Substrate separating device

Abstract

The utility model provides a substrate separating device, and relates to the technical field of semiconductors. The substrate separating device comprises a positioning mechanism, a separating mechanism and a driving mechanism, the positioning mechanism comprises a positioning carrying table and a bottom plate, the positioning carrying table is provided with a positioning space for positioning a base, the positioning carrying table and the bottom plate are arranged in a spaced mode and connected through at least one guide column, and the separating mechanism is located above the positioning carrying table. The separating mechanism comprises at least two pressing columns protruding towards the base plate and a first adsorption part, the pressing columns have a second state in which the pressing columns abut against the base to drive the positioning carrying table to move downwards, the first adsorption part is arranged to abut against the base plate when the pressing columns are in the second state, and the driving mechanism is connected with the separating mechanism; when the pressing column moves to the second state, the positioning carrying table and the base are driven to move downwards till the first adsorption piece abuts against the substrate. The substrate separating device is simple in structure, easy and convenient to operate, and capable of preventing the substrate from deforming while ensuring that the substrate is completely separated from the base.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a substrate separation device. Background Art

[0002] Substrates are widely used in modern electronics and semiconductor manufacturing. The substrate and its support structure usually need to be separated and reassembled during the production process for subsequent process treatment. In the prior art, the separation mechanism is usually an electrical structure, that is, an electrical system is used in cooperation with mechanical jaws to separate the substrate from its support mechanism.

[0003] However, since the electrical system usually needs to use a motor drive mechanism and a vacuum adsorption mechanism with relatively high precision and cooperate with mechanical jaws to perform the separation operation of the substrate, the substrate separation device in the prior art has a complex structure, high cost, and the mechanical jaws are likely to cause deformation of the substrate during the separation process. Summary of the Utility Model

[0004] An object of the utility model is to provide a substrate separation device to solve the technical problems that the substrate separation device in the prior art has a complex structure and is likely to cause deformation of the substrate during the separation process.

[0005] Another object of the utility model is to improve the operation simplicity of the substrate separation device.

[0006] According to the object of the utility model, the utility model provides a substrate separation device, including:

[0007] A positioning mechanism, including a positioning stage and a bottom plate. The positioning stage has a positioning space for positioning the base. The positioning stage is spaced from the bottom plate and connected by at least one guiding column;

[0008] A separation mechanism, located above the positioning stage. The separation mechanism includes at least two pressing columns protruding towards the substrate and a first adsorbent. The substrate is arranged on the top of the base. The pressing column has a first state spaced from the base and a second state in which it abuts against the base to drive the positioning stage to move downward, and the first adsorbent is arranged to abut against the substrate when the pressing column is in the second state;

[0009] A driving mechanism, connected to the separation mechanism. The driving mechanism is used to drive the pressing column to switch between the first state and the second state, so as to drive the positioning stage and the base to move downward to make the first adsorbent abut against the substrate when the pressing column moves to the second state.

[0010] Optionally, the driving structure includes:

[0011] The lead screw assembly includes a vertical part and a horizontal part, and the vertical part is respectively connected to the horizontal part and the separation mechanism;

[0012] The handheld part is connected to the end of the horizontal part, and the handheld part is arranged to rotate around the horizontal part as the rotation axis, so as to drive the separation mechanism to move along the vertical part.

[0013] Optionally, the positioning mechanism further includes:

[0014] The second adsorbent is located between the bottom plate and the positioning stage, and the second adsorbent is arranged at an interval from the positioning stage.

[0015] Optionally, both the first adsorbent and the second adsorbent are magnets, and the first adsorbent and the second adsorbent are arranged with the same-sex magnetic poles.

[0016] Optionally, the positioning mechanism further includes:

[0017] A plurality of positioning posts, each positioning post is arranged to protrude upward from the top of the positioning stage, and the plurality of positioning posts and the positioning stage form the positioning space for positioning the base.

[0018] Optionally, the separation mechanism further includes:

[0019] The connecting piece extends in the vertical direction, and the connecting piece is arranged to be fixedly connected to the vertical part;

[0020] The fixing plate is connected to the top of the first adsorbent and the pressing column, and the fixing plate is connected to the connecting piece.

[0021] Optionally, the positioning stage has at least one first through hole corresponding to the guide post, the base has at least one second through hole corresponding to the first through hole, and the guide post is arranged to abut against the bottom of the substrate when the base is forced to move downward.

[0022] Optionally, the number of the guide posts is multiple, and the multiple guide posts are arranged at equal intervals.

[0023] The driving mechanism of the substrate separation device of the present utility model is configured to drive the pressing column and the first suction member to move downward, so that the pressing column moves to abut against the base and drives the base and the positioning stage to move downward to the second state where the first suction member abuts against the substrate, that is, the driving mechanism first drives the pressing column to move downward to abut against the base and drives the base to continue to move downward to achieve the preliminary separation of the base and the substrate, and when the first suction member abuts against the substrate, the driving mechanism drives the pressing column and the first suction member to move upward, that is, the first suction member adsorbs the substrate and drives the substrate to move upward, thereby achieving the complete separation of the substrate and the base. The substrate separation device in this embodiment has a simple structure, is easy to operate, and can prevent the substrate and the base from deforming during the separation process, improving the quality and efficiency of substrate separation.

[0024] Further, the driving structure of the present utility model includes a lead screw assembly and a hand-held member. The lead screw assembly includes a vertical portion and a horizontal portion. The vertical portion is respectively connected to the horizontal portion and the separation mechanism. The hand-held member is connected to the end of the horizontal portion. The hand-held member is configured to rotate with the horizontal portion as the rotation axis to drive the separation mechanism to move along the vertical portion. The setting of the lead screw assembly provides precise linear displacement. The vertical portion ensures that the up and down movement of the separation mechanism can accurately adjust the position with the helical movement of the lead screw. The hand-held member can be directly rotated by hand with the horizontal portion as the rotation axis, which is simple to operate and reduces the operation burden.

[0025] The above description is only an overview of the technical solution of the present utility model. In order to be able to understand the technical means of the present utility model more clearly and implement it according to the content of the specification, the following takes the preferred embodiments of the present utility model and describes them in detail with the accompanying drawings as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Some specific embodiments of the present utility model will be described in detail hereinafter with reference to the accompanying drawings in an exemplary but not restrictive manner. The same reference numerals in the drawings denote the same or similar components or parts. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0027] Figure 1 is a schematic structural diagram of a substrate separation device according to an embodiment of the present utility model;

[0028] Figure 2 is a schematic cross-sectional view of a substrate separation device according to an embodiment of the present utility model;

[0029] Figure 3 is Figure 2 a schematic partial enlarged view shown at A in

[0030] Reference Numerals:

[0031] 100 - Substrate separation device, 200 - Base, 300 - Substrate, 10 - Positioning mechanism, 11 - Positioning stage, 12 - Base plate, 13 - Second adsorbing member, 14 - Positioning post, 15 - Guide post, 20 - Separation mechanism, 21 - Pressing post, 22 - First adsorbing member, 23 - Connecting member, 24 - Fixed plate, 30 - Driving mechanism, 31 - Lead screw assembly, 311 - Vertical portion, 312 - Horizontal portion, 32 - Handheld member. Detailed implementation manners

[0032] The following will further describe in detail the specific implementation manners of the present utility model in conjunction with the accompanying drawings and embodiments. The following embodiments are used to illustrate the present utility model, but are not used to limit the scope of the present utility model.

[0033] To make the above objects, features, and advantages of the present application more obvious and understandable, the following will describe in detail the specific implementation manners of the present application in conjunction with the accompanying drawings. It can be understood that the specific embodiments described herein are only used to explain the present application, rather than limiting the present application. Additionally, it should be noted that for the sake of convenience of description, only parts related to the present application rather than all structures are shown in the accompanying drawings. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present application.

[0034] The terms "including" and "having" and any variations thereof in the present application are intended to cover non - exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products, or devices.

[0035] Referring to "embodiments" herein means that the specific features, structures, or characteristics described in conjunction with the embodiments can be included in at least one embodiment of the present application. The phrase appears at various positions in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0036] Figure 1 is a schematic structural diagram of a substrate separation device according to an embodiment of the present utility model, Figure 2 is a schematic cross - sectional view of a substrate separation device according to an embodiment of the present utility model, Figure 3 is Figure 2 the schematic partial enlarged view shown at A in

[0037] As Figure 1As shown in the figure, the present utility model provides a substrate separation device 100. The substrate separation device 100 includes a positioning mechanism 10, a separation mechanism 20, and a driving mechanism 30. The substrate separation device 100 is used to separate a substrate 300 from a base 200. The positioning mechanism 10 includes a positioning stage 11 and a bottom plate 12. The positioning stage 11 has a positioning space for positioning the base 200. The positioning stage 11 is spaced apart from the bottom plate 12 and connected by at least one guiding column 15 (refer to Figure 2 ), the separation mechanism 20 is located above the positioning stage 11. The separation mechanism 20 includes at least two pressing columns 21 protruding towards the substrate 300 and a first adsorbing member 22. The substrate 300 is disposed on the top of the base 200. The pressing column 21 has a first state spaced apart from the base 200 and a second state in which it abuts against the base 200 to drive the positioning stage 11 to move downward. The first adsorbing member 22 is arranged to abut against the substrate 300 when the pressing column 21 is in the second state. The driving mechanism 30 is connected to the separation mechanism 20. The driving mechanism 30 is used to drive the pressing column 21 to switch between the first state and the second state, so as to drive the positioning stage 11 and the base 200 to move downward when the pressing column 21 moves to the second state until the first adsorbing member 22 abuts against the substrate 300. Here, the substrate 300 is located on the top of the base 200, and the base 200 is located on the top of the positioning stage 11.

[0038] In this embodiment, the driving mechanism 30 of the substrate separation device 20 is arranged to drive the pressing column 21 and the first adsorbing member 22 to move downward, so that the pressing column 21 moves to abut against the base 200 and drives the base 200 and the positioning stage 11 to move downward until the first adsorbing member 22 abuts against the substrate 300, that is, the driving mechanism 30 first drives the pressing column 21 to move downward to abut against the base 200 and drives the base 200 to continue to move downward to achieve a preliminary separation of the base 200 from the substrate 300. When the first adsorbing member 22 abuts against the substrate 300, the driving mechanism 30 drives the pressing column 21 and the first adsorbing member 22 to move upward, that is, the first adsorbing member 22 adsorbs the substrate 300 and drives the substrate 300 to move upward, thereby achieving a complete separation of the substrate 300 and the base 200. The substrate separation device 20 in this embodiment has a simple structure, is easy to operate, and can prevent the substrate 300 and the base 200 from deforming during the separation process, improving the separation quality and efficiency of the substrate 300.

[0039] In a further embodiment, the driving structure includes a lead screw assembly 31 and a hand-held member 32. The lead screw assembly 31 includes a vertical portion 311 and a horizontal portion 312. The vertical portion 311 is connected to the horizontal portion 312 and the separation mechanism 20 respectively. The hand-held member 32 is connected to the end of the horizontal portion 312. The hand-held member 32 is configured to rotate about the horizontal portion 312 as the rotation axis to drive the separation mechanism 20 to move along the vertical portion 311. In this embodiment, the setting of the lead screw assembly 31 provides precise linear displacement. The vertical portion 311 ensures that the up-and-down movement of the separation mechanism 20 can precisely adjust the position with the helical movement of the lead screw. The hand-held member 32 can be directly rotated by hand with the horizontal portion 312 as the rotation axis, which is simple to operate and reduces the operation burden. At the same time, the setting of the lead screw assembly 31 can effectively prevent shaking or instability during the movement, ensuring that the separation mechanism 20 moves smoothly along the vertical portion 311. In addition, the lead screw assembly 31 has a self-locking performance, avoiding the separation mechanism 20 from sliding or displacing by itself under the action of external force, making the separation mechanism 20 stable at the specified height and increasing the reliability of the substrate separation device 100.

[0040] In a further embodiment, the positioning mechanism 10 further includes a second adsorbing member 13. The second adsorbing member 13 is located between the bottom plate 12 and the positioning stage 11, and the second adsorbing member 13 is spaced from the positioning stage 11. In this embodiment, the second adsorbing member 13 is disposed below the positioning stage 11 and attached to the top of the bottom plate 12. The second adsorbing member 13 is used to adsorb the base 200. That is, during the process that the pressing column 21 drives the base 200 and the positioning stage 11 to move downward under the drive of the driving mechanism 30, the second adsorbing member 13 has an adsorbing force on the base 200, so that the second adsorbing member 13 enables the base 200 to be better separated from the substrate 300 during the process that the base 200 is mechanically pressed by the pressing column 21 until it is separated from the substrate 300.

[0041] In a further embodiment, both the first adsorbing member 22 and the second adsorbing member 13 are magnets, and the first adsorbing member 22 and the second adsorbing member 13 are set as the same-sex magnetic poles. In this embodiment, the first adsorbing member 22 is configured to adsorb the substrate 300 and drive the substrate 300 to move upward under the drive of the driving mechanism 30. The second adsorbing member 13 is configured to adsorb the base 200 and drive the base 200 to move downward under the drive of the driving mechanism 30 to separate the base 200 and the substrate 300. The first adsorbing member 22 and the second adsorbing member 13 are set as the same-sex magnetic poles so that the first adsorbing member 22 and the second adsorbing member 13 repel each other, preventing the second adsorbing member from generating an adsorbing force on the first adsorbing member 22 when the first adsorbing member 22 moves downward, thereby ensuring the smooth separation of the base 200 and the substrate 300.

[0042] In a further embodiment, the positioning mechanism 10 further includes a plurality of positioning posts 14. Each positioning post 14 is arranged to protrude upward from the top of the positioning stage 11. The plurality of positioning posts 14 and the positioning stage 11 form a positioning space for positioning the base 200. In this embodiment, the positioning space formed by the positioning posts 14 and the positioning stage 11 can effectively limit and restrain the base 200, ensuring that the base 200 can be accurately fixed at a predetermined position during placement, avoiding deviation or improper position, thereby improving the positioning accuracy of the substrate separation device 100.

[0043] In a further embodiment, the separation mechanism 20 further includes a connecting member 23 and a fixing plate 24. The connecting member 23 extends in the vertical direction and is arranged to be fixedly connected to the vertical portion 311. The fixing plate 24 is connected to the first suction member 22 and the pressing column 21, and the fixing plate 24 is connected to the connecting member 23. In this embodiment, the first suction member 22 and the pressing column 21 are arranged at the bottom of the fixing plate 24. The connecting member 23 is respectively connected to the vertical portion 311 of the driving mechanism 30 and the fixing plate 24. When the driving mechanism 30 drives the connecting member 23 to move up and down, the plurality of pressing columns 21 and the first suction member 22 at the bottom of the fixing plate 24 are driven to move down simultaneously. At the same time, the force of the pressing column 21 can be evenly transmitted to the entire separation mechanism 20, ensuring that the force applied by the pressing column 21 to the base 200 during the separation process is evenly distributed, avoiding structural deformation or damage caused by excessive local stress. In addition, the cooperative arrangement of the connecting member 23 and the fixing plate 24 enables the separation mechanism 20 to precisely control the up and down movement of the pressing column 21, ensuring that the separation action of the base 200 can be carried out along a predetermined trajectory, improving the operation accuracy of the substrate separation device 20.

[0044] As Figure 3 shown, in a further embodiment, the positioning stage 11 has at least one first through hole corresponding to the guide post 15, and the base 200 has at least one second through hole corresponding to the first through hole. The guide post 15 is arranged to abut against the bottom of the substrate 300 when the base 200 is forced to move down. In this embodiment, the base 200 is arranged on the top of the positioning stage 11, the substrate 300 is arranged on the top of the base 200, and the base 200 and the positioning stage 11 are respectively provided with a first through hole and a second through hole corresponding to the guide post 15, so that the pressing column 21 abuts against the base 200 and drives the base 200 and the positioning stage 11 to move downward along the extension direction of the guide post 15. At this time, the guide post 15 sequentially passes through the first through hole and the second through hole until it abuts against the bottom of the substrate 300, causing a preliminary separation between the base 200 and the substrate 300.

[0045] As Figure 2As shown, in a further embodiment, the number of guide posts 15 is multiple, and the multiple guide posts 15 are arranged at equal intervals. In this embodiment, the multiple guide posts 15 are evenly distributed, which can ensure uniform force in all directions when the separation mechanism 20 presses on the base 200, avoid excessive force on a single part, and thus improve the stability and durability of the substrate separation device 20. The evenly distributed guide posts 15 can effectively guide the movement of the base 200 and the positioning stage 11, reduce the shaking or jamming caused by deviation or imbalance, improve the positioning accuracy of the positioning mechanism 10, and further improve the operating stability of the substrate separation device 20.

[0046] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0047] The above-described embodiments merely represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the utility model patent shall be subject to the appended claims.

Claims

1. A substrate separation device, characterized in that, Comprising: A positioning mechanism, including a positioning stage and a base plate. The positioning stage has a positioning space for positioning the base, and the positioning stage is spaced from the base plate and connected by at least one guiding column. A separating mechanism, located above the positioning stage. The separating mechanism includes at least two pressing columns protruding towards the substrate and a first adsorbing member. The substrate is disposed on the top of the base. The pressing column has a first state spaced from the base and a second state in which it abuts against the base to drive the positioning stage to move downward. The first adsorbing member is arranged to abut against the substrate when the pressing column is in the second state. A driving mechanism, connected to the separating mechanism. The driving mechanism is used to drive the pressing column to switch between the first state and the second state, so as to drive the positioning stage and the base to move downward when the pressing column moves to the second state until the first adsorbing member abuts against the substrate.

2. The substrate separation device according to claim 1, characterized in that, The driving mechanism includes: A lead screw assembly, including a vertical portion and a horizontal portion. The vertical portion is respectively connected to the horizontal portion and the separating mechanism. A hand-held member, connected to the end of the horizontal portion. The hand-held member is arranged to rotate about the horizontal portion as the rotation axis to drive the separating mechanism to move along the vertical portion.

3. The substrate separation device according to claim 2, wherein The positioning mechanism further includes: A second adsorbing member, located between the base plate and the positioning stage, and the second adsorbing member is spaced from the positioning stage.

4. The substrate separating device according to claim 3, wherein: Both the first adsorbing member and the second adsorbing member are magnets, and the first adsorbing member and the second adsorbing member are set to have the same magnetic poles.

5. The substrate separation device according to claim 4, characterized in that, The positioning mechanism further includes: A plurality of positioning columns. Each positioning column is arranged to protrude upward from the top of the positioning stage. The plurality of positioning columns and the positioning stage form the positioning space for positioning the base.

6. The substrate separation device according to claim 5, wherein The separating mechanism further includes: A connecting member, extending in the vertical direction. The connecting member is arranged to be fixedly connected to the vertical portion. A fixing plate, connected to the top of the first adsorbing member and the pressing column, and the fixing plate is connected to the connecting member.

7. The substrate separating device according to any one of claims 1-6, wherein: The positioning stage has at least one first through hole corresponding to the guiding column, and the base has at least one second through hole corresponding to the first through hole. The guiding column is arranged to abut against the bottom of the substrate when the base is forced to move downward.

8. The substrate separating device according to claim 7, wherein: The number of the guiding columns is multiple, and the multiple guiding columns are evenly spaced.

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