodiments of the present utility model and their descriptions are only used to explain the present utility model and do not limit the present utility model.

[0025] Embodiment

[0026] First, please refer to Figure 2 , which is the wiring pattern of the mask adopted in this embodiment. This embodiment will be described in terms of this wiring method of the mask. Any mask shape and wiring method in the prior art can be adopted in other embodiments, as long as the mask has at least two isolated board lines with sharp corners.

[0027] Please refer to Figures 1 to 4 , this embodiment provides an auxiliary structure for preventing fine lines on a mask from breaking, including a plurality of connectors 10. The connectors 10 are strip-shaped, and the two ends of the connectors 10 are respectively a first connection end 11 and a second connection end 12. The first connection end 11 and the second connection end 12 are respectively used to connect with the sharp corners of two isolated board lines with sharp corners on the mask.

[0028] The auxiliary structure for preventing the fine lines of the mask plate from breaking provided by the utility model increases the lateral width at the sharp corners of the isolated plate lines with sharp corners on the mask plate by connecting the two isolated plate lines with sharp corners on the mask plate through the strip-shaped connecting body 10 at both ends thereof. On the one hand, it effectively improves the shear resistance. On the other hand, the two isolated plate lines with sharp corners are connected into one body through the connecting body 10, so that the two support each other through the connecting body 10, and at the same time improves the structural performance at the sharp corners of the two, thus effectively solving the problem that the sharp corner areas of the isolated plate lines with sharp corners on the mask plate are prone to break during the cleaning process.

[0029] In order to make the whole structure more inclined to a triangular shape to improve the structural stability, the included angle formed at the connection between the first connection end 11 and the plate line with a sharp corner is an acute angle; the included angle formed at the connection between the second connection end 12 and the plate line with a sharp corner is an obtuse angle.

[0030] To further explain the specific structure of the connecting body 10, the connecting body 10 includes a first connecting section 101 and a second connecting section 102. Both the first connecting section 101 and the second connecting section 102 are straight line segments. One end of the first connecting section 101 is connected to one end of the second connecting section 102; the end of the first connecting section 101 far from the second connecting section 102 is the first connection end 11; the end of the second connecting section 102 far from the first connecting section 101 is the second connection end 12.

[0031] By setting that the connecting body 10 includes two straight line segments, namely the first connecting section 101 and the second connecting section 102, it is convenient to adjust the angles of the first connection end 11 and the second connection end 12, so as to adapt to the isolated plate lines with sharp corners with different inclination angles.

[0032] To further improve the structural stability and avoid generating "sharp corners" on the connecting body 10 itself, the included angle between the first connecting section 101 and the second connecting section 102 is an obtuse angle.

[0033] Preferably, the length of the first connecting section 101 is less than the length of the second connecting section 102.

[0034] In order to further make the overall structure closer to a quasi-triangle to improve the structural stability, the number of the connecting bodies 10 is 1; the two plate lines with sharp corners connected to the connecting body 10 are respectively a first plate line 1 and a second plate line 2, and the length of the first plate line 1 is longer than that of the second plate line 2; the roots of the first plate line 1 and the second plate line 2 are both connected to the same edge of the mask plate, and the sharp corners of the first plate line 1 and the second plate line 2 extend towards the middle of the mask plate; the included angle between the first plate line 1 and the second plate line 2 is an acute angle, so as to form a setting space between the sharp corner of the first plate line 1 and the sharp corner of the second plate line 2; the connecting body 10 is located in the setting space, so that the first plate line 1 and the second plate line 2 are connected into a closed quasi-triangle.

[0035] In order to further increase the width at the sharp corner of the first plate line 1 on the basis of ensuring the quasi-triangle, the mask plate is a rectangular plate; the roots of the first plate line 1 and the second plate line 2 are both connected to the first long side of the mask plate; with the first long side as a reference, the slope of the first connecting section 101 is greater than the slope of the first plate line 1.

[0036] Preferably, the slope of the second connecting section 102 is less than the slope of the second plate line 2.

[0037] In order to make the overall structure closer to a triangle, a perpendicular line is drawn from the sharp corner of the first plate line 1 to the first long side to obtain a reference perpendicular line; the distance between the second connecting section 102 and the reference perpendicular line gradually increases along the direction close to the second plate line 2.

[0038] Preferably, the connecting body 10 is in the shape of a strip with a uniform width, and the width of the connecting body 10 is less than the width of the plate line with a sharp corner isolatedly arranged on the mask plate; the width of the connecting body 10 is 0.4 - 0.6 μm, which can not only meet the quality requirements of the MASK laser direct writing lithography machine for engraving, but also is much smaller than the resolution of the client exposure machine (about 2.2 μm), and will not affect the pattern presentation of the actual design of the client; the distance between the connection point of the first connecting section 101 and the second connecting section 102 and the adjacent plate line of the mask plate > 2.2 μm, and the resolution of the client exposure machine is 2.2 μm. If the distance is too small, the connecting body will be recognized as an integral pattern by the client exposure machine and the plate line.

[0039] The above-mentioned specific implementation manners further elaborate the purpose, technical solution and beneficial effects of the present invention. It should be understood that the above-mentioned is only the specific implementation manners of the present invention, and is not used to limit the protection scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An auxiliary structure for preventing the breakage of fine lines on a photomask, characterized in that, It includes a number of connecting bodies (10). The connecting bodies (10) are strip-shaped. The two ends of the connecting body (10) are respectively a first connecting end (11) and a second connecting end (12). The first connecting end (11) and the second connecting end (12) are respectively used to connect with the sharp corners of two isolated plate lines on the mask plate.

2. The auxiliary structure for preventing the breakage of fine lines on a photomask according to claim 1, characterized in that, The included angle formed at the connection between the first connecting end (11) and the plate line with a sharp corner is an acute angle; the included angle formed at the connection between the second connecting end (12) and the plate line with a sharp corner is an obtuse angle.

3. The auxiliary structure for preventing the breakage of fine lines on a photomask according to claim 2, characterized in that, The connecting body (10) includes a first connecting segment (101) and a second connecting segment (102). Both the first connecting segment (101) and the second connecting segment (102) are straight line segments. One end of the first connecting segment (101) is connected to one end of the second connecting segment (102); The end of the first connecting segment (101) far from the second connecting segment (102) is the first connecting end (11); The end of the second connecting segment (102) far from the first connecting segment (101) is the second connecting end (12).

4. The auxiliary structure for preventing the breakage of fine lines on a photomask according to claim 3, characterized in that, The included angle between the first connecting segment (101) and the second connecting segment (102) is an obtuse angle.

5. The auxiliary structure for preventing the fine lines of the photomask from breaking according to claim 3, characterized in that, The length of the first connecting segment (101) is less than the length of the second connecting segment (102).

6. The auxiliary structure for preventing the breakage of fine lines on a photomask according to claim 5, wherein The number of the connecting bodies (10) is 1; The two plate lines with sharp corners connected to the connecting body (10) are respectively a first plate line (1) and a second plate line (2). The length of the first plate line (1) is longer than the length of the second plate line (2); The roots of the first plate line (1) and the second plate line (2) are both connected to the same edge of the mask plate. The sharp corners of the first plate line (1) and the second plate line (2) extend towards the middle of the mask plate; The included angle between the first plate line (1) and the second plate line (2) is an acute angle, so as to form a setting space between the sharp corners of the first plate line (1) and the second plate line (2); The connecting body (10) is located within the setting space, so that the first plate line (1) and the second plate line (2) are connected into a closed triangular shape.

7. The auxiliary structure for preventing the breakage of fine lines on a photomask according to claim 6, characterized in that, The mask plate is a rectangular plate; The roots of the first plate line (1) and the second plate line (2) are both connected to the first long side of the mask plate; Based on the first long side, the slope of the first connecting segment (101) is greater than the slope of the first plate line (1).

8. The auxiliary structure for preventing the breakage of fine lines on a photomask according to claim 7, characterized in that, The slope of the second connecting segment (102) is less than the slope of the second plate line (2).

9. The auxiliary structure for preventing the breakage of thin lines on a photomask according to claim 8, characterized in that, A perpendicular line is drawn from the sharp corner of the first plate line (1) to the first long side to obtain a reference perpendicular line; The distance between the second connecting segment (102) and the reference perpendicular line gradually increases along the direction close to the second plate line (2).

10. The auxiliary structure for preventing the breakage of fine lines on a photomask according to claim 3, characterized in that, The connecting body (10) is strip-shaped with a uniform width. The width of the connecting body (10) is less than the width of the plate line with a sharp corner isolatedly arranged on the mask plate; The width of the connecting body (10) is 0.4 - 0.6 μm; The distance between the connection point of the first connecting segment (101) and the second connecting segment (102) and the adjacent plate line on the mask plate > 2.2 μm.

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