Three-dimensional micro-contact measurement packaging structure and three-dimensional measurement device comprising same

Abstract

The utility model provides a three-dimensional microcontact measurement packaging structure and a three-dimensional measurement device comprising the same, the packaging structure comprises a detection module, a plurality of detectors and a mounting table, the detection module comprises a probe and a reflector body which are relatively fixed, the lower end of the probe is used for contacting with the surface of a sample and moving along with the fluctuation of the surface of the sample; the reflector body is provided with a plurality of reflecting surfaces; the detector is arranged corresponding to the reflecting surface of the reflecting mirror body and is used for detecting the displacement of the reflecting surface of the reflecting mirror body; the detection module and the detector are fixed on the mounting table, and the mounting table is also used for being fixed with the measuring platform. The detection module and the detector are fixed on the mounting table, so that the detection module and the detector form an integral packaging structure, and the packaging structure can be mounted on the measurement platform as a whole, so that the detection module, the detector and the measurement platform can be quickly mounted, and one measurement scheme can be conveniently adapted to a plurality of measurement platforms; and one measuring platform can also adapt to various measuring schemes.

Description

Technical Field

[0001] The utility model relates to a three-dimensional micro-contact measurement packaging structure and a three-dimensional measurement device comprising the same. Background Art

[0002] Currently, commonly used measurement methods for micro- and nanoscale 3D measurement include scanning probe microscopes, confocal microscopes, white light interferometry microscopes, and micro- and nanoscale coordinate measuring machines. Micro- and nanoscale coordinate measurement technology overcomes the conflict between measurement range and accuracy while simultaneously providing three-dimensional detection and sensing capabilities, enabling true 3D measurement. It is currently a relatively effective approach to solving micro- and nanoscale 3D measurement problems.

[0003] How to reasonably set up the stylus, detector, etc. used in micro-nano coordinate measurement technology to ensure measurement accuracy and conveniently install the above components on the measurement platform is an important issue that needs to be solved in current micro-nano coordinate measurement technology. Utility Model Content

[0004] In order to solve the problem of reasonably setting the stylus, detector, etc. used in micro-nano coordinate measurement technology to ensure measurement accuracy and conveniently install the above components on a measurement platform, the utility model provides a three-dimensional micro-contact measurement packaging structure and a three-dimensional measurement device containing the same.

[0005] The utility model solves the above technical problems through the following technical solutions:

[0006] The utility model provides a three-dimensional micro-contact measurement packaging structure, comprising a detection module, a plurality of detectors and a mounting platform, wherein the detection module comprises a relatively fixed stylus and a reflector body, wherein the lower end of the stylus is used to contact the surface of a sample and move following the undulations of the surface of the sample, and the reflector body is provided with a plurality of reflective surfaces; the detectors are arranged corresponding to the reflective surfaces of the reflector body, and are used to detect the displacement of the reflective surfaces of the reflector body; the detection module and the detectors are fixed on the mounting platform, and the mounting platform is also used to be fixed to the measurement platform.

[0007] In this technical solution, the detection module and the detector are fixed on the mounting table, so that the detection module and the detector form an integral packaging structure; then the mounting table and the measuring platform are fixed, so that the packaging structure can be installed on the measuring platform as a whole, thereby quickly realizing the installation of the detection module, the detector and the measuring platform, so that one measurement scheme can be easily adapted to multiple measurement platforms, and one measurement platform can also be adapted to multiple measurement schemes.

[0008] Preferably, the mounting platform includes an annular mounting seat, and the annular mounting seat is used to be fixed to the measuring platform.

[0009] In this technical solution, the annular mounting seat is fixed to the measuring platform, so that the packaging structure is fixed on the measuring platform as a whole.

[0010] Preferably, the detector includes a horizontal detector arranged horizontally; the mounting platform also includes a horizontal connecting plate, the horizontal connecting plate is fixed below the annular mounting seat, the horizontal detector is fixed below the horizontal connecting plate, and the horizontal detector is located on the side of the reflector body.

[0011] In this technical solution, a horizontal connecting plate is provided to fix the position of the horizontal detector relative to the annular mounting seat, so that the packaging structure can be fixed on the measuring platform as a whole; and the horizontal connecting plate and the annular mounting seat are detachably connected, which can adapt to the requirements of different detector installation positions and thus adapt to different measuring platforms.

[0012] Preferably, the detector includes a vertical detector arranged vertically; the mounting platform also includes a vertical connecting block, the vertical connecting block is fixed in the middle of the annular mounting seat, the vertical detector is fixed on the side of the vertical connecting block, and the vertical detector is located above the reflector body.

[0013] In this technical solution, by setting a vertical connecting block, the position of the vertical detector relative to the annular mounting seat is fixed, so that the packaging structure can be fixed on the measuring platform as a whole; and the vertical connecting block and the annular mounting seat are detachably connected, which can adapt to the requirements of different detector installation positions, thereby adapting to different measuring platforms.

[0014] Preferably, the vertical connecting block includes a vertical connecting plate and a protrusion protruding from the side of the vertical connecting plate, the protrusion extends to the top of the annular mounting seat, and the protrusion is fixedly connected to the annular mounting seat; the vertical detector is arranged on the side of the vertical connecting plate.

[0015] In the present technical solution, the vertical connecting block of the above structural design ensures that the position of the vertical detector is fixed relative to the annular mounting seat, so that the vertical detector is located above the reflector body.

[0016] Preferably, the annular mounting seat surrounds and forms a vertical mounting space, and the vertical connecting plate and the vertical detector are located in the vertical mounting space.

[0017] In this technical solution, the vertical installation space is used to accommodate the vertical connecting plate and the vertical detector, so that the positions of the vertical connecting plate and the vertical detector are fixed in the annular mounting seat.

[0018] Preferably, the mounting platform also includes a horizontal connecting plate and a lateral connecting plate, the horizontal connecting plate is fixed under the annular mounting seat; the lateral connecting plate includes a vertically arranged lateral fixing section and a laterally arranged lateral fixing section, the lateral fixing section is fixed to the side of the horizontal connecting plate, and the detection module is fixed on the lateral fixing section.

[0019] In this technical solution, the lateral fixing section and the transverse fixing section are perpendicular to each other, so that the detection module fixed to the transverse fixing section can maintain a horizontal state.

[0020] Preferably, the outer circumferential surface of the annular mounting seat is provided with a transversely arranged mounting ridge, and the mounting ridge is used to cooperate with the connecting groove of the measuring platform; or, the outer circumferential surface of the annular mounting seat is provided with a transversely arranged mounting groove, and the mounting groove is used to cooperate with the connecting ridge of the measuring platform.

[0021] In this technical solution, the packaging structure and the measuring platform can be fixed by connecting the ridges and grooves. The installation method is simple, and the installation and disassembly of the packaging structure are convenient.

[0022] Preferably, the detection module also includes a suspension structure, a clamping assembly and a reflector rod, the upper end of the measuring probe is fixed to the lower surface of the center of the suspension structure, so that the measuring probe is in a suspended state; the clamping assembly is arranged around the suspension structure, and the clamping assembly fixes the frame of the suspension structure; the clamping assembly is also fixed to the mounting table, so that the suspension structure is placed horizontally; the lower end of the reflector rod is fixed to the upper surface of the center of the suspension structure, and the reflector body is arranged at the upper end of the reflector rod.

[0023] In this technical solution, the lower end of the reflector rod is fixed to the upper surface of the center of the suspension structure; when the stylus rotates, the reflector rod will also rotate with the stylus, so that the displacement of the stylus can be converted into the displacement of the reflector body.

[0024] Preferably, the clamping assembly includes a lower base, an upper pressure plate and a clamping member, the frame of the suspension structure is placed on the upper surface of the lower base, and the lower base is fixed to the mounting platform; the upper pressure plate is pressed on the upper surface of the frame of the suspension structure; the clamping member clamps the upper pressure plate and the lower base so that the frame of the suspension structure is clamped between the lower base and the upper pressure plate.

[0025] In this technical solution, the frame of the suspension structure is clamped by the lower base and the upper pressure plate, and the upper pressure plate and the lower base are clamped by the clamping member, so that the suspension structure can be fixed and presented in a horizontally expanded state.

[0026] Preferably, the mounting platform also includes a transverse fixing section, which is located above the clamping assembly of the detection module and fixed to the clamping assembly; the transverse fixing section is provided with a plurality of vertically arranged first mounting holes, and the clamping assembly of the detection module is provided with a plurality of vertically arranged second mounting holes, the second mounting holes are arranged in a one-to-one correspondence with the first mounting holes, and the diameter of the first mounting hole is larger than the diameter of the second mounting hole; the packaging structure also includes a plurality of fixing bolts, which pass through the first mounting hole and the second mounting hole in sequence to fix the clamping assembly and the transverse fixing section.

[0027] In this technical solution, by setting the first mounting hole and the second mounting hole, the displacement of the clamping assembly relative to the transverse fixed section can be adjusted, so that the position of the reflector body relative to the detector can be adjusted, thereby ensuring the accuracy of the relative position of the reflector body and the detector after the packaging structure is assembled, ensuring measurement accuracy, and avoiding measurement errors.

[0028] Preferably, a central hollow area is provided in the middle of the transverse fixing section, the reflector rod of the detection module extends from the central hollow area to above the transverse fixing section, and the second mounting holes are evenly distributed around the circumference of the reflector rod.

[0029] In this technical solution, a central hollow area is provided so that the reflector rod can extend above the transverse fixed section, and the second mounting holes are evenly distributed around the circumference of the reflector rod, which can ensure that the detection module is evenly stressed.

[0030] The present utility model also provides a three-dimensional measuring device, including a measuring platform, a sample placement platform and a three-dimensional micro-contact measurement packaging structure, wherein the sample placement platform is installed on the measuring platform, the sample placement platform can move relative to the measuring platform, and the sample placement platform is used to place a sample; the packaging structure is as described in the above technical solution, the mounting platform of the packaging structure is fixed on the measuring platform, the detection module of the packaging structure is located above the sample placement platform, and the lower end of the measuring probe can contact the surface of the sample placed on the sample placement platform.

[0031] Preferably, the measuring platform includes a horizontally arranged suspension plate, the edge of the suspension plate forms an inwardly recessed installation space, and the mounting platform of the packaging structure is inserted into the installation space and fixed to the suspension plate.

[0032] In this technical solution, the mounting platform is fixed to the suspension plate, so that the packaging structure can be hung on the suspension plate as a whole, completing the installation of the packaging structure and the measuring platform.

[0033] Preferably, the inner wall of the installation space forms a connecting groove extending laterally to the edge of the suspension plate, and the installation platform is provided with a laterally extending installation ridge, which is inserted into the connecting groove.

[0034] In this technical solution, the mounting platform is inserted into the mounting space through the connection of ridges and grooves to achieve fixation of the packaging structure and the measuring platform. The installation method is simple and facilitates installation and disassembly of the packaging structure.

[0035] Preferably, the suspension plate includes an edge fixing plate, the edge fixing plate is arranged on the inner wall of the installation space, and the connecting groove is arranged on the inner surface of the edge fixing plate.

[0036] In this technical solution, the edge fixing plate can be made of a different material from the main part of the suspension plate to meet the precision and strength requirements required for the connection groove processing; and the edge fixing plate and the main part of the suspension plate are detachably connected, and edge fixing plates of different specifications can be replaced according to the installation requirements of different packaging structures.

[0037] On the basis of conforming to the common sense in this field, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present utility model.

[0038] The positive progress effect of this utility model is:

[0039] In the above-mentioned three-dimensional micro-contact measurement packaging structure, the detection module and the detector are fixed on the mounting table, so that the detection module and the detector form an integral packaging structure; the mounting table is then fixed to the measurement platform, so that the packaging structure can be installed on the measurement platform as a whole, and the detection module, the detector and the measurement platform are quickly installed; the three-dimensional micro-contact measurement packaging structure is applied to the three-dimensional measurement device, so that one measurement scheme can be easily adapted to multiple measurement platforms, and one measurement platform can also be adapted to multiple measurement schemes. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 This is a structural schematic diagram of the three-dimensional micro-contact measurement packaging structure of the utility model.

[0041] Figure 2 for Figure 1 A local enlarged view of area A of the three-dimensional micro-contact measurement packaging structure is shown.

[0042] Figure 3 for Figure 1 The schematic diagram of the structure of the three-dimensional micro-contact measurement packaging structure from another angle is shown.

[0043] Figure 4 for Figure 1 The schematic diagram of the structure of the detection module and the lateral connection plate of the three-dimensional micro-contact measurement packaging structure is shown.

[0044] Figure 5 for Figure 1 The schematic diagram of the structure of the detection module of the three-dimensional micro-contact measurement packaging structure is shown.

[0045] Figure 6 for Figure 5 The cross-sectional schematic diagram of the detection module is shown.

[0046] Figure 7 This is a schematic structural diagram of the three-dimensional measuring device of the present invention.

[0047] Figure 8 for Figure 7 Schematic diagram of the structure of the suspension plate of the three-dimensional measurement device shown.

[0048] Description of Reference Numerals

[0049] Three-dimensional micro-contact measurement packaging structure 100

[0050] Detection module 1

[0051] Stylus 11

[0052] Reflector body 12

[0053] Reflective surface 121

[0054] X-direction reflective surface 122

[0055] Y-direction reflective surface 123

[0056] Z-direction reflective surface 124

[0057] Suspension structure 13

[0058] Clamping assembly 14

[0059] Lower base 141

[0060] Upper pressure plate 142

[0061] Clamping piece 143

[0062] Boss 144

[0063] Clamping body 145

[0064] Upper pressing edge 146

[0065] Lower fixed edge 147

[0066] Accommodation slot 148

[0067] Second mounting hole 149

[0068] Reflector rod 15

[0069] Detector 2

[0070] X-axis laser detector 21

[0071] Y-axis laser detector 22

[0072] Z-axis laser detector 23

[0073] Mounting station 3

[0074] Ring mount 31

[0075] Vertical installation space 311

[0076] Install rib 312

[0077] Horizontal connecting plate 32

[0078] Vertical connection block 33

[0079] Vertical connecting plate 331

[0080] raised portion 332

[0081] Lateral connecting plate 34

[0082] Lateral fixing section 341

[0083] Transverse fixing section 342

[0084] First mounting hole 343

[0085] Center hollow area 344

[0086] Measuring Platform 200

[0087] Connecting groove 201

[0088] Suspension plate 202

[0089] Installation space 203

[0090] Edge fixing plate 204

[0091] Sample placement table 300

[0092] Sample 400 DETAILED DESCRIPTION

[0093] The present invention is further described below by way of examples, but the present invention is not limited to the scope of the examples.

[0094] Figures 1 to 6The figure shows an embodiment of a three-dimensional micro-contact measurement package 100 according to the present invention. The package 100 comprises a detection module 1, multiple detectors 2, and a mounting platform 3. The detection module 1 includes a relatively fixed stylus 11 and a reflector 12. The lower end of the stylus 11 is configured to contact the surface of a sample 400 and follow the surface fluctuations of the sample 400. The reflector 12 is provided with a plurality of reflective surfaces 121. The detectors 2 are positioned corresponding to the reflective surfaces 121 of the reflector 12 and are configured to detect the displacement of the reflective surfaces 121 of the reflector 12. The detection module 1 and the detectors 2 are fixed to the mounting platform 3.

[0095] The lower end of the stylus 11 contacts the surface of the sample 400 and moves along with the undulations of the sample 400, thereby driving the displacement of the reflector 12. The detector 2 detects the displacement of the reflective surface 121 of the reflector 12, thereby inferring the displacement of the lower end of the stylus 11 and ultimately calculating the shape data of the surface of the sample 400.

[0096] The detection module 1 and the detector 2 are fixed on the mounting platform 3, so that the detection module 1 and the detector 2 form an integral packaging structure; then the mounting platform 3 is fixed to the measuring platform 200, so that the packaging structure can be installed on the measuring platform 200 as a whole, thereby quickly realizing the installation of the detection module 1, the detector 2 and the measuring platform 200, so that one measurement scheme can be easily adapted to multiple measurement platforms 200, and one measurement platform 200 can also be adapted to multiple measurement schemes.

[0097] In this embodiment, the reflective surface 121 of the reflector body 12 includes an X-direction reflective surface 122, a Y-direction reflective surface 123, and a Z-direction reflective surface 124; the detector 2 includes an X-axis laser detector 21, a Y-axis laser detector 22, and a Z-axis laser detector 23. The laser direction of the X-axis laser detector 21 is perpendicular to the X-direction reflective surface 122, the laser direction of the Y-axis laser detector 22 is perpendicular to the Y-direction reflective surface 123, and the laser direction of the Z-axis laser detector 23 is perpendicular to the Z-direction reflective surface 124. The X-axis laser detector 21 can detect the displacement of the X-direction reflective surface 122, the Y-axis laser detector 22 can detect the displacement of the Y-direction reflective surface 123, and the Z-axis laser detector 23 can detect the displacement of the Z-direction reflective surface 124. The displacement data of the reflector body 12 detected in the X, Y, and Z directions can be converted to obtain the displacement of the lower end of the stylus 11, thereby calculating the shape data of the surface of the sample 400. In other embodiments, detectors and reflectors with other combinations in other directions may be designed according to actual measurement requirements.

[0098] like Figures 1 to 3As shown, the mounting platform 3 includes an annular mounting seat 31, which is used to be fixed to the measurement platform 200. The annular mounting seat 31 is fixed to the measurement platform 200, so that the packaging structure is fixed on the measurement platform 200 as a whole.

[0099] Mounting platform 3 also includes a horizontal connecting plate 32, which is fixed below annular mounting base 31. X-axis laser detector 21 and Y-axis laser detector 22 are fixed below horizontal connecting plate 32. X-axis laser detector 21 and Y-axis laser detector 22 are located on the sides of reflector body 12. The provision of horizontal connecting plate 32 fixes the position of X-axis laser detector 21 and Y-axis laser detector 22 relative to annular mounting base 31, thereby securing the package structure as a whole to measurement platform 200.

[0100] The horizontal connecting plate 32 is detachably connected to the annular mounting seat 31. In other embodiments, the horizontal connecting plate 32 can also be replaced with a connecting plate of other structures to meet the requirements of different detector installation positions, thereby adapting to different measurement platforms 200.

[0101] The mounting platform 3 further includes a vertical connecting block 33 , which is fixed in the middle of the annular mounting seat 31 . The Z-axis laser detector 23 is fixed on the side of the vertical connecting block 33 , and the Z-axis laser detector 23 is located above the reflector body 12 .

[0102] By providing the vertical connecting block 33 , the position of the Z-axis laser detector 23 relative to the annular mounting seat 31 is fixed, so that the packaging structure 100 as a whole can be fixed on the measurement platform 200 .

[0103] like Figure 3 As shown, the vertical connecting block 33 includes a vertical connecting plate 331 and a protrusion 332 protruding from the side of the vertical connecting plate 331, the protrusion 332 extends to the top of the annular mounting seat 31, the protrusion 332 is fixedly connected to the annular mounting seat 31, and the Z-axis laser detector 23 is arranged on the side of the vertical connecting plate 331.

[0104] The vertical connecting block 33 is designed to consist of a vertical connecting plate 331 and a laterally protruding protrusion 332. The protrusion 332 connects the vertical connecting block 33 to the annular mounting base 31, while the vertical connecting plate 331 connects the vertical connecting block 33 to the Z-axis laser detector 23. The vertical connecting block 33 with the aforementioned structural design ensures that the Z-axis laser detector 23 is fixed in position relative to the annular mounting base 31, allowing the Z-axis laser detector 23 to be positioned above the reflector body 12.

[0105] The vertical connecting block 33 is detachably connected to the annular mounting base 31. In other embodiments, the vertical connecting block 33 can also be replaced with a connecting plate of other structures to adapt to the requirements of different detector installation positions, thereby adapting to different measurement platforms 200.

[0106] like Figure 1 、 Figure 2 As shown, the annular mounting seat 31 surrounds and forms a vertical mounting space 311, and the vertical connecting plate 331 and the Z-axis laser detector 23 are located in the vertical mounting space 311. The vertical mounting space 311 is used to accommodate the vertical connecting plate 331 and the Z-axis laser detector 23, so that the positions of the vertical connecting plate 331 and the Z-axis laser detector 23 are fixed in the annular mounting seat 31.

[0107] like Figure 3 and Figure 7 、 Figure 8 As shown, the outer circumference of the annular mounting seat 31 is provided with a transverse mounting ridge 312, which is configured to engage with the connection groove 201 of the measurement platform 200. Inserting the mounting ridge 312 into the connection groove 201 secures the package structure 100 to the measurement platform 200, simplifying the installation and facilitating the installation and removal of the package structure 100.

[0108] In other embodiments, a transverse mounting groove may be provided on the outer peripheral surface of the annular mounting seat, and a corresponding connecting protrusion may be provided on the measuring platform. The packaging structure and the measuring platform may be fixed by cooperating with the mounting groove of the annular mounting seat and the connecting protrusion of the measuring platform.

[0109] like Figure 1 、 Figure 2 and Figure 4 As shown, the mounting platform 3 further includes a lateral connecting plate 34, which includes a vertically arranged lateral fixing section 341 and a transversely arranged transverse fixing section 342. The lateral fixing section 341 is fixed to the side of the horizontal connecting plate 32, and the detection module 1 is fixed to the transverse fixing section 342. The mutually perpendicular lateral fixing section 341 and transverse fixing section 342 ensure that the detection module 1 fixed to the transverse fixing section 342 can maintain a horizontal state.

[0110] like Figures 5 and 6As shown, the detection module 1 also includes a suspension structure 13, a clamping assembly 14 and a reflector rod 15. The upper end of the probe 11 is fixed to the lower surface of the center of the suspension structure 13, so that the probe 11 is in a suspended state; the clamping assembly 14 is arranged around the suspension structure 13, and the clamping assembly 14 fixes the frame of the suspension structure 13; the clamping assembly 14 is also fixed to the mounting table 3, so that the suspension structure 13 is placed horizontally; the lower end of the reflector rod 15 is fixed to the upper surface of the center of the suspension structure 13, and the reflector body 12 is arranged at the upper end of the reflector rod 15.

[0111] The upper end of stylus 11 is fixed to the lower surface of the center of suspension structure 13. Stylus 11 remains upright in the absence of external forces, while also allowing the lower end of stylus 11 to move with the undulations of the surface of sample 400. The lower end of reflector rod 15 is fixed to the upper surface of the center of suspension structure 13. When stylus 11 rotates, reflector rod 15 also rotates with stylus 11, thereby translating the displacement of stylus 11 into the displacement of reflector body 12.

[0112] like Figures 5 and 6 As shown, the clamping assembly 14 includes a lower base 141, an upper pressure plate 142 and a clamping member 143. The frame of the suspension structure 13 is placed on the upper surface of the lower base 141, and the lower base 141 is fixed to the horizontal fixing section 342; the upper pressure plate 142 is pressed on the upper surface of the frame of the suspension structure 13; the clamping member 143 clamps the upper pressure plate 142 and the lower base 141, so that the frame of the suspension structure 13 is clamped between the lower base 141 and the upper pressure plate 142.

[0113] By clamping the frame of the suspension structure 13 through the lower base 141 and the upper pressing plate 142 and then using the clamping member 143 to clamp the upper pressing plate 142 and the lower base 141, the suspension structure 13 can be fixed and presented in a horizontally expanded state.

[0114] The lower base 141 is provided with an upwardly projecting boss 144. The suspension structure 13 is placed on the boss 144 during installation, which serves to position the suspension structure 13. The boss 144 also facilitates the design and installation of the clamping member 143, enabling it to clamp the lower base 141 and the upper pressure plate 142.

[0115] Among them, the shapes of the frames of the boss 144, the upper pressure plate 142 and the suspension structure 13 are the same, so that the boss 144, the suspension structure 13 and the upper pressure plate 142 are stacked to form a whole, which facilitates the installation of the clamping part 143; at the same time, the center of the suspension structure 13 is surrounded by the middle of the upper pressure plate 142 and the boss 144.

[0116] like Figures 5 and 6As shown, the clamping member 143 includes a clamping body 145, an upper pressing edge 146, and a lower fixing edge 147. The upper pressing edge 146 is formed at the upper edge of the clamping body 145 and presses against the upper surface of the upper pressure plate 142. The lower fixing edge 147 is formed at the lower edge of the clamping body 145 and is fixed to the lower base 141. The clamping member 143 of the above structure, through the fixation of the lower fixing edge 147 to the lower base 141, enables the upper pressing edge 146 to press against the upper pressure plate 142, thereby compressing and fixing the suspension structure 13.

[0117] The upper surface of the upper pressing plate 142 is formed with a downwardly recessed receiving groove 148, and the upper pressing edge 146 is located in the receiving groove 148. The receiving groove 148 is used to position the upper pressing edge 146 so that the position of the clamping member 143 and the upper pressing plate 142 are relatively fixed when installed.

[0118] like Figure 4 、 Figure 5 As shown, a plurality of vertically arranged first mounting holes 343 are provided on the horizontal fixing section 342, and a plurality of vertically arranged second mounting holes 149 are provided on the lower base 141 of the detection module 1. The second mounting holes 149 are arranged in a one-to-one correspondence with the first mounting holes 343, and the diameter of the first mounting hole 343 is larger than the diameter of the second mounting hole 149; the packaging structure 100 also includes a plurality of fixing bolts (not shown in the figure). When the detection module 1 needs to be fixed to the horizontal fixing section 342, the fixing bolts pass through the first mounting hole 343 and the second mounting hole 149 in sequence to fix the lower base 141 and the horizontal fixing section 342.

[0119] The lower base 141 and the transverse fixing section 342 are clamped vertically by fixing bolts extending through the first mounting hole 343 and the second mounting hole 149. Because the diameter of the first mounting hole 343 is larger than that of the second mounting hole 149, there is a gap between the fixing bolt and the first mounting hole 343, allowing the fixing bolt to move laterally within the first mounting hole 343. This allows the displacement of the lower base 141 relative to the transverse fixing section 342 to be adjusted, allowing the position of the reflector body 12 relative to the detector 2 to be adjusted. This ensures the accuracy of the relative position of the reflector body 12 and the detector 2 after the package structure 100 is assembled, ensuring measurement accuracy and avoiding measurement errors.

[0120] In other embodiments, for clamping assemblies 14 with different structures, the second mounting hole 149 is set at a position corresponding to the first mounting hole 343, so that the fixing bolt can pass through the first mounting hole 343 and the second mounting hole 149, thereby fixing the clamping assembly 14 and the transverse fixing section 342, thereby fixing the detection module 1 on the mounting platform 3.

[0121] like Figure 4As shown, a central hollow area 344 is provided in the middle of the transverse fixing section 342. The upper surface of the lower base 141 is in contact with the lower surface of the transverse fixing section 342. The boss 144 and the upper pressure plate 142 protrude into the central hollow area 344, allowing the reflector rod 15 to extend from the central hollow area 344 to above the transverse fixing section 342. To ensure uniform force on the detection module 1, the second mounting holes 149 are evenly distributed around the circumference of the reflector rod 15. Correspondingly, the first mounting holes 343 and the fixing bolts are also evenly distributed around the circumference of the reflector rod 15.

[0122] The package structure 100 is mounted on a measuring platform 200 to form a three-dimensional measuring device, such as Figure 7 and Figure 8 The three-dimensional measurement device includes a measurement platform 200, a sample placement platform 300, and a three-dimensional micro-contact measurement package structure 100. The sample placement platform 300 is mounted on the measurement platform 200 and can move relative to the measurement platform 200. The sample placement platform 300 is used to place a sample 400. The mounting platform 3 of the package structure 100 is fixed on the measurement platform 200. The detection module 1 of the package structure 100 is located above the sample placement platform 300. The lower end of the stylus 11 can contact the surface of the sample 400 placed on the sample placement platform 300.

[0123] Sample 400 is placed on sample stage 300. The lower end of stylus 11 of detection module 1 contacts the surface of sample 400 placed on sample stage 300. When sample stage 300 moves sample 400, the lower end of stylus 11 follows the undulations of the surface of sample 400, thereby displacing reflector 12. Detector 2 detects the displacement of reflective surface 121 of reflector 12 and transmits the measured displacement data to measurement platform 200. This displacement is then calculated from the lower end of stylus 11, ultimately determining the surface shape of sample 400.

[0124] like Figures 7 and 8 As shown, the measuring platform 200 includes a horizontally arranged suspension plate 202, the edge of the suspension plate 202 forms an inwardly recessed installation space 203, the inner wall of the installation space 203 forms a connecting groove 201 extending laterally to the edge of the suspension plate 202, the annular mounting seat 31 of the packaging structure 100 is inserted into the installation space 203, and the mounting protrusion 312 of the annular mounting seat 31 is inserted into the connecting groove 201 of the suspension plate 202, so that the annular mounting seat 31 is fixed to the suspension plate 202, so that the packaging structure 100 can be suspended as a whole on the suspension plate 202, completing the installation of the packaging structure 100 and the measuring platform 200.

[0125] The suspension plate 202 includes an edge fixing plate 204, which is disposed on the inner wall of the installation space 203. The connection groove 201 is provided on the inner surface of the edge fixing plate 204. The edge fixing plate 204 can be made of a different material than the main body of the suspension plate 202 to meet the precision and strength requirements required for machining the connection groove 201. Furthermore, the edge fixing plate 204 is detachably connected to the main body of the suspension plate 202, allowing for replacement of edge fixing plates 204 of different specifications to meet the installation requirements of different packaging structures 100.

[0126] In other embodiments, the inner wall of the mounting space 203 of the suspension plate 202 may also be provided with a connection structure different from the connection groove 201 to accommodate the mounting platform 3 requirements of the package structure 100 in different installation methods. For a groove structure connection method, a connection ridge may be provided on the inner wall of the mounting space 203, and a mounting groove may be provided on the outer circumference of the annular mounting seat 31 to achieve the installation of the annular mounting seat 31 and the suspension plate 202.

[0127] The detection module 1 and the detector 2 are formed into an integral packaging structure and then mounted on the measurement platform 200 , so that one measurement scheme can be easily adapted to multiple measurement platforms 200 , and one measurement platform 200 can also be adapted to multiple measurement schemes.

[0128] The present invention is not limited to the above-described embodiments. Any changes in shape or structure fall within the scope of protection of the present invention. The scope of protection of the present invention is defined by the appended claims. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, and such changes and modifications shall fall within the scope of protection of the present invention.

Claims

1. A three-dimensional micro-contact measurement packaging structure, characterized in that: include: A detection module, the detection module comprising a relatively fixed stylus and a reflector body, the lower end of the stylus being used to contact the sample surface and move following the undulations of the sample surface, and the reflector body being provided with a plurality of reflective surfaces; a plurality of detectors, each of which is disposed corresponding to a reflective surface of the reflector body and configured to detect a displacement of the reflective surface of the reflector body; The mounting platform is used to fix the detection module and the detector on the mounting platform, and the mounting platform is also used to fix with the measurement platform.

2. The three-dimensional micro-contact measurement package structure according to claim 1, wherein: The mounting platform includes an annular mounting seat, and the annular mounting seat is used to be fixed to the measuring platform.

3. The three-dimensional micro-contact measurement package structure according to claim 2, characterized in that: The detector includes a horizontal detector arranged horizontally; the mounting platform also includes a horizontal connecting plate, the horizontal connecting plate is fixed below the annular mounting seat, the horizontal detector is fixed below the horizontal connecting plate, and the horizontal detector is located on the side of the reflector body.

4. The three-dimensional micro-contact measurement package structure according to claim 2, characterized in that: The detector includes a vertical detector arranged vertically; the mounting platform also includes a vertical connecting block, the vertical connecting block is fixed in the middle of the annular mounting seat, the vertical detector is fixed on the side of the vertical connecting block, and the vertical detector is located above the reflector body.

5. The three-dimensional micro-contact measurement package structure according to claim 4, characterized in that: The vertical connecting block includes a vertical connecting plate and a protrusion protruding from the side of the vertical connecting plate, the protrusion extends to the top of the annular mounting seat, and the protrusion is fixedly connected to the annular mounting seat; the vertical detector is arranged on the side of the vertical connecting plate.

6. The three-dimensional micro-contact measurement package structure according to claim 5, characterized in that: The annular mounting seat surrounds and forms a vertical mounting space, and the vertical connecting plate and the vertical detector are located in the vertical mounting space.

7. The three-dimensional micro-contact measurement packaging structure according to claim 2, characterized in that: The mounting station further comprises: a horizontal connecting plate fixed below the annular mounting seat; The lateral connecting plate includes a vertically arranged lateral fixing section and a transversely arranged transverse fixing section, the lateral fixing section is fixed to the side of the horizontal connecting plate, and the detection module is fixed on the transverse fixing section.

8. The three-dimensional micro-contact measurement package structure according to claim 2, wherein: The outer circumference of the annular mounting seat is provided with a transversely arranged mounting ridge, and the mounting ridge is used to cooperate with the connecting groove of the measuring platform; Alternatively, a transversely arranged mounting groove is provided on the outer peripheral surface of the annular mounting seat, and the mounting groove is used to cooperate with the connecting ridge of the measuring platform.

9. The three-dimensional micro-contact measurement package structure according to claim 1, characterized in that: The detection module also includes: a suspension structure, wherein the upper end of the measuring needle is fixed to the lower surface of the center of the suspension structure so that the measuring needle is in a suspended state; A clamping assembly, the clamping assembly being arranged around the suspension structure and fixing the frame of the suspension structure; the clamping assembly is also fixed to the mounting platform so that the suspension structure is placed horizontally; A reflector rod, the lower end of which is fixed to the upper surface of the center of the suspension structure, and the reflector body is arranged on the upper end of the reflector rod.

10. The three-dimensional micro-contact measurement package structure according to claim 9, characterized in that: The clamping assembly comprises: A lower base, the frame of the suspension structure is placed on the upper surface of the lower base, and the lower base is fixed to the mounting platform; an upper pressing plate, the upper pressing plate pressing on the upper surface of the frame of the suspension structure; A clamping member clamps the upper pressing plate and the lower base so that the frame of the suspension structure is clamped between the lower base and the upper pressing plate.

11. The three-dimensional micro-contact measurement package structure according to claim 9 or 10, characterized in that: The mounting platform also includes a transverse fixing section, which is located above the clamping assembly of the detection module and fixed to the clamping assembly; the transverse fixing section is provided with a plurality of vertically arranged first mounting holes, and the clamping assembly of the detection module is provided with a plurality of vertically arranged second mounting holes, the second mounting holes are arranged in a one-to-one correspondence with the first mounting holes, and the diameter of the first mounting hole is larger than the diameter of the second mounting hole; the packaging structure also includes a plurality of fixing bolts, which pass through the first mounting hole and the second mounting hole in sequence to fix the clamping assembly and the transverse fixing section.

12. The three-dimensional micro-contact measurement package structure according to claim 11, characterized in that: A central hollow area is provided in the middle of the transverse fixing section, the reflector rod of the detection module extends from the central hollow area to above the transverse fixing section, and the second mounting holes are evenly distributed around the circumference of the reflector rod.

13. A three-dimensional measuring device, characterized in that: include: Measuring platform; A sample placement platform, the sample placement platform is mounted on the measurement platform, the sample placement platform can move relative to the measurement platform, and the sample placement platform is used to place a sample; A three-dimensional micro-contact measurement packaging structure, the packaging structure being as described in any one of claims 1 to 12, wherein the mounting platform of the packaging structure is fixed on the measurement platform, the detection module of the packaging structure is located above the sample placement platform, and the lower end of the probe can contact the surface of the sample placed on the sample placement platform.

14. The three-dimensional measuring device according to claim 13, wherein: The measuring platform includes a horizontally arranged suspension plate, the edge of the suspension plate forms an inwardly recessed installation space, and the installation platform of the packaging structure is inserted into the installation space and fixed to the suspension plate.

15. The three-dimensional measuring device according to claim 14, wherein: The inner wall of the installation space forms a connecting groove extending transversely to the edge of the suspension plate, and the installation platform is provided with a transversely extending installation ridge, which is inserted into the connecting groove.

16. The three-dimensional measuring device according to claim 15, wherein: The hanging plate includes an edge fixing plate, the edge fixing plate is arranged on the inner wall of the installation space, and the connecting groove is arranged on the inner surface of the edge fixing plate.

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