Furnace door and vertical furnace

Abstract

The furnace door is applied to the vertical furnace, materials are contained in a reaction cavity of the vertical furnace, and the furnace door comprises a door body, a bearing part, a heating part and a heat preservation part. The bearing part is connected with the door body, spaced from the door body and used for bearing materials. The heating piece is arranged on the side, facing the door body, of the bearing piece and used for heating materials. The heat preservation piece is arranged on the side, facing the bearing piece, of the door body. The furnace door can retain part of heat in the vertical furnace through the heat preservation piece connected to the door body, heat, lost through the door body, in the reaction cavity can be reduced, materials borne on the bearing piece are heated through the heating piece, heat can be provided for the materials, and the situation that the machining effect of the materials is affected due to insufficient heating of the materials can be prevented. Therefore, when the vertical furnace is used for processing the photovoltaic materials, the vertical furnace with the furnace door is good in heat preservation effect, can provide enough heat for the photovoltaic materials, and is beneficial to processing of the photovoltaic materials.

Description

Technical Field

[0001] The present application relates to the field of photovoltaic material processing, and in particular to a furnace door and a vertical furnace. Background Art

[0002] Vertical furnaces are often used in the process production of photovoltaic materials. The photovoltaic materials are placed in a carrier boat, and the carrier boat and photovoltaic materials are placed in a vertical furnace. Reactive gas is introduced into the reaction chamber of the vertical furnace to provide a high-temperature environment for the photovoltaic materials, thereby realizing processing technologies such as coating, diffusion, oxidation and thin film deposition of photovoltaic materials.

[0003] In the related art, the thermal insulation effect of the furnace door of the vertical furnace is poor, which easily leads to the loss of heat in the reaction chamber, easily affects the processing effect of the photovoltaic material, and causes uneven coating of the photovoltaic material. Utility Model Content

[0004] In view of this, the present application provides a furnace door that can retain at least part of the heat in the reaction chamber in a vertical furnace.

[0005] One embodiment of the present application provides a furnace door for use in a vertical furnace having a reaction chamber containing material. The furnace door includes a door body, a load-bearing member, a heating element, and a heat-insulating member. The load-bearing member is connected to the door body and spaced apart from the door body, and is used to carry the material. The heating element is disposed on the side of the load-bearing member facing the door body and is used to heat the material. The heat-insulating member is disposed on the side of the door body facing the load-bearing member.

[0006] In some embodiments of the present application, the heating element includes an operating handle and a heating wire. The operating handle is arranged on the side of the door body away from the supporting member. The heating wire is passed through the door body and coiled on the side of the supporting member facing the door body. The operating handle is used to enable the heating wire to heat the material.

[0007] In some embodiments of the present application, the heating wire is coiled in a circuitous manner on a side of the carrier facing the door body.

[0008] In some embodiments of the present application, the furnace door further includes a plurality of ribs arranged at intervals, and the heating wire is passed through the ribs, so that the heating wire is coiled in a circuitous manner on the side of the carrier facing the door body.

[0009] In some embodiments of the present application, the heating element also includes a mounting plate and a cover, which are arranged opposite to each other, and the heating wire is clamped between the mounting plate and the cover and installed on the mounting plate, and the side of the mounting plate facing away from the cover is used to contact the carrier.

[0010] In some embodiments of the present application, the furnace door further includes support columns, which are respectively connected to the door body and the bearing member so that the door body and the bearing member are spaced apart.

[0011] In some embodiments of the present application, a protrusion is provided on the side of the support column facing the carrier, and a groove is provided on the side of the carrier facing the furnace door. The protrusion can be inserted into the groove, so that the support column can position the carrier.

[0012] In some embodiments of the present application, the insulation component includes multiple insulation blocks, which are spliced together. The insulation blocks have two side faces, each side face is provided with a notch, and two adjacent insulation blocks are connected so that the two notches form an avoidance hole that can accommodate a support column passing through.

[0013] In some embodiments of the present application, a splicing groove is provided on one side of the insulation block, and a splicing block is provided on the other side of the insulation block. In two adjacent insulation blocks, the splicing groove is inserted into the splicing block to connect multiple insulation blocks.

[0014] An embodiment of the present application further provides a vertical furnace, comprising a furnace tube and the furnace door of the previous embodiment, wherein the furnace door is connected to the furnace tube, and the furnace door and the furnace tube form a reaction chamber.

[0015] In the embodiments of the present application, a vertical furnace is provided with a furnace door that seals the furnace tube, thereby sealing the reaction chamber of the vertical furnace. The furnace door, through a thermal insulation member connected to the door body, can retain some heat within the vertical furnace, thereby reducing heat loss from the door body. The heating member heats the material carried on the carrier, thereby providing heat to the material and preventing insufficient heating of the material that could affect the processing effect. Therefore, when the vertical furnace is used for processing photovoltaic materials, the vertical furnace with the above-mentioned furnace door has a better thermal insulation effect, can provide sufficient heat to the photovoltaic material, and is conducive to the processing of photovoltaic materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope.

[0017] Figure 1 This is a schematic structural diagram of a furnace door provided in one embodiment of the present application.

[0018] Figure 2 for Figure 1 Exploded view of the middle furnace door.

[0019] Figure 3 A schematic diagram of the partial structure of a furnace door provided in another embodiment of the present application.

[0020] Figure 4 for Figure 1 Schematic diagram of the connection between the middle load-bearing member and the mounting plate.

[0021] Figure 5 for Figure 1 Schematic diagram of the structure of the middle insulation block.

[0022] Description of main component symbols:

[0023] 100. Furnace door; 10. Door body; 20. Carrying part; 201. Groove; 202. Through hole; 30. Insulation part; 301. Avoidance hole; 31. Insulation block; 3101. Notch; 311. Side; 312. Splicing groove; 313. Splicing block; 40. Heating part; 41. Operating handle; 42. Heating wire; 43. Mounting plate; 431. Screw; 44. Cover; 4401. Threaded hole; 50. Support column; 51. Protrusion; 60. Rib; 61. Connecting block; 70. Reinforcement part; 71. Reinforcement plate. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0026] The term "perpendicular" is used to describe an ideal state. In actual production or use, a state approximately perpendicular to the vertical may exist. The term "parallel" is used to describe an ideal state. In actual production or use, a state approximately parallel may exist.

[0027] It should be noted that when an element is referred to as being "fixed" to another element, it may be directly attached to the other element or there may be an intermediate element. When an element is referred to as being "connected" to another element, it may be directly connected to the other element or there may be an intermediate element. When an element is referred to as being "disposed on" another element, it may be directly disposed on the other element or there may be an intermediate element.

[0028] References to "embodiments" herein mean that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the present application. The appearance of such phrases in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. The various embodiments of the present application may be combined with each other unless there is a conflict.

[0029] Vertical furnaces are commonly used in the production of photovoltaic materials. The materials are loaded into a carrier boat, which is then placed in the vertical furnace. Reactive gases are introduced into the furnace's reaction chamber, creating a high-temperature environment for the materials, which then undergoes coating. However, conventional vertical furnaces often have poor insulation on their doors, which can lead to heat loss within the reaction chamber, affecting the coating and causing uneven film formation.

[0030] An embodiment of the present application provides a furnace door that can retain at least part of the heat in a reaction chamber within a vertical furnace. The furnace door is applied to a vertical furnace having material in the reaction chamber. The furnace door includes a door body, a carrier, a heating element, and a heat-insulating element. The carrier is connected to the door body and spaced apart from the door body, and the carrier is used to carry the material. The heating element is provided on the side of the carrier facing the door body and is used to heat the material. The heat-insulating element is provided on the side of the door body facing the carrier.

[0031] In the embodiments of the present application, a vertical furnace is provided with a furnace door that seals the furnace tube, thereby sealing the reaction chamber of the vertical furnace. The furnace door, through a thermal insulation member connected to the door body, can retain some heat within the vertical furnace, thereby reducing heat loss from the door body. The heating member heats the material carried on the carrier, thereby providing heat to the material and preventing insufficient heating of the material that could affect the processing effect. Therefore, when the vertical furnace is used for processing photovoltaic materials, the vertical furnace with the above-mentioned furnace door has a better thermal insulation effect, can provide sufficient heat to the photovoltaic material, and is conducive to the processing of photovoltaic materials.

[0032] The following describes some embodiments of the present application in detail with reference to the accompanying drawings. In the absence of conflict, the following embodiments and features of the embodiments may be combined with each other.

[0033] See also Figure 1 One embodiment of the present application provides a vertical furnace (not shown) including a furnace tube and a furnace door 100. The furnace door 100 is connected to the furnace tube. The furnace door 100 and the furnace tube are connected to form a sealed reaction chamber. The reaction chamber contains material.

[0034] In some embodiments, the material includes a photovoltaic material and a carrying boat for carrying the photovoltaic material.

[0035] In some embodiments, the photovoltaic material is a sheet material.

[0036] In some embodiments, the sheet material may be a silicon wafer or a silicon carbide wafer used to make a battery cell, or may be a wafer.

[0037] Reaction gas is introduced into the reaction chamber of the vertical furnace to provide a high-temperature environment for the photovoltaic material, thereby coating the photovoltaic material.

[0038] See also Figure 1The furnace door 100 includes a door body 10, a carrier 20, an insulation member 30 and a heating member 40. The carrier 20 is used to carry a carrying boat. The insulation member 30 is used to retain at least part of the heat in the reaction chamber in the vertical furnace to reduce the heat loss of the door body 10. The heating member 40 is used to heat the carrying boat carried by the carrier 20 and act on the photovoltaic material. It can provide heat for the photovoltaic material to prevent the photovoltaic material from being heated insufficiently and having a bad influence on the processing of the photovoltaic material, resulting in uneven coating of the photovoltaic material; it can also supplement heat for the reaction chamber to prevent insufficient heat in the reaction chamber from affecting the processing of the photovoltaic material. Therefore, the vertical furnace with the above-mentioned furnace door 100 has a better insulation effect and can provide sufficient heat to the photovoltaic material, which is beneficial to the processing of the photovoltaic material, thereby making the photovoltaic material uniformly coated.

[0039] In the reference document CN118463580A, an auxiliary heater is installed on the side of the furnace door facing the reaction chamber. The auxiliary heater can increase the temperature at the furnace door. The auxiliary heater in the reference document is equivalent to the heating element 40 in the present application. The heating element 40 in the present application is spaced apart from the door body 10. Compared to connecting the heating element 40 to the door body 10, the heating element 40 in the present application is closer to the material, which has a better heating effect on the material and helps the heat generated by the heating element 40 to better act on the material.

[0040] In addition, a sealing ring is usually provided between the door body 10 and the furnace tube to improve the sealing effect of the furnace door 100. The heating element 40 closer to the material is spaced apart from the door body 10, that is, the heating element 40 is spaced apart from the sealing ring. Compared with the heating element 40 closer to the sealing ring, the spacing between the heating element 40 and the sealing ring makes the sealing ring less likely to be damaged by high temperature, which can increase the service life of the sealing ring.

[0041] The insulation element 30 is located on the side of the door body 10 facing the carrier 20, thereby improving the thermal insulation performance of the door body 10. The heating element 40 is located on the side of the carrier 20 facing the door body 10 to heat the carrier boat supported by the carrier 20 and act on the photovoltaic material. The carrier 20 is connected to the door body 10 and is spaced apart from the door body 10 to provide space for the insulation element 30 and the heating element 40 to facilitate their installation.

[0042] In some embodiments, the carrier 20 is a tray and has a plurality of through holes 202 thereon, which facilitate the heat generated by the heating element 40 to act on the material.

[0043] In some embodiments, the oven door 100 further includes support columns 50. The support columns 50 connect the door body 10 and the carrier 20 respectively, so that the door body 10 and the carrier 20 are spaced apart to leave space for installing the heat preservation element 30 and the heating element 40.

[0044] See also Figure 2 and Figure 4 In some embodiments, the support column 50 has a protrusion 51 on the side facing the carrier 20. The carrier 20 has a groove 201 on the side facing the furnace door 100. The protrusion 51 can be inserted into the groove 201, so that the support column 50 can position the carrier 20, facilitating the installation and positioning of the carrier 20.

[0045] In some embodiments, the door body 10 is disc-shaped. Four support columns 50 are provided, and the lower ends of the four support columns 50 are fixedly connected to the door body 10. The upper ends of the four support columns 50 are each provided with a protrusion 51. The bottom of the support member 20 is provided with at least four grooves 201, and each protrusion 51 is inserted into a groove 201 to stably support the support member 20.

[0046] See also Figures 1 to 3 In some embodiments, one support column 50 is connected to the center of the door body 10. The other three support columns 50 are connected to the door body 10 at intervals. The distances between the other three support columns 50 and the center of the door body 10 are the same, and the distances between any two support columns 50 are the same, so that the support member 20 is stably supported by the support columns 50.

[0047] In some embodiments, the support column 50 is in the shape of a round rod.

[0048] When a vertical furnace is used, the furnace door 100 is mounted on the furnace tube, and the support column 50 extends in a vertical direction. The door body 10 and the bearing member 20 are both arranged perpendicular to the support column 50.

[0049] In some embodiments, the thermal insulation component 30 is an integrally formed structure, which facilitates the molding of the thermal insulation component 30 .

[0050] In some embodiments, the thermal insulation component 30 is a split structure, which facilitates the transportation and installation of the thermal insulation component 30.

[0051] See also Figure 1 and Figure 5 In some embodiments, the thermal insulation member 30 includes a plurality of thermal insulation blocks 31. The plurality of thermal insulation blocks 31 are joined together to form a cylindrical thermal insulation member 30 adapted to fit within the disc-shaped door body 10. Each thermal insulation block 31 is provided with a notch 3101. Adjacent thermal insulation blocks 31 are connected so that the two notches 3101 form a clearance hole 301 through which the support column 50 can pass.

[0052] When part of the insulation block 31 is damaged, a separate insulation block 31 can be replaced without disassembling the support column 50 , the heating element 40 and the carrier 20 , which facilitates the replacement of the insulation block 31 .

[0053] In some embodiments, the axis of the cylindrical heat-insulating member 30 is parallel to the vertical direction. The side surface 311 extends along the axis of the cylinder and connects the bottom surface and the top surface.

[0054] See also Figure 5 In some embodiments, a splicing groove 312 is provided on one side 311 of the insulation block 31, and a splicing block 313 is provided on the other side 311 of the insulation block 31. In two adjacent insulation blocks 31, the splicing groove 312 is plugged into the splicing block 313, connecting multiple insulation blocks 31 and facilitating the installation and removal of multiple insulation blocks 31.

[0055] In some embodiments, the splicing groove 312, the splicing block 313 and the notch 3101 all extend along the extension direction of the support column 50. When replacing an insulation block 31, the insulation block 31 is driven to move along the extension direction of the support column 50, and the splicing and disassembly of two adjacent insulation blocks 31 can be completed. The structure is simple and easy to assemble and disassemble.

[0056] In some embodiments, the insulation component 30 includes three insulation blocks 31, each insulation block 31 is provided with three notches 3101, one notch 3101 is used to avoid the support column 50 connected to the center position of the door body 10, and the other two notches 3101 are used to avoid the other two adjacent support columns 50 that are not located at the center position of the door body 10.

[0057] In some embodiments, the heat-insulating member 30 is a quartz heat-insulating member 30 . Quartz has good heat-insulating effects and can reduce heat loss in the reaction chamber.

[0058] In some embodiments, the thickness of the heat-insulating member 30 is greater than the thickness of the door body 10 , so that the heat-insulating member 30 can increase the heat-insulating performance of the door body 10 to reduce the heat in the reaction chamber lost through the door body 10 .

[0059] The thickness of the heat-insulating member 30 refers to the height of the heat-insulating member 30 in the vertical direction when a vertical furnace is used.

[0060] In some embodiments, the heating element 40 includes an operating handle 41 and a heating wire 42. The operating handle 41 is located on the side of the door body 10 facing away from the carrier 20, so that the operating handle 41 is located outside the reaction chamber, allowing the user to control the operation of the heating wire 42 through the operating handle 41. The heating wire 42 passes through the door body 10 and then coils around the side of the carrier 20 facing the door body 10. The heating wire 42 can be controlled by the operating handle 41, so that the coiled heating wire 42 can evenly heat the material loaded on the carrier 20.

[0061] In some embodiments, the heating wire 42 is serpentine (see Figure 3 ) is coiled around the side of the carrier 20 facing the door body 10.

[0062] In some embodiments, the heating wire 42 is spirally wound around a side of the carrier 20 facing the door body 10 .

[0063] The heating wire 42 that is wound in a circuitous manner or in a spiral manner can be passed through by the support column 50 and can evenly heat the carrier 20 so that the material carried on the carrier 20 is evenly heated.

[0064] In some embodiments, the heating wire 42 is covered with a metal tube. The metal tube is an aluminum silicate flame retardant tube, which has a good thermal insulation effect and can protect the heating wire 42, thereby effectively preventing the occurrence of safety hazards.

[0065] See also Figure 3 In some embodiments, the oven door 100 further includes a plurality of spaced ribs 60. The heating wire 42 is passed through the ribs 60, allowing the heating wire 42 to be coiled in a circuitous manner around the side of the carrier 20 facing the door body 10. The plurality of ribs 60 secure the heating wire 42, assisting in the coiling of the heating wire 42, allowing the heating wire 42 to be coiled in a circuitous manner and also maintaining the shape of the coiled portion of the heating wire 42.

[0066] In some embodiments, there are two ribs 60. The two ribs 60 are spaced apart. The heating wire 42 passes through the ribs 60 in a direction perpendicular to the spacing between the ribs 60 to secure the portion of the heating wire 42 that is coiled in a circuitous manner. Three or more ribs 60 may be provided depending on the application, and this is not limited here.

[0067] In some embodiments, the heat preservation element 30 is spaced apart from the heating wire 42 to prevent the heat preservation element 30 from directly contacting the heating wire 42, which would cause the heat preservation element 30 to absorb a large amount of heat generated by the heating element 40. Figure 2 In some embodiments, the heating element 40 further includes a mounting plate 43. The mounting plate 43 allows the support column 50 to pass through, allowing the support column 50 to locate the mounting plate 43. The heating wire 42 is fixedly mounted on the side of the mounting plate 43 facing away from the support member 20 via ribs 60. The provision of the mounting plate 43 facilitates the installation of the heating wire 42. The side of the mounting plate 43 facing away from the furnace door 100 is configured to contact the support member 20, allowing the heat generated by the heating wire 42 to be transferred to the material through the mounting plate 43 and the support member 20, thereby providing heat to the material.

[0068] In some embodiments, the heating element 40 further includes a cover 44. The cover 44 allows the support column 50 to pass through, allowing the support column 50 to position the mounting plate 43 so that the mounting plate 43 and the cover 44 are arranged opposite each other. The cover 44 is connected to the side of the mounting plate 43 facing the heating wire 42, so that the heating wire 42 is sandwiched between the support member 20 and the cover 44. The heating wire 42 passes through the furnace door 100 and the cover 44 in sequence, and then is coiled around the mounting plate 43. The coiled portion of the heating wire 42 is enclosed by the cover 44 and the mounting plate 43, which prevents the heating wire 42 from being exposed to the reaction chamber and protects the coiled portion of the heating wire 42.

[0069] In some embodiments, a screw 431 is threadedly connected to the mounting plate 43 , a threaded hole 4401 is provided on the cover 44 , and the mounting plate 43 and the cover 44 are connected via the screw 431 .

[0070] See also Figure 3 In some embodiments, the heating wire 42 is directly fixed to the carrier 20 via the ribs 60, so that the heat generated by the heating wire 42 is transferred to the material through the carrier 20. Compared to mounting the heating wire 42 via the mounting plate 43, the heating wire 42 directly contacting the carrier 20 prevents the mounting plate 43 from absorbing a large amount of heat, thereby providing more heat to the material.

[0071] In some embodiments, a connection block 61 is provided on the rib 60 , and the connection block 61 is fixedly connected to the support column 50 , thereby further fixing the connection block 61 and the heating wire 42 .

[0072] In some embodiments, the oven door 100 further includes a reinforcement member 70. The reinforcement member 70 is spaced apart from the coiled portion of the heating element 40 to prevent the reinforcement member 70 from absorbing a large amount of heat generated by the heating element 40. The reinforcement member 70 comprises a plurality of stacked reinforcement plates 71. The support column 50 extends through the reinforcement plates 71, so that the reinforcement plates 71 can reinforce the support column 50 and prevent the support column 50 from shaking.

[0073] In addition, those skilled in the art should recognize that the above embodiments are merely intended to illustrate the present application and are not intended to limit the present application. As long as they are within the spirit of the present application, appropriate changes and modifications to the above embodiments are within the scope of disclosure of the present application.

Claims

1. A furnace door, applied to a vertical furnace, wherein the reaction chamber of the vertical furnace contains materials, characterized in that: include: Door body; A bearing member connected to the door body and spaced apart from the door body, the bearing member being used to bear the material; a heating element, disposed on a side of the carrier facing the door body and used for heating the material; The heat-insulating component is arranged on a side of the door body facing the bearing component.

2. The furnace door according to claim 1, characterized in that: The heating element includes an operating handle and a heating wire. The operating handle is arranged on the side of the door body away from the supporting member. The heating wire passes through the door body and is coiled on the side of the supporting member facing the door body. The operating handle is used to enable the heating wire to heat the material.

3. The furnace door according to claim 2, characterized in that: The heating wire is wound around the side of the carrier facing the door body in a circuitous shape.

4. The furnace door according to claim 3, characterized in that: The furnace door further comprises a plurality of ribs arranged at intervals, and the heating wire is passed through the ribs so that the heating wire is wound around the side of the bearing member facing the door body in a circuitous manner.

5. The furnace door according to claim 2, characterized in that: The heating element also includes a mounting plate and a cover, the mounting plate and the cover are arranged opposite to each other, the heating wire is clamped between the mounting plate and the cover, and is installed on the mounting plate, and the side of the mounting plate facing away from the cover is used to contact the carrier.

6. The furnace door according to claim 2, characterized in that: The furnace door further includes support columns, which are respectively connected to the door body and the bearing member so that the door body and the bearing member are spaced apart.

7. The furnace door according to claim 6, characterized in that: The support column is provided with a protrusion on a side facing the carrier, and the carrier is provided with a groove on a side facing the furnace door. The protrusion can be inserted into the groove, so that the support column can position the carrier.

8. The furnace door according to claim 6, characterized in that: The thermal insulation component includes multiple insulation blocks, which are spliced together. The insulation block has two side faces, each of which is provided with a notch. Two adjacent insulation blocks are connected so that the two notches form an avoidance hole that can accommodate the support column passing through.

9. The furnace door according to claim 8, characterized in that: One side surface of the insulation block is provided with a splicing groove, and the other side surface of the insulation block is provided with a splicing block. In two adjacent insulation blocks, the splicing groove is plugged into the splicing block to connect the multiple insulation blocks.

10. A vertical furnace, characterized in that: The invention comprises a furnace tube and a furnace door according to any one of claims 1 to 9, wherein the furnace door is connected to the furnace tube, and the furnace door and the furnace tube form a reaction chamber.

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