Testing pressure head and testing device equipped with same

Abstract

The utility model relates to the technical field of semiconductor testing, and provides a testing pressure head and a testing device equipped with the same. The test pressure head comprises a fixing assembly, a floating assembly, a positioning assembly and a locking assembly. The fixed assembly is provided with a sliding rail, and the floating assembly is detachably connected to the sliding rail and can move in the sliding rail. The positioning assembly is movably installed on the fixing assembly and used for being in limiting fit with the floating assembly when the floating assembly slides in place. The locking assembly is used for locking the floating assembly relative to the fixing assembly. According to the test pressure head provided by the invention, stable and accurate assembly can be realized without cooperation of multiple persons, the time consumed by assembly is short, and the efficiency is high.

Description

Technical Field

[0001] The present application relates to the field of semiconductor testing technology, and in particular to a test indenter and a test device equipped with the same. Background Art

[0002] During semiconductor testing, semiconductor components are placed on a tester, and a pressure test assembly is brought close to the tester to dock with the semiconductor components. To improve docking accuracy, a floating structure is typically provided on the pressure test assembly, upon which a test head for docking with the semiconductor components can be mounted. Because multiple semiconductor components need to be tested at once, the pressure test assembly has multiple test heads spaced apart. This results in a large and heavy floating structure, requiring multiple people to coordinate and cooperate during installation, which is time-consuming and inefficient. Utility Model Content

[0003] Based on this, it is necessary to provide a test pressure head that can achieve stable and precise assembly without the need for collaboration of multiple people, and the assembly time is short and the efficiency is high.

[0004] A test pressure head includes a fixed component, a floating component, a positioning component and a locking component; the fixed component is constructed with a sliding track; the floating component is detachably connected to the sliding track and can move within the sliding track; the positioning component is movably mounted on the fixed component and is used to limit the position of the floating component when the floating component slides into place; the locking component is used to lock the floating component relative to the fixed component.

[0005] It can be understood that the provision of the sliding track facilitates the sliding of the floating assembly relative to the fixed assembly, thereby reducing installation displacement. Furthermore, when the floating assembly slides into position, the positioning assembly connected to the fixed assembly can be engaged with the floating assembly to position the floating assembly relative to the fixed assembly, ensuring that the floating assembly does not wobble or shift. The locking assembly can then be used to lock the floating assembly relative to the fixed assembly. This ensures stable and precise assembly of the floating assembly relative to the fixed assembly. Furthermore, the provision of the sliding track facilitates the sliding installation of the floating assembly, eliminating the need for multiple people to coordinate, shortening assembly time and improving assembly efficiency.

[0006] In some embodiments, the sliding track has an entrance side and an end side, which are arranged opposite to each other and spaced apart along a first direction, and the floating component can slide into or out of the sliding track from the entrance side and / or the end side; the first direction is set at an angle to the crimping direction of the test pressure head.

[0007] This arrangement sets the disassembly direction of the floating component relative to the fixed component at an angle to the crimping direction of the test pressure head, avoiding interference during disassembly and replacement.

[0008] In some embodiments, the fixing assembly includes a mounting base and at least two guide rails; at least two of the guide rails are protruding from the same side of the mounting base and arranged at intervals, and each of the guide rails is constructed with a back-recessed through groove on the side facing the other guide rail, and the two through grooves together define a sliding track.

[0009] It can be understood that the mounting base plays a supporting role, and the guide rail and the through slots thereon are provided to facilitate the floating assembly to be inserted into the two through slots so as to move along the sliding track to achieve assembly and disassembly.

[0010] In some embodiments, the floating assembly includes at least a floating base plate, and a sliding bar is provided at one end of the floating base plate facing the through slot. The sliding bar is inserted into the through slot and can move in the through slot.

[0011] That is to say, the sliding cooperation between the sliding bar and the sliding groove is used to realize the sliding of the floating component relative to the fixed component along the sliding track.

[0012] In some embodiments, the fixed component is configured with an assembly hole, and the floating component is configured with a positioning hole; the positioning component is passed through the assembly hole, and is at least partially located on the side of the assembly hole away from the sliding track; the positioning component can move in the assembly hole and along the axial direction of the assembly hole to be inserted into or moved out of the positioning hole.

[0013] That is to say, the provision of the assembly hole not only satisfies the assembly of the positioning component relative to the fixed component, but also facilitates the guidance of the positioning component to move so as to achieve plug-in cooperation with the positioning hole, thereby satisfying the installation positioning of the floating component.

[0014] In some embodiments, the positioning assembly includes a positioning column and a limiting portion; the positioning column is passed through the assembly hole; the limiting portion is connected to one end of the positioning column, and at least part of the limiting portion is located outside the assembly hole; wherein, the positioning column can move in the assembly hole so that the other end of the positioning column is inserted into the positioning hole or moved out of the positioning hole.

[0015] It can be understood that the positioning post is used to be plugged into the positioning hole, and the limiting portion is used to prevent the positioning post from being separated from the assembly hole; and the limiting portion can also be easily matched with other structures to move the positioning post.

[0016] In some embodiments, the test pressure head further includes a limiting assembly, which is connected between the positioning assembly and the fixing assembly to limit the movement of the positioning assembly.

[0017] In this way, it can be ensured that the positioning component is installed stably relative to the fixing component and is not easily separated.

[0018] In some embodiments, the fixing component is constructed with an assembly hole for the positioning component to pass through, and the fixing component is also constructed with a limiting hole connected to the assembly hole, and the limiting hole is set at an angle to the assembly hole; the limiting component includes at least a limiting column, which is inserted into the limiting hole and can move in the limiting hole to press the positioning component.

[0019] It can be understood that the movement of the limiting column in the limiting hole is used to press the positioning assembly to achieve axial constraint of the positioning assembly; and when the limiting column is relaxed relative to the positioning assembly, it is convenient to move the positioning assembly to disassemble and replace the floating assembly.

[0020] In some embodiments, the positioning assembly is constructed with a limiting groove, and the limiting assembly also includes a ball, the ball is connected to one end of the limiting column, and the limiting column is snap-fitted with the groove wall of the limiting groove through the ball; and / or, at least the hole wall of the limiting hole is installed with a guide bushing.

[0021] That is to say, by utilizing the cooperation between the limiting groove and the ball, the limiting range of the limiting column and the positioning assembly is increased, and the limiting effect is improved; and the setting of the guide bushing not only guides the movement of the limiting column, but also reduces the wear between the limiting column and the hole wall.

[0022] In some embodiments, at least a guide bushing is provided in the assembly hole and is sleeved on the outside of the positioning assembly. The guide bushing is configured with an avoidance hole that penetrates radially along the assembly hole.

[0023] It can be understood that the setting of the guide bushing is to reduce the wear of the positioning component caused by movement, and the setting of the avoidance hole can have an avoidance effect on the subsequent limiting structure of the positioning component.

[0024] The present application also provides a testing device, comprising the above-mentioned testing pressure head.

[0025] In this way, the installation of the floating component in the test pressure head can be facilitated, the assembly efficiency can be improved, and the assembly can be stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 A schematic diagram of a test pressure head provided in one embodiment of the present application;

[0028] Figure 2 A side view of a test indenter provided in one embodiment of the present application;

[0029] Figure 3 A top view of a test indenter provided in one embodiment of the present application;

[0030] Figure 4 for Figure 3 Cross-section of the middle AA;

[0031] Figure 5 for Figure 4 A partial enlarged view of point B in the middle;

[0032] Figure 6 A schematic diagram of a testing device provided in one embodiment of the present application.

[0033] 1. Test head; 2. Mounting chamber; 3. Guide column; 4.00 Mounting seat; 5.00 Testing machine; 1.10 Fixing assembly; 1.101 Inlet side; 1.102 Terminal side; 1.11 Mounting substrate; 1.12 Guide rail; 1.121 Through groove; 1.103 Assembly hole; 1.104 Limiting hole; 1.20 Floating assembly; 1.201 Positioning hole; 1.21 Floating substrate; 1.211 Sliding bar; 1.30 Positioning assembly; 1.31 Positioning column; 1.32 Positioning portion; 1.311 Positioning groove; 1.50 Positioning assembly; 1.51 Positioning column; 1.52 Ball; 1.61 Guide bushing; 1.610 Avoidance hole; 1.61a First guide bushing; 1.61b Second guide bushing. DETAILED DESCRIPTION

[0034] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0035] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0037] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it can mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it can mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. When a first feature is "below," "below," or "below" a second feature, it can mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is lower in level than the second feature.

[0038] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more of the relevant listed items.

[0039] See also Figure 1 and Figure 2 The present application provides a test indenter 100, comprising a fixed assembly 110, a floating assembly 120, a positioning assembly 130, and a locking assembly. The fixed assembly 110 is configured with a sliding track (not shown in the figure), and the floating assembly 120 is detachably connected to the sliding track and is capable of moving within the sliding track. The positioning assembly 130 is movably mounted on the fixed assembly 110 and is used to limit the position of the floating assembly 120 when the floating assembly 120 slides into place. The locking assembly is used to lock the floating assembly 120 relative to the fixed assembly 110.

[0040] As can be understood, the provision of the sliding track facilitates guiding the floating assembly 120 to slide relative to the fixed assembly 110, thereby reducing installation displacement. Furthermore, when the floating assembly 120 slides into position, the positioning assembly 130 connected to the fixed assembly 110 can be limitedly engaged with the floating assembly 120 to position the floating assembly 120 relative to the fixed assembly 110, ensuring that the floating assembly 120 does not shake or shift. The locking assembly can then be used to lock the floating assembly 120 relative to the fixed assembly 110. This ensures stable and precise assembly of the floating assembly 120 relative to the fixed assembly 110. Furthermore, the provision of the sliding track facilitates the sliding installation of the floating assembly 120, eliminating the need for multiple people to coordinate, shortening assembly time and improving assembly efficiency. The following describes each component in detail.

[0041] Please continue reading Figure 1 and Figure 2 Exemplarily, the sliding track has an entry side 1101 and a termination side 1102, which are arranged opposite to each other and spaced apart along a first direction. The floating assembly 120 can slide in or out of the sliding track from the entry side 1101. The first direction is set at an angle to the crimping direction of the test ram 100. Take the crimping direction of the test ram 100 as the Z-axis direction and the first direction as the X-axis direction as an example. Such a setting is equivalent to setting the disassembly direction of the floating assembly 120 relative to the fixed assembly 110 at an angle to the crimping direction of the test ram 100 itself, thereby avoiding the disassembly and assembly operation of the floating assembly 120 from interfering with the crimping operation of the test ram 100, especially when replacing the floating assembly 120, so that it is not easy to interfere with the chip or test machine below the test ram 100, thereby improving the protection of the structure below the test ram 100.

[0042] Please continue reading Figure 1 and Figure 2 Furthermore, the fixing assembly 110 includes a mounting base 111 and at least two guide rails 112. The at least two guide rails 112 are protruding from the same side of the mounting base 111 and are arranged at intervals. Each guide rail 112 is constructed with a back-recessed through groove 1121 on the side facing the other guide rail 112, and the two through grooves 1121 together define a sliding track. The provision of the mounting base 111 not only facilitates the connection of the test pressure head 100 relative to other structures; moreover, since the guide rails 112 are mounted on the mounting base 111, the mounting base also provides support when the floating assembly 120 slides into the sliding track.

[0043] As an example, two guide rails 112 are provided. These two guide rails 112 are spaced apart and opposed along the Y-axis. Both guide rails 112 are located on the lower surface of the mounting base 111 and project downward along the Z-axis. Opposing sidewalls of the two guide rails 112 each have recessed slots 1121 extending away from each other. The two side edges of the floating assembly 120 along the Y-axis can be inserted into corresponding slots 1121, allowing it to move along the length of the slots 1121 (i.e., the X-axis) to slide the floating assembly 120 in and out of the sliding rails.

[0044] The two guide rails 112 can be integrally formed with the mounting base 111, or they can be screwed, welded, or bonded to the mounting base 111. For example, the two guide rails 112 can be screwed to the two side walls of the mounting base 111 along the Y-axis, with portions protruding from the mounting base 111 along the Z-axis and recessed into through-slots 1121. Any suitable method is sufficient to ensure stable assembly of the guide rails 112 relative to the mounting base 111 and support the floating assembly 120.

[0045] Alternatively, the guide rails 112 may be provided in three or four numbers and spaced apart along the Y-axis direction. Any two adjacent guide rails 112 along the Y-axis direction define a sliding track, and each sliding track corresponds to a group of floating components 120 .

[0046] Please continue reading Figure 1 and Figure 2 Furthermore, the floating assembly 120 includes at least a floating base plate 121. A sliding bar 1211 is provided at one end of the floating base plate 121 facing the through slot 1121. The sliding bar 1211 is inserted into the through slot 1121 and is capable of moving within the through slot 1121, specifically, along the length direction of the through slot 1121 (i.e., the X-axis direction). The sliding bar 1211 is integrally formed with the floating base plate 121, or can be screwed, welded, or bonded to the floating base plate 121. Taking the two guide rails 112 as an example, the two corresponding sliding bars 1211 are respectively protruded from the two side walls of the floating base plate 121 along the Y-axis direction. Each sliding bar 1211 is provided with a connecting portion extending from one side along the Z-axis direction to increase the reliability of the connection with the floating base plate 121. Moreover, the thickness of each sliding bar 1211 is less than the thickness of the floating base plate 121 itself and is located at an upper position of the floating base plate 121 along the Z-axis direction. Such a configuration can reduce the thickness of the fixing assembly 110 , thereby reducing the size of the entire test indenter 100 along the Z-axis.

[0047] In some specific embodiments, an L-shaped notch is provided at the upper portion of the floating substrate 121 along the Z-axis, with a sliding bar 1211 protruding from the vertical sidewall of the notch. The notch allows for clearance of the guide rail 112, ensuring that the side of the floating substrate 121 facing away from the fixed assembly 110 has sufficient space for installation of the crimping structure.

[0048] See also Figure 1 、 Figure 3 、 Figure 4 and Figure 5 Optionally, the fixed component 110 is configured with an assembly hole 1103, and the floating component is configured with a positioning hole 1201. The positioning component 130 is arranged through the assembly hole 1103, and is at least partially located on the side of the assembly hole 1103 away from the sliding track. The positioning component 130 can move in the assembly hole 1103 along the axial direction of the assembly hole 1103 to insert into or move out of the positioning hole 1201. Specifically, the assembly hole 1103 is provided in the mounting substrate 111 in the fixed component 110, and is provided through the thickness direction of the mounting substrate 111; the positioning hole 1201 is provided in the floating substrate 121 in the floating component 120. The positioning hole 1201 can be provided through the thickness direction of the floating substrate 121; or, the positioning hole 1201 can be provided as a blind hole, with the hole opening facing the mounting substrate 111.

[0049] In other words, positioning assembly 130 is inserted through assembly hole 1103 on mounting base plate 111 and engages with positioning hole 1201 on floating base plate 121, thereby achieving positional engagement between positioning assembly 130 and floating assembly 120, ensuring the proper installation and positioning of floating assembly 120 relative to fixed assembly 110 and improving installation accuracy. Furthermore, this arrangement allows assembly hole 1103 to guide the movement of positioning assembly 130, improving the accuracy of the engagement between positioning assembly 130 and positioning hole 1201 on floating base plate 121.

[0050] In actual use, taking the example of floating assembly 120 being mounted on the lower surface of fixed assembly 110 along the Z-axis, the axial direction of assembly hole 1103 is along the Z-axis. When floating assembly 120 is required to slide in or out of the sliding track, positioning assembly 130 moves upward along the Z-axis within assembly hole 1103 to remove itself from positioning hole 1201, thereby releasing its retaining engagement with floating base plate 121. When floating assembly 120 slides into position relative to fixed assembly 110 on the sliding track, positioning assembly 130 moves downward along the Z-axis within assembly hole 1103 to insert one end of positioning assembly 130 into positioning hole 1201, thereby achieving retaining engagement with floating assembly 120.

[0051] Please combine Figure 4 and Figure 5As some optional features, positioning assembly 130 includes a positioning post 131 and a stopper 132. Positioning post 131 is disposed through assembly hole 1103, and stopper 132 is connected to one end of positioning post 131, with at least a portion of stopper 132 located outside assembly hole 1103. Positioning post 131 is movable within assembly hole 1103, such that the other end of positioning post 131 is inserted into or removed from positioning hole 1201.

[0052] In other words, the positioning post 131 is plugged into the positioning hole 1201 to achieve the positioning of the positioning assembly 130 relative to the floating substrate 121. Furthermore, because the floating substrate 121 is located below the mounting substrate 111, the stopper 132 prevents the positioning post 131 from falling from below the assembly hole 1103. Furthermore, the stopper 132 can also cooperate with other structures to facilitate the movement of the positioning post 131. For example, an operator can manually grasp the stopper 132 or clamp it with a tool such as a pliers to move the positioning post 131. Alternatively, a cylinder piston rod can be connected to the stopper 132, which can then be driven by the cylinder to move the stopper 132, thereby moving the positioning post 131. This is merely an example.

[0053] Alternatively, the positioning post 131 may directly press against the floating base plate 121 to achieve positional engagement between the positioning assembly 130 and the floating assembly 120. The end of the positioning post 131 facing away from the position limiting portion 132 is configured with a pressing surface to press against the upper surface of the floating base plate 121.

[0054] like Figure 5 As shown, further, guide bushings 161 can be installed in the assembly hole 1103 and the positioning hole 1201 respectively. The assembly hole 1103 corresponds to the first guide bushing 161a, and a recessed groove is provided at one end of the assembly hole 1103 away from the positioning hole 1201. Part of the first guide bushing 161a is inserted into the assembly hole 1103, and part is pressed into the recessed groove. The positioning hole 1201 corresponds to the second guide bushing 161b, and its installation method is similar to that of the first guide bushing 161a. It is also provided with a recessed groove, so it will not be described in detail. The provision of the first guide bushing 161a and the second guide bushing 161b not only reduces the wear of the positioning column 131 and the hole wall of the assembly hole 1103 and the hole wall of the positioning hole 1201, but also guides the movement of the positioning column 131.

[0055] In some specific embodiments, one end of the positioning post 131 is a plug-in end, while the other end is connected to the stopper 132. The plug-in end is tapered to facilitate insertion into the positioning hole 1201. The minimum outer diameter of the stopper 132 is greater than the maximum outer diameter of the positioning post 131 to prevent the positioning post 131 from being dislodged from the assembly hole 1103. An annular protrusion may be provided on the end of the stopper 132 facing away from the plug-in end. The stopper 132 may be integrally formed with the positioning post 131.

[0056] The positioning column 131 may be a pin.

[0057] See also Figure 2 、 Figure 4 and Figure 5 Exemplarily, the test press head 100 further includes a limiting assembly 150, which is connected between the positioning assembly 130 and the fixing assembly 110 and is used to limit the movement of the positioning assembly 130. Specifically, the limiting assembly 150 cooperates with the positioning post 131 to limit the axial movement of the positioning post 131 after the positioning post 131 moves into position. This arrangement not only ensures that the positioning post 131 can remain stably in the assembly hole 1103 after exiting the positioning hole 1201, and will not suddenly fall off and interfere with the sliding of the floating assembly 120; it also ensures that the positioning post 131 is stably assembled after being inserted into the positioning hole 1201, preventing it from being easily pulled out of the positioning hole 1201 under the action of external force. Therefore, the arrangement of the limiting assembly 150 can ensure that the positioning assembly 130 is stably installed and not easily detached, thereby improving the limiting effect of the positioning assembly 130 on the floating assembly 120.

[0058] Please combine Figure 4 and Figure 5 Furthermore, the fixing assembly 110 is also constructed with a limiting hole 1104 connected to the assembly hole 1103, and the limiting hole 1104 is set at an angle to the assembly hole 1103. Specifically, the assembly hole 1103 is set on one side of the mounting base plate 111 along the X-axis direction, for example, it can be located on the entrance side 1101 of the sliding track; and there are at least two assembly holes 1103, which are arranged at intervals along the Y-axis direction, and each assembly hole 1103 corresponds to a set of positioning assemblies 130. The axial direction of the limiting hole 1104 is set along the X-axis direction and is connected to the assembly hole 1103. The limiting assembly 150 includes at least a limiting column 151, which is inserted into the limiting hole 1104 and can move in the limiting hole 1104 to press against the positioning column 131.

[0059] That is, when limiting post 151 moves inward along the X-axis within limiting hole 1104, it presses against positioning post 131, thereby limiting the movement of positioning post 131 along the Z-axis, thereby axially limiting positioning post 131. When positioning post 131 needs to move, limiting post 151 moves outward along the X-axis within limiting hole 1104, away from positioning post 131 and releasing the pressing action. Therefore, when floating assembly 120 is moved into position, positioning post 131 is engaged with positioning hole 1201, and limiting post 151 can move to press against positioning post 131, further improving the assembly stability of floating assembly 120.

[0060] The first guide bushing 161 a disposed in the assembly hole 1103 is provided with an avoidance hole 1610 , which is adapted to and communicated with the limiting hole 1104 , so that the limiting column 151 passes through the avoidance hole 1610 and directly presses the positioning column 131 .

[0061] like Figure 5 As shown, in actual use, the positioning post 131 in the positioning assembly 130 is constructed with a limiting groove 1311. The limiting post 151 can be inserted into the limiting groove 1311 to press against the positioning post 131, thereby limiting the axial movement of the positioning post 131. Specifically, the positioning post 131 is provided with at least two limiting grooves 1311 spaced apart along its own axial direction. Each limiting groove 1311 is recessed from the outer wall of the positioning post 131 along the radial direction of the positioning post 131 and is arranged along the circumference of the positioning post 131 to form an annular groove.

[0062] For example, the positioning post 131 is provided with two spaced apart limiting grooves 1311. When the positioning post 131 is inserted into the positioning hole 1201, the limiting post 151 is engaged with the upper limiting groove 1311; when the positioning post 131 is removed from the positioning hole 1201, the limiting post 151 is engaged with the lower limiting groove 1311.

[0063] like Figure 5 As shown, in some embodiments, the end of the limiting column 151 facing the positioning column 131 is a pressing end. The limiting assembly 150 also includes a ball 152, which is connected to the pressing end of the limiting column 151. The limiting column 151 is engaged with the groove wall of the limiting groove 1311 through the ball 152. In other words, the ball 152 cooperates with the limiting groove 1311 to increase the limiting range of the limiting column 151 and the positioning column 131, thereby improving the limiting effect; and the provision of the ball 152 reduces the wear of the limiting column 151 on the positioning hole 1201. A guide bushing can also be installed in the limiting hole 1104, referred to herein as a third guide bushing (not shown in the figure), to guide the movement of the limiting column 151 and reduce the wear between the limiting column 151 and the hole wall of the limiting hole 1104.

[0064] In some specific embodiments, the limiting post 151 may also be a pin. The size of the limiting post 151 is much smaller than that of the positioning post 131. Alternatively, the limiting post 151 may be threadedly connected to the wall of the limiting hole 1104. In this case, the limiting post 151 may be directly screwed.

[0065] See also Figure 6 Another embodiment of the present application provides a testing device, including a mounting chamber 200, a testing machine 500, a mounting seat 400, a guide column 300 and the aforementioned test ram 100. One end of the guide column 300 is connected to the test ram 100, and the other end is connected to the mounting seat 400. The test ram 100 is located in the mounting chamber 200, and the testing machine 500 is located below the mounting chamber 200. The test ram 100 moves along the Z-axis direction to perform a crimping test with the chip on the testing machine 500. The guide column 300 plays a guiding role, improving the crimping alignment accuracy between the test ram 100 and the chip. The mounting chamber 200 is constructed with a window on at least one side along the X-axis direction to facilitate the disassembly and assembly of the floating component 120 and improve assembly efficiency.

[0066] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0067] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of patent protection for the present application shall be determined by the appended claims.

Claims

1. A test indenter, characterized in that: include: A fixed assembly (110) is constructed with a sliding track; a floating assembly (120) detachably connected to the sliding track and capable of moving within the sliding track; a positioning assembly (130) movably mounted on the fixing assembly (110) and configured to engage with the floating assembly (120) in a limiting manner when the floating assembly (120) slides into position; A locking assembly is used to lock the floating assembly (120) relative to the fixed assembly (110).

2. The test indenter according to claim 1, wherein: The sliding track has an entrance side (1101) and a terminal side (1102), which are arranged opposite to each other and spaced apart along a first direction, and the floating assembly (120) can slide into or out of the sliding track from the entrance side (1101) and / or the terminal side (1102); The first direction is arranged at an angle to the crimping direction of the test press head (100).

3. The test indenter according to claim 1 or 2, characterized in that: The fixing assembly (110) comprises a mounting base (111) and at least two guide rails (112); At least two guide rails (112) are protruding from the same side of the mounting base plate (111) and are arranged at intervals. A through groove (1121) recessed in the opposite direction is constructed on the side of each guide rail (112) facing the other guide rail (112). The two through grooves (1121) together define a sliding track.

4. The test indenter according to claim 3, wherein: The floating assembly (120) comprises at least a floating base plate (121). A sliding bar (1211) is provided at one end of the floating base plate (121) facing the through slot (1121). The sliding bar (1211) is inserted into the through slot (1121) and is movable in the through slot (1121).

5. The test indenter according to claim 1, wherein: The fixed component (110) is configured with an assembly hole (1103), and the floating component (120) is configured with a positioning hole (1201); The positioning component (130) is inserted into the assembly hole (1103) and is at least partially located on a side of the assembly hole (1103) away from the sliding track; The positioning assembly (130) is capable of moving in the assembly hole (1103) along the axial direction of the assembly hole (1103) to be inserted into or removed from the positioning hole (1201).

6. The test indenter according to claim 5, characterized in that: The positioning assembly (130) includes: A positioning column (131) is provided through the assembly hole (1103); a limiting portion (132) connected to one end of the positioning column (131), wherein at least a portion of the limiting portion (132) is located outside the assembly hole (1103); The positioning column (131) is capable of moving in the assembly hole (1103) so that the other end of the positioning column (131) is inserted into the positioning hole (1201) or moved out of the positioning hole (1201).

7. The test indenter according to claim 1, wherein: The test pressure head (100) further comprises a limiting assembly (150), wherein the limiting assembly (150) is connected between the positioning assembly (130) and the fixing assembly (110) and is used to limit the movement of the positioning assembly (130).

8. The test indenter according to claim 7, wherein: The fixing assembly (110) is configured with an assembly hole (1103) for the positioning assembly (130) to pass through, and the fixing assembly (110) is further configured with a limiting hole (1104) connected to the assembly hole (1103), and the limiting hole (1104) is arranged at an angle to the assembly hole (1103); The limiting assembly (150) comprises at least a limiting column (151), wherein the limiting column (151) is inserted into the limiting hole (1104) and is movable in the limiting hole (1104) for pressing the positioning assembly (130).

9. The test indenter according to claim 8, wherein: The positioning assembly (130) is constructed with a limiting groove (1311); the limiting assembly (150) further includes a ball (152), the ball (152) is connected to one end of the limiting column (151), and the limiting column (151) is engaged with the groove wall of the limiting groove (1311) through the ball (152); and / or, At least the hole wall of the limiting hole (1104) is installed with a guide bushing.

10. A testing device, characterized in that: A test indenter comprising the test indenter according to any one of claims 1 to 9.

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