Developing solution supply device

Abstract

The utility model discloses a developing solution supply device which comprises a main body structure, the main body structure comprises a box body and a box door, the box door is installed on one side of an opening of the box body, a bearing box used for bearing printing plates is arranged in the box body, and a notch is formed in the inner bottom of the bearing box; the supply mechanism is used for supplying a developing solution; the supply mechanism comprises a storage pool and a pump body, the storage pool is arranged at the inner bottom of the box body, the pump body is mounted on the outer wall of one side of the box body, a spray head is arranged at the inner top of the box body, a plurality of groups of spray holes are distributed in the bottom of the spray head at equal intervals in an array mode, the spray head is located over the bearing box, and the pump body extracts the developing solution in the storage pool and conveys the developing solution to the spray head. By arranging the supply mechanism, the developing solution can be supplied to the plate material, and the redundant developing solution can be refluxed for cyclic utilization, so that the utilization rate of the developing solution is improved, the production cost is reduced, and remarkable economic and environment-friendly benefits are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of developing solution supply equipment, in particular to a developing solution supply device. Background Technique

[0002] A developing solution is a chemical solvent mainly used to dissolve the soluble areas of the photoresist after exposure in the lithography process. In microelectronics manufacturing, the developing solution is crucial for precisely transferring the circuit pattern onto the surface of the silicon wafer. Depending on the type of photoresist, the developing solution can be an alkaline solution or an organic solvent. For example, a positive photoresist developing solution is usually a strong alkali solution diluted with water, such as an aqueous solution of tetramethylammonium hydroxide (TMAH), while a negative photoresist developing solution may be an organic solvent, such as xylene.

[0003] When developing a printing plate, a developing solution needs to be supplied. After retrieval, Chinese Patent Application No.: CN201320043417.7 discloses a developing solution spraying device, including: a plurality of mutually parallel spray pipes arranged above the substrate, and a developing solution supply unit connected to the spray pipes; a plurality of nozzles are opened on the spray pipes, and the developing solution is sprayed onto the surface of the substrate through the nozzles; the spray pipes are inclined with respect to the moving direction of the substrate, and the nozzles on adjacent two spray pipes are alternately arranged along the central axis direction of the spray pipes. By inclining the spray pipes with respect to the moving direction of the substrate, the length of the spray pipe corresponding directly above the substrate can be extended, the number of nozzles can be increased, and the uniformity of the developing solution spraying can be improved; the alternate arrangement of the nozzles on adjacent two spray pipes can make the distribution of the nozzles more uniform, reduce the mutual interference between the nozzles, and improve the yield of the developing solution spraying.

[0004] The above technical solution still has defects, that is, it lacks the function of circular supply. Like traditional developing equipment, the developing solution is often used once, which not only has a high cost, but also the waste developing solution causes a burden on the environment. Therefore, we need to propose a developing solution supply device. Content of the Utility Model

[0005] The purpose of the utility model is to provide a developing solution supply device, which has a simple structure and is convenient to use. Through the setting of the supply mechanism, the developing solution can be supplied to the plate material, and the excess developing solution can be refluxed for circular utilization, which not only improves the utilization rate of the developing solution, but also reduces the production cost, and has significant economic and environmental benefits, so as to solve the problems raised in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solution:

[0007] A developing solution supply device, including:

[0008] A main body structure;

[0009] The main body structure includes a box body and a box door. The box door is installed on the opening side of the box body. A carrier box for carrying plates is arranged inside the box body, and a notch is provided at the inner bottom of the carrier box;

[0010] It further includes a supply mechanism for supplying developing solution;

[0011] The supply mechanism includes a storage pool and a pump body. The storage pool is arranged at the inner bottom of the box body, and the pump body is installed on the outer wall of one side of the box body. A nozzle is provided at the inner top of the box body. Multiple groups of spray holes are evenly distributed at equal intervals at the bottom of the nozzle, and the nozzle is located directly above the carrier box. The pump body extracts the developing solution in the storage pool and transports it to the nozzle.

[0012] Preferably, the liquid inlet end of the pump body is fixedly connected with a liquid inlet pipe. The liquid inlet pipe is hermetically inserted into the storage pool, and the end of the liquid inlet pipe extends to the inner bottom of the storage pool.

[0013] Preferably, a filter head is threadedly installed at the end of the liquid inlet pipe located inside the storage pool. The filter head is spherical in shape, and filter holes are distributed in a honeycomb pattern on the filter head.

[0014] Preferably, the liquid outlet end of the pump body is fixedly connected with a liquid outlet pipe. The liquid outlet pipe is hermetically inserted into the top of the box body, and the end of the liquid outlet pipe extends to the inner top of the box body and is fixedly connected to the nozzle.

[0015] Preferably, the carrier box includes an integrally formed surrounding plate and a conical cover. A notch is opened at the inner top of the conical cover, and a filter mesh plate is embedded in the notch.

[0016] Preferably, bearing plates for carrying plates are symmetrically arranged on the inner wall of the carrier box, and a clamping plate is slidably installed between the two bearing plates.

[0017] Preferably, a convex plate is integrally formed at the lower end of the clamping plate. The convex plate is slidably matched between the two bearing plates. The clamping plate is designed in an inverted L shape, and the inner wall of the clamping plate is an inclined surface that slopes downward.

[0018] Preferably, a connecting rod is arranged on the outer wall of the clamping plate. The connecting rod is slidably inserted into the carrier box, and a baffle is arranged at the end of the connecting rod. A pull ring is arranged on the baffle, and a compression spring is sleeved on the connecting rod between the clamping plate and the carrier box.

[0019] Preferably, side plates are symmetrically arranged on both sides of the top of the carrier box. Handles are arranged on the tops of the side plates, and positioning columns are symmetrically arranged at the bottoms of the side plates.

[0020] Preferably, support plates are symmetrically arranged on the inner walls of both sides of the box body. Positioning holes are opened on the support plates, and the positioning holes correspond to the positioning columns at the bottoms of the side plates.

[0021] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0022] By setting a main structure including a box body and a box door, a bearing box with a notch is arranged in the box body, and a supply mechanism including a storage pool and a pump body is also arranged. The liquid inlet pipe of the pump body extends to the inner bottom of the storage pool, and the liquid outlet pipe of the pump body extends to the inner top of the box body and is connected to a spray head with multiple groups of spray holes. The device has a simple structure and is convenient to use. Through the setting of the supply mechanism, the developing solution can be supplied to the plate material, and the redundant developing solution can be recycled by reflux, which not only improves the utilization rate of the developing solution, but also reduces the production cost, and has significant economic and environmental benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic structural diagram of the utility model;

[0024] Figure 2 is a schematic structural diagram of the spray head of the utility model;

[0025] Figure 3 is a schematic structural diagram of the storage pool of the utility model;

[0026] Figure 4 is a schematic structural diagram of the bearing box of the utility model;

[0027] Figure 5 is a schematic structural diagram of the filter screen plate of the utility model.

[0028] In the figure: 1. Box body; 2. Box door; 3. Storage pool; 4. Bearing box; 5. Pump body; 6. Liquid inlet pipe; 7. Spray head; 8. Spray holes; 9. Liquid outlet pipe; 10. Filter head; 11. Drain pipe; 12. Filter screen plate; 13. Bearing plate; 14. Clamping plate; 15. Connecting rod; 16. Compression spring; 17. Baffle; 18. Pull ring; 19. Side plate; 20. Handle; 21. Positioning column; 22. Support plate; 23. Positioning hole. DETAILED DESCRIPTION OF THE INVENTION

[0029] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0030] Please refer to Figures 1-3 , the present utility model provides a technical solution:

[0031] A developing solution supply device, comprising:

[0032] Main body structure; the main body structure includes a box body 1 and a box door 2. The box door 2 is installed on the opening side of the box body 1. A loading box 4 for carrying plates is arranged inside the box body 1, and a notch is provided at the inner bottom of the loading box 4.

[0033] It also includes a supply mechanism for supplying developing solution; the supply mechanism includes a storage tank 3 and a pump body 5. The storage tank 3 is arranged at the inner bottom of the box body 1, the pump body 5 is installed on one outer wall of the box body 1, a nozzle 7 is arranged at the inner top of the box body 1, and multiple groups of spray holes 8 are evenly arranged in an array at the bottom of the nozzle 7, and the nozzle 7 is located directly above the loading box 4. The pump body 5 extracts the developing solution in the storage tank 3 and transports it to the nozzle 7.

[0034] The liquid inlet end of the pump body 5 is fixedly connected with a liquid inlet pipe 6. The liquid inlet pipe 6 is hermetically inserted into the storage tank 3, and the end of the liquid inlet pipe 6 extends to the inner bottom of the storage tank 3. A filter head 10 is threadedly installed at the end of the liquid inlet pipe 6 located inside the storage tank 3. The filter head 10 is spherical, and filter holes are distributed in a honeycomb shape on the filter head 10. The liquid outlet end of the pump body 5 is fixedly connected with a liquid outlet pipe 9. The liquid outlet pipe 9 is hermetically inserted into the top of the box body 1, and the end of the liquid outlet pipe 9 extends to the inner top of the box body 1 and is fixedly connected with the nozzle 7.

[0035] By setting the main body structure including the box body 1 and the box door 2, a loading box 4 with a notch is arranged inside the box body 1, and a supply mechanism including a storage tank 3 and a pump body 5 is also set. The liquid inlet pipe 6 of the pump body 5 extends to the inner bottom of the storage tank 3, and the liquid outlet pipe 9 of the pump body 5 extends to the inner top of the box body 1 and is connected to the nozzle 7 with multiple groups of spray holes 8. During use, open the box door 2, place the exposed plate in the loading box 4, close the box door 2, the pump body 5 works to extract the developing solution in the storage tank 3 through the liquid inlet pipe 6 and transport it to the nozzle 7 through the liquid outlet pipe 9. The nozzle 7 sprays the developing solution on the plate surface through the spray holes 8, so as to perform the developing operation;

[0036] The excess developing solution during the developing process flows back to the storage tank 3 directly below through the notch at the inner bottom of the loading box 4, thus realizing the recycling of the developing solution;

[0037] Generally speaking, the structure of this device is simple and easy to use. Through the setting of the supply mechanism, the developing solution can be supplied to the plate, and the excess developing solution can be recycled by flowing back, which not only improves the utilization rate of the developing solution but also reduces the production cost, and has significant economic and environmental benefits.

[0038] In addition, please refer to Figures 4-5 :

[0039] The loading box 4 includes an integrally formed surrounding plate and a conical cover. A notch is opened at the inner top of the conical cover, and a filter mesh plate 12 is embedded in the notch.

[0040] By arranging a filter screen plate 12 in the notch, preliminary filtration can be achieved during the circulation of the excess developer, removing large particle impurities in the developer, such as undissolved developer, film fragments, etc. At the same time, a spherical filter head 10 with filter holes is installed at the end of the liquid inlet pipe 6, which can achieve secondary filtration before the developer is circulated and supplied, thereby improving the quality of the recycled developer;

[0041] Among them, when the plate is developed in the carrier box 4, the surrounding plate can prevent the developer from splashing, and the conical cover can divert the excess developer and return it to the storage tank 3 through the notch with the filter screen plate 12.

[0042] Furthermore, please refer to Figures 4-5 :

[0043] Carrying plates 13 for carrying the plate are symmetrically arranged on the inner wall of the carrier box 4. A clamping plate 14 is slidably installed between the two groups of carrying plates 13. A convex plate is integrally formed at the lower end of the clamping plate 14, and the convex plate is slidably matched between the two groups of carrying plates 13. The clamping plate 14 is designed in an inverted L shape, and the inner wall of the clamping plate 14 is an inclined surface that slopes downward. A connecting rod 15 is arranged on the outer wall of the clamping plate 14. The connecting rod 15 is slidably inserted into the carrier box 4, and a baffle 17 is arranged at the end of the connecting rod 15. A pull ring 18 is arranged on the baffle 17. A compression spring 16 is sleeved on the connecting rod 15 between the clamping plate 14 and the carrier box 4.

[0044] During use, pull the pull ring 18, place the plate between the two groups of carrying plates 13 for carrying, and then release the pull ring 18. Under the action of the compression spring 16, the two groups of clamping plates 14 can position the plate to prevent the plate from shifting during the developing process;

[0045] Among them, due to the inverted L-shaped design of the clamping plate 14, the upper end of the clamping plate 14 can prevent the plate from detaching, and the inner wall of the clamping plate 14 is an inclined surface. The inclined surface provides a downward pressure when the clamping plate 14 positions the plate, which can improve the firmness of the plate positioning.

[0046] In addition, please refer to Figure 2 、 4 and Figure 5 :

[0047] Side plates 19 are symmetrically arranged on both sides of the top of the carrier box 4. Handles 20 are arranged on the tops of the side plates 19. Positioning columns 21 are symmetrically arranged at the bottoms of the side plates 19. Support plates 22 are symmetrically arranged on the inner walls of both sides of the box body 1. Positioning holes 23 are formed in the support plates 22, and the positioning holes 23 correspond to the positioning columns 21 at the bottoms of the side plates 19.

[0048] By arranging side plates 19 on both sides of the carrier box 4, a handle 20 is arranged at the top of the side plate 19, and a positioning column 21 is arranged at the bottom. Moreover, a support plate 22 with a positioning hole 23 is arranged on the inner wall of the box body 1. During use, the cooperation between the support plate 22 and the side plate 19 can play a good supporting role for the carrier box 4. At the same time, the cooperation between the positioning column 21 and the positioning hole 23 can play a good positioning role for the carrier box 4, and the carrier box 4 will not be displaced during the use of the device;

[0049] At the same time, through the handle 20, the combination and disassembly between the carrier box 4 and the box body 1 can be carried out quickly and conveniently, which is convenient for cleaning the carrier box 4 and the filter screen plate 12, convenient for cleaning the inside of the box body 1, and convenient for cleaning the inside of the storage pool 3.

[0050] Wherein, a drain pipe 11 communicated with the storage pool 3 is arranged at the lower end of the outer wall on one side of the storage pool 3, which can discharge the waste liquid after the device is used up.

[0051] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A developing solution supply device, characterized in that, Comprising: Main body structure; The main body structure includes a box body (1) and a box door (2). The box door (2) is installed on the opening side of the box body (1). A carrying box (4) for carrying plates is arranged inside the box body (1), and a notch is provided at the inner bottom of the carrying box (4); Also includes a supply mechanism for supplying developing solution; The supply mechanism includes a storage pool (3) and a pump body (5). The storage pool (3) is arranged at the inner bottom of the box body (1), and the pump body (5) is installed on the outer wall of one side of the box body (1). A spray head (7) is arranged at the inner top of the box body (1). Multiple groups of spray holes (8) are evenly distributed in an array at the bottom of the spray head (7), and the spray head (7) is located directly above the carrying box (4). The pump body (5) extracts the developing solution in the storage pool (3) and transports it to the spray head (7).

2. The developing solution supply device according to claim 1, wherein: The liquid inlet end of the pump body (5) is fixedly connected with a liquid inlet pipe (6). The liquid inlet pipe (6) is hermetically inserted into the storage pool (3), and the end of the liquid inlet pipe (6) extends to the inner bottom of the storage pool (3).

3. The developing solution supply device according to claim 2, wherein: A filter head (10) is threadedly installed at the end of the liquid inlet pipe (6) located inside the storage pool (3). The filter head (10) is spherical in shape, and filter holes are distributed in a honeycomb pattern on the filter head (10).

4. The developing solution supply device according to claim 1, characterized in that: The liquid outlet end of the pump body (5) is fixedly connected with a liquid outlet pipe (9). The liquid outlet pipe (9) is hermetically inserted into the top of the box body (1), and the end of the liquid outlet pipe (9) extends to the inner top of the box body (1) and is fixedly connected to the spray head (7).

5. The developing solution supply device according to claim 1, characterized in that: The carrying box (4) includes an integrally formed surrounding plate and a conical cover. A notch is opened at the inner top of the conical cover, and a filter mesh plate (12) is embedded in the notch.

6. The developing solution supply device according to claim 1, wherein: Carrying plates (13) for carrying plates are symmetrically arranged on the inner wall of the carrying box (4). A clamping plate (14) is slidably installed between the two groups of carrying plates (13).

7. The developing solution supply device according to claim 6, characterized in that: A convex plate is integrally formed at the lower end of the clamping plate (14). The convex plate slides and fits between the two groups of carrying plates (13). The clamping plate (14) is designed in an inverted L shape, and the inner wall of the clamping plate (14) is an inclined surface that slopes downward.

8. The developing solution supply apparatus according to claim 7, wherein: A connecting rod (15) is arranged on the outer wall of the clamping plate (14). The connecting rod (15) is slidably inserted into the carrying box (4), and a baffle (17) is arranged at the end of the connecting rod (15). A pull ring (18) is arranged on the baffle (17). A compression spring (16) is sleeved on the connecting rod (15) between the clamping plate (14) and the carrying box (4).

9. A developing solution supply device according to claim 1, characterized in that: Side plates (19) are symmetrically arranged on both sides of the top of the carrying box (4). A handle (20) is arranged at the top of the side plates (19), and positioning columns (21) are symmetrically arranged at the bottom of the side plates (19).

10. The developing solution supply device according to claim 9, characterized in that: Support plates (22) are symmetrically arranged on the inner walls of both sides of the box body (1). Positioning holes (23) are opened on the support plates (22), and the positioning holes (23) correspond to the positioning columns (21) at the bottom of the side plates (19).

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