Platform device capable of automatically positioning size of film box

Abstract

The utility model discloses a platform device for automatically positioning the size of a piece box. The platform device comprises a piece box platform and three sets of piece box positioning assemblies which are distributed in a diffusion mode from inside to outside so that a 6-cun piece box, an 8-cun piece box and a 12-cun piece box can be correspondingly placed. Each group of film magazine positioning assembly comprises a left barrier strip, a right barrier strip, a lower barrier strip and at least one pressure sensing piece, the left barrier strip, the right barrier strip and the lower barrier strip are distributed in three directions on the film magazine platform to form a film magazine placing space, and the pressure sensing piece is located on the side where the left barrier strip or the right barrier strip is located; and the pressure sensing piece extends to the sheet box placing space relative to the inner side of the left barrier strip or the right barrier strip so as to sense the frame of the sheet box. The positions of the left barrier strip, the right barrier strip, the lower barrier strip and the pressure sensing piece of each group of wafer box positioning assembly are ingeniously designed, the wafer box positioning device can be matched with wafer ring frames of different specifications, the pressure sensing piece senses that the wafer box is placed abnormally, manual adjustment of a confirmation point of the wafer ring frame for storing the wafer box is canceled, the machine changing efficiency is improved, and the condition that the wafer is automatically grabbed and returned abnormally is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging auxiliary equipment, and more specifically relates to an automatic positioning cassette size platform device. Background Art

[0002] When performing wafer loading and flip-chip production, wafers are used to pick up chips. The wafers are stored in a wafer carrier frame, and the wafer carrier frame needs to be placed at the corresponding position of the cassette on the machine table to achieve the automation of wafer picking and returning.

[0003] Currently, wafer processes have sizes of 6 inches, 8 inches, and 12 inches. The cassette platform on the machine table is positioned by manually adjusting the position of the fixture slot. After manual adjustment, abnormal wafer clamping may occur because the position is not centered.

[0004] In addition, using the method of manually adjusting the position, it takes about 10 minutes to adjust the position and confirm the risk each time, and the machine change speed is not fast, resulting in low efficiency. Summary of the Utility Model

[0005] In order to solve the above problems, the utility model provides an automatic positioning cassette size platform device, which cancels the manual adjustment of the confirmation point for the cassette where the wafer carrier frame is placed, improves the abnormal situation of automatic picking and returning of clamped wafers, and improves the machine change efficiency.

[0006] According to one aspect of the utility model, an automatic positioning cassette size platform device is provided, including a cassette platform and multiple groups of cassette positioning components arranged on the cassette platform. The multiple groups of cassette positioning components are distributed in a radially outward manner on the cassette platform to be used for placing cassettes of different size specifications.

[0007] Each group of cassette positioning components includes a left stop bar, a right stop bar, a lower stop bar, and at least one pressure sensing member. The left stop bar, the right stop bar, and the lower stop bar are distributed in three directions on the cassette platform to form a cassette placement space. The pressure sensing member is located on the side where the left stop bar or the right stop bar is located, and the pressure sensing member extends from the inner side of the left stop bar or the right stop bar towards the cassette placement space so as to be able to sense the cassette border.

[0008] Thus, the operator places the cassette in the cassette placement space corresponding to the specification. The left, right, and lower stop bars of the corresponding group of cassette positioning components fix the cassette from three directions. The cassette presses on the pressure sensing member of the corresponding group of cassette positioning components. When the pressure sensing member senses the cassette, it indicates that the placement is normal. The device is provided with multiple groups of cassette positioning components, which are distributed in a radially outward manner in size order and can directly match cassettes of different specifications. There is no need to manually adjust the slot position like traditional fixtures, canceling the manual adjustment of the confirmation point for the cassette where the wafer carrier frame is placed, improving the machine change efficiency, and improving the abnormal situation of automatic picking and returning of clamped wafers.

[0009] In some embodiments, each cassette positioning assembly has two pressure sensors, which are respectively located on the sides where the left stop bar and the right stop bar are located, so as to be able to sense the cassette frame from two directions. Thus, by setting two pressure sensors, it can be ensured that both sides of the cassette are placed in place, enabling the subsequent processes to proceed in an orderly manner.

[0010] In some embodiments, each cassette positioning assembly has two lower stop bars, and the two lower stop bars are aligned and arranged on the cassette platform. Thus, by setting two lower stop bars, especially for cassettes with slightly larger sizes, a more accurate placement effect can be achieved.

[0011] In some embodiments, waist-shaped holes are provided at both ends of the left stop bar, the right stop bar, and the lower stop bar, and they are fixed to the cassette platform by screws. Multiple sets of adjustment holes are provided on the cassette platform corresponding to each left stop bar, right stop bar, and lower stop bar. Thus, through multiple sets of adjustment holes, the installation positions of the left stop bar, the right stop bar, and the lower stop bar can be adjusted, and through the waist-shaped holes, the installation positions of the left stop bar, the right stop bar, and the lower stop bar can be further finely adjusted to meet the actual production requirements.

[0012] In some embodiments, there are three sets of cassette positioning assemblies in total, and the three sets of cassette positioning assemblies are respectively used to place 6-inch cassettes, 8-inch cassettes, and 12-inch cassettes. Thus, the three sets of cassette positioning assemblies can correspond to the three commonly used specifications of wafer sizes, expanding the applicable range of the device.

[0013] In some embodiments, the cassette positioning assembly for a 12-inch cassette includes a left stop bar and a right stop bar, and the left stop bar and the right stop bar are distributed diagonally on the cassette platform. Thus, when only one stop bar is provided on each of the left and right sides, with the diagonal position distribution, the side limits of the front and rear parts of the cassette can be taken into account.

[0014] In some embodiments, the cassette positioning assembly for a 12-inch cassette includes two left stop bars and right stop bars, or includes three left stop bars and right stop bars, and the two or three left stop bars are aligned, and the two or three right stop bars are aligned. Thus, two or three left stop bars and right stop bars can also be set to limit the sides of the cassette at multiple positions.

[0015] In some embodiments, the left stop bar and the right stop bar of the cassette positioning assembly for a 12-inch cassette are provided with a raised area, and an inclined surface is provided at the inner side position of the upper part of the raised area. Thus, raising the left stop bar and the right stop bar is beneficial for positioning the two sides of the 12-inch cassette, and using the inclined surface is beneficial for placing the 12-inch cassette into the cassette placement space.

[0016] Compared with the prior art, the beneficial effects of the present utility model are as follows: The automatic positioning cassette size platform device provided by the present utility model sets three groups of cassette positioning components on a cassette platform according to the existing specifications of semiconductor wafers. The positions of the left, right, and lower stop bars and the pressure sensors of each group of cassette positioning components are ingeniously designed. The left, right, and lower stop bars enclose a cassette placement space from three directions, and the cassette placement spaces are distributed in a diffusion manner from the inside to the outside according to the size. The operator places the cassette in the cassette placement space corresponding to the specification, and the cassette presses on the pressure sensor of this group of cassette positioning components. When the pressure sensor senses the cassette, it indicates that the placement is normal. This device can directly match and position different specifications of cassette frames, eliminating the need for manual adjustment of the confirmation points for storing cassettes in the cassette frames, improving the machine change efficiency, and improving the abnormal situation of automatic grasping and returning of wafers stuck. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a perspective view of an embodiment of an automatic positioning cassette size platform device of the present utility model;

[0018] Figure 2 is Figure 1 a perspective view from another angle. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The present utility model will be further described below in conjunction with the detailed embodiments.

[0020] As Figure 1 and 2 shown, an automatic positioning cassette size platform device according to an embodiment of the present utility model includes a cassette platform 1 and multiple groups of cassette positioning components installed on the cassette platform 1. The multiple groups of cassette positioning components are distributed in a diffusion manner from the inside to the outside on the cassette platform 1 for placing cassettes of different size specifications.

[0021] Each group of cassette positioning components includes a left stop bar 2, a right stop bar 3, a lower stop bar 4, and at least one pressure sensor 5. The left stop bar 2, the right stop bar 3, and the lower stop bar 4 are distributed in three directions on the cassette platform 1. The left stop bar 2 and the right stop bar 3 are arranged left and right. The stop bars from the three directions enclose a cassette placement space 100, and the opposite side of the lower stop bar 4 is in an open-mouth shape. When there is only one pressure sensor 5 in this group of cassette positioning components, the pressure sensor 5 is located on the side where the left stop bar 2 or the right stop bar 3 is located, and the pressure sensor 5 extends from the inner side of the left stop bar 2 or the right stop bar 3 towards the cassette placement space 100 so as to be able to sense the cassette frame.

[0022] In practical applications, each group of cassette positioning components is preferably provided with two pressure sensors 5. The two pressure sensors 5 are respectively located on the sides where the left stop bar 2 and the right stop bar 3 are located so as to be able to sense the cassette frame from two directions. Setting two pressure sensors 5 can ensure that both sides of the cassette are placed in place, enabling the subsequent process to proceed orderly.

[0023] An installation opening 12 for the pressure sensing member 5 is provided on the cassette platform 1. The pressure sensing member 5 specifically includes a pressure sensing sensor 51, a pressing plate 52, a spring (not shown in the figure), and a base 53. The base 53 is installed on the back of the installation opening 12 on the cassette platform 1 by screws. The pressing plate 52 is interconnected with the pressure sensing sensor 51 and the spring and is installed on the base 53. The pressing plate 52 is located within the installation opening 12 and on the front side of the cassette platform 1. When the cassette is placed on the pressing plate 52, the light of the pressure sensing sensor 51 lights up to obtain the signal of the cassette placement. The pressure sensing principle of this pressure sensing member 5 is prior art.

[0024] To achieve a better placement and alignment effect, two lower stop bars 4 are provided for each set of cassette positioning components. The two lower stop bars 4 are aligned and arranged on the cassette platform 1, which can achieve a more accurate placement effect especially for cassettes with slightly larger sizes.

[0025] Waist-shaped holes 6 are provided at both ends of the left stop bar 2, the right stop bar 3, and the lower stop bars 4, and each stop bar is fixed to the cassette platform 1 by screws. In addition, multiple sets of adjustment holes 11 are provided on the cassette platform 1 corresponding to each of the left stop bar 2, the right stop bar 3, and the lower stop bars 4. In this way, the installation positions of the left stop bar 2, the right stop bar 3, and the lower stop bars 4 can be adjusted through the multiple sets of adjustment holes 11. The installation positions of the left stop bar 2, the right stop bar 3, and the lower stop bars 4 can be further fine-tuned through the waist-shaped holes 6 to meet the actual production requirements.

[0026] In this embodiment, there are a total of three sets of cassette positioning components, and the three sets of cassette positioning components respectively correspond to placing 6-inch cassettes, 8-inch cassettes, and 12-inch cassettes. These three sets of cassette positioning components can correspond to the three commonly used specifications of wafer sizes.

[0027] The left stop bars 2 and the right stop bars 3 of the three sets of cassette positioning components can be arranged in a row. The left and right stop bars (2, 3) corresponding to the 6-inch cassette are located in the middle position, and the 8-inch and 12-inch cassettes are distributed outward. Each pressure sensing member 5 is also arranged in a row, and the pressure sensing members 5 of each set of cassette positioning components do not affect each other. For example, when placing a 6-inch cassette, the pressure sensing members 5 of the 8-inch and 12-inch cassettes will not touch the 6-inch cassette; when placing an 8-inch cassette, the pressure sensing members 5 of the 6-inch and 12-inch cassettes will not touch the 8-inch cassette either.

[0028] During specific implementation, the cassette positioning component for the 12-inch cassette can include a left stop bar 2 and a right stop bar 3, and the left stop bar 2 and the right stop bar 3 are distributed at diagonal positions on the cassette platform 1. In this way, when only one stop bar is provided on each side, using the diagonal position distribution can take into account the limited lateral position of the front and rear parts of the cassette.

[0029] According to the design requirements, the cassette positioning component of the 12-inch cassette may include two left stop bars 2 and right stop bars 3, or may include three left stop bars 2 and right stop bars 3. Align the two or three left stop bars 2 and align the two or three right stop bars 3. In this way, the side edges of the cassette can be limited at multiple positions.

[0030] The left stop bar 2 and the right stop bar 3 of the cassette positioning component of the 12-inch cassette have a raised area 7, and an inclined surface 71 is provided at the inner position of the upper part of the raised area 7. The raised left stop bar 2 and right stop bar 3 are beneficial to the positioning of the two side edges of the 12-inch cassette, and the inclined surface 71 is beneficial to the 12-inch cassette being placed in the cassette placement space 100.

[0031] Specific operation process: The operator places the cassette in the cassette placement space 100 of the corresponding specification. The left, right, and lower stop bars (2, 3, 4) of the corresponding cassette positioning component fix the cassette from three directions. The cassette presses on the pressure sensing component 5 of this group of cassette positioning components. The lamp of the pressure sensing sensor 51 of the pressure sensing component 5 lights up, indicating that the placement of the cassette is normal when it senses the cassette. The cassette can be replaced as needed and placed in the cassette placement space 100 formed by the cassette positioning components of the corresponding size.

[0032] The automatic positioning cassette size platform device provided by the present utility model sets three groups of cassette positioning components on a cassette platform 1 according to the existing specifications of semiconductor wafers. Cleverly design the positions of the left, right, and lower stop bars (2, 3, 4) and the pressure sensing component 5 of each group of cassette positioning components. The left, right, and lower stop bars (2, 3, 4) enclose the cassette placement space 100 from three directions, and each cassette placement space 100 is distributed in a diffusive manner from the inside to the outside according to the size. The operator places the cassette in the cassette placement space 100 of the corresponding specification, and the cassette presses on the pressure sensing component 5 of this group of cassette positioning components. The pressure sensing component 5 senses the cassette, indicating that the placement is normal. This device can directly match and position different specifications of cassette frames, cancel the manual adjustment of the confirmation points for storing cassettes in the cassette frames, improve the machine change efficiency, and improve the abnormal situation of automatically grasping and returning wafers stuck.

[0033] The above are only some embodiments of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the creative concept of the present utility model, other deformations and improvements can be made, and these all belong to the protection scope of the present utility model.

Claims

1. An automatic positioning platform device for cassette size, characterized in that, It includes a magazine platform (1) and multiple groups of magazine positioning components arranged on the magazine platform (1). The multiple groups of magazine positioning components are distributed in a radially outward manner on the magazine platform (1) for placing magazines of different sizes and specifications. Each group of magazine positioning components includes a left stop bar (2), a right stop bar (3), a lower stop bar (4), and at least one pressure sensor (5). The left stop bar (2), the right stop bar (3), and the lower stop bar (4) are distributed in three directions on the magazine platform (1) to form a magazine placement space (100). The pressure sensor (5) is located on the side where the left stop bar (2) or the right stop bar (3) is located, and the pressure sensor (5) extends from the inner side relative to the left stop bar (2) or the right stop bar (3) towards the magazine placement space (100) so as to be able to sense the magazine border.

2. The automatic positioning cartridge size platform device according to claim 1, wherein Each group of magazine positioning components has two pressure sensors (5), and the two pressure sensors (5) are respectively located on the sides where the left stop bar (2) and the right stop bar (3) are located, so as to be able to sense the magazine border from two directions.

3. The automatic positioning film cassette size platform device according to claim 1, characterized in that Each group of magazine positioning components has two lower stop bars (4), and the two lower stop bars (4) are aligned and arranged on the magazine platform (1).

4. The automatic positioning cartridge size platform device according to claim 1, characterized in that, Both ends of the left stop bar (2), the right stop bar (3), and the lower stop bar (4) are provided with waist-shaped holes (6) and are fixed to the magazine platform (1) by screws. Multiple groups of adjustment holes (11) are provided on the magazine platform (1) corresponding to each of the left stop bar (2), the right stop bar (3), and the lower stop bar (4).

5. The automatic positioning film cassette size platform device according to claim 1, characterized in that There are three groups of magazine positioning components in total, and the three groups of magazine positioning components are respectively used to place 6-inch magazines, 8-inch magazines, and 12-inch magazines.

6. The automatic positioning cassette size platform device according to claim 5, wherein, The magazine positioning components for 12-inch magazines include a left stop bar (2) and a right stop bar (3), and the left stop bar (2) and the right stop bar (3) are distributed at diagonal positions on the magazine platform (1).

7. The automatic positioning cassette size platform device according to claim 5, wherein The magazine positioning components for 12-inch magazines include two left stop bars (2) and right stop bars (3), or include three left stop bars (2) and right stop bars (3). The two or three left stop bars (2) are aligned, and the two or three right stop bars (3) are aligned.

8. The automatic positioning cassette size platform device according to claim 6 or 7, characterized in that The left stop bar (2) and the right stop bar (3) of the magazine positioning components for 12-inch magazines are provided with a heightening area (7), and an inclined surface (71) is provided at the inner side of the upper part of the heightening area (7).

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