Filter type detachable cooling water delivery device for high-temperature purification furnace body

Abstract

The utility model discloses a filter type detachable cooling water delivery device for a high-temperature purification furnace body, and belongs to the field of cooling devices. The problem that the cooling effect of a furnace body is affected due to the fact that rust in a water-cooled jacket of high-temperature purification equipment is difficult to remove is solved. In order to solve the technical problem, the technical scheme adopted by the utility model is as follows: the device comprises a filtering device, one end face of the filtering device is provided with a first flange, the first flange is fixedly connected to a furnace body, a pipeline is connected between the first flange and a water delivery port of the furnace body, the other end face of the filtering device is provided with a second flange, and the second flange is fixedly connected to a water delivery device; a water inlet buffer part is further arranged between the second flange and the water conveying device, the pipeline, the first flange, the second flange, the water inlet buffer part and the water conveying device are coaxially arranged, a plurality of first sealing devices are arranged on the first flange, and a plurality of second sealing devices are arranged on the second flange; the utility model is applied to the high-temperature purification furnace.

Description

Technical Field

[0001] The utility model provides a filtering type detachable high-temperature purification furnace body cooling water delivery device, belonging to the technical field of cooling devices for producing high-purity third-generation semiconductor substrate equipment. Background Art

[0002] The third generation of semiconductors, also known as wide bandgap semiconductors, are semiconductor materials represented by silicon carbide (SiC) and gallium nitride (GaN). They have the characteristics of high pressure, high temperature, high frequency and high power. High temperature purification equipment is one of the necessary devices for preparing the third generation semiconductor SiC substrate. The working temperature of high temperature purification equipment reaches 2400℃. At such a high temperature, the cooling effect of cooling water is particularly important. If the cooling effect of cooling water is not good, it will cause equipment operation failure and affect the safe production of equipment. In order to ensure that the cooling water can fill the entire water cooling interlayer (water cooling jacket) of the furnace body, the water inlet of the cooling water is directly welded to the bottom of the furnace body, such as Figure 1 As shown, however, since the furnace body is made of carbon steel, a large amount of rust will be produced after the cooling water enters. Due to the small size of the water inlet, the rust on the bottom of the furnace body cannot be removed during furnace body maintenance. Long-term use will affect the cooling effect of the furnace body, and in serious cases, it will affect the safe operation of the equipment. Utility Model Content

[0003] In order to solve the technical problem that rust in the water cooling jacket of high-temperature purification equipment is difficult to remove and affects the cooling effect of the furnace body, the utility model proposes a filtering-type detachable high-temperature purification furnace body cooling water supply device. The purpose is to effectively solve the problem of filtering and removing rust in the water cooling jacket by improving the hardware structure of the high-temperature purification furnace, avoid blockage of the water supply port, and improve the cooling effect of the furnace body.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is as follows: a filtering type detachable high-temperature purification furnace body cooling water supply device, comprising a filtering device, one end surface of the filtering device is provided with a first flange, the first flange is fixedly connected to the furnace body; the first flange is connected to the water supply port of the furnace body by a pipe;

[0005] The other end surface of the filter device is provided with a second flange, which is fixedly connected to the water delivery device; a water inlet buffer portion is also provided between the second flange and the water delivery device;

[0006] The pipeline, the first flange, the second flange, the water inlet buffer portion and the water delivery device are coaxially arranged;

[0007] A plurality of first sealing devices are provided on the first flange;

[0008] A plurality of second sealing devices are provided on the second flange.

[0009] Furthermore, the filtering device is a metal filter.

[0010] Furthermore, the water inlet buffer portion is provided on the second flange.

[0011] Furthermore, a first fixing hole is provided on the first flange, and a second fixing hole is provided on the second flange, and the first fixing hole corresponds to the second fixing hole one-to-one; the first flange and the second flange are fixedly connected by a plurality of bolts, and the bolts correspond to the first fixing holes one-to-one.

[0012] Furthermore, the first sealing device includes a first sealing groove, in which a first sealing ring is arranged; the second sealing device includes a second sealing groove, in which a second sealing ring is arranged.

[0013] Furthermore, the first sealing device corresponds to the second sealing device in a one-to-one manner.

[0014] Furthermore, the water inlet buffer portion is a hollow cylinder.

[0015] The beneficial effects of the present invention compared to the prior art are as follows:

[0016] 1. The filter device of the present invention is arranged between the first flange and the second flange, and cooperates with the water inlet buffer part to filter impurities in the cooling water to prevent impurities from entering the furnace body. At the same time, when the cooling water in the cold sleeve of the furnace body is discharged through the water delivery device, the rust in the furnace body can be filtered on the filter device. When inspecting and maintaining the furnace body, it is only necessary to remove the bolts connecting the first flange and the second flange to disassemble the filter device, and then clean the impurities in the cooling water and the rust in the furnace body. The equipment structure is simple and easy to operate. Compared with the traditional structure in which the water delivery device is welded to the furnace body, the water delivery device of the present invention is detachable, which is easy to clean the rust in the furnace body and can ensure the cooling effect of the furnace body.

[0017] 2. The first flange and the second flange of the utility model are both provided with sealing devices. The sealing surface of the first flange and the sealing surface on the second flange cooperate with each other, and a double sealing device is used for sealing. The first flange and the second flange are fixed by bolts, which can effectively prevent water leakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention will be further described below with reference to the accompanying drawings:

[0019] Figure 1 A schematic diagram of the structure of a traditional furnace body and its cooling water delivery device;

[0020] Figure 2 for Figure 1 Enlarged view of part A;

[0021] Figure 3 It is a structural diagram of the utility model;

[0022] Figure 4 This is a structural diagram of the connection between the water delivery device and the furnace body of the utility model;

[0023] Figure 5 It is a structural diagram of the connection relationship between the water delivery device and the first flange of the utility model;

[0024] In the figure: 1 is the water delivery device, 2 is the second flange, 3 is the filtering device, 4 is the first flange, 5 is rust, 6 is the water cooling jacket, 7 is the inner furnace shell, 8 is the outer furnace shell, 9 is the water inlet buffer, 10 is the first sealing device, 11 is the second sealing device, 12 is the second sealing groove, 13 is the first fixing hole, 14 is the second fixing hole, 15 is the pipeline, and 16 is impurities. DETAILED DESCRIPTION

[0025] In the present invention, unless otherwise specified, directional words such as "up, down, top, bottom" are usually used with reference to the directions shown in the drawings, or with reference to the components themselves in the vertical, perpendicular or gravity direction; similarly, for ease of understanding and description, "inside and outside" refer to the inside and outside relative to the outline of each component itself, but the above directional words are not used to limit the present invention.

[0026] like Figures 1 to 5 As shown, the present invention provides a detachable, filtered cooling water delivery device for a high-temperature purification furnace, comprising a filter device 3. A first flange 4, fixedly connected to the furnace body, is secured to one end of the filter device 3; a second flange 2, fixedly connected to the water delivery device 1, is secured to the other end of the filter device 3. In this embodiment, the filter device 3 is a metal filter mesh. The filter device 3 is detachably positioned between the first and second flanges 4 and 2. When the first and second flanges 4 are bolted together, the filter device 3 is securely secured between the two flanges.

[0027] The adjacent sealing surfaces of the first flange 4 and the second flange 2 cooperate with each other. Several first sealing devices 10 are provided on the first flange 4, and several second sealing devices 11 are provided on the second flange 2 to prevent water leakage. The number of first sealing devices 10 and second sealing devices 11 can be determined by those skilled in the art based on practical circumstances. In this embodiment, the first sealing devices 10 are evenly distributed on the first flange 4, and the second sealing devices 11 are evenly distributed on the second flange 2. The first sealing devices 10 and the second sealing devices 11 correspond one-to-one. The first sealing device 10 includes a first sealing groove, in which a first sealing ring is placed; the second sealing device 11 includes a second sealing groove 12, in which a second sealing ring is placed.

[0028] A pipe 15 is fixedly connected between the first flange 4 and the water inlet of the furnace body. The pipe 15 is coaxially arranged with the first flange 4 , and the diameter of the pipe 15 is larger than the diameter of the water pipeline.

[0029] A first fixing hole 13 is defined in the first flange 4, and a second fixing hole 14 is defined in the second flange 2. The first fixing hole 13 corresponds to the second fixing hole 14. The first flange 4 and the second flange 2 are fixedly connected by a plurality of bolts, each corresponding to the first fixing hole 13. A water inlet buffer 9 is provided between the second flange 2 and the water supply device 1. The water inlet buffer 9 is disposed within the second flange 2. The first flange 4, the second flange 2, the water inlet buffer 9, and the water supply device 1 are coaxially arranged. When cooling water flows from the water supply device 1 through the filter device 3 and enters the water-cooling jacket 6 within the furnace body, that is, the cooling water is located between the inner furnace shell 7 and the outer furnace shell 8 of the furnace body, any impurities 16 in the cooling water will be filtered out by the filter device 3, and the filtered impurities 16 will remain in the water inlet buffer 9. During furnace maintenance, the cooling water in the water-cooling jacket 6 is released from the water delivery device 1. The rust 5 in the water-cooling jacket 6 of the furnace body is filtered onto the upper end surface of the filter device 3. The bolts securing the first flange 4 and the second flange 2 are then removed, and the filter device 3 is removed, thereby cleaning the rust 5 in the furnace body and the impurities 16 in the cooling water, thereby ensuring the cooling effect of the furnace body. In this embodiment, a hollow area is formed between the water delivery device 1 and the second flange 2. This hollow area serves as the water inlet buffer 9 in this embodiment. Except for the pipe 15 connected to the first flange 4 through the filter device 3, the other end surfaces of this area are sealed. Those skilled in the art may also configure the water inlet buffer 9 as a hollow cylinder that intersects the water inlet of the water delivery device 1 and is coaxial with the pipe 15 connected to the first flange 4, or configure the water inlet buffer 9 as another structure, as long as it cooperates with the filter device 3 and can temporarily store impurities 16 in the filtered cooling water.

[0030] Regarding the specific structure of the present invention, it should be noted that the connection relationship between the various component modules adopted in the present invention is definite and feasible. Except for the special instructions in the embodiments, the specific connection relationship can bring about corresponding technical effects and solve the technical problems raised by the present invention without relying on the execution of the corresponding software program. The components, modules, models of specific components appearing in the present invention, the connection methods between each other, and the conventional usage methods and expected technical effects brought about by the above-mentioned technical features, except for the specific instructions, all belong to the disclosed contents in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by technical personnel in this field before the application date, or belong to the existing technologies such as conventional technology and common knowledge in this field, and there is no need to elaborate, so that the technical solution provided in this case is clear, complete, and feasible, and the corresponding physical products can be reproduced or obtained based on this technical means.

[0031] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A filtering type detachable high temperature purification furnace body cooling water delivery device, characterized by: It comprises a filtering device (3), one end surface of the filtering device (3) is provided with a first flange (4), the first flange (4) is fixedly connected to the furnace body; the first flange (4) is connected to the water inlet of the furnace body by a pipe (15); The other end surface of the filter device (3) is provided with a second flange (2), and the second flange (2) is fixedly connected to the water delivery device (1); a water inlet buffer portion (9) is also provided between the second flange (2) and the water delivery device (1); The pipeline (15), the first flange (4), the second flange (2), the water inlet buffer portion (9), and the water delivery device (1) are coaxially arranged; A plurality of first sealing devices (10) are provided on the first flange (4); A plurality of second sealing devices (11) are provided on the second flange (2).

2. The filtering type detachable high-temperature purification furnace cooling water delivery device according to claim 1, characterized in that: The filtering device (3) is a metal filter.

3. The filtering type detachable high-temperature purification furnace cooling water supply device according to claim 1, characterized in that: The water inlet buffer portion (9) is arranged on the second flange (2).

4. The filtering type detachable high-temperature purification furnace cooling water supply device according to claim 1, characterized in that: The first flange (4) is provided with a first fixing hole (13), and the second flange (2) is provided with a second fixing hole (14), and the first fixing hole (13) corresponds to the second fixing hole (14) one by one; the first flange (4) and the second flange (2) are fixedly connected by a plurality of bolts, and the bolts correspond to the first fixing holes (13) one by one.

5. The filtering type detachable high-temperature purification furnace cooling water supply device according to claim 1, characterized in that: The first sealing device (10) comprises a first sealing groove, in which a first sealing ring is arranged; the second sealing device (11) comprises a second sealing groove (12), in which a second sealing ring is arranged.

6. The filtering type detachable high-temperature purification furnace cooling water delivery device according to claim 1, characterized in that: The first sealing device (10) corresponds to the second sealing device (11) on a one-to-one basis.

7. The filtering type detachable high-temperature purification furnace cooling water supply device according to claim 1, characterized in that: The water inlet buffer portion (9) is a hollow cylinder.

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