Movable film thickness detection system for evaporator

Abstract

The utility model belongs to the technical field of vacuum coating, and relates to a movable film thickness detection system for an evaporator, which comprises a detection probe, a movable support frame, a motor lead screw transmission structure and a vacuum chamber, the detection probe is arranged on the movable support frame, the movable support frame is arranged on the motor lead screw transmission structure, and the vacuum chamber is arranged in the vacuum chamber. The detection probe is moved to the position near the evaporation source furnace, the motor lead screw transmission structure is installed in the vacuum cavity, and the detection probe comprises a probe body, an interface and a signal communication line; the probe body is installed on the movable supporting frame, the output end of the probe body is connected with the input end of the interface, the output end of the interface is connected with the signal communication line, electric signals are transmitted through the signal communication line, the signal communication line is located in the vacuum isolation pipeline, and the vacuum isolation pipeline is fixed to one side of the interface. A cooling pipeline structure is arranged on the detection probe and is used for cooling the detection probe. When detection is not needed, the device is moved to the position without the evaporation source furnace, so that thick materials are prevented from being deposited on the quartz crystal oscillation sheet in the detection probe.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating, and in particular relates to a movable film thickness detection system for a vapor deposition machine. Background Art

[0002] Quartz crystal film thickness detectors offer high sensitivity, real-time monitoring, nondestructive testing, and automation compatibility. They are widely used in industries such as semiconductor manufacturing, optical coatings, microelectronics, nanotechnology, and materials science research. They are suitable for various physical vapor deposition (PVD) and chemical vapor deposition (CVD) processes that require high precision, high repeatability, and real-time monitoring. During actual film thickness measurement, when thin film material is deposited onto the surface of a quartz crystal, it changes the crystal's mass, causing a decrease in its resonant frequency. By monitoring this frequency change, the mass and thickness of the deposited film can be calculated in real time.

[0003] The coating process in large-scale vacuum evaporation equipment places high demands on the uniformity and consistency of the film deposited on the substrate surface. This requires a quartz crystal film thickness meter to regularly monitor the evaporation rate of the evaporation source furnace material. By adjusting the equipment parameters, the thickness and quality of the film deposited on the substrate surface can be precisely controlled. Existing quartz crystal film thickness meters within vacuum chambers use brackets to mount the sensor above the evaporation source furnace opening, making it difficult to monitor multiple furnaces with a single meter. Existing installation methods suffer from low flexibility and high costs. Utility Model Content

[0004] The technical problem to be solved by the present invention is to provide a movable film thickness detection system for an evaporation machine, which uses a single film thickness detector to detect the evaporation rate of multiple evaporation source furnaces and has the characteristics of high flexibility and low cost.

[0005] The present invention is implemented as follows: a movable film thickness detection system for an evaporation machine is provided, which comprises: a detection probe, a movable support frame, a motor screw transmission mechanism and an evaporation source furnace, wherein the detection probe is arranged on the movable support frame, the movable support frame comprises a movable base, the motor screw transmission mechanism comprises a motor, a screw and a guide shaft, the movable base is sleeved on the screw and the guide shaft and moves back and forth, a plurality of evaporation source furnaces are arranged in sequence along the length direction of the screw, the motor screw transmission mechanism moves the detection probe to the furnace mouth above each evaporation source furnace, and the detection probe detects the evaporation rate of the evaporation source furnace; the detection probe, movable support frame, screw, guide shaft and evaporation source furnace are respectively installed in a vacuum chamber, the motor is arranged outside the vacuum chamber seat, and the screw, guide shaft and evaporation source furnace are respectively installed on the vacuum chamber seat wall.

[0006] Furthermore, the detection probes respectively include a probe body, an interface and a signal communication line. The signal communication line is in signal communication with the probe body through the interface. The probe body is mounted on a movable support frame.

[0007] Furthermore, the detection probe is also provided with a cooling pipeline mechanism for cooling the probe body.

[0008] Furthermore, the cooling pipeline mechanism includes an embedded cooling water pipeline, a cooling water hose and a vacuum isolation pipeline. The embedded cooling water pipeline is arranged in the probe body to cool the probe body. The interface has a built-in quick-plug interface for connecting to the cooling water hose pipeline. The embedded cooling water pipeline is connected to the cooling water hose through a through hole arranged in the interface; one end of the vacuum isolation pipeline is connected to the interface, and the signal communication line and the cooling water hose are respectively located in the vacuum isolation pipeline.

[0009] Furthermore, the movable support frame also includes a support frame and a retractable vacuum isolation bellows. The support frame is fixedly placed on the movable base. The other end of the vacuum isolation pipe is interconnected with the upper end of the retractable vacuum isolation bellows. The lower end of the retractable vacuum isolation bellows is connected to the wall of the vacuum chamber seat. The signal communication line and the cooling water hose are extended to the outside of the vacuum chamber seat through the retractable vacuum isolation bellows.

[0010] Furthermore, the motor-screw transmission mechanism also includes a motor fixing frame, a coupling, a shaft seal, a guide shaft fixing seat and a screw nut. The motor is installed on the motor fixing frame, the motor fixing frame is fixedly installed on the side wall of the vacuum chamber seat, the shaft seal is installed on the two side walls of the vacuum chamber seat, the screw passes through the shaft seals on both sides, the two side walls of the vacuum chamber and the screw nut, one end of the screw is connected to the motor through the coupling, the screw nut is installed on the through-hole of the movable base and cooperates with the screw, the guide seat fixing seat is fixedly installed on the wall of the vacuum chamber seat, the two ends of the guide shaft are respectively connected to the guide seat fixing seats located at both ends thereof, the guide shaft passes through the movable base and is arranged parallel to the screw, and the movable base moves back and forth along the screw and the guide shaft at the same time.

[0011] Furthermore, the movable support frame also includes a position sensing component, which is located on the side of the movable base; the motor screw transmission mechanism also includes a plurality of positioning sensors, which are arranged on the wall of the vacuum chamber seat, and a positioning sensor is installed correspondingly next to each evaporation source furnace.

[0012] Furthermore, the motor screw transmission mechanism also includes a limit sensor, which is arranged on the vacuum chamber seat wall and located on both sides of the positioning sensor, and corresponds to the closest position and the farthest position that the movable support frame can move.

[0013] Furthermore, the shaft seal includes a sealing shaft housing, two skeleton oil seals, a spacer, a bearing, an inner retaining spring and an outer retaining spring. The two skeleton oil seals, the spacer and the bearing are respectively sleeved on the ends of the screw. The spacer is located between the two skeleton oil seals, and the bearing is located on the outside of the right skeleton oil seal. The inner retaining spring is clamped on the inner side wall of the sealing shaft housing and abuts against the outer ring surface of the bearing. The outer retaining spring is clamped in the end groove of the screw and abuts against the inner ring surface of the bearing.

[0014] Compared with the prior art, the movable film thickness detection system for an evaporation machine of the present invention comprises a detection probe, a movable support frame, a motor screw transmission mechanism, and a plurality of evaporation source furnaces. The detection probe is arranged on the movable support frame, and the motor screw transmission mechanism drives the movable support frame to stay next to each evaporation source furnace, and the detection probe detects the evaporation rate of the evaporation source furnace. The present invention realizes the evaporation rate detection of multiple evaporation source furnaces by a single detection probe, which is low in cost and high in flexibility. Moreover, when the detection probe is not needed for detection, it moves to a position where there is no evaporation source furnace, effectively avoiding the problem of the quartz crystal oscillator inside the detection probe being reduced in service life due to the long-term deposition of materials. The configuration of a single quartz film thickness detector facilitates later maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 1 is a three-dimensional schematic diagram of a movable film thickness detection system for an evaporation machine according to an embodiment;

[0016] Figure 2 for Figure 1 3D schematic diagram of the detection probe;

[0017] Figure 3 for Figure 1 A three-dimensional schematic diagram of the assembled state of the movable support frame;

[0018] Figure 4 for Figure 1 A three-dimensional schematic diagram of the motor screw transmission mechanism;

[0019] Figure 5 for Figure 4 Schematic diagram of the bottom bracket seal.

[0020] Explanation of the symbols in the drawings: detection probe 100, probe body 101, embedded cooling water pipeline 102, interface 103, signal communication line 104, cooling water hose 105, vacuum isolation pipe 106;

[0021] Movable support frame 200, support frame 201, movable base 202, retractable vacuum isolation bellows 203, position sensor 204;

[0022] Motor screw transmission structure 300, motor 301, motor mounting bracket 302, coupling 303, shaft seal 304, screw 305, guide shaft mounting base 306, guide shaft 307, screw nut 308, positioning sensor 309, limit sensor 310;

[0023] Sealing shaft housing-3041, skeleton oil seal-3042, spacer-3043, bearing-3044, inner retaining spring-3045, outer retaining spring-3046;

[0024] Evaporation source furnace-400, vacuum chamber seat-500. DETAILED DESCRIPTION

[0025] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0026] Please refer to Figure 1 As shown, the present invention provides a movable film thickness detection system for an evaporation deposition machine, comprising a detection probe 100, a movable support frame 200, a motor-screw drive mechanism 300, multiple evaporation source furnaces 400, a vacuum housing (not shown), and a vacuum chamber base 500 supporting the vacuum housing. A vacuum chamber is disposed within the vacuum housing. The detection probe 100, movable support frame 200, and evaporation source furnaces 400 are each mounted within the vacuum chamber, with each evaporation source furnace 400 mounted on a wall of the vacuum chamber base 500.

[0027] Please also refer to Figures 1 to 5 As shown, the detection probe 100 is set on the movable support frame 200. The detection probe 100 includes a probe body 101, an interface 103 and a signal communication line 104. The signal communication line 104 is in signal communication with the probe body 101 through the interface 103. The probe body 101 is installed on the movable support frame 200.

[0028] The detection probe 100 is also provided with a cooling pipeline mechanism for cooling the probe body 101. The cooling pipeline mechanism includes an embedded cooling water pipeline 102, a cooling water hose 105, and a vacuum isolation pipe 106. The embedded cooling water pipeline 102 is provided within the probe body 101 to cool the probe body 101. The interface 103 has a built-in quick-connect interface for connecting to the cooling water hose 105. The embedded cooling water pipeline 102 is connected to the cooling water hose 105 via a through hole provided in the interface 103. One end of the vacuum isolation pipe 106 is connected to the interface 103, and the signal communication line 104 and the cooling water hose 105 are respectively located within the vacuum isolation pipe 106.

[0029] Please also refer to Figures 1 to 5 As shown, the movable support frame 200 includes a support frame 201, a movable base 202, a retractable vacuum isolation bellows 203, and a position sensor 204. The support frame 201 is fixedly mounted on the movable base 202. The other end of the vacuum isolation pipe 106 is connected to the upper end of the retractable vacuum isolation bellows 203, and the lower end of the retractable vacuum isolation bellows 203 is connected to the wall of the vacuum chamber base 500. The signal communication line 104 and the cooling water hose line 105 extend through the retractable vacuum isolation bellows 203 to the outside of the vacuum chamber base 500. The position sensor 204 is located on the side of the movable base 202.

[0030] The support frame 201 is made of corrosion-resistant and high-temperature-resistant stainless steel. The upper end of the support frame 201 has four threaded holes for mounting and fixing the probe body 101. The lower end of the support frame 201 has four through holes for fixing it to the mobile base 202 via four bolts.

[0031] A through hole is provided on the bottom wall of the vacuum chamber base 500. A sealing ring is provided in the through hole and connected to the lower connector of the retractable vacuum isolation bellows 203. The cooling water hose 105 and the signal communication line 104 extend through the retractable vacuum isolation bellows 203 to the outside of the vacuum chamber base.

[0032] The motor-screw transmission mechanism 300 includes a motor 301, a motor mounting bracket 302, a coupling 303, a shaft seal 304, a screw 305, a guide shaft mounting bracket 306, a guide shaft 307, a screw nut 308, several positioning sensors 309, and a limit sensor 310. The movable base 202 is sleeved on the screw 305 and the guide shaft 307 for reciprocating movement. The motor 301 drives the screw 305 to rotate, which in turn drives the movable base 202 and the movable support frame 200 to reciprocate along the guide shaft 307. Multiple evaporation source furnaces 400 are arranged in sequence along the length of the screw 305. The motor-screw transmission mechanism 300 moves the detection probe 100 to the furnace opening above each evaporation source furnace 400, where the detection probe 100 detects the evaporation rate of that evaporation source furnace 400.

[0033] The lead screw 305 and the guide shaft 307 are respectively installed in the vacuum chamber, the motor 301 is arranged outside the vacuum chamber seat 500, and the lead screw 305 and the guide shaft 307 are respectively installed on the wall of the vacuum chamber seat 500.

[0034] The motor 301 is mounted on a motor mount 302 via machine screws. The motor mount 302 is fixedly mounted on the side wall of the vacuum chamber base 500. A shaft seal 304 is mounted on both side walls of the vacuum chamber base 500. A screw 305 passes through the shaft seals 304, the side walls of the vacuum chamber, and a screw nut 308. One end of the screw 305 is connected to the motor 301 via a coupling 303. The screw nut 308 is mounted on a through-hole in the movable base 202 and engages with the screw 305. A guide base mount 306 is fixedly mounted on the wall of the vacuum chamber base 500. The ends of a guide shaft 307 are respectively connected to the guide base mount 306 located at its ends. The guide shaft 307 passes through the movable base 202 and is arranged parallel to the screw 305. The movable base 202 reciprocates along both the screw 305 and the guide shaft 307.

[0035] Motor mount 302 is positioned and mounted in a threaded hole on the outer wall of vacuum chamber base 500 via mounting holes. Screw 305 passes through the vacuum chamber through-hole and the outer end of shaft seal 304, connecting to motor 301 via coupling 303. Shaft seal 304 is connected to the vacuum chamber, providing fixed support and sealing for screw 305.

[0036] The positioning sensors 309 are mounted on the wall of the vacuum chamber base 500, with one positioned adjacent to each evaporation source furnace 400. When the movable support frame 200 moves to the location of a particular evaporation source furnace 400, the position sensing element 204 on the movable base 202 triggers the positioning sensor 309 located adjacent to the evaporation source furnace 400. The positioning sensor 309 then issues a control signal to stop the motor 301, causing the movable support frame 200 to stop at the corresponding measurement position. The probe body 101 then detects the evaporation rate of the evaporation source furnace 400.

[0037] The limit sensors 310 are mounted on the wall of the vacuum chamber base 500, on either side of the positioning sensor 309, and correspond to the closest and furthest positions, respectively, at which the movable support frame 200 can move. Upon being triggered by the position sensing element 204 on the movable base 202, the two limit sensors 310 generate control signals that stop the motor 301, causing the movable support frame 200 to stop at its closest or furthest positions, respectively.

[0038] The movable base 202 is made of corrosion-resistant and high-temperature-resistant stainless steel and has two through-holes. One through-hole has two threaded holes on either side for mounting a screw nut 308. The other through-hole is used to connect to the guide shaft 307. The movable base 202 also includes two threaded holes for mounting a fixed position sensor 204.

[0039] Please also refer to Figures 1 to 5As shown, the shaft seal 304 includes a sealing shaft housing 3041, two skeleton oil seals 3042, a spacer 3043, a bearing 3044, an inner retaining spring 3045, and an outer retaining spring 3046. The two skeleton oil seals 3042, the spacer 3043, and the bearing 3044 are respectively sleeved on the ends of the lead screw 305, with the spacer 3043 located between the two skeleton oil seals 3042, and the bearing 3044 located outside the right skeleton oil seal 3042. The inner retaining spring 3045 is clamped to the inner side wall of the sealing shaft housing 3041 and abuts against the outer ring surface of the bearing 3044. The outer retaining spring 3046 is clamped into the end groove of the lead screw 305 and abuts against the inner ring surface of the bearing 3044.

[0040] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A movable film thickness detection system for a vapor deposition machine, characterized in that: They include: A detection probe (100), a movable support frame (200), a motor screw transmission mechanism (300) and an evaporation source furnace (400), wherein the detection probe (100) is arranged on the movable support frame (200), the movable support frame (200) includes a movable base (202), the motor screw transmission mechanism (300) includes a motor (301), a screw (305) and a guide shaft (307), the movable base (202) is sleeved on the screw (305) and the guide shaft (307) and moves back and forth, and a plurality of evaporation source furnaces (400) are arranged in sequence along the length direction of the screw (305). The motor screw transmission mechanism (300) moves the detection probe (100) to the furnace mouth above each evaporation source furnace (400), and the detection probe (100) detects the evaporation rate of the evaporation source furnace (400); the detection probe (100), the movable support frame (200), the screw (305), the guide shaft (307) and the evaporation source furnace (400) are respectively installed in the vacuum chamber, the motor (301) is arranged outside the vacuum chamber seat (500), and the screw (305), the guide shaft (307) and the evaporation source furnace (400) are respectively installed on the wall of the vacuum chamber seat (500).

2. The movable film thickness detection system for a vapor deposition machine according to claim 1, wherein: The detection probe (100) comprises a probe body (101), an interface (103) and a signal communication line (104). The signal communication line (104) is in signal communication with the probe body (101) via the interface (103). The probe body (101) is mounted on a movable support frame (200).

3. The movable film thickness detection system for a vapor deposition machine according to claim 2, wherein: The detection probe (100) is also provided with a cooling pipeline mechanism for cooling the probe body (101).

4. The movable film thickness detection system for a vapor deposition machine according to claim 3, wherein: The cooling pipeline mechanism comprises an embedded cooling water pipeline (102), a cooling water hose pipeline (105) and a vacuum isolation pipeline (106). The embedded cooling water pipeline (102) is arranged in the probe body (101) to cool the probe body (101). The interface (103) has a built-in quick-connect interface for connecting with the cooling water hose pipeline (105). The embedded cooling water pipeline (102) is connected to the cooling water hose pipeline (105) through a through hole arranged in the interface (103). One end of the vacuum isolation pipeline (106) is connected to the interface (103). The signal communication line (104) and the cooling water hose pipeline (105) are respectively located in the vacuum isolation pipeline (106).

5. The movable film thickness detection system for a vapor deposition machine according to claim 4, characterized in that: The movable support frame (200) further comprises a support frame (201) and a retractable vacuum isolation bellows (203), wherein the support frame (201) is fixedly placed on the movable base (202), the other end of the vacuum isolation pipe (106) is communicated with the upper end of the retractable vacuum isolation bellows (203), the lower end of the retractable vacuum isolation bellows (203) is connected to the wall of the vacuum chamber seat (500), and the signal communication line (104) and the cooling water hose pipeline (105) extend to the outside of the vacuum chamber seat (500) through the retractable vacuum isolation bellows (203).

6. The movable film thickness detection system for a vapor deposition machine according to claim 5, characterized in that: The motor screw transmission mechanism (300) further comprises a motor fixing frame (302), a coupling (303), a shaft seal (304), a guide shaft fixing seat (306) and a screw nut (308), wherein the motor (301) is mounted on the motor fixing frame (302), the motor fixing frame (302) is fixedly mounted on the side wall of the vacuum chamber seat (500), the shaft seal (304) is mounted on both side walls of the vacuum chamber seat (500), the screw (305) passes through the shaft seals (304) on both sides, the two side walls of the vacuum chamber and the screw nut (308), and the screw (305) passes through the guide shaft fixing seat (306) and the guide shaft fixing seat (306). 05) is connected to the motor (301) through a coupling (303), a screw nut (308) is installed on the through hole of the movable base (202) and cooperates with the screw (305), the guide seat fixing seat (306) is fixedly installed on the wall of the vacuum chamber seat (500), and the two ends of the guide shaft (307) are respectively connected to the guide seat fixing seats (306) located at both ends thereof, the guide shaft (307) passes through the movable base (202) and is arranged parallel to the screw (305), and the movable base (202) moves back and forth along the screw (305) and the guide shaft (307) at the same time.

7. The movable film thickness detection system for a vapor deposition machine according to claim 6, characterized in that: The movable support frame (200) further includes a position sensing member (204), which is located on the side of the movable base (202); the motor screw transmission mechanism (300) further includes a plurality of positioning sensors (309), which are arranged on the wall of the vacuum chamber seat (500), and a positioning sensor (309) is correspondingly installed next to each evaporation source furnace (400).

8. The movable film thickness detection system for a vapor deposition machine according to claim 7, wherein: The motor screw transmission mechanism (300) further comprises a limit sensor (310), which is arranged on the wall of the vacuum chamber seat (500) and located on both sides of the positioning sensor (309), and respectively corresponds to the closest position and the farthest position that the movable support frame (200) can move.

9. The movable film thickness detection system for a vapor deposition machine according to claim 6, wherein: The shaft seal (304) comprises a sealing shaft housing (3041), two skeleton oil seals (3042), a spacer (3043), a bearing (3044), an inner retaining spring (3045) and an outer retaining spring (3046). The two skeleton oil seals (3042), the spacer (3043) and the bearing (3044) are respectively sleeved on the ends of the screw rod (305). The spacer (3043) is located between the two skeleton oil seals (3042). The bearing (3044) is located on the outside of the right skeleton oil seal (3042). The inner retaining spring (3045) is clamped on the inner side wall of the sealing shaft housing (3041) and abuts against the outer ring surface of the bearing (3044). The outer retaining spring (3046) is clamped in the end groove of the screw rod (305) and abuts against the inner ring surface of the bearing (3044).

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