Cavity door connecting electrode structure and coating device

Abstract

The utility model relates to a cavity door connecting electrode structure and a coating device. The cavity door connecting electrode structure comprises a cavity door, an electrode plate, a lead-in electrode and an insulation pad are arranged in the cavity door, the electrode plate is arranged on the inner side face of the cavity door, the cavity door is provided with an installation hole, the lead-in electrode is arranged in the installation hole and connected with the electrode plate, and the surface of the electrode plate is of a cambered surface structure. According to the utility model, the surface of the electrode plate is bent into an arc shape to reduce the edge effect of the edge, so that plasmas generated by the electrode plate and required by the process are uniformly distributed.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a cavity door connecting electrode structure and a film coating device. Background Art

[0002] Atomic layer deposition (ALD) technology forms thin films by alternately introducing pulses of vapor precursors into a reaction chamber, where a saturated chemical reaction occurs on the substrate. ALD coating equipment deposits materials onto the substrate surface layer by layer in the form of single atomic layers. Each deposition pass is considered an atomic layer. Based on atomic properties, ten deposition passes produce approximately 1 nm of film. ALD's unique process principles have led to its widespread application across various industries.

[0003] The coating machine generates the plasma required for the process by introducing external radio frequency current into the electrode plate. The electrode plate of the existing technology adopts a flat plate structure, which produces a boundary effect. After the high voltage end is applied to the flat plate, the electric field strength generated at the edge of the electrode plate increases, and the uniformity of the ions cannot be controlled. The distribution of plasma during etching and coating is uneven, affecting production quality. Utility Model Content

[0004] The first aspect of the present invention aims to solve the problem of uniformity in controlling plasma by electrode plates in the prior art. It provides a chamber gate-connected electrode structure that can achieve uniform distribution of the plasma required for the process generated by the electrode plates by setting a curved surface on the surface of the electrode plates. The main concept is:

[0005] A chamber door-connected electrode structure includes a chamber door, an electrode plate, an introduction electrode, and an insulating pad disposed within the chamber door. The electrode plate is disposed on the inner side of the chamber door, and a mounting hole is provided in the chamber door. The introduction electrode is disposed within the mounting hole and connected to the electrode plate. The surface of the electrode plate has a curved surface structure. In this solution, the introduction electrode is disposed on the chamber door through the mounting hole. The electrode plate is mounted on the end face of the chamber door to act on the product within the chamber of the coating equipment after the chamber door is closed. The introduction electrode is connected to the electrode plate so that the electrode plate receives external radio frequency current input by the introduction electrode. The electrode plate generates the plasma required for the process. In this solution, the surface of the electrode plate is curved to reduce edge effects, ensuring that the plasma generated by the electrode plate is evenly distributed.

[0006] Preferably, an insulating pad is provided between the electrode plate and the chamber door, with a circular hole formed in the middle of the insulating pad, and an introduction electrode is provided at the circular hole of the insulating pad. The insulating pad isolates the electrode plate from the chamber door to prevent the chamber from being charged when the coating equipment is in operation, thereby preventing installation risks. The through hole of the insulating pad is also provided at the position of the introduction electrode, so that the introduction electrode can pass through the insulating pad and connect to the electrode plate.

[0007] Preferably, the introduction electrode includes a sealed upper plate, a sealed lower plate, a fixing screw, and an elastic contact. The sealed upper plate and the sealed lower plate are connected by the fixing screw, and the elastic contact is provided on the sealed lower plate. The fixing screw has its ends provided on the sealed upper plate and the sealed lower plate, and the elastic contact is mounted on the sealed lower plate. The fixing screw then establishes electrode communication with the elastic contact through the sealed lower plate.

[0008] The second aspect of the present invention aims to solve the technical problem of poor sealing performance of the mounting hole of the chamber door. Furthermore, the sealing upper plate and the sealing lower plate are configured as a T-shaped structure, the small-diameter ends of the sealing upper plate and the sealing lower plate are relatively arranged in the mounting hole, and a sealing ring is provided between the sealing upper plate and the sealing lower plate and the end face of the chamber door. A threaded through hole is provided in the middle position of the end face of the sealing upper plate, and a threaded hole is provided at the small-diameter end of the sealing lower plate. A fixing screw passes through the sealing upper plate, and the bottom of the fixing screw is connected to the sealing lower plate. By inserting the fixing screw into the sealing upper plate, the outer wall of the fixing screw is connected to the sealing upper plate through the threaded through hole, and the bottom of the fixing screw is connected to the sealing lower plate through the threaded hole, the distance between the sealing upper plate and the sealing lower plate can be adjusted by rotating the sealing lower plate or the sealing upper plate. The sealing upper plate and the sealing lower plate squeeze the sealing ring provided in the mounting hole of the chamber door. By adjusting the distance between the sealing upper plate and the sealing lower plate, the squeezing force of the sealing upper plate and the sealing lower plate on the sealing ring is further achieved, which can improve the sealing performance.

[0009] Preferably, a positioning hole is opened in the radial position of the upper end surface of the sealing upper plate, and a positioning screw is installed in the positioning hole, and a conductive member is installed on the positioning screw. The conductive member is positioned and installed on the sealing upper plate by the positioning screw so that the conductive member can be electrically connected to the fixing screw.

[0010] The third invention of the present utility model aims to solve the technical problem that the coating effect is poor due to the electrification of the chamber door. Furthermore, an insulating upper plate is installed on the sealing upper plate, and an opening is provided on the side of the insulating upper plate, and a conductive part is inserted into the opening. The sealing upper plate and the sealing lower plate are provided with insulating positioning sleeves, and a sealing ring is provided on the outside of the insulating positioning sleeves. The insulating upper plate is sleeved on the sealing upper plate, and the end of the insulating upper plate is installed on the chamber door, so that the conductive part provided on the sealing upper plate is isolated from the mounting hole of the chamber door under the action of the insulating assembly, and the conductive sealing upper plate and the sealing lower plate are isolated from the mounting hole of the chamber door under the action of the insulating positioning sleeve, so that the chamber door is not electrified, and the reaction chamber is ensured not to be electrified, thereby avoiding affecting the coating effect.

[0011] Preferably, the process further comprises a coupling electrode, a conductive member, and a radio frequency electrode. The coupling electrode is disposed at the chamber door and connected to the radio frequency electrode. The coupling electrode is connected to the introduction electrode via the conductive member. The coupling electrode is connected to the radio frequency power supply and is connected to the introduction electrode via the conductive member. The introduction electrode introduces external radio frequency current to the electrode plate to generate the plasma required for the process.

[0012] Preferably, a coating device includes a chamber door connected to an electrode structure, and also includes a chamber, wherein a chamber door is provided above the chamber opening, a mounting lug is provided on the upper end surface of the chamber, a hinge support is mounted on the mounting lug, a connecting plate is mounted on the chamber door, a rotating shaft is provided on the connecting plate, and the connecting plate is movably connected to the hinge support via the rotating shaft. The chamber door is used to open and close the chamber, the mounting lug is provided on the chamber for mounting the hinge support, and the connecting plate is installed on the chamber door, the connecting plate is hinged to the hinge support of the chamber, and the connecting plate is rotatably connected around the hinge support via the rotating shaft, so that the chamber door rotates synchronously under the action of the connecting plate, completing the opening and closing movement of the chamber door on the chamber.

[0013] The third aspect of the present invention is to solve the technical problem of poor sealing performance between the chamber door and the chamber. Furthermore, an annular sealing groove is provided on the upper end surface of the chamber, a sealing gasket is provided in the annular sealing groove, a strip-shaped rotating shaft hole is provided in the connecting plate, the extending direction of the strip-shaped rotating shaft hole is perpendicular to the direction of the connecting plate on the chamber door mounting surface, and adjustment holes are provided at both ends of the connecting plate in the extending direction of the strip-shaped rotating shaft hole, an adjusting screw is inserted into the adjustment hole, and a rotating shaft is inserted into the strip-shaped rotating shaft hole, so that the adjusting screw and the rotating shaft abut against each other. The cam is then tightened to the cam face, and the cam is tightened to the cam face, so that the cam is tightened and the seal is restored to the desired position.

[0014] The beneficial effects of the present invention are:

[0015] The surface of the electrode plate is bent into an arc shape to reduce the edge effect, so that the plasma required for the process generated by the electrode plate is evenly distributed. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural side sectional view of the utility model.

[0017] Figure 2 It is a top view of the structure of the utility model.

[0018] Figure 3 This is a partial enlarged view of the structure of the electrode introduced in the utility model.

[0019] Figure 4This is a partial enlarged view of the position where the cavity door of the utility model is hinged to the cavity.

[0020] Figure 5 It is a structural schematic diagram of the utility model.

[0021] The reference numerals include: 1. chamber door; 11. mounting hole; 12. connecting plate; 13. rotating shaft; 14. bar rotating shaft hole; 15. adjustment hole; 16. adjusting screw; 2. electrode plate; 3. introduction electrode; 31. sealing upper plate; 32. sealing lower plate; 33. fixing screw; 34. elastic contact; 35. insulating upper plate; 36. insulating positioning sleeve; 37. positioning screw; 4. insulating pad; 5. sealing ring; 6. coupling electrode; 7. conductive part; 8. chamber; 81. mounting ear plate; 82. sealing gasket; 9. hinge support. DETAILED DESCRIPTION

[0022] To make the objectives, technical solutions, and advantages of the embodiments more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. When the following description refers to the drawings, unless otherwise indicated, identical numbers in different drawings represent identical or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. Instead, they are merely examples of devices and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.

[0023] In this disclosure, unless otherwise specified, directional terms such as "inner" and "outer" are defined based on the contours of the corresponding components. Terms such as "first" and "second" are used in this disclosure to distinguish one element from another and do not convey order or importance.

[0024] Example 1:

[0025] Basically Figure 1 As shown, a cavity door connecting electrode structure includes a cavity door 1, an electrode plate 2, an introduction electrode 3 and an insulating pad 4 are arranged in the cavity door 1, the electrode plate 2 is arranged on the inner side of the cavity door 1, the cavity door 1 is provided with a mounting hole 11, the introduction electrode 3 is arranged in the mounting hole 11, the introduction electrode 3 is connected to the electrode plate 2, and the surface of the electrode plate 2 is a curved surface structure.

[0026] In this embodiment, an introduction electrode 3 is set on the chamber door 1 through the mounting hole 11, and the electrode plate 2 is installed on the inner side of the chamber door 1 to act on the product in the chamber of the coating equipment after the chamber door 1 is closed. The introduction electrode 3 is connected to the electrode plate 2, so that the electrode plate 2 receives the external radio frequency current input by the introduction electrode 2, and the electrode plate 2 generates the plasma required for the process. In this solution, the surface of the electrode plate is bent into an arc to reduce the edge effect of the edge, so that the plasma required for the process generated by the electrode plate is evenly distributed.

[0027] like Figure 1 As shown, an insulating pad 4 is provided between the electrode plate 2 and the chamber door 1. A circular hole is provided in the middle of the insulating pad 4, and an introduction electrode 3 is provided at the circular hole of the insulating pad 4. The electrode plate 2 is isolated from the chamber door 1 by the insulating pad 4 to prevent the chamber from being charged when the coating equipment is working, which may cause installation risks. The through hole of the insulating pad 4 is also provided at the position of the introduction electrode 3, so that the introduction electrode 3 can pass through the insulating pad 4 and connect with the electrode plate 2.

[0028] Example 2:

[0029] like Figure 3 As shown, the introduction electrode 3 of this embodiment includes a sealing upper plate 31, a sealing lower plate 32, fixing screws 33 and elastic contacts 34. The sealing upper plate 31 and the sealing lower plate 32 are connected by the fixing screws 33, and the elastic contacts 34 are provided on the sealing lower plate 32.

[0030] The two ends of the fixing screw 33 are set on the sealing upper plate 31 and the sealing lower plate 32 , and the elastic contact 34 is installed on the sealing lower plate 32 , so that the fixing screw 33 is connected to the elastic contact 34 through the sealing lower plate 32 for electrode communication.

[0031] like Figure 3 As shown, the sealing upper plate 31 and the sealing lower plate 32 of this embodiment are set as T-shaped structures, and the small-diameter ends of the sealing upper plate 31 and the sealing lower plate 32 are relatively arranged in the mounting hole 11, and a sealing ring 5 is set between the sealing upper plate 31 and the sealing lower plate 32 and the end face of the chamber door 1. A threaded through hole is provided in the middle position of the end face of the sealing upper plate 31, and a threaded hole is provided at the small-diameter end of the sealing lower plate 32. The fixing screw 33 passes through the sealing upper plate 31, and the bottom of the fixing screw 33 is connected to the sealing lower plate 32.

[0032] By inserting the fixing screw 33 into the sealing upper plate 31, the outer wall of the fixing screw 33 is connected to the sealing upper plate 31 through a threaded through hole, and the bottom of the fixing screw 33 is connected to the sealing lower plate 32 through a threaded hole. The distance between the sealing upper plate 31 and the sealing lower plate 32 can be adjusted by rotating the sealing lower plate 32 or the sealing upper plate 31. The sealing upper plate 31 and the sealing lower plate 32 squeeze the sealing ring 5 set in the mounting hole 11 of the chamber door 1. By adjusting the distance between the sealing upper plate 31 and the sealing lower plate 32, the extrusion force of the sealing upper plate 31 and the sealing lower plate 32 on the sealing ring 5 is further realized, and the sealing performance can be improved.

[0033] A positioning hole is provided in the radial position of the upper end surface of the sealing upper plate 31, and a positioning screw 37 is installed in the positioning hole. The conductive member 7 is installed on the positioning screw 37. The conductive member 7 is positioned and installed on the sealing upper plate 31 by the positioning screw 37 so that the conductive member 7 can be electrically connected to the fixing screw 33.

[0034] Example 3:

[0035] like Figure 2-Figure 3 As shown, an insulating upper plate 35 is installed on the sealing upper plate 31 of this embodiment. The side of the insulating upper plate 35 is open, and the conductive member 7 is inserted into the open position. An insulating positioning sleeve 36 is provided on the sealing upper plate 31 and the sealing lower plate 32, and a sealing ring 5 is provided on the outside of the insulating positioning sleeve 36.

[0036] The insulating upper plate 35 is sleeved on the sealing upper plate 31, and the end of the insulating upper plate 35 is installed on the chamber door 1, so that the conductive part 7 set on the sealing upper plate 1 is under the action of the insulating component, and the conductive sealing upper plate 31 and the sealing lower plate 32 are isolated from the mounting hole 11 of the chamber door 1 under the action of the insulating positioning sleeve 36, so that the chamber door 1 is not charged, ensuring that the reaction chamber is not charged, and avoiding affecting the coating effect.

[0037] The insulating positioning sleeve 36 of this embodiment is composed of a bushing tube and a limiting ring. The limiting ring is coaxially fixed to the end of the bushing tube. The insulating positioning sleeve 36 is made of non-conductive insulating material. The bottom of the sealing upper plate 31 or the sealing lower plate 32 is inserted into the inside of the bushing tube. The outer wall of the bushing tube cooperates with the inner wall of the mounting hole 11 of the chamber door 1. A sealing ring 5 is provided on the outer wall of the limiting ring so that the sealing ring 5 can be positioned through the side wall of the limiting ring. The end face of the limiting ring is abutted against the mounting hole 11, and the other end face of the limiting ring is grounded to the end face of the sealing upper plate 31 or the sealing lower plate 32, so that the side wall and end face of the sealing upper plate 31 or the sealing lower plate 32 set at the mounting hole 11 are isolated by the insulating positioning sleeve 36, preventing the chamber door 1 from being electrified.

[0038] In this embodiment, a shell is installed on the chamber door 1, and an installation cavity is formed between the shell and the upper surface of the chamber door 1 for installing the chamber door connection electrode structure.

[0039] Example 4:

[0040] like Figure 5 As shown, based on Example 1, this embodiment further includes a coupling electrode 6, a conductive member 7 and a radio frequency electrode. The coupling electrode 6 is arranged on the cavity door 1, the coupling electrode 6 is connected to the radio frequency electrode, and the coupling electrode 6 is connected to the introduction electrode 3 through the conductive member 7.

[0041] The coupling electrode 6 introduces a radio frequency power source, and is connected to the introduction electrode 3 through the conductive member 7. The introduction electrode 3 introduces an external radio frequency current to the electrode plate 2 to generate the plasma required for the process. Example 5:

[0042] A coating device includes a chamber door-connected electrode structure and a chamber 8. A chamber door 1 is provided above the opening of the chamber 8. A mounting lug 81 is provided on the upper end surface of the chamber 8. A hinge support 9 is mounted on the mounting lug 81. A connecting plate is mounted on the chamber door 1. The connecting plate 12 is provided with a rotating shaft 13. The connecting plate 12 is movably connected to the hinge support 9 via the rotating shaft 13. The chamber door 1 is used to open and close the chamber 8. The mounting lug 81 is provided on the chamber 8 for mounting the hinge support 9. The connecting plate 12 is mounted on the chamber door 1. The connecting plate 12 is hinged to the hinge support 9 of the chamber 1. The connecting plate 12 is rotatably connected around the hinge support 9 via the rotating shaft 13, so that the chamber door 1 rotates synchronously under the action of the connecting plate 12, completing the opening and closing movement of the chamber door 1 on the chamber 8.

[0043] An annular sealing groove is provided on the upper end surface of the chamber 8, and a sealing gasket 82 is provided in the annular sealing groove. A strip shaft hole 14 is provided on the connecting plate 12, and the extension direction of the strip shaft hole 14 is perpendicular to the direction of the connecting plate 12 on the installation surface of the chamber door 1. Adjustment holes 15 are provided on both ends of the extending direction of the strip shaft hole 14 on the connecting plate 12, and an adjusting screw 16 is inserted into the adjusting hole 15, and a shaft 13 is inserted into the strip shaft hole 14, and the adjusting screw 16 is in contact with the shaft 13.

[0044] In this embodiment, on the one hand, an annular sealing groove is provided on the abutting surface of the chamber 8 and the chamber door 1 to install a sealing gasket 82, so that after the chamber door 1 is closed on the chamber 8, the gap between the chamber door 1 and the chamber 8 that is not tightly sealed is adjusted by the sealing gasket 82; on the other hand, a vertical strip shaft hole 14 is provided on the connecting plate 12 to adjust the position of the shaft 13 in the strip shaft hole 14, and the adjusting screws 16 are installed in the adjustment holes 15 at both ends of the extension direction of the strip shaft hole 14, so that the shaft 13 abuts between the adjusting screws 16 for positioning, and the upper adjusting screws 16 and the lower adjusting screws 16 are adjusted respectively so that the shaft 13 can be adjusted to a suitable height in the strip shaft hole 14, and when the chamber door 1 is closed on the chamber 8, the gap when the end faces of the chamber door 4 and the chamber 8 are parallel can be adjusted, so that the gap when the chamber door 1 is sealing the chamber 8 can be adjusted to the optimal state, thereby ensuring the position accuracy of the chamber door 1 on the chamber 8 and improving the sealing strength.

[0045] The above is only an embodiment of the present invention, and the commonly known specific structures and characteristics of the scheme are not described in detail here. It should be pointed out that for those skilled in the art, several modifications and improvements can be made without departing from the structure of the present invention, and these should also be regarded as the scope of protection of the present invention. These will not affect the effect of the implementation of the present invention and the practicality of the patent. The scope of protection claimed by this application shall be based on the content of its claims, and the specific implementation methods and other records in the specification can be used to interpret the content of the claims.

Claims

1. A cavity door connecting electrode structure, characterized by: The invention comprises a chamber door (1), wherein an electrode plate (2), an introduction electrode (3) and an insulating pad (4) are arranged in the chamber door (1), the electrode plate (2) is arranged on the inner side surface of the chamber door (1), the chamber door (1) is provided with a mounting hole (11), the introduction electrode (3) is arranged in the mounting hole (11), the introduction electrode (3) is connected to the electrode plate (2), and the surface of the electrode plate (2) is a curved surface structure; The introduction electrode (3) comprises a sealing upper plate (31), a sealing lower plate (32), a fixing screw (33) and an elastic contact (34); the sealing upper plate (31) and the sealing lower plate (32) are connected via the fixing screw (33); and the elastic contact (34) is provided on the sealing lower plate (32).

2. The cavity door connection electrode structure according to claim 1, characterized in that: An insulating pad (4) is provided between the electrode plate (2) and the chamber door (1), a circular hole is provided in the middle of the insulating pad (4), and an introduction electrode (3) is provided at the circular hole of the insulating pad (4).

3. The cavity door connection electrode structure according to claim 1, characterized in that: The sealing upper plate (31) and the sealing lower plate (32) are configured as a T-shaped structure. The small-diameter ends of the sealing upper plate (31) and the sealing lower plate (32) are relatively arranged in the mounting hole (11). A sealing ring (5) is provided between the sealing upper plate (31), the sealing lower plate (32) and the end face of the chamber door (1). A threaded through hole is provided in the middle position of the end face of the sealing upper plate (31). A threaded hole is provided at the small-diameter end of the sealing lower plate (32). A fixing screw (33) passes through the sealing upper plate (31). The bottom of the fixing screw (33) is connected to the sealing lower plate (32).

4. The cavity door connection electrode structure according to claim 1, characterized in that: A positioning hole is provided at a radial position on the upper end surface of the sealing upper plate (31), a positioning screw (37) is installed in the positioning hole, and a conductive member (7) is installed on the positioning screw (37).

5. The cavity door connecting electrode structure according to claim 1, characterized in that: An insulating upper plate (35) is mounted on the sealing upper plate (31). The insulating upper plate (35) has an opening on its side, into which a conductive member (7) is inserted. An insulating positioning sleeve (36) is sleeved on the sealing upper plate (31) and the sealing lower plate (32). A sealing ring (5) is sleeved on the outside of the insulating positioning sleeve (36).

6. The cavity door connecting electrode structure according to any one of claims 1 to 5, characterized in that: It also includes a coupling electrode (6) and a radio frequency electrode. The coupling electrode (6) is provided at the cavity door (1). The coupling electrode (6) is connected to the radio frequency electrode. The coupling electrode (6) is connected to the introduction electrode (3) via a conductive member (7).

7. A film coating device, characterized in that: It includes the cavity door connecting electrode structure according to any one of claims 1-6.

8. The coating device according to claim 7, characterized in that: The invention also includes a chamber (8), a chamber door (1) is provided above the opening of the chamber (8), a mounting ear plate (81) is provided on the upper end surface of the chamber (8), a hinge support (9) is installed on the mounting ear plate (81), a connecting plate (12) is installed on the chamber door (1), a rotating shaft (13) is provided on the connecting plate (12), and the connecting plate (12) is movably connected to the hinge support (9) through the rotating shaft (13).

9. The coating device according to claim 8, characterized in that: An annular sealing groove is provided on the upper end surface of the chamber (8), and a sealing gasket (82) is provided in the annular sealing groove. The connecting plate (12) is provided with a strip shaft hole (14), and the extension direction of the strip shaft hole (14) is perpendicular to the direction of the connecting plate (12) on the installation surface of the chamber door (1). The connecting plate (12) is provided with adjustment holes (15) at both ends of the extension direction of the strip shaft hole (14), and an adjusting screw (16) is inserted into the adjustment hole (15), and a shaft (13) is inserted into the strip shaft hole (14), and the adjusting screw (16) is in contact with the shaft (13).

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