Ion generation device

Abstract

The utility model discloses an ion generating device, comprising an arc chamber comprising a first end part and a second end part which are oppositely arranged, and the arc chamber is connected with a first power supply; each hot electron generating part at least comprises a heat source, a cathode and a reflecting electrode, in the same hot electron generating part, the heat source is arranged on the first end part or the second end part, the cathode is arranged in the arc chamber on one side of the heat source, and the reflecting electrode is arranged in the arc chamber on the other side of the heat source. And the reflecting electrodes are oppositely arranged on the second end part or the first end part on one side of the cathodes, and in the plurality of hot electron generating parts, the plurality of heat sources are connected in parallel and then are connected with a second power supply, the plurality of cathodes are respectively connected with a third power supply, and the plurality of reflecting electrodes are respectively connected with a fourth power supply. According to the ion generation device provided by the utility model, the service life of the ion generation device can be prolonged, and the ion generation efficiency can be improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to an ion generating device. Background Art

[0002] The ion implantation process is a technology that plays a key role in semiconductor manufacturing. It can transform a preset area into a semiconductor material with a specific conductivity. In the ion implantation process, an ion generating device is an indispensable device for providing an ion source for the ion implantation process. In the ion generating device, a group of thermal electron generating parts are respectively provided at both ends of the arc chamber. Each group of thermal electron generating parts includes a heat source and a cathode, and the two groups of thermal electron generating parts are connected in series. Therefore, when the heat source or cathode in a group of thermal electron generating parts fails, the entire ion generating device cannot work normally, and the ion generating device must be replaced frequently, resulting in a shortened service life of the ion generating device and an increase in the maintenance cost and replacement time of the ion generating device. In addition, in the existing ion generating devices, there are problems such as low ion generation efficiency and inability to meet process requirements. Utility Model Content

[0003] The purpose of the present invention is to provide an ion generating device that can extend the service life of the ion generating device, reduce the replacement frequency of the ion generating device, reduce the replacement time and maintenance cost of the ion generating device, and improve the ion generation efficiency.

[0004] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0005] The utility model provides an ion generating device, which at least comprises:

[0006] An arc chamber comprising a first end and a second end disposed opposite to each other, wherein the arc chamber is connected to a first power source; and

[0007] Multiple thermal electron generating sections, each of the thermal electron generating sections includes at least one heat source, one cathode and one reflective electrode. In the same thermal electron generating section, the heat source is arranged on the first end or the second end, the cathode is arranged in the arc chamber on one side of the heat source, and the reflective electrode is relatively arranged on the second end or the first end on the side of the cathode. In the multiple thermal electron generating sections, multiple heat sources are connected in parallel to the second power supply, multiple cathodes are each connected to the third power supply, and multiple reflective electrodes are each connected to the fourth power supply.

[0008] In an embodiment of the present invention, in the plurality of thermal electron generating portions, each of the heat sources includes a first end and a second end that are oppositely disposed.

[0009] In one embodiment of the present invention, in the plurality of thermal electron generating portions, the first ends of the plurality of heat sources are respectively connected to the negative pole of the second power supply, and the second ends of the plurality of heat sources are respectively connected to the positive pole of the second power supply.

[0010] In one embodiment of the present invention, there is at least one intersection in the connection lines between the first ends of the plurality of heat sources and the negative pole of the second power supply, and there is at least one intersection in the connection lines between the second ends of the plurality of heat sources and the positive pole of the second power supply.

[0011] In one embodiment of the present invention, in the multiple thermal electron generating parts, the multiple cathodes are each connected to the positive pole of the third power supply, and the connection points between the multiple cathodes and the positive pole of the third power supply are located on the connection line between the negative pole of the first power supply and the positive pole of the third power supply.

[0012] In one embodiment of the present invention, in the plurality of thermal electron generating portions, the plurality of reflective electrodes are each connected to the negative electrode of the fourth power supply.

[0013] In one embodiment of the present invention, the positive poles of the arc chamber and the fourth power supply are respectively connected to the positive pole of the first power supply, and the connection point between the positive pole of the first power supply and the positive pole of the fourth power supply is located on the connection line between the positive pole of the first power supply and the arc chamber.

[0014] In one embodiment of the present invention, the arc chamber further includes a top and a bottom, and the top and the bottom are relatively arranged on both sides of the first end and the second end, and the top, the bottom, the first end and the second end together constitute the internal area of the arc chamber, an ion extraction slit is provided on the top, and a gas inlet is provided on the bottom.

[0015] In one embodiment of the present invention, in the plurality of thermal electron generating portions, the plurality of heat sources are commonly provided on the first end portion or the second end portion.

[0016] In an embodiment of the present invention, among the plurality of thermal electron generating portions, at least one heat source is disposed on the first end portion and the second end portion opposite to the remaining heat sources.

[0017] In summary, the present invention provides an ion generating device. By improving the structure of the ion generating device, the unexpected technical effect of the present application is that it can form multiple groups of thermal electron generating units connected in parallel. When a component in one group of thermal electron generating units fails, the other group of thermal electron generating units can still operate normally, and the ion generating device can still output ions normally, thereby extending the service life of the ion generating device, reducing the replacement frequency of the ion generating device, and reducing the replacement time and maintenance cost of the ion generating device. Moreover, the ion generating device provided by the present invention can also increase the movement path of the thermal electrons generated by the cathode in the arc chamber, improve the ion generation efficiency, and fully meet the process requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 FIG. 1 is a schematic diagram of the appearance of an ion generating device in one embodiment.

[0020] Figure 2 FIG. 4 is a cross-sectional view of an ion generating device in one embodiment.

[0021] Description of labels:

[0022] 11. Arc chamber; 111. First end; 112. Second end; 113. Top; 114. Bottom; 115. Ion extraction slit; 116. Gas inlet; 121. First heat source; 122. Second heat source; 131. First cathode; 132. Second cathode; 141. First reflective electrode; 142. Second reflective electrode; 15. First power supply; 16. Second power supply; 17. Third power supply; 18. Fourth power supply; 191. First group of thermal electron generating units; 192. Second group of thermal electron generating units. DETAILED DESCRIPTION

[0023] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the conditions for the implementation of this solution. Therefore, they have no substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size should still fall within the scope of the technical content disclosed in this solution without affecting the efficacy and purpose of this solution. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description and are not used to limit the scope of the implementation of this solution. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of this solution without substantially changing the technical content.

[0025] See also Figures 1 to 2 As shown, the present invention provides an ion generating device, for example, including an arc chamber 11, multiple heat sources, multiple cathodes, multiple reflective electrodes, a first power supply 15, a second power supply 16, a third power supply 17, and a fourth power supply 18. The arc chamber 11 includes a first end 111 and a second end 112 that are oppositely disposed. The multiple heat sources are respectively disposed on the first end 111 and the second end 112. The multiple cathodes are respectively disposed in the arc chamber 11 on one side of each heat source. The multiple reflective electrodes are respectively disposed on the first end 111 or the second end 112 on one side of each cathode. The arc chamber 11 is connected to the first power supply 15. The multiple heat sources are connected in parallel and then to the second power supply 16. The multiple cathodes are each connected to the third power supply 17. The multiple reflective electrodes are each connected to the fourth power supply 18. In the ion generation device provided by the present invention, a heat source, a cathode, and a reflective electrode constitute a group of thermal electron generation units. In the same group of thermal electron generation units, the heat source generates thermal electrons that hit the cathode, and the cathode generates thermal electrons that enter the arc chamber 11 and move toward the reflective electrode. The reflective electrode rebounds the thermal electrons generated by the cathode back into the arc chamber 11, which can increase the movement path of the thermal electrons generated by the cathode in the arc chamber 11 and improve the ion generation efficiency to fully meet the process requirements. Moreover, the present invention forms multiple groups of parallel-connected thermal electron generation units by connecting multiple heat sources, multiple cathodes, and multiple reflective electrodes in parallel. When a component in one group of thermal electron generation units fails, it does not affect the normal operation of the thermal electron generation units in other groups, ensuring that the ion generation device can output ions normally and does not affect the normal use of the ion generation device, thereby avoiding frequent replacement of the ion generation device, extending the service life of the ion generation device, and saving the maintenance cost and replacement time of the ion generation device. The ion generation device provided by the present invention can be widely used in processes such as ion sputtering deposition, ion plating, or ion implantation. In this embodiment, the ion generation device provided by the present invention is described by taking the ion implantation process as an example.

[0026] See also Figures 1 to 2 As shown, in one embodiment of the present invention, the arc chamber 11 provides a place for the collision of thermal electrons and source gas. The present invention does not limit the shape of the arc chamber 11. In this embodiment, the arc chamber 11 includes a first end 111, a second end 112, a top 113 and a bottom 114. Among them, the first end 111 and the second end 112 are arranged opposite to each other, the top 113 and the bottom 114 are arranged on both sides of the first end 111 and the second end 112, and connect the first end 111 and the second end 112. The area enclosed by the first end 111, the second end 112, the top 113 and the bottom 114 constitutes a cavity, which is used to form the internal area of the arc chamber 11 and provide a place for the collision of the source gas and the thermal electrons generated by the cathode.

[0027] See also Figure 2 As shown, in one embodiment of the present invention, the ion generating device further includes a gas inlet 116, which is, for example, disposed on the bottom 114. A source gas is introduced into the arc chamber 11 through the gas inlet 116. The source gas may include, for example, at least one of boron trifluoride, phosphorus trifluoride, and germanium tetrafluoride.

[0028] See also Figure 2 As shown, in one embodiment of the present invention, the ion generating device further includes an ion extraction slit 115, which is, for example, disposed on the top portion 113. Within the arc chamber 11, source gas introduced through the gas inlet 116 collides with thermal electrons generated by the cathode to generate ions. The ions are then extracted from the arc chamber 11 through the ion extraction slit 115 for use in the ion implantation process.

[0029] See also Figure 1 As shown, in one embodiment of the present invention, the ion generating device further includes a first power supply 15, which is connected to the arc chamber 11 to supply power to the arc chamber 11. In this embodiment, the positive electrode of the first power supply 15 is connected to the arc chamber 11, and the negative electrode of the first power supply 15 is connected to a third power supply 17, a first cathode 131, and a second cathode 132 that are subsequently provided.

[0030] See also Figure 1As shown, in one embodiment of the present invention, among the multiple heat sources, at least one heat source is arranged on the first end 111 and the second end 112 relative to the other heat sources. The heat source is, for example, a filament. In this embodiment, there are two heat sources, for example, the two heat sources include a first heat source 121 and a second heat source 122, the first heat source 121 is arranged on the first end 111, and the second heat source 122 is arranged on the second end 112. Each heat source includes a first end 123 and a second end 124 arranged opposite to each other, so as to respectively connect to the negative and positive poles of the power supply to energize the heat source. In other embodiments of the present invention, the multiple heat sources can also be arranged together on the first end 111 or the second end 112, that is, the first heat source 121 and the second heat source 122 can be arranged together on the first end 111 or the second end 112. The present invention does not limit the relative positional relationship between the multiple heat sources, and can be selected according to actual needs.

[0031] See also Figure 1As shown, in one embodiment of the present invention, the ion generating device further includes a second power supply 16, and the first heat source 121 and the second heat source 122 are connected in parallel and connected to the second power supply 16. The first end 123 of the first heat source 121 and the first end 123 of the second heat source 122 are respectively connected to the negative pole of the second power supply 16, and the connection line between the first end 123 of the first heat source 121 and the negative pole of the second power supply 16 and the connection line between the first end 123 of the second heat source 122 and the negative pole of the second power supply 16 have at least one intersection, the second end 124 of the first heat source 121 and the second end 124 of the second heat source 122 are respectively connected to the positive pole of the second power supply 16, and the connection line between the second end 124 of the first heat source 121 and the positive pole of the second power supply 16 has at least one intersection. In this embodiment, the connection line between the first end 123 of the first heat source 121 and the negative pole of the second power supply 16 and the connection line between the first end 123 of the second heat source 122 and the negative pole of the second power supply 16, for example, have an intersection A, and the intersection A is arranged close to the negative pole of the second heat source 16. The connection line between the second end 124 of the first heat source 121 and the positive pole of the second power supply 16 and the connection line between the second end 124 of the second heat source 122 and the positive pole of the second power supply 16, for example, have an intersection B, and the intersection B is arranged close to the positive pole of the second heat source 16. Therefore, the first heat source 121 and the second heat source 122 are arranged in parallel. By arranging the first heat source 121 and the second heat source 122 in parallel, the second power supply 16 can independently supply power to the first heat source 121 and the second heat source 122, thereby providing energy to the first heat source 121 and the second heat source 122, and enabling the first heat source 121 and the second heat source 122 to release thermal electrons. Moreover, when the first heat source 121 cannot release thermal electrons normally, the second power supply 16 can still supply power to the second heat source 122 normally, so that the second heat source 122 can release thermal electrons normally, which does not affect the normal operation of the second heat source 122, can extend the service life of the ion generating device, reduce the replacement frequency of the ion generating device, and reduce the replacement time and maintenance cost of the ion generating device.

[0032] See also Figure 1As shown, in one embodiment of the present invention, multiple cathodes are disposed within the arc chamber 11. In this embodiment, there are, for example, two cathodes, including, for example, a first cathode 131 and a second cathode 132. The first cathode 131 is disposed within the arc chamber 11 on the side of the first heat source 121, and the second cathode 132 is disposed within the arc chamber 11 on the side of the second heat source 122. In this embodiment, the thermal electrons generated by the first heat source 121 collide with the first cathode 131. The first cathode 131 is heated by the collision and releases thermal electrons. The thermal electrons released by the first cathode 131 enter the arc chamber 11 and await collision with the source gas. The thermal electrons generated by the second heat source 122 collide with the second cathode 132. The second cathode 132 is heated by the collision and releases thermal electrons. The thermal electrons released by the second cathode 132 enter the arc chamber 11 and await collision with the source gas.

[0033] See also Figure 1 As shown, in one embodiment of the present invention, the ion generating device further includes a third power supply 17, and the first cathode 131 and the second cathode 132 are respectively connected to the third power supply 17. In this embodiment, the negative pole of the third power supply 17 is connected to the positive pole of the second power supply 16, and the first cathode 131 and the second cathode 132 are respectively connected to the positive pole of the third power supply 17. Specifically, the intersection B between the connecting line between the second end 124 of the first heat source 121 and the positive pole of the second power supply 16 and the connecting line between the second end 124 of the second heat source 122 and the positive pole of the second power supply 16 is located on the connecting line between the positive pole of the second power supply 16 and the negative pole of the third power supply 17, and the connecting line between the first cathode 131 and the positive pole of the third power supply 17 has an intersection C with the connecting line between the second cathode 132 and the positive pole of the third power supply 17. By connecting the first cathode 131 and the second cathode 132 to the positive pole of the third power supply 17 respectively, the third power supply 17 can independently supply power to the first cathode 131 and the second cathode 132. When the first cathode 131 fails, the third power supply 17 can still supply power to the second cathode 132 normally without affecting the normal operation of the second cathode 132. It can extend the service life of the ion generating device, reduce the replacement frequency of the ion generating device, and reduce the replacement time and maintenance cost of the ion generating device.

[0034] See also Figure 1As shown, in one embodiment of the present invention, multiple reflective electrodes are disposed on the first end 111 or the second end 112 of each cathode. In this embodiment, there are, for example, two reflective electrodes, including, for example, a first reflective electrode 141 and a second reflective electrode 142. The first reflective electrode 141 is disposed on the first end 111 of the first cathode 131, and the second reflective electrode 142 is disposed on the second end 112 of the second cathode 132. The first reflective electrode 141 and the second cathode 132 are disposed opposite each other, and the second reflective electrode 142 and the first cathode 131 are disposed opposite each other. In this embodiment, the first heat source 121, the first cathode 131, and the second reflective electrode 142 constitute a first group of thermal electron generating units 191, while the second heat source 122, the second cathode 132, and the first reflective electrode 141 constitute a second group of thermal electron generating units 192. Among them, in the same group of thermal electron generation parts, the heat source generates thermal electrons that collide with the cathode, and the cathode is heated by the collision to generate thermal electrons. The thermal electrons generated by the cathode enter the arc chamber 11 and move toward the side where the reflective electrode is located. The thermal electrons generated by the cathode move to the reflective electrode, and the reflective electrode bounces the thermal electrons back, increasing the movement path of the thermal electrons in the arc chamber 11, increasing the collision frequency between the source gas and the thermal electrons in the arc chamber 11, and improving the ion generation efficiency.

[0035] See also Figure 1 As shown, in one embodiment of the present invention, the ion generating device further includes a fourth power supply 18, and the first reflective electrode 141 and the second reflective electrode 142 are each connected to the fourth power supply 18. In this embodiment, the first reflective electrode 141 and the second reflective electrode 142 are each connected to the negative electrode of the fourth power supply 18, and the connection line between the first reflective electrode 141 and the negative electrode of the fourth power supply 18 and the connection line between the second reflective electrode 142 and the negative electrode of the fourth power supply 18 have an intersection D. The positive electrode of the fourth power supply 18 is connected to the positive electrode of the first power supply 15, and the connection point between the positive electrode of the fourth power supply 18 and the positive electrode of the first power supply 15 is located on the connection line between the arc chamber 11 and the positive electrode of the first power supply 15. By connecting the first reflective electrode 141 and the second reflective electrode 142 to the negative pole of the fourth power supply 18 respectively, the fourth power supply 18 can independently supply power to the first reflective electrode 141 and the second reflective electrode 142. When the first reflective electrode 141 fails, the fourth power supply 18 can still supply power to the second reflective electrode 142 normally without affecting the normal operation of the second reflective electrode 142. This can extend the service life of the ion generating device, reduce the replacement frequency of the ion generating device, and reduce the replacement time and maintenance cost of the ion generating device.

[0036] See also Figure 1As shown, in one embodiment of the present invention, the first heat source 121 and the second heat source 122 are connected in parallel and connected to the second power supply 16, the first cathode 131 and the second cathode 132 are each connected to the third power supply 17, and the first reflective electrode 141 and the second reflective electrode 142 are each connected to the fourth power supply 18. Therefore, the first group of thermal electron generating units 191 and the second group of thermal electron generating units 192 are arranged in parallel. When the first heat source 121, the first cathode 131, or the second reflective electrode 142 in the first group of thermal electron generating units 191 fails, the second group of thermal electron generating units 192 can still operate normally, and the ion generating device can still output ions normally, thereby avoiding frequent replacement of the ion generating device, extending the service life of the ion generating device, and reducing the replacement time and maintenance cost of the ion generating device. The ion generating device provided by the utility model can save 35-40 hours / year in replacement time and save 130,000-150,000 yuan / year in maintenance costs by improving the structure of the ion generating device.

[0037] In summary, the present invention provides an ion generation device that, by providing multiple sets of parallel-connected thermal electron generation units, achieves the unexpected technical effect of avoiding frequent replacement of the ion generation device, extending the life cycle of the ion generation device, and reducing the replacement time and maintenance costs of the ion generation device. Furthermore, the ion generation device provided by the present invention, by providing a reflective electrode within the thermal electron generation unit, can increase the movement of the cathode-generated thermal electrons within the arc chamber, thereby improving ion generation efficiency and fully meeting process requirements.

[0038] The embodiments of the present invention disclosed above are intended only to help illustrate the present invention. These embodiments do not exhaustively describe all details, nor do they limit the present invention to the specific embodiments described. Obviously, many modifications and variations are possible based on the contents of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. An ion generating device, characterized in that: At least: An arc chamber comprising a first end portion and a second end portion disposed opposite to each other, wherein the arc chamber is connected to a first power source; as well as Multiple thermal electron generating sections, each of the thermal electron generating sections includes at least one heat source, one cathode and one reflective electrode. In the same thermal electron generating section, the heat source is arranged on the first end or the second end, the cathode is arranged in the arc chamber on one side of the heat source, and the reflective electrode is relatively arranged on the second end or the first end on the side of the cathode. In the multiple thermal electron generating sections, multiple heat sources are connected in parallel to the second power supply, multiple cathodes are each connected to the third power supply, and multiple reflective electrodes are each connected to the fourth power supply.

2. The ion generating device according to claim 1, characterized in that In the plurality of thermal electron generating portions, each of the heat sources includes a first end and a second end that are opposite to each other.

3. The ion generating device according to claim 2, characterized in that In the plurality of thermal electron generating portions, the first ends of the plurality of heat sources are respectively connected to the negative electrode of the second power supply, and the second ends of the plurality of heat sources are respectively connected to the positive electrode of the second power supply.

4. The ion generating device according to claim 3, characterized in that The connection lines between the first ends of the plurality of heat sources and the negative pole of the second power supply have at least one intersection, and the connection lines between the second ends of the plurality of heat sources and the positive pole of the second power supply have at least one intersection.

5. The ion generating device according to claim 1, wherein In the multiple thermal electron generating parts, the multiple cathodes are each connected to the positive electrode of the third power supply, and the connection points between the multiple cathodes and the positive electrode of the third power supply are located on the connection line between the negative electrode of the first power supply and the positive electrode of the third power supply. The ion generating device according to claim 1 , wherein: In the plurality of thermal electron generating portions, each of the plurality of reflective electrodes is connected to the negative electrode of the fourth power supply.

7. The ion generating device according to claim 1, characterized in that The positive poles of the arc chamber and the fourth power supply are respectively connected to the positive pole of the first power supply, and the connection point between the positive pole of the first power supply and the positive pole of the fourth power supply is located on the connection line between the positive pole of the first power supply and the arc chamber.

8. The ion generating device according to claim 1, characterized in that The arc chamber also includes a top and a bottom, which are relatively arranged on both sides of the first end and the second end, and the top, the bottom, the first end and the second end together constitute an internal area of the arc chamber, an ion extraction slit is provided on the top, and a gas inlet is provided on the bottom.

9. The ion generating device according to claim 1, characterized in that In the plurality of thermal electron generating portions, the plurality of heat sources are provided in common on the first end portion or the second end portion.

10. The ion generating device according to claim 1, wherein Among the plurality of thermal electron generating portions, at least one heat source is provided on the first end portion and the second end portion opposite to the remaining heat sources.

Images