Tool for vapor deposition of annular workpiece

Abstract

The utility model relates to the field of deposition of annular workpieces, in particular to a tool for vapor deposition of annular workpieces, which comprises deposition equipment, a mounting frame and a support rod, the mounting frame comprises a mounting rod and two cantilever rods, the mounting rod is mounted in the deposition equipment, and the two cantilever rods are mounted at two ends of the mounting rod along the depth direction of the deposition equipment; a plurality of mounting holes are formed in the cantilever rods, the plurality of mounting holes are uniformly arranged in the length direction of the cantilever rods, and the supporting rod is horizontally mounted and connected to the two cantilever rods through the mounting holes and is used for bearing the annular workpiece, so that the position of the annular workpiece in the deposition equipment can be adjusted; and further, the deposition thickness of the annular workpiece is adjusted.

Description

Technical Field

[0001] The utility model relates to the field of annular workpiece deposition, in particular to a tool for vapor phase deposition of annular workpieces. Background Art

[0002] Chemical vapor deposition (CVD) is an important technology for preparing thin film materials and is widely used in many fields. It prepares thin films by decomposing compounds in the gas phase at high temperatures and depositing them on the substrate surface. It is highly controllable and scalable. During the CVD process, vapor deposition is required on workpieces of different shapes. Annular workpieces are a common type of workpiece. To facilitate deposition on annular workpieces, they are generally placed in the deposition equipment by hoisting. The deposition thickness of the annular workpiece varies at different positions in the deposition equipment. When the deposition thickness of the annular workpiece needs to be controlled, the annular workpiece needs to be adjusted at different positions in the deposition equipment. This requires that the deposition tooling for the annular workpiece has a convenient position adjustment function to facilitate the adjustment of the position of the annular workpiece in the deposition equipment and thus control the deposition thickness. Utility Model Content

[0003] The purpose of the utility model is to provide a tool for vapor deposition of an annular workpiece, so as to adjust the position of the annular workpiece in a deposition device, and further adjust the deposition thickness of the annular workpiece.

[0004] To achieve the above objectives, on the one hand, the present invention adopts the following technical solutions:

[0005] A tool for vapor deposition of an annular workpiece includes a deposition device, a mounting frame and a support rod. The mounting frame includes a mounting rod and two cantilever rods. The mounting rod is installed in the deposition device, and the two cantilever rods are installed at both ends of the mounting rod along the depth direction of the deposition device; the cantilever rod is provided with a mounting hole, and the number of the mounting holes is set to be multiple, and the multiple mounting holes are evenly arranged along the length direction of the cantilever rod. The support rod is horizontally installed on the two cantilever rods through the mounting holes and is used to carry the annular workpiece.

[0006] The beneficial effect is: when it is necessary to deposit an annular workpiece, the mounting rod is installed in the vapor deposition equipment, and the cantilever rod is set along the depth direction of the vapor deposition equipment. Since a plurality of mounting holes are provided on the cantilever rod, the plurality of mounting holes are evenly arranged along the length direction of the cantilever rod. When depositing the annular workpiece, the annular workpiece is passed through the support rod, and then the support rod is passed through the mounting holes on the plurality of cantilever rods. According to the required deposition thickness of the annular workpiece, the position of the support rod installed on the cantilever rod is adjusted. The deposition thickness of the mounting hole close to the mounting rod is thinner, and the deposition thickness of the mounting hole away from one end of the mounting rod is thicker. The operator can select the deposition thickness of the annular workpiece.

[0007] A further technical solution of the present invention is that the diameters of both ends of the support rod are contracted inwards.

[0008] A further technical solution of the present invention is that the end of the cantilever rod away from the mounting rod is set as a pointed end.

[0009] A further technical solution of the present invention is that a connecting hole is provided at one end of the cantilever rod, the cantilever rod is passed through the connecting hole on the mounting rod, a limiting groove is provided on the mounting rod along its length direction, a limiting block is provided on the inner wall of the connecting hole of the cantilever rod, the limiting block is inserted into the limiting groove and slides in the limiting groove.

[0010] The beneficial effect is that by providing a limit block on the cantilever rod, the limit block cooperates with the limit groove to allow the cantilever rod to move only along the length direction of the mounting rod, thereby preventing the cantilever rod from swinging on the mounting rod. A further technical solution of the utility model is that the support rod is provided with a plurality of slots, which are spaced apart along the length direction of the support rod, and the annular workpiece is used to be placed between the plurality of arranged slots.

[0011] A further technical solution of the present invention is that a plurality of slots are provided on the top side of the support rod, the plurality of slots are spaced apart along the length direction of the support rod, and the width of the slots is smaller than the width of the annular workpiece.

[0012] The beneficial effect is that the arrangement of the clamping groove reduces the contact area between the annular workpiece and the support rod when the annular workpiece is placed on the support rod, thereby increasing the area of vapor deposition on the annular workpiece and improving the effect of vapor deposition.

[0013] A further technical solution of the present invention is that the cross section of the support rod is fan-shaped, and the clamping grooves are evenly distributed along the length direction of the side where the vertex of the fan is located.

[0014] In order to achieve the above purpose, on the other hand, the present invention adopts the following technical solutions:

[0015] A tool for vapor deposition of an annular workpiece, wherein at least one group of abutment needles is fixedly arranged on the top side of the support rod, each group of abutment needles includes a plurality of abutment needles distributed in a row along the length direction of the support rod, and each group of abutment needles is used to support the annular workpiece; the abutment needles are arranged perpendicular to the length direction of the support rod, the tips of the abutment needles are away from the support rod, and the distance between two adjacent abutment needles is less than the width of the annular workpiece.

[0016] A further technical solution of the present invention is that a plurality of groups of abutment needles are arranged along the circumferential direction of the support rod.

[0017] The beneficial effect is: when it is necessary to deposit an annular workpiece, the mounting rod is installed in the vapor deposition equipment, and the cantilever rod is set along the depth direction of the vapor deposition equipment. Then, since multiple mounting holes are provided on the cantilever rod, the multiple mounting holes are evenly arranged along the length direction of the cantilever rod. When depositing the annular workpiece, the annular workpiece is passed through the support rod, and then the support rod is passed through the corresponding mounting holes on the multiple cantilever rods. The position of the support rod installed on the cantilever rod is adjusted, and the operator can select the deposition thickness of the annular workpiece. At the same time, the setting of the slot or abutment needle on the support rod reduces the contact area between the annular workpiece and the support rod, thereby making the deposition layer more complete. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of Example 1 of the present utility model.

[0019] Figure 2 yes Figure 1 A partial enlarged view of point A in the middle;

[0020] Figure 3 yes Figure 1 A partial enlarged view of point B in the middle;

[0021] Figure 4 It is a schematic diagram showing the overall structure of the support rod and the abutment needle.

[0022] In the figure: 1-mounting frame, 11-mounting rod, 12-cantilever rod, 13-connecting hole, 2-support rod, 3-limiting block, 31-limiting slot, 4-connecting rod, 5-card slot, 6-abutment pin, 7-mounting hole. DETAILED DESCRIPTION

[0023] The following is combined with Figures 1-4 The specific implementation methods of the present utility model are further described.

[0024] Example 1

[0025] like Figure 1 and Figure 2As shown, the utility model discloses a tool for vapor deposition of an annular workpiece, and the tool for vapor deposition of an annular workpiece includes a mounting frame 1 and a support rod 2. The mounting frame 1 includes a horizontally arranged mounting rod 11 and a plurality of cantilever rods 12. A connecting hole 13 is provided at one end of the cantilever rod 12, and the mounting rod 11 is passed through the connecting hole 13, thereby connecting the mounting rod 11 with the cantilever rod 12. In the present application, the number of cantilever rods 12 is set to two, and both cantilever rods 12 are installed on the mounting rod 11 in a length direction perpendicular to the mounting rod 11 and are arranged in parallel and at intervals; each cantilever rod 12 is provided with a plurality of mounting holes 7, and the plurality of mounting holes 7 are evenly distributed along the length direction of the cantilever rod 12, and the mounting holes 7 on the two cantilever rods 12 correspond to each other; a support rod 2 is provided on the cantilever rod 12, and the support rod 2 is arranged parallel to the length direction of the mounting rod 11, and the two ends of the support rod 2 are respectively passed through the mounting holes 7 corresponding to the two cantilever rods 12, combined with Figure 3 The support rod 2 includes a main body and connecting rods 4 connected at both ends of the main body. The two ends of the support rod 2 are contracted inward to form a connecting rod 4, so that the diameter of the connecting rod 4 is smaller than the main body of the support rod 2. The connecting rod 4 is used to facilitate the driving of the main body of the support rod 2 to pass through the mounting hole 7; a limiting groove 31 is provided on the mounting rod 11, and the limiting groove 31 is formed into a long strip along the length direction of the mounting rod 11. A limiting block 3 corresponding to the limiting groove 31 is provided on the cantilever rod 12, and the limiting block 3 is integrally arranged on the inner wall of the connecting hole 13. When the mounting rod 11 passes through the connecting hole 13, the limiting block 3 is stuck in the limiting groove 31 and cooperates with the limiting groove 31, so that the cantilever rod 12 is installed in the mounting hole When the cantilever rod 12 is mounted on the mounting rod 11, it is not easy to rotate on the mounting rod 11, thereby improving the stability of the cantilever rod 12 when it is installed on the mounting rod 11; when in use, by horizontally mounting the mounting rod 11 on the deposition device, the cantilever rod 12 extends in the depth direction of the deposition device, and the end of the cantilever rod 12 extending into the deposition device is set as a tip. In this embodiment, the cantilever rod 12 is set as a plate-shaped structure with a rectangular cross-section, and the end of the cantilever rod 12 extending into the deposition device is contracted in the direction of decreasing thickness of the cantilever rod 12 to form a tip. The setting of the tip allows the gas to move evenly along the length direction of the cantilever rod 12, thereby facilitating deposition of the annular workpiece on the mounting rod 11 mounted on the cantilever rod 12;

[0026] Combine Figure 1 and Figure 2According to the target deposition thickness of the annular workpiece, the support rod 2 is installed in the mounting holes 7 at different positions on the cantilever rod 12, so that the annular workpiece is located at different depths in the deposition equipment. During vapor deposition, the density of the deposition gas at the bottom of the deposition equipment is relatively high, and the density of the deposition gas at the top of the deposition equipment is relatively low. Therefore, the deeper into the deposition equipment, that is, the farther away from the mounting rod 11, the greater the deposition thickness of the annular workpiece, and the closer to the mounting rod 11, the thinner the deposition thickness of the annular workpiece. In the technical solution of the present application, different installation positions of the support rod 2 on the cantilever rod 12 can be selected according to the target deposition thickness of the workpiece, and the installation height can be flexibly adjusted to achieve the desired deposition effect.

[0027] Combine Figure 1 and Figure 3 In some embodiments, the top side of the support rod 2 is provided with multiple slots 5 , evenly and spaced apart along the length of the support rod 2 . The width of the slots 5 is less than the thickness of the annular workpiece. When deposition is required on an annular workpiece, the workpiece is placed on the support rod 2 , with the edge of the support rod 2 containing the slots 5 abutting the inner ring of the workpiece. The width of the workpiece spans at least one slot 5 . The provision of the slots 5 reduces the contact area between the workpiece and the support rod 2 .

[0028] Combine Figure 1 and Figure 3 In some embodiments, the cross-section of the support rod 2 is set to be fan-shaped, and the slot 5 is opened on the edge corresponding to the angle of the fan-shaped cross-section. When the annular workpiece needs to be deposited, the annular workpiece is passed through the support rod 2, and the edge of the support rod 2 where the slot 5 is opened is abutted against the inner ring of the annular workpiece. The setting of the fan-shaped cross-section further reduces the contact area between the annular workpiece and the support rod 2.

[0029] Example 2

[0030] Reference Figure 1 and Figure 4 The difference between this embodiment and embodiment 1 is that the cross-section of the support rod 2 in this embodiment is set to be circular, and an abutment needle 6 is connected to the support rod 2. One end of the abutment needle 6 is welded to the support rod 2, and the other end extends in a direction perpendicular to the support rod 2 and forms a tip. The number of abutment needles 6 is set to multiple, and multiple abutment needles 6 are arranged in multiple rows and columns on the support rod 2. The abutment needles 6 are used to abut annular workpieces. When the annular workpiece needs to be deposited, the annular workpiece is passed through the support rod 2 and the annular workpiece is abutted against the needle heads of the arranged abutment needles 6 to reduce the contact area between the annular workpiece and the support rod 2. Then, the support rod 2 with the annular workpiece installed is passed through the mounting hole 7 of the cantilever rod 12, so that the annular workpiece is stably deposited to the required thickness and has a relatively complete deposition layer.

Claims

1. A tool for vapor deposition of an annular workpiece, comprising a deposition device, characterized in that: It also includes a mounting frame and a support rod. The mounting frame includes a mounting rod and two cantilever rods. The mounting rod is installed in the deposition equipment, and the two cantilever rods are installed at both ends of the mounting rod along the depth direction of the deposition equipment; the cantilever rod is provided with a mounting hole, and the number of the mounting holes is set to multiple, and the multiple mounting holes are evenly arranged along the length direction of the cantilever rod. The support rod is horizontally installed on the two cantilever rods through the mounting hole, and is used to carry annular workpieces.

2. The tooling for vapor deposition of an annular workpiece according to claim 1, characterized in that: The diameters of both ends of the support rod shrink inwards.

3. The tooling for vapor deposition of an annular workpiece according to claim 1, characterized in that: One end of the cantilever rod facing away from the mounting rod is configured as a tip.

4. The tooling for vapor deposition of an annular workpiece according to claim 1, characterized in that: A connecting hole is provided at one end of the cantilever rod, and the cantilever rod is passed through the connecting hole on the mounting rod. A limiting groove is provided on the mounting rod along its length direction. A limiting block is provided on the inner wall of the connecting hole of the cantilever rod, and the limiting block is inserted into the limiting groove and slides in the limiting groove.

5. The tooling for vapor deposition of an annular workpiece according to claim 1, characterized in that: A plurality of slots are provided on the top side of the support rod. The plurality of slots are spaced apart along the length direction of the support rod, and the width of the slots is smaller than the width of the annular workpiece.

6. The tooling for vapor deposition of an annular workpiece according to claim 5, characterized in that: The cross section of the support rod is fan-shaped, and the slots are evenly distributed along the length direction of the side where the vertex of the fan is located.

7. The tool for vapor deposition of an annular workpiece according to any one of claims 1 to 4, characterized in that: At least one group of abutment needles is fixedly arranged on the top side of the support rod, each group of abutment needles includes a plurality of abutment needles distributed in a row along the length direction of the support rod, and each group of abutment needles is used to support the annular workpiece; the abutment needles are arranged perpendicular to the length direction of the support rod, the tips of the abutment needles are away from the support rod, and the distance between two adjacent abutment needles is less than the width of the annular workpiece.

8. The tooling for vapor deposition of an annular workpiece according to claim 7, characterized in that: The plurality of abutment needles are arranged along the circumferential direction of the support rod.

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