Crystal growth equipment

Abstract

The embodiment of the utility model provides crystal growth equipment, which comprises a furnace body, a temperature measuring window, a crystal growth device, a crystal growth device and a crystal growth device, wherein the furnace wall of the furnace body is provided with a temperature measuring window; the mounting hole is formed in the furnace wall; and the temperature measuring and cleaning device comprises a cleaning part, the cleaning part is arranged in the furnace body and can clean the temperature measuring window, and the temperature measuring and cleaning device can penetrate through the mounting hole and is movably arranged in the mounting hole.

Description

Technical Field

[0001] This specification relates to the field of crystal growth technology, and in particular to a crystal growth device. Background Art

[0002] Crystal growth is the process by which a substance forms crystals from a gas, liquid, or solid phase under specific physical and chemical conditions. Common methods for crystal growth include physical vapor transport (PVT). This involves using a small-diameter thermometric hole-type insulation cover. During crystal growth, the size and shape of the thermometric holes (e.g., heat dissipation holes) in the insulation material above the graphite crucible are varied to create a temperature gradient within the growth chamber, placing the raw material at a high temperature and the seed crystal at a low temperature. Raising the crucible temperature causes the raw material to sublime. The resulting vapor phase, under the influence of the temperature gradient, is transported from the raw material surface to the low-temperature seed crystal, where it crystallizes into bulk crystals.

[0003] However, during the actual growth process, gas phase components are particularly prone to crystallization and accumulation at the center of the temperature measuring hole in the lowest temperature zone of the growth chamber. Usually, the temperature measuring hole will be completely blocked within less than a day of growth. This not only makes it impossible to observe the temperature of the seed crystal cover, but more importantly, as the accumulation at the center of the temperature measuring hole increases, the temperature field of the crystal growth interface changes. This makes the temperature field of the growth interface extremely unstable during the crystal growth process, making it impossible to produce high-quality crystals.

[0004] Therefore, it is necessary to provide a crystal growth device that can clean the temperature measurement window to achieve stable temperature measurement, while keeping the temperature field of the crystal growth interface stable to produce high-quality crystals. Utility Model Content

[0005] One or more embodiments of the present specification provide a crystal growth device, which includes: a furnace body, a furnace wall of which is provided with a temperature measuring window; a mounting hole, which is provided on the furnace wall; a temperature measuring and cleaning device, including a cleaning part, which is provided in the furnace body and can clean the temperature measuring window, and the temperature measuring and cleaning device can pass through the mounting hole and be movably provided in the mounting hole.

[0006] In some embodiments, the temperature measuring and cleaning device further includes a connecting rod and a handle: the connecting rod is connected between the handle and the cleaning portion; and the connecting rod passes through the mounting hole, and the radial length of the handle along the mounting hole is greater than the diameter of the mounting hole.

[0007] In some embodiments, the cleaning portion includes a first brush head.

[0008] In some embodiments, the crystal growth equipment further includes a crucible and a thermal insulation felt disposed inside the furnace body; a temperature measuring hole is provided on the thermal insulation felt, and the temperature measuring and cleaning device can clean the temperature measuring hole.

[0009] In some embodiments, the cleaning portion includes a second brush head and a third brush head, and the second brush head and the third brush head are respectively located at two ends of the cleaning portion along the axial direction of the furnace body.

[0010] In some embodiments, the temperature measuring and cleaning device further includes a rotation drive mechanism, which drives the temperature measuring and cleaning device to rotate around the axial direction of the mounting hole.

[0011] In some embodiments, the crystal growth apparatus further comprises an axial drive mechanism, which drives the temperature measuring and cleaning device to move axially along the furnace body.

[0012] In some embodiments, the crystal growth equipment also includes a bearing and a thermal insulation member, and the bearing and the thermal insulation member are both arranged in the mounting hole, the outer ring of the bearing is connected to the mounting hole, and the inner ring of the bearing is connected to the temperature measuring and cleaning device; the thermal insulation member is closer to the inner cavity of the furnace body than the bearing.

[0013] In some embodiments, the outer ring of the bearing is detachably mounted to the mounting hole.

[0014] In some embodiments, the crystal growth apparatus further comprises a laser detection device configured to detect whether the temperature measuring hole is blocked. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] This specification will be further described in the form of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. These embodiments are not limiting, and in these embodiments, like numbers represent like structures, wherein:

[0016] Figure 1 is a schematic diagram of a crystal growth apparatus according to some embodiments of this specification;

[0017] Figure 2 is a schematic diagram of a temperature measuring and cleaning device according to some embodiments of this specification;

[0018] Figure 3 is a schematic diagram of a temperature measuring and cleaning device according to other embodiments of this specification;

[0019] Figure 4 is a schematic diagram of a temperature measuring and cleaning device according to some other embodiments of this specification;

[0020] Figure 5 is a cross-sectional view of a crystal growth apparatus according to some embodiments of this specification;

[0021] Figure 6It is a schematic diagram of the working principle of the laser detection device shown in some embodiments of this specification. DETAILED DESCRIPTION

[0022] To more clearly illustrate the technical solutions of the embodiments of this specification, the following briefly describes the drawings required for describing the embodiments. Obviously, the drawings described below are merely examples or embodiments of this specification. Those skilled in the art can apply this specification to other similar scenarios based on these drawings without inventive effort. Unless otherwise apparent from the context or otherwise noted, the same reference numerals in the figures represent the same structure or operation.

[0023] It should be understood that the terms "system," "device," "unit," and / or "module" used herein are a method for distinguishing different components, elements, parts, portions, or assemblies at different levels. However, if other terms can achieve the same purpose, the terms may be replaced by other expressions.

[0024] Unless the context clearly indicates an exception, words related to spatial descriptions such as "upper", "lower", "bottom", and "side" mentioned in this specification and claims are described based on the exemplary positional relationships shown in the accompanying drawings and do not constitute an absolute limitation on the components or structures in actual use. In actual use, the relative positions and directions of the components can be adjusted according to specific needs and application scenarios. Therefore, the words related to spatial descriptions in the specification are only used to assist in understanding the structural features and functional effects of the embodiments of this specification and do not constitute a limitation.

[0025] Figure 1 Schematic diagram of a crystal growth apparatus according to some embodiments of this specification. Figure 1 As shown, the crystal growth equipment 100 may at least include a furnace body 10 , a mounting hole 20 , and a temperature measuring and cleaning device 30 .

[0026] The furnace body 10 can provide a suitable environment (e.g., a temperature and pressure environment) for crystal growth, causing it to melt and reach a temperature suitable for crystal growth. In some embodiments, the furnace body 10 can include a furnace wall and a furnace lining. The furnace body 10 can be provided with a heater, a heat shield (not shown), etc.

[0027] In some embodiments, the furnace body 10 can be made of a material that is resistant to high temperatures, corrosion, and has good heat preservation properties. For example, the furnace body 10 can be made of graphite, high-temperature ceramics, etc.

[0028] In some embodiments, a temperature measuring window 11 is provided on the furnace wall of the furnace body 10 .

[0029] The temperature measuring window 11 can allow a temperature measuring instrument (such as an infrared thermometer) to measure the temperature inside the furnace body 10. In some embodiments, the temperature measuring window 11 can be made of a high temperature resistant and corrosion resistant material, such as quartz, silicon carbide, etc.

[0030] In some embodiments, the temperature measuring window 11 can be provided on the upper furnace wall or the side furnace wall of the furnace body 10. In some embodiments, in order to more accurately obtain the temperature distribution in the furnace body 10, multiple temperature measuring windows 11 can also be provided on the furnace wall, for example, multiple temperature measuring windows 11 can be provided on the upper furnace wall and the side furnace wall respectively.

[0031] In some embodiments, the crystal growth apparatus 100 further includes a mounting hole 20 disposed on the furnace wall. The mounting hole 20 can be used to install the temperature measurement and cleaning device 30.

[0032] The temperature measuring and cleaning device 30 can clean the temperature measuring window 11. In some embodiments, the temperature measuring and cleaning device 30 can pass through the mounting hole 20 and be movably disposed therein. That is, after being disposed within the mounting hole 20, the temperature measuring and cleaning device 30 can be moved or adjusted to a certain extent. For example, the temperature measuring and cleaning device 30 can be moved up and down or rotated; in another example, the temperature measuring and cleaning device 30 can be removed from the mounting hole 20.

[0033] In some embodiments, the user can manually control the temperature measuring and cleaning device 30 to clean the temperature measuring window 11. In some embodiments, the temperature measuring and cleaning device 30 can also be automatically controlled to clean the temperature measuring window 11. For more information about the automatic control of the temperature measuring and cleaning device 30, please refer to the relevant part below.

[0034] Figure 2 Schematic diagram of a temperature measuring and cleaning device according to some embodiments of this specification. Figure 2 As shown, the temperature measuring and cleaning device 30 includes a cleaning portion 31 .

[0035] The cleaning unit 31 is disposed inside the furnace body 10 and is capable of cleaning the temperature measuring window 11 .

[0036] In some embodiments, as Figure 2 As shown, the temperature measuring and cleaning device 30 further includes a connecting rod 32 and a handle 33 .

[0037] The connecting rod 32 is connected between the handle 33 and the cleaning portion 31. In some embodiments, the connecting rod 32 passes through the mounting hole 20 to mount the temperature measuring and cleaning device 30 on the furnace body 10.

[0038] The handle 33 is provided outside the furnace body 10 to facilitate holding the temperature measuring and cleaning device 30. In some embodiments, the handle 33 is provided along the radial direction of the mounting hole 20 (eg Figure 1The length of the handle in the x-direction is greater than the diameter of the mounting hole 20. In some embodiments of the present specification, the length of the handle in the radial direction of the mounting hole is greater than the diameter of the mounting hole, which can prevent the temperature measuring and cleaning device 30 from falling into the furnace body 10.

[0039] In some embodiments, as Figure 2 As shown, the cleaning portion 31 includes a first brush head 311 .

[0040] In some embodiments, the first brush head 311 can be made of a high-temperature resistant and corrosion-resistant material. In some embodiments, the shape and size of the first brush head 311 can be set as needed. For example, the shape of the first brush head 311 can be an ellipse or a rounded rectangle. For another example, the area of the bristle region covered by the first brush head 311 can be slightly larger than the area of the temperature measuring window 11. In some embodiments, the first brush head 311 can be detachably connected to the cleaning portion 31 (for example, by a thread, a buckle, etc.) to facilitate replacement and cleaning of the brush head.

[0041] In some embodiments, the temperature measurement and cleaning device 30 can clean the temperature measurement window 11 using the first brush head 311. In some embodiments, the user can manually clean the temperature measurement window 11. For example, the user can hold the handle 33 and drive the first brush head 311 to rotate or move up and down via the connecting portion 32 and the cleaning portion 31 to remove impurities from the temperature measurement window 11. In some embodiments, the temperature measurement window 11 can also be cleaned automatically. For more information on automatic cleaning of the temperature measurement window 11, please refer to the relevant section below.

[0042] In some embodiments, as Figure 1 As shown, the crystal growth apparatus 100 further includes a crucible 40 and a heat-insulating felt 50 disposed inside the furnace body 10 .

[0043] The crucible 40 can hold raw materials for crystal growth and transfer energy to the raw materials, causing them to melt and promoting crystal growth. For example, the crucible 40 can be loaded and accommodated with raw materials for crystal growth, and a heater (such as a resistance wire or an electromagnetic heater) within the furnace body 10 can heat the crucible to transfer energy to the raw materials for crystal growth, accelerating their melting and promoting crystal growth.

[0044] The insulation felt 50 can keep the crucible 40 warm. In some embodiments, the insulation felt 50 can be placed outside the crucible 40 to reduce heat loss from the crucible 40 and improve thermal efficiency.

[0045] In some embodiments, in order to achieve precise control of the temperature field in the crucible 40 and enable better crystal growth, the temperature in the crucible 40 needs to be measured.

[0046] In some embodiments, reference Figure 1The insulation felt 50 is provided with a temperature measuring hole 51. In some embodiments, the temperature in the crucible 40 can be measured through the temperature measuring hole 51.

[0047] During crystal growth, the temperature of the temperature measuring hole 51 is lower than the temperature of the crucible 40. The gas phase components in the crucible 40 tend to crystallize and accumulate at the center of the low-temperature temperature measuring hole 51, causing the temperature measuring hole 51 to be blocked. This not only makes it impossible to observe the temperature in the crucible 40, but also changes the temperature field in the crucible 40 as the accumulation at the center of the temperature measuring hole 51 increases. This causes the temperature field at the growth interface to be extremely unstable during the crystal growth process, making it impossible to produce high-quality crystals. Therefore, the temperature measuring hole 51 needs to be cleaned.

[0048] In some embodiments, the temperature measuring and cleaning device 30 can also clean the temperature measuring hole 51 .

[0049] Figure 3 Schematic diagram of a temperature measuring and cleaning device according to other embodiments of this specification. Figure 3 As shown, the cleaning portion 31 also includes a second brush head 312 and a third brush head 313. In some embodiments, the second brush head 312 and the third brush head 313 can be made of high-temperature resistant and corrosion-resistant materials. In some embodiments, the shape and size of the second brush head 312 and the third brush head 313 can be set as needed. For example, the shape of the second brush head 312 and the third brush head 313 can be an ellipse or a rounded rectangle, etc. For another example, the area of the bristle region covered by the second brush head 312 and the third brush head 313 can be slightly larger than the area of the temperature measuring window 11, etc. In some embodiments, the second brush head 312 and the third brush head 313 can be detachably connected to the cleaning portion 31 (for example, by means of threads, snaps, etc.) to facilitate replacement and cleaning of the brush heads. The second brush head 312 and the third brush head 313 are respectively located on the axial direction of the cleaning portion 31 along the furnace body 10 (such as Figure 1 The second brush head 312 and the third brush head 313 provided in the above manner can clean the temperature measuring window 11 and the temperature measuring hole 51 respectively, thereby achieving a better cleaning effect.

[0050] In some embodiments, the temperature measuring and cleaning device 30 can clean the temperature measuring window 11 and the temperature measuring hole 51 by the second brush head 312 and the third brush head 313. Figure 3 The second brush head 312 located at the upper end of the cleaning portion 31 can clean the temperature measuring window 11 , and the third brush head 313 located at the lower end of the cleaning portion 31 can clean the temperature measuring hole 51 .

[0051] Figure 4 Schematic diagram of a temperature measuring and cleaning device according to some other embodiments of this specification. Figure 4 As shown, the temperature measuring and cleaning device further includes an air pipe 36 and an air pump 35 .

[0052] The air pipe 36 can clean the temperature measuring window 11 and the temperature measuring hole 51 by suction and blowing. In some embodiments, one end of the air pipe 36 is provided on the cleaning part 31, and the other end is connected to the air pump 35. The air pump 35 can be provided outside the furnace body 10.

[0053] In some embodiments, one air pipe 36 may be provided. In some preferred embodiments, two air pipes 36 may also be provided, one for suction and the other for blowing, to improve cleaning efficiency.

[0054] During the crystal growth process, it is necessary to maintain air pressure balance within the furnace. Cleaning the temperature measurement window 11 and the temperature measurement hole 51 via the air pipe 36 and the air pump 35 may disrupt the air pressure balance and affect the crystal growth effect. In some embodiments, the temperature measurement window 11 and the temperature measurement hole 51 can be cleaned via the air pipe 36 and the air pump 35 after crystal growth is completed to avoid disrupting the air pressure balance within the furnace.

[0055] In some embodiments, the temperature measuring and cleaning device 30 further includes a rotation driving mechanism 34 .

[0056] The rotation drive mechanism 34 can drive the temperature measuring and cleaning device 30 to rotate around the axial direction of the mounting hole 20 ( Figure 1 For example, the rotation drive mechanism 34 may be a motor or the like.

[0057] In some embodiments, as Figure 2 、 Figure 3 As shown, the rotary drive mechanism 34 can be connected to the handle 33 to drive the temperature measuring and cleaning device 30 to rotate. In some embodiments, the rotary drive mechanism 34 can also be disposed inside the temperature measuring and cleaning device 30 (e.g., inside the connecting rod 32). The rotary drive mechanism 34 drives the cleaning portion 31 to rotate, and the second brush head 312 and the third brush head 313 (or the first brush head 311) rotate to rub against the deposits accumulated in the temperature measuring hole 51, thereby cleaning the temperature measuring hole 51.

[0058] In some embodiments of the present specification, the temperature measuring window and the temperature measuring hole can be automatically cleaned by driving the temperature measuring cleaning device through the rotary drive mechanism 34, which is more convenient and efficient and has a better cleaning effect.

[0059] In some embodiments, crystal growth apparatus 100 further includes bearings 60 and thermal insulation 70 . Figure 5 is a cross-sectional view of a crystal growth apparatus according to some embodiments of the present specification. Figure 5 The cross section extends in the direction of the longitudinal axis b of the mounting hole 20 .

[0060] In some embodiments, the temperature measuring and cleaning device 30 may be disposed on the mounting hole 20 via a bearing 60 .

[0061] In some embodiments of the present specification, the temperature measuring and cleaning device 30 is provided via a bearing 60 , so that the temperature measuring and cleaning device 30 can be driven by the rotation drive mechanism 34 to rotate stably to clean the temperature measuring window 11 and the temperature measuring hole 51 .

[0062] Since the furnace body 10 will rise to a relatively high temperature (eg, 800° C. to 1000° C.) during crystal growth, in order to reduce the impact of high temperature on the bearing 60 , a heat insulating member 70 may be provided below the bearing 60 along the axis b.

[0063] The heat insulating member 70 may be made of a material that is resistant to high temperatures and has low thermal conductivity, such as ceramic fiber (such as alumina fiber, aluminum silicate fiber), aerogel, refractory brick, graphite, and the like.

[0064] In some embodiments, the thermal insulation member 70 may have a multi-layer structure. The multi-layer structure of the thermal insulation member 70 can achieve better thermal insulation performance by combining different materials, while improving the strength and stability of the overall structure.

[0065] In some embodiments, air layers and / or cooling layers (such as cold water pipes) may be provided between the multi-layer structure of the thermal insulation member 70. Providing air layers and / or cooling layers (such as cold water pipes) may further enhance the thermal insulation effect and increase the service life of the bearing.

[0066] In some embodiments of the present specification, providing a heat insulating member 70 can reduce the impact of high temperature on the bearing 60, ensure the normal operation of the bearing 60, and increase its service life.

[0067] In some embodiments, as Figure 5 As shown, the bearing 60 and the thermal insulation member 70 are both arranged in the mounting hole 30, the outer ring of the bearing 60 is connected to the mounting hole 20, the inner ring of the bearing 60 is connected to the temperature measuring and cleaning device, and the thermal insulation member 70 is closer to the inner cavity of the furnace body 10 than the bearing 60.

[0068] In some embodiments, the outer ring of the bearing 60 is detachably mounted to the mounting hole 20 .

[0069] In some embodiments of the present specification, the outer ring of the bearing 60 is detachably mounted on the mounting hole 20. The bearing 60 can be removed when the temperature inside the furnace body 10 is too high, and then installed after the temperature drops or the crystal growth is completed. The temperature measuring window 11 and the temperature measuring hole 11 are cleaned, which can further reduce the impact of high temperature on the bearing 60 and the temperature measuring and cleaning device 30, thereby increasing the service life.

[0070] In some embodiments, the temperature measuring window 11 and the temperature measuring hole 51 are on the same axis.

[0071] In some embodiments, in some embodiments, the temperature measuring and cleaning device 30 further includes an axial driving mechanism (not shown in the figures).

[0072] like Figure 1 As shown, there is a certain distance between the temperature measuring window 11 and the temperature measuring hole 51 , and it is difficult for the temperature measuring cleaning device 30 to switch between different cleaning objects (such as switching between the temperature measuring window 11 and the temperature measuring hole 51 ).

[0073] In some embodiments, the distance between the second brush head 312 and the third brush head 313 is relatively long, that is, the second brush head 312 and the third brush head 313 can clean the temperature measuring window 11 and the temperature measuring hole 51 at the same time, so that the temperature measuring window 11 and the temperature measuring hole 51 can be cleaned at the same time without axial movement of the brush head.

[0074] In some embodiments, the temperature measuring and cleaning device 30 can be moved up and down along the axial direction of the furnace body by an axial driving mechanism to switch between different cleaning objects.

[0075] The axial drive mechanism can drive the temperature measuring and cleaning device 30 to move along the axial direction of the furnace body to switch different cleaning objects. Exemplarily, the axial drive mechanism can include a linear motor, a hydraulic cylinder, etc.

[0076] In some embodiments, the axial drive mechanism can be connected to the handle 33 to drive the temperature measuring and cleaning device 30 to switch between different cleaning targets. For example, the axial drive mechanism can drive the temperature measuring and cleaning device 30 to move upward along the axis of the furnace body 10 to clean the temperature measuring window 11; for another example, the axial drive mechanism can drive the temperature measuring and cleaning device 30 to move downward along the axis of the furnace body 10 to clean the temperature measuring hole 51.

[0077] In some embodiments, the connecting rod 32 is retractable, and an axial drive mechanism can be disposed within the connecting rod 32 to drive the connecting rod 32 to extend or retract. For example, the axial drive mechanism can drive the connecting rod 32 to extend to clean the temperature measuring hole 51; or, for another example, the axial drive mechanism can drive the connecting rod 32 to retract to clean the temperature measuring window 11.

[0078] In some embodiments of the present specification, the temperature measuring and cleaning device is driven to move axially along the furnace body by an axial drive mechanism, which can simply and conveniently realize the replacement of the cleaning object and obtain a better cleaning effect; in addition, the size of the temperature measuring and cleaning device can be reduced, and it is not easy to interfere with other components in the furnace body (such as crucibles, etc.).

[0079] In some embodiments, the crystal growth apparatus 100 further includes a laser detection device 80 configured to detect whether the temperature measuring hole 51 is blocked. In some embodiments, the laser detection device 80 may be further configured to detect whether the temperature measuring window 11 is blocked.

[0080] Figure 6 FIG. 1 is a schematic diagram of the working principle of the laser detection device according to some embodiments of this specification. Figure 6 As shown, the laser detection device 80 can be arranged outside the furnace body 10, and the distance from the laser detection device 80 to the lower end surface of the temperature measuring window 11 is S1, and the distance to the lower end surface of the temperature measuring hole 51 is S2.

[0081] In some embodiments, when the distance detected by the laser detection device 80 is less than S1, it indicates that at least the temperature measurement window 11 is blocked and at least the temperature measurement window 11 needs to be cleaned.

[0082] In some embodiments, when the distance detected by the laser detection device 80 is between S1 and S2 , it indicates that the temperature measuring hole 51 is blocked and needs to be cleaned.

[0083] In some embodiments, the laser detection device 80 can also be connected to the rotary drive mechanism and / or the axial drive mechanism by signal. The laser detection device 80 can send the detected distance information to the rotary drive mechanism and / or the axial drive mechanism. The rotary drive mechanism and / or the axial drive mechanism automatically determine the cleaning object based on the distance information and perform cleaning. For example, when the distance detected by the laser detection device 80 is less than S1, the rotary drive mechanism and / or the axial drive mechanism can at least clean the temperature measuring window 11. For another example, when the distance detected by the laser detection device 80 is between S1 and S2, the rotary drive mechanism and / or the axial drive mechanism can clean the temperature measuring hole 51.

[0084] In some embodiments of the present specification, a laser detection device is used to detect whether the temperature measuring hole and the temperature measuring window are blocked, and the detection results are sent to the rotary drive mechanism and / or the axial drive mechanism. The temperature measuring hole and the temperature measuring window can be cleaned intelligently and automatically, and the cleaning is more timely and a better cleaning effect is achieved.

[0085] While the basic concepts have been described above, it will be apparent to those skilled in the art that the detailed disclosure is merely illustrative and does not limit this specification. Although not explicitly stated herein, various modifications, improvements, and revisions to this specification may be made by those skilled in the art. Such modifications, improvements, and revisions are suggested in this specification and remain within the spirit and scope of the exemplary embodiments of this specification.

[0086] It should be understood that the embodiments described in this specification are intended only to illustrate the principles of the embodiments of this specification. Other variations may also fall within the scope of this specification. Therefore, by way of example and not limitation, alternative configurations of the embodiments of this specification may be considered consistent with the teachings of this specification. Accordingly, the embodiments of this specification are not limited to the embodiments explicitly described and illustrated in this specification.

Claims

1. A crystal growth device, characterized in that: The crystal growth equipment comprises: A furnace body, wherein a temperature measuring window is provided on the furnace wall of the furnace body; A mounting hole is provided on the furnace wall; The temperature measuring and cleaning device comprises a cleaning part, which is arranged in the furnace body and can clean the temperature measuring window. The temperature measuring and cleaning device can pass through the installation hole and be movably arranged in the installation hole.

2. The crystal growth apparatus according to claim 1, wherein The temperature measuring and cleaning device also includes a connecting rod and a handle: The connecting rod is connected between the handle and the cleaning portion; and the connecting rod passes through the mounting hole, and the length of the handle along the radial direction of the mounting hole is greater than the diameter of the mounting hole.

3. The crystal growth apparatus according to claim 1, wherein The cleaning portion includes a first brush head.

4. The crystal growth apparatus according to claim 1, wherein The crystal growth equipment further comprises a crucible and a thermal insulation felt arranged inside the furnace body; a temperature measuring hole is provided on the thermal insulation felt, and the temperature measuring and cleaning device can clean the temperature measuring hole.

5. The crystal growth apparatus according to claim 4, wherein: The cleaning portion includes a second brush head and a third brush head, and the second brush head and the third brush head are respectively located at two ends of the cleaning portion along the axial direction of the furnace body.

6. The crystal growth apparatus according to claim 5, wherein: The temperature measuring and cleaning device further includes a rotation driving mechanism, which drives the temperature measuring and cleaning device to rotate around the axial direction of the mounting hole.

7. The crystal growth apparatus according to claim 6, wherein: The crystal growth equipment further comprises an axial drive mechanism, which drives the temperature measuring and cleaning device to move along the axial direction of the furnace body.

8. The crystal growth apparatus according to claim 6, wherein: The crystal growth equipment also includes a bearing and a thermal insulation member, both of which are arranged in the mounting hole, the outer ring of the bearing is connected to the mounting hole, and the inner ring of the bearing is connected to the temperature measuring and cleaning device; the thermal insulation member is closer to the inner cavity of the furnace body than the bearing.

9. The crystal growth apparatus according to claim 8, wherein: The outer ring of the bearing is detachably mounted to the mounting hole.

10. The crystal growth apparatus according to claim 4, wherein: The crystal growth apparatus further includes a laser detection device configured to detect whether the temperature measuring hole is blocked.

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