Rotary table assembly and semiconductor device processing equipment

Abstract

The utility model discloses a rotary table assembly and semiconductor device processing equipment, the rotary table assembly comprises a rotary table and wafer bearing tables which are evenly distributed around the axis of the rotary table in a circumferential mode, the rotary table is connected with a driving roller through a synchronous belt which is sleeved on the periphery of the rotary table, and the outer diameter of the rotary table is at least 10 times of the outer diameter of the driving roller. And the driving rollers are connected with a driving motor for driving the driving rollers to rotate. According to the structure, the synchronous belt is directly arranged on the periphery of the rotating table in a sleeving mode, so that additional belt wheels do not need to be arranged, parts can be effectively reduced, space is provided for installation of other parts, and the installation difficulty of other structures is lowered. Meanwhile, the difference value of the outer diameter of the rotating table and the outer diameter of the driving roller is larger, the contact area of the synchronous belt and the rotating table can be effectively increased, the driving stability and accuracy are guaranteed, and the rotating speed of the rotating table is more convenient to control.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor device processing, in particular to a turntable assembly and a semiconductor device processing equipment. Background Art

[0002] In the process of semiconductor processing, a rotating table is used to drive a wafer stage to rotate, so as to realize the switching of workpieces on the wafer stage at different processing positions.

[0003] The invention patent with the authorization announcement number of CN117798815B discloses a structure of a dividing table. In this structure, the dividing table is connected to a driving motor through a large pulley, a belt and a small pulley below it.

[0004] In this structure, an additional large pulley needs to be set, which not only increases the additional structure but also leads to an increase in the height of the equipment. At the same time, due to the existence of the large pulley and the need for rotation, it increases the difficulty of installing other structures below the dividing table. Summary of the Utility Model

[0005] The purpose of the utility model is to solve the above problems existing in the prior art, and provide a turntable assembly and a semiconductor device processing equipment.

[0006] The purpose of the utility model is realized by the following technical solutions:

[0007] A turntable assembly includes a rotating table and a wafer stage evenly distributed in a circumferential direction around the axis of the rotating table. The rotating table is connected to a driving roller through a synchronous belt sleeved on its outer periphery. The outer diameter of the rotating table is at least 10 times the outer diameter of the driving roller, and the driving roller is connected to a driving motor that drives it to rotate.

[0008] Preferably, in the turntable assembly, an electronic tag matching at least one of the wafer stages is arranged on the rotating table, and a reading device for reading the information of the electronic tag at a specified position is arranged beside the rotating table.

[0009] Preferably, in the turntable assembly, there are multiple electronic tags respectively matching each wafer stage, the number of the reading devices is the same as the number of the electronic tags, and when one reading device can read the data of one electronic tag, each of the other reading devices can respectively read the data of another electronic tag.

[0010] Preferably, in the turntable assembly, the driving motor is provided with a multi-turn absolute encoder.

[0011] Preferably, in the turntable assembly, an interface component matching each of the wafer support platforms is provided on the turntable or each of the wafer support platforms. The interface component cooperates with the plug component to communicate and / or supply power and / or supply gas and / or supply liquid to the wafer support platform corresponding to the interface component.

[0012] Preferably, in the turntable assembly, the number of the plug components is the same as that of the interface components. When one plug component is docked with one interface component, the other plug components can also pass through

[0013] Preferably, in the turntable assembly, the plug component includes a docking driving device. The docking driving device is connected to the mounting seat and drives the mounting seat to translate radially along the turntable. An air connection joint and / or a liquid connection joint with an axis parallel to the moving direction of the mounting seat are provided on the mounting seat. At least a connection plug for supplying power is also provided on the mounting seat.

[0014] Preferably, in the turntable assembly, the air connection joint and / or the liquid connection joint are movably connected to the mounting seat along their respective axial directions. Baffles are respectively provided on the air connection joint and / or the liquid connection joint. An elastic member is connected between the baffle and the mounting seat. A detection sensor for detecting the positions of the air connection joint and / or the liquid connection joint is provided on the mounting seat. Under normal conditions, the detection sensor cannot detect the baffles of the air connection joint and / or the liquid connection joint.

[0015] A semiconductor device processing apparatus includes the turntable assembly as described in any one of the above.

[0016] The advantages of the technical solution of the present invention are mainly reflected in:

[0017] In the structure of the present invention, the synchronous belt is directly sleeved on the outer periphery of the turntable, so that there is no need to provide an additional pulley, which can effectively reduce components and provide space for the installation of other components, and reduce the installation difficulty of other structures. At the same time, the difference between the outer diameters of the turntable and the driving roller is larger, which can effectively increase the contact area between the synchronous belt and the turntable, ensure the stability and accuracy of driving, and is more convenient to control the rotation speed of the turntable.

[0018] An electronic tag is provided on the turntable of the present invention, and a reading device corresponding to the electronic tag is provided. When the motor abnormally loses position data, after recovery, the position of each wafer support platform can be determined by reading the electronic tag through the reading device, so that the normal operation of the device after recovery can be effectively ensured.

[0019] The present invention uses the interface component to cooperate with the plug component to connect gas, electricity, water and communicate, so that the turntable can rotate in a single direction during operation.

[0020] The plug component of the present utility model has buffering and detection capabilities, which can effectively improve the stability and safety of use. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a top view schematic diagram of the turntable assembly of the present utility model;

[0022] Figure 2 is a perspective view of the turntable assembly of the present utility model;

[0023] Figure 3 is a perspective view of the electronic tag and the reading device of the present utility model;

[0024] Figure 4 is a perspective view of the plug component and the interface component of the present utility model;

[0025] Figure 5 is a top view of the plug component of the present utility model, and the connecting plug is not shown in the figure. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0026] The objectives, advantages, and features of the present utility model will be illustrated and explained through the non-restrictive description of the following preferred embodiments. These embodiments are only typical examples of applying the technical solutions of the present utility model, and any technical solutions formed by equivalent replacement or equivalent transformation shall fall within the scope of protection required by the present utility model.

[0027] In the description of the solution, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of description and simplification of the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0028] Embodiment 1

[0029] The turntable assembly disclosed by the present utility model will be described below with reference to the drawings, as shown in Figure 1 and Figure 2As shown in the figure, it includes a rotating table 100 and wafer carriers 200 evenly distributed circumferentially around the axis of the rotating table 100. The rotating table 100 is rotatably arranged on a base (not shown in the figure). The rotating table 100 is connected to a driving roller 400 through a synchronous belt 300 sleeved on its outer periphery. The outer diameter of the rotating table 100 is at least 10 times the outer diameter of the driving roller 400. Preferably, the outer diameter of the rotating table does not exceed 20 times the outer diameter of the driving roller. The driving roller 400 is connected to a driving motor 500 that drives its rotation.

[0030] During operation, the driving motor 500 drives the driving roller 400 to rotate, thereby driving the rotation of the rotating table 100. Further, in order to make the synchronous belt 300 fit the rotating table 100 better and drive it more stably, the synchronous belt 300 can be kept in a tensioned state by a tension adjustment mechanism described in the patents cited in the background art.

[0031] In order to conveniently know the position of the rotating table 100, the driving motor 500 is provided with a multi-turn absolute encoder. As shown in the attached Figure 2 attachment Figure 3 figure, an electronic tag 600 matching at least one of the wafer carriers 200 is arranged on the rotating table 100, and a reading device 700 for reading the information of the electronic tag 600 at a specified position is arranged beside the rotating table 100. For example, in a thinning machine, three wafer carriers 200 are arranged at 120°. At the same time, the rotating table 100 can make two wafer carriers 200 located at two thinning mechanisms for processing simultaneously. At this time, the reading device 700 can read the information of the electronic tag 600.

[0032] Preferably, there are multiple electronic tags 600, each of which matches a corresponding wafer carrier 200. Taking three wafer carriers 200 as an example, there are 3 electronic tags 600, and they are evenly distributed around the axis of the wafer carrier 200. Each electronic tag 600 corresponds to the position of a wafer carrier 200. At the same time, the number of reading devices 700 is the same as the number of electronic tags 600. When one reading device 700 can read the data of one electronic tag 600, each of the other reading devices 700 can respectively read the data of another electronic tag 600. In this way, the information read by each reading device 700 can be compared to ensure the accurate and reliable determination of the position information of the wafer carrier 200.

[0033] When each wafer carrier 200 is in operation, it needs to be powered on, connected to gas, etc. In one way, corresponding functions can be achieved through slip rings, etc. In another way, corresponding functions can also be achieved through drag chains. In a more preferred way, as shown in the attached Figure 4 attachment Figure 5As shown, an interface component 800 matching each of the wafer carriers 200 is provided on the rotary table 100 or each of the wafer carriers 200. The interface component 800 cooperates with the plug component 900 to communicate and / or supply power and / or supply gas and / or supply liquid for the wafer carrier 200 corresponding to the interface component 800.

[0034] For example, there are three wafer carriers 200 and three interface components 800. The number of the plug components 900 can be designed according to needs. For example, in a lapping machine with two lapping mechanisms, the plug components 900 can be two. When two wafer carriers 200 are located at the two lapping mechanisms, the two plug components 900 can be docked with the interface components 800 corresponding to the two wafer carriers 200. More preferably, the number of the plug components 900 is the same as the number of the interface components 800. When one plug component 900 is docked with one interface component 800, the other plug components 900 can also be respectively docked with the other interface components 800.

[0035] As shown in the appendix Figure 4 As shown, the plug component 900 includes a docking driving device 910. The docking driving device 910 can be a feasible device such as a cylinder, a hydraulic cylinder, an electric cylinder, etc. The docking driving device 910 is connected to the mounting base 920 and drives the mounting base 920 to translate radially along the rotary table 100. An air connection joint 930 and / or a liquid connection joint 940 with an axis parallel to the moving direction of the mounting base 920 are provided on the mounting base 920. At least a connection plug 950 for supplying power is also provided on the mounting base 920. Of course, the connection plug 950 can also be used for communication, data transmission, etc. Correspondingly, the interface component includes connection jacks, air connection jacks and liquid connection jacks respectively corresponding to the connection plug 950, the air connection joint 930 and the liquid connection joint 940. The connection jacks are electrically connected to the various electrical components of the wafer carrier 200. The air connection jacks are connected to the gas pipelines of the wafer carrier 200, and the liquid connection jacks are connected to the liquid pipelines on the wafer carrier 200.

[0036] As shown in the appendix Figure 5As shown, the gas connection joint 930 and / or the liquid connection joint 940 are movably connected to the mounting base 920 along their respective axial directions and they cannot rotate relative to the mounting base 920. Baffles 960 are respectively provided on the gas connection joint 930 and / or the liquid connection joint 940. The baffles 960 are located on the side of the mounting base 920 facing the interface assembly. An elastic member 970 is connected between the baffles 960 and the mounting base 920. The elastic member 970 is preferably a spring sleeved on the outer periphery of the gas connection joint 930 and / or the liquid connection joint 940. At the same time, a detection sensor 980 for detecting the positions of the gas connection joint 930 and / or the liquid connection joint 940 is further provided on the mounting base 920. The detection sensor 980 can be a proximity sensor. Under normal conditions, the detection sensor 980 cannot detect the baffles 960 of the gas connection joint 930 and / or the liquid connection joint 940. When the docking drive device 910 drives the gas connection joint 930 and the liquid connection joint 940 to move towards the interface assembly, if the gas connection joint 930 and the liquid connection joint 940 are blocked, the gas connection joint 930 and the liquid connection joint 940 move towards the fixed base, so that the detection sensor 980 can detect the baffles 960.

[0037] Embodiment 2

[0038] This embodiment discloses a semiconductor device processing equipment, including the turntable assembly as described above.

[0039] There are still various embodiments of the present invention. All technical solutions formed by equivalent transformation or equivalent substitution fall within the protection scope of the present invention.

Claims

1. Turntable assembly, including a rotating table and wafer support platforms evenly distributed in a circumferential manner around the axis of the rotating table, characterized in that: The rotary table is connected to a driving roller through a synchronous belt sleeved on its outer periphery. The outer diameter of the rotary table is at least 10 times the outer diameter of the driving roller, and the driving roller is connected to a driving motor for driving its rotation.

2. The turntable assembly according to claim 1, wherein: An electronic tag matching at least one of the wafer carriers is provided on the rotary table, and a reading device for reading the information of the electronic tag at a specified position is provided beside the rotary table.

3. The turntable assembly according to claim 2, wherein: There are multiple electronic tags, each of which matches a corresponding wafer carrier. The number of the reading devices is the same as the number of the electronic tags. When one reading device can read the data of one electronic tag, each of the other reading devices can respectively read the data of another electronic tag.

4. The turntable assembly according to claim 1, wherein: The driving motor is provided with a multi-turn absolute encoder.

5. The turntable assembly according to claim 1, characterized in that: An interface component matching each of the wafer carriers is provided on the rotary table or each of the wafer carriers. The interface component cooperates with a plug component to communicate and / or supply power and / or supply gas and / or supply liquid for the wafer carrier corresponding to the interface component.

6. The turntable assembly according to claim 5, wherein: The number of the plug components is the same as the number of the interface components. When one plug component is docked with one interface component, the other plug components can also be respectively docked with the other interface components.

7. The turntable assembly according to claim 5, characterized in that: The plug component includes a docking driving device. The docking driving device is connected to a mounting seat and drives the mounting seat to translate along the radial direction of the rotary table. An air connection joint and / or a liquid connection joint with an axis parallel to the moving direction of the mounting seat are provided on the mounting seat, and at least a connection plug for power supply is further provided on the mounting seat.

8. The turntable assembly according to claim 7, wherein: The air connection joint and / or the liquid connection joint are movably connected to the mounting seat along their respective axial directions. Baffles are respectively provided on the air connection joint and / or the liquid connection joint. Elastic members are connected between the baffles and the mounting seat. A detection sensor for detecting the positions of the air connection joint and / or the liquid connection joint is provided on the mounting seat. Under normal conditions, the detection sensor cannot detect the baffles of the air connection joint and / or the liquid connection joint.

9. A semiconductor device processing apparatus, characterized in that: It includes a turntable assembly according to any one of claims 1-8.

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