Whole-piece telescopic material taking mechanism

Abstract

The utility model discloses a whole-piece telescopic material taking mechanism which is provided with a support, a double-shaft motor is installed on the inner side of the support, and a conveying belt is arranged on the outer side of the double-shaft motor in a transmission mode. Comprising a fan blade installed at one end of a double-shaft motor, the outer side of the fan blade is sleeved with a protection box, the protection box is fixed to the side face of a support, the top of the protection box is connected with a cleaning mechanism, and the cleaning mechanism is arranged over a silicon wafer; the other end of the double-shaft motor is connected with a transmission assembly through a belt wheel mechanism, the transmission assembly is connected with a cleaning mechanism, and the transmission assembly and the cleaning mechanism are fixed to a support through the support. According to the whole-wafer telescopic material taking mechanism, in the silicon wafer conveying process, dust adhering to the surface of a silicon wafer can be synchronously cleaned, comprehensive cleaning of the silicon wafer is achieved through swinging gas, and therefore an additional cleaning structure does not need to be used for cleaning after material taking, and subsequent machining is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to a whole-wafer telescopic material-taking mechanism. Background Art

[0002] During the processing of silicon wafers, corresponding equipment is usually required to feed and retrieve them. The conveyor belt structure is the most common retrieving equipment. It uses a flat conveyor belt to achieve horizontal transportation of silicon wafers. However, the existing retrieving mechanism still has the following shortcomings in actual use:

[0003] Since dust easily falls from the upper surface of silicon wafers during transportation, which in turn affects their subsequent processing, the surface of the silicon wafers needs to be cleaned in time during transportation. However, the traditional material-retrieving mechanism is not convenient for cleaning silicon wafers, and usually requires an additional cleaning structure to clean them after transportation. In response to the above problems, there is an urgent need for innovative design based on the original material-retrieving mechanism. Utility Model Content

[0004] The purpose of the present utility model is to provide a whole-wafer telescopic material-retrieving mechanism to solve the problem raised in the above-mentioned background technology that dust is easily dropped from the upper surface of the silicon wafer during transportation, thereby affecting its subsequent processing. Therefore, the surface of the silicon wafer needs to be cleaned in time during transportation, but the traditional material-retrieving mechanism is not convenient for cleaning the silicon wafer, and usually an additional cleaning structure needs to be used for cleaning after transportation.

[0005] To achieve the above object, the present invention provides the following technical solution: a whole-wafer telescopic material taking mechanism, provided with a bracket, a dual-axis motor is installed on the inner side of the bracket, and a conveyor belt is driven on the outer side of the dual-axis motor, and silicon wafers are transported above the conveyor belt;

[0006] The device comprises a fan blade mounted on one end of the dual-axis motor, a protective box being provided on the outer side of the fan blade, and the protective box being fixed to the side of the bracket, the top of the protective box being connected to a cleaning mechanism, and the cleaning mechanism being arranged directly above the silicon wafer;

[0007] The other end of the dual-axis motor is connected to the transmission assembly through a pulley mechanism, and the transmission assembly is connected to the cleaning mechanism, and both the transmission assembly and the cleaning mechanism are fixed on the bracket through a bracket.

[0008] Preferably, the cleaning mechanism includes an air pipe fixed to the top of the protective box, and the protective box is connected to one of the sleeves through the air pipe, and the two sleeves are connected to each other through a connecting pipe, and the gas generated by the rotation of the fan blades can be transmitted to the sleeve through the air pipe.

[0009] Preferably, a movable shaft passes through the interior of the sleeve block, and the movable shaft and the sleeve block are rotatably connected, and the sleeve blocks are interconnected through the movable shaft and the fixed tube, so that the gas in the sleeve block can be transmitted to the movable shaft without hindering the rotation of the movable shaft.

[0010] Preferably, the fixed tube is fixed to the end of the movable shaft, and air nozzles are arranged at equal intervals on the lower side of the fixed tube, and the air nozzles are arranged at an angle. At the same time, a spring is wound around the end of the movable shaft away from the fixed tube to reset it. The gas in the movable shaft can be transmitted to the fixed tube and finally discharged from the air nozzles.

[0011] Preferably, the transmission assembly includes a first gear fixedly mounted on the outside of the movable shaft, and a second gear is meshed and connected above the first gear, and the range of the tooth blocks on the second gear is 1 / 2 of its circumference. The meshing transmission of the bevel gears can make the connecting shaft and the transmission shaft rotate synchronously.

[0012] Preferably, a transmission shaft is fixedly passed through the interior of the second gear, and the two transmission shafts are connected to each other through a pulley mechanism. When the transmission shaft rotates, it can drive the second gear to rotate, and then drive the movable shaft to rotate through the meshing transmission with the first gear.

[0013] Preferably, the outer side of the transmission shaft is meshed with the connecting shaft through a bevel gear set, and the end of the connecting shaft away from the bevel gear set is connected to the output shaft of the dual-axis motor through another pulley mechanism. The movable shaft drives the fixed pipe to rotate, thereby realizing the swinging discharge of gas.

[0014] Compared with the prior art, the present invention has the following beneficial effects: the whole-wafer telescopic retrieving mechanism can simultaneously clean dust adhering to the surface of the silicon wafer during the wafer conveying process, and utilizes the swinging air to achieve comprehensive cleaning of the silicon wafer, so there is no need to use an additional cleaning structure for cleaning after retrieving the wafer, which facilitates subsequent processing. The specific contents are as follows:

[0015] 1. The wind generated by the rotation of the fan blades can be transmitted to the sleeve through the air pipe. The gas is then transmitted to the two sleeves through the connecting pipe. After that, it is transmitted to the fixed pipe through the cavity in the movable shaft. Finally, it can be discharged from the air nozzle and blown onto the silicon wafer being transported to clean the dust on its surface.

[0016] 2. The transmission shaft is driven to rotate through the meshing transmission of the bevel gear set, and then the second gear is driven to rotate through the transmission shaft, and the movable shaft and the fixed tube are driven to rotate through the meshing transmission of the second gear and the first gear, so that the air nozzle can rotate during the air jetting process. Since the second gear is a half gear structure, when it is not meshed with the first gear, the spring resilience can drive the movable shaft and the fixed tube to rotate in the opposite direction, thereby realizing the back and forth swing of the air nozzle and improving the efficiency of dust cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the front view structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the back structure of the utility model;

[0019] Figure 3 This is a schematic diagram of the fan blade moisturizing structure of the utility model;

[0020] Figure 4 This is a schematic diagram of the front view structure of the fixed pipe of the utility model;

[0021] Figure 5 This is a schematic diagram of the front view structure of the gear of the utility model;

[0022] Figure 6 This is a bottom view of the fixed tube structure of the utility model;

[0023] Figure 7 This is a schematic diagram of the front cross-section structure of the fixed pipe of the utility model.

[0024] In the figure: 1. Bracket; 2. Dual-axis motor; 3. Conveyor belt; 4. Silicon wafer; 5. Fan blade; 6. Protective box; 7. Air pipe; 8. Bushing; 9. Connecting pipe; 10. Movable shaft; 11. Fixed pipe; 12. Air nozzle; 13. First gear; 14. Second gear; 15. Drive shaft; 16. Bevel gear set; 17. Connecting shaft. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0026] See also Figure 1-Figure 7 , the utility model provides a technical solution:

[0027] In order to solve the problems existing in the prior art, this embodiment adopts the following technical scheme: a whole-piece telescopic material-taking mechanism, which is provided with a bracket 1, a dual-axis motor 2 is installed on the inner side of the bracket 1, and a conveyor belt 3 is driven on the outer side of the dual-axis motor 2, and a silicon wafer 4 is transported above the conveyor belt 3; it includes: a fan blade 5, which is installed at one end of the dual-axis motor 2, a protective box 6 is provided on the outer side of the fan blade 5, and the protective box 6 is fixed to the side of the bracket 1, the top of the protective box 6 and the cleaning mechanism are interconnected, and the cleaning mechanism is arranged directly above the silicon wafer 4; the other end of the dual-axis motor 2 is interconnected with the transmission assembly through a pulley mechanism, and the transmission assembly is interconnected with the cleaning mechanism, and the transmission assembly and the cleaning mechanism are both fixed to the bracket 1 through the bracket.

[0028] Since the silicon wafer 4 is easily covered with dust during transportation, which affects its subsequent processing, the surface of the silicon wafer 4 needs to be cleaned in time during transportation. However, the traditional material removal mechanism is not convenient for cleaning the silicon wafer 4. Usually, an additional cleaning structure is required to clean it after transportation, such as Figure 2-Figure 3 and Figure 6-Figure 7 As shown, the cleaning mechanism includes an air supply pipe 7 fixed to the top of the protective box 6, and the protective box 6 is connected to one of the sleeve blocks 8 through the air supply pipe 7, and the two sleeve blocks 8 are connected to each other through a connecting pipe 9; a movable shaft 10 runs through the interior of the sleeve block 8, and the movable shaft 10 and the sleeve block 8 are rotatably connected, and the sleeve block 8 is connected to each other through the movable shaft 10 and the fixed pipe 11; the fixed pipe 11 is fixed to the end of the movable shaft 10, and air nozzles 12 are arranged at equal intervals on the lower side of the fixed pipe 11, and the air nozzles 12 are inclined. At the same time, a spring is wound around the end of the movable shaft 10 away from the fixed pipe 11 to reset it; the dual-axis motor 2 can drive the fan blades 5 to rotate synchronously during the driving process, and the wind force generated in this way can be transmitted to the sleeve block 8 through the air supply pipe 7, and then the gas is transmitted to the two sleeve blocks 8 respectively through the connecting pipe 9, and then transmitted to the fixed pipe 11 through the cavity in the movable shaft 10, and finally discharged from the air nozzle 12 to blow onto the silicon wafer 4 in transmission to clean the dust on its surface.

[0029] like Figure 1 and Figure 4-Figure 6As shown, the transmission assembly includes a first gear 13 fixedly sleeved on the outside of the movable shaft 10, and a second gear 14 is meshed and connected above the first gear 13, and the range of the tooth blocks on the second gear 14 is 1 / 2 of its circumference; a transmission shaft 15 is fixedly passed through the inside of the second gear 14, and the two transmission shafts 15 are connected to each other through a pulley mechanism; the outer side of the transmission shaft 15 is meshed and driven by a bevel gear set 16 and a connecting shaft 17, and the end of the connecting shaft 17 away from the bevel gear set 16 is connected to the output shaft of the dual-axis motor 2 through another pulley mechanism; during the driving process of the dual-axis motor 2, the connecting shaft 17 can also be driven by the pulley mechanism The connecting shaft 17 rotates, and then drives the transmission shaft 15 to rotate through the meshing transmission of the bevel gear set 16, and the two transmission shafts 15 are transmitted through another pulley mechanism, and the second gear 14 is driven to rotate by the transmission shaft 15, and then the movable shaft 10 and the fixed tube 11 are driven to rotate through the meshing transmission of the second gear 14 and the first gear 13, so that the air nozzle 12 can rotate during the air jetting process. Since the second gear 14 is a half gear structure, when it is not meshed with the first gear 13, the rebound resilience of the spring can drive the movable shaft 10 and the fixed tube 11 to rotate in the opposite direction, thereby realizing the back and forth swing of the air nozzle 12, thereby improving the efficiency of cleaning dust.

[0030] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A whole-piece telescopic material-retrieving mechanism, comprising a bracket (1), a dual-axis motor (2) mounted on the inner side of the bracket (1), a conveyor belt (3) driven on the outer side of the dual-axis motor (2), and a silicon wafer (4) transported above the conveyor belt (3); It is characterized in that include: A fan blade (5) is mounted on one end of the dual-axis motor (2); a protective box (6) is provided on the outer side of the fan blade (5); the protective box (6) is fixed to the side of the bracket (1); the top of the protective box (6) and the cleaning mechanism are connected to each other, and the cleaning mechanism is arranged directly above the silicon wafer (4); The other end of the dual-axis motor (2) is connected to the transmission assembly via a pulley mechanism, and the transmission assembly is connected to the cleaning mechanism, and both the transmission assembly and the cleaning mechanism are fixed to the bracket (1) via a bracket.

2. The whole-piece telescopic material-retrieving mechanism according to claim 1, characterized in that: The cleaning mechanism comprises an air supply pipe (7) fixed to the top of the protective box (6), and the protective box (6) is connected to one of the sleeve blocks (8) via the air supply pipe (7), and the two sleeve blocks (8) are connected to each other via a connecting pipe (9).

3. The whole-piece telescopic material-retrieving mechanism according to claim 2, characterized in that: A movable shaft (10) passes through the interior of the sleeve block (8), and the movable shaft (10) and the sleeve block (8) are rotatably connected, and the sleeve block (8) is communicated with each other through the movable shaft (10) and the fixed pipe (11).

4. The whole-piece telescopic material-retrieving mechanism according to claim 3, characterized in that: The fixed tube (11) is fixed to the end of the movable shaft (10), and air nozzles (12) are arranged at equal intervals on the lower side of the fixed tube (11), and the air nozzles (12) are arranged obliquely. At the same time, a spring is wound around the end of the movable shaft (10) away from the fixed tube (11) to reset it.

5. The whole-piece telescopic material taking mechanism according to claim 1, characterized in that: The transmission assembly includes a first gear (13) fixedly sleeved on the outside of the movable shaft (10), and a second gear (14) is meshedly connected above the first gear (13), and the tooth blocks on the second gear (14) are distributed over a range of 1 / 2 of its circumference.

6. The whole-piece telescopic material taking mechanism according to claim 5, characterized in that: A transmission shaft (15) is fixedly passed through the interior of the second gear (14), and the two transmission shafts (15) are connected to each other via a pulley mechanism.

7. The whole-piece telescopic material-retrieving mechanism according to claim 6, characterized in that: The outer side of the transmission shaft (15) is meshed with the connecting shaft (17) for transmission, and one end of the connecting shaft (17) away from the bevel gear set (16) is connected to the output shaft of the dual-axis motor (2) through another pulley mechanism.

Images