Portable high-precision dynamic calibration device for linear displacement sensor

Abstract

The utility model discloses a portable high-precision dynamic calibration device for a linear displacement sensor, which comprises a calibration table, a linear displacement sensor to be calibrated and a grating ruler are arranged above the calibration table, the linear displacement sensor to be calibrated is fixed on the calibration table through a direction adjusting mechanism, and the grating ruler is fixed on the calibration table through a support. A calibration mounting plate matched with the grating ruler is arranged on the calibration table, the calibration mounting plate is fixed on the calibration table through a horizontal moving mechanism, and a positioning column matched with a movable measuring rod of the linear displacement sensor to be calibrated is arranged on the calibration mounting plate. Compared with the prior art, through the cooperation of the horizontal moving mechanism, the calibration mounting plate and the grating ruler, dynamic automatic calibration can be realized, the accuracy of metering traceability is fully guaranteed, and the calibration efficiency is improved; and secondly, the posture of the to-be-calibrated linear displacement sensor is adjusted by referring to the positioning column, so that the movement axis of the to-be-calibrated linear displacement sensor can be quickly aligned with the movement axis of the horizontal adjusting mechanism.

Description

Technical Field

[0001] The utility model relates to the technical field of linear displacement sensor calibration, in particular to a portable high-precision linear displacement sensor dynamic calibration device. Background Art

[0002] The current calibration methods for the metrological characteristics of linear displacement sensors can be summarized into the following two categories:

[0003] 1. Use the gauge block as the main standard, manually cooperate with the relevant fixtures to perform static non-automatic fixed-point detection at each calibration point, and compare the standard value of the gauge block with the reading of the calibrated linear displacement sensor;

[0004] 2. Use the laser interferometer as the main standard, and the linear modules such as the motor screw drive the moving parts of the calibrated linear displacement sensor to perform dynamic and automatic fixed-point detection at each calibration point. The laser interferometer indication is compared with the reading of the calibrated linear displacement sensor.

[0005] The above two types of calibration schemes have the following problems:

[0006] (1) The first calibration scheme is manual static fixed-point detection. The accuracy of calibration implementation is low, the work efficiency is low, and the cooperation of multiple inspectors is required. The labor and time costs are high.

[0007] (2) Although the second calibration scheme can realize dynamic automatic calibration at the calibration point of the displacement sensor, the laser interferometer is expensive, which is not conducive to the scalability of the calibration device and calibration method;

[0008] (3) The main standard laser interferometer in the second calibration scheme has strict requirements on the use environment and cannot be transported portablely. Therefore, it is impossible to calibrate the linear displacement sensor at the customer's site. Utility Model Content

[0009] The utility model provides a portable high-precision linear displacement sensor dynamic calibration device, which is used to solve the problems that the existing displacement sensor calibration device cannot realize dynamic automatic calibration or has high calibration cost and is difficult to carry.

[0010] The utility model provides a portable high-precision linear displacement sensor dynamic calibration device, comprising a calibration platform, above which are provided the linear displacement sensor to be calibrated and a grating ruler, the linear displacement sensor to be calibrated being fixed on the calibration platform by a direction adjustment mechanism, the grating ruler being fixed on the calibration platform by a support, a calibration mounting plate cooperating with the grating ruler being provided on the calibration platform, the calibration mounting plate being fixed on the calibration platform by a horizontal movement mechanism, and a positioning column cooperating with a movable measuring rod of the linear displacement sensor to be calibrated being provided on the calibration mounting plate.

[0011] Preferably, a first strip hole is provided on the calibration mounting plate, and a first fixing screw passes through the first strip hole and is fixed to the horizontal moving mechanism.

[0012] Preferably, the horizontal moving mechanism includes: a screw, a slider and a drive motor, the screw and the slider are threadedly connected, the screw is rotatably set on the support, the drive motor drives the screw to rotate, the calibration mounting plate is fixed on the slider, and the slider cooperates with the grating scale.

[0013] Preferably, the front end and the rear end of the sliding block are respectively provided with screw holes adapted to the first fixing screw.

[0014] Preferably, a vertical plate is fixed to the front end of the calibration mounting plate, and the positioning column is fixed to the front side of the vertical plate.

[0015] Preferably, the direction adjustment mechanism includes a pitch fine-tuning component, a Y-direction linear fine-tuning component, a rotation fine-tuning component, an X-direction linear fine-tuning component and a vertical linear fine-tuning component, which are arranged in sequence from top to bottom, and the linear displacement sensor to be calibrated is installed on the pitch fine-tuning component.

[0016] Preferably, a support plate is fixed on the pitch fine-tuning assembly, the linear displacement sensor to be calibrated is fixed on the support plate, a cover plate is fixed above the support plate, the fixed measuring rod of the linear displacement sensor to be calibrated is arranged between the support plate and the cover plate, and the cover plate and the support plate are both provided with a V-groove adapted to the fixed measuring rod.

[0017] Preferably, the support includes a base plate, a column and a support plate arranged in sequence from bottom to top, the base plate and the column are fixed by bolts, the column and the support plate are fixed by bolts, and the horizontal moving mechanism is fixed on the support plate.

[0018] Preferably, the cover plate is fixed to the support plate by a second fixing screw.

[0019] Preferably, the base plate is fixed to the calibration table by bolts.

[0020] Preferably, the width of the vertical plate is smaller than the width of the calibration mounting plate.

[0021] Compared with the existing technology, the present invention, through the coordination of a horizontal movement mechanism, a calibration mounting plate, and a grating ruler, can achieve dynamic automated calibration, fully guaranteeing the accuracy of metrological traceability and facilitating improved calibration efficiency. Secondly, by adjusting the posture of the linear displacement sensor to be calibrated with reference to the positioning column, it is convenient to quickly align the motion axis of the linear displacement sensor to be calibrated with the motion axis of the horizontal adjustment mechanism. Furthermore, using the grating ruler as the main standard effectively guarantees the measurement accuracy of the calibration device. Thirdly, its small size and portability allow the linear displacement sensor to be calibrated at the customer's site, further ensuring calibration accuracy and metrological traceability. Fourthly, the use of the grating ruler helps reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 It is a structural diagram of the utility model;

[0024] Figure 2 for Figure 1 A magnified schematic diagram of the structure at center A;

[0025] Figure 3 It is a structural schematic diagram of the V-shaped groove of the present utility model.

[0026] Reference numerals:

[0027] 1. Calibration table, 2. Linear displacement sensor to be calibrated, 3. Grating scale, 4. Direction adjustment mechanism, 5. Support, 6. Calibration mounting plate, 7. Horizontal movement mechanism, 8. Positioning column, 9. Vertical plate, 21. Movable measuring rod, 22. Fixed measuring rod, 41. Pitch fine-tuning assembly, 42. Y-direction linear fine-tuning assembly, 43. Rotation fine-tuning assembly, 44. X-direction linear fine-tuning assembly, 45. Vertical linear fine-tuning assembly, 51. Base plate, 52. Vertical column, 53. Support plate, 61. First strip hole, 71. Lead screw, 72. Slider, 73. Drive motor, 721. Screw hole, 100. Support plate, 200. Cover plate, 300. First fixing screw, 400. Second fixing screw, 500. V-groove. DETAILED DESCRIPTION

[0028] To make the purpose, technical solutions, and advantages of the present invention more clear, the following will be combined with the accompanying drawings to clearly and completely describe the technical solutions of the present invention. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] Refer to the attached Figure 1 The present embodiment provides a portable high-precision linear displacement sensor dynamic calibration device, including a calibration platform 1, a linear displacement sensor 2 to be calibrated and a grating ruler 3 are provided above the calibration platform 1, the linear displacement sensor 2 to be calibrated is fixed on the calibration platform 1 through a direction adjustment mechanism 4, the grating ruler 3 is fixed on the calibration platform 1 through a support 5, a calibration mounting plate 6 is provided on the calibration platform 1 to cooperate with the grating ruler 3, the calibration mounting plate 6 is fixed on the calibration platform 1 through a horizontal moving mechanism 7, and the horizontal moving mechanism 7 is used to drive the calibration mounting plate 6 to change the distance between the calibration mounting plate 6 and the linear displacement sensor 2 to be calibrated, refer to the attached Figure 2 The calibration mounting plate 6 is provided with a positioning column 8 that cooperates with the movable measuring rod 21 of the linear displacement sensor 2 to be calibrated. The positioning column 8 is fixed in the middle position of the calibration mounting plate 6. The utility model adjusts the position and posture of the linear displacement sensor 2 to be calibrated through the direction adjustment mechanism 4, so that the movement axis of the movable measuring rod 21 of the linear displacement sensor 2 to be calibrated and the movement axis of the horizontal movement mechanism 7 are located on the same straight line, thereby minimizing the Abbe measurement error during calibration. During the position adjustment process, the area of the calibration mounting plate 6 is relatively large, and it is difficult to observe whether the position of the positioning column 8 is aligned with the calibration mounting plate 6. The positioning column 8 is provided to facilitate the alignment of the movable measuring rod 21 with it during adjustment, so that the two are coaxially arranged. The movable measuring rod 21 of the linear displacement sensor 2 to be calibrated is extended to its maximum stroke, bringing the positioning column 8 into contact with the movable measuring rod 21. The horizontal movement mechanism 7 then pushes the positioning column 8 forward via the calibration mounting plate 6. The positioning column 8 pushes the movable measuring rod 21 back, and the horizontal movement mechanism 7 drives the positioning column 8 to perform uninterrupted linear reciprocating motion (three reciprocating cycles). Assuming the measuring range of the linear displacement sensor 2 to be calibrated is a mm, the movement range of the positioning column 8 is 0 to a mm. During this process, the readings on the grating scale 3 are compared with those on the linear displacement sensor 2 to be calibrated, thereby calculating the sensitivity, basic error, linearity, return error, and repeatability of the linear displacement sensor 2 to be calibrated.

[0030] In another embodiment of the present invention, the calibration mounting plate 6 is provided with a first slotted hole 61, through which a first fixing screw 300 passes to secure the calibration mounting plate 6 to the horizontal movement mechanism 7. The calibration mounting plate 6 can be movably mounted on the horizontal movement mechanism 7 via the first slotted hole 61 and the first fixing screw 300, thereby ensuring that the positioning post 8 remains in contact with the movable measuring rod 21 throughout the range of motion of the horizontal movement mechanism 7.

[0031] An embodiment of the horizontal moving mechanism 7: The horizontal moving mechanism 7 includes: a screw 71, a slider 72 and a drive motor 73. The screw 71 and the slider 72 are threadedly connected. A guide rod is slidingly provided on the slider 72. The screw 71 is rotatably provided on the support 5. The drive motor 73 drives the screw 71 to rotate and thereby drives the slider 72 to slide along the guide rod. The calibration mounting plate 6 is fixed on the slider 72, and the slider 72 cooperates with the grating scale 3.

[0032] As another embodiment of the present invention, the front and rear ends of the slider 72 are each provided with screw holes 721 adapted to accommodate the first fixing screws 300. The end of the slider 72 closest to the linear displacement sensor 2 to be calibrated is the front end. In this embodiment, the calibration mounting plate 6 is mounted to the front end of the slider 72 via the first fixing screws 300. Of course, the calibration mounting plate 6 can also be mounted to the rear end of the slider 72 via the first fixing screws 300 to accommodate different linear displacement sensors 2 to be calibrated.

[0033] One embodiment of mounting the positioning post 8 on the calibration mounting plate 6 includes: a vertical plate 9 secured to the front end of the calibration mounting plate 6, with the positioning post 8 secured to the front side of the vertical plate 9. The vertical plate 9 and the calibration mounting plate 6 form an L-shaped arrangement. Specifically, the width of the vertical plate 9 is smaller than the width of the calibration mounting plate 6.

[0034] One embodiment of the direction adjustment mechanism 4 includes, from top to bottom, a pitch fine-tuning assembly 41, a Y-direction linear fine-tuning assembly 42, a rotation fine-tuning assembly 43, an X-direction linear fine-tuning assembly 44, and a vertical linear fine-tuning assembly 45. The linear displacement sensor 2 to be calibrated is mounted on the pitch fine-tuning assembly 41. The pitch fine-tuning assembly 41 is used to adjust the pitch angle of the movable measuring rod 21, the Y-direction linear fine-tuning assembly 42 is used to adjust the position of the movable measuring rod 21 in the Y direction, the rotation fine-tuning assembly 43 is used to adjust the rotation angle of the movable measuring rod 21 in the horizontal plane, the X-direction linear fine-tuning assembly 44 is used to adjust the position of the movable measuring rod 21 in the X direction, and the vertical linear fine-tuning assembly 45 is used to adjust the height position of the movable measuring rod 21. These adjustments ensure that the movable measuring rod 21 is coaxial with the positioning column 8.

[0035] As another embodiment of the present invention: Figure 3A support plate 100 is fixed to the pitch fine-tuning assembly 41. The linear displacement sensor 2 to be calibrated is fixed to the support plate 100. A cover plate 200 is fixed above the support plate 100. The fixed measuring rod 22 of the linear displacement sensor 2 to be calibrated is disposed between the support plate 100 and the cover plate 200. Both the cover plate 200 and the support plate 100 are provided with V-shaped grooves 5 that fit the fixed measuring rod 22. The movable measuring rod 21 extends and retracts within the fixed measuring rod 22, which is confined within the V-shaped grooves 5 formed between the cover plate 200 and the support plate 100.

[0036] As another embodiment of the present invention, the support 5 includes, from bottom to top, a base plate 51, a column 52, and a support plate 53. The base plate 51 and the column 52 are fixed by bolts, and the column 52 and the support plate 53 are also fixed by bolts. The horizontal movement mechanism 7 is fixed to the support plate 53. The detachable design of the base plate 51, the column 52, and the support plate 53 facilitates changing the height of the column 52 according to the specifications of the linear displacement sensor 2 to be calibrated.

[0037] As another embodiment of the present invention: the cover plate 200 is fixed to the support plate 100 by a second fixing screw 400, and the second fixing screw 400 passes through the waist-shaped hole of the cover plate 200 and is threadedly connected to the support plate 100. The detachable design of the support plate 100 and the cover plate 200 facilitates the fixing of the fixed measuring rod 22 of different linear displacement sensors 2 to be calibrated.

[0038] As another embodiment of the present invention: the base plate 51 is fixed to the calibration platform 1 by bolts, and the direction adjustment mechanism 4 is fixed to the calibration platform 1 by bolts. During installation, the base plate 51 and the direction adjustment mechanism 4 are installed as close as possible to minimize the Abbe measurement error when the linear displacement sensor is calibrated.

[0039] The present invention can realize dynamic automatic calibration through the cooperation of the horizontal moving mechanism 7, the calibration mounting plate 6 and the grating ruler 3, fully guarantee the accuracy of metrological traceability, and help improve the calibration efficiency; secondly, by adjusting the posture of the linear displacement sensor 2 to be calibrated with reference to the positioning column 8, it is convenient to quickly align the motion axis of the linear displacement sensor 2 to be calibrated with the motion axis of the horizontal adjustment mechanism. Secondly, the grating ruler 3 is used as the main standard to effectively guarantee the measurement accuracy of the calibration device; thirdly, it is small in size and easy to carry, and can calibrate the linear displacement sensor at the customer's site, further ensuring the calibration accuracy and metrological traceability accuracy; fourthly, the use of the grating ruler 3 is conducive to reducing production costs. Fifth, the modular design improves the convenience of processing and assembly of the device and improves its economic efficiency.

[0040] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A portable high-precision linear displacement sensor dynamic calibration device, characterized in that: It includes a calibration platform, above which are provided a linear displacement sensor to be calibrated and a grating ruler, the linear displacement sensor to be calibrated being fixed on the calibration platform via a direction adjustment mechanism, the grating ruler being fixed on the calibration platform via a support, a calibration mounting plate cooperating with the grating ruler being provided on the calibration platform, the calibration mounting plate being fixed on the calibration platform via a horizontal movement mechanism, and a positioning column cooperating with a movable measuring rod of the linear displacement sensor to be calibrated being provided on the calibration mounting plate.

2. The portable high-precision linear displacement sensor dynamic calibration device according to claim 1, characterized in that: The calibration mounting plate is provided with a first strip hole, and a first fixing screw passes through the first strip hole and is fixed to the horizontal moving mechanism.

3. The portable high-precision linear displacement sensor dynamic calibration device according to claim 2, characterized in that: The horizontal movement mechanism includes: a screw, a slider and a drive motor. The screw and the slider are threadedly connected. The screw is rotatably set on the support. The drive motor drives the screw to rotate. The calibration mounting plate is fixed on the slider. The slider cooperates with the grating ruler.

4. The portable high-precision linear displacement sensor dynamic calibration device according to claim 3, characterized in that: The front end and the rear end of the sliding block are respectively provided with screw holes adapted to the first fixing screws.

5. The portable high-precision linear displacement sensor dynamic calibration device according to claim 4, characterized in that: A vertical plate is fixed to the front end of the calibration mounting plate, and the positioning column is fixed to the front side of the vertical plate.

6. The portable high-precision linear displacement sensor dynamic calibration device according to claim 1, characterized in that: The direction adjustment mechanism includes a pitch fine-tuning component, a Y-direction linear fine-tuning component, a rotation fine-tuning component, an X-direction linear fine-tuning component and a vertical direction linear fine-tuning component, which are arranged in sequence from top to bottom. The linear displacement sensor to be calibrated is installed on the pitch fine-tuning component.

7. The portable high-precision linear displacement sensor dynamic calibration device according to claim 6, characterized in that: A support plate is fixed on the pitch fine-tuning assembly, the linear displacement sensor to be calibrated is fixed on the support plate, a cover plate is fixed above the support plate, the fixed measuring rod of the linear displacement sensor to be calibrated is arranged between the support plate and the cover plate, and the cover plate and the support plate are both provided with a V-groove adapted to the fixed measuring rod.

8. The portable high-precision linear displacement sensor dynamic calibration device according to claim 1, characterized in that: The support includes a base plate, a column and a support plate arranged in sequence from bottom to top, the base plate and the column are fixed by bolts, the column and the support plate are fixed by bolts, and the horizontal moving mechanism is fixed on the support plate.

9. The portable high-precision linear displacement sensor dynamic calibration device according to claim 7, characterized in that: The cover plate is fixed on the support plate by second fixing screws.

10. The portable high-precision linear displacement sensor dynamic calibration device according to claim 8, characterized in that: The base plate is fixed on the calibration table by means of bolts.

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