Material frame sorting reflux device

Abstract

The utility model provides a material frame sorting backflow device which comprises a multi-layer conveying line body, a first jacking mechanism and a second jacking mechanism, the multi-layer conveying line body is used for conveying material frames in a classified mode, the first jacking mechanism is arranged at one end of the multi-layer conveying line body, and the second jacking mechanism is arranged at the other end of the multi-layer conveying line body. The first jacking mechanism is arranged at one end of the multi-layer conveying line body and used for conveying different types of material frames to different layers of the multi-layer conveying line body, a detection device is arranged on the first jacking mechanism and used for detecting the types of the material frames, and the second jacking mechanism is arranged at the other end of the multi-layer conveying line body and used for receiving the material frames conveyed by the multi-layer conveying line body. And the detection device is arranged on the second jacking mechanism. The automatic sorting device has the advantages that automatic sorting of material frame backflow is achieved, the material frames are conveyed in a classified mode, and production efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to a material frame sorting and reflow device. Background Art

[0002] After silicon wafers are debonded and inserted, the empty feed frames need to be reflowed before loading. Because different sizes of ingots require different feed frames, the feed frames need to be sorted so that ingots of different sizes can be loaded into the corresponding feed frames. In existing technology, the feed frame reflow process cannot sort the feed frames for classified transfer, affecting the efficiency of ingot loading. Utility Model Content

[0003] In order to solve the above technical problems, the utility model provides a material frame sorting and reflow device, which effectively solves the problem that the material frame reflow cannot sort and classify the material frames and overcomes the shortcomings of the existing technology.

[0004] The technical solution adopted by the utility model is: a material frame sorting and reflow device, comprising:

[0005] Multi-layer conveyor line, used for classified transmission of material frames;

[0006] a first lifting mechanism, disposed at one end of the multi-layer conveyor line body, for transferring different types of material frames to different layers of the multi-layer conveyor line body; a detection device is provided on the first lifting mechanism for detecting the type of the material frame;

[0007] The second lifting mechanism is arranged at the other end of the multi-layer conveyor line body and is used to receive the material frame conveyed by the multi-layer conveyor line body. The second lifting mechanism is provided with the detection device.

[0008] Furthermore, the detection device includes a first sensor and a second sensor, the first sensor is used to detect the presence of the material frame, and the second sensor is used to detect the type of the material frame.

[0009] Furthermore, the first lifting mechanism and the second lifting mechanism both include:

[0010] a transmission line body, wherein the detection device is provided on the transmission line body;

[0011] Guide rails are arranged on both sides of the transmission line body and are slidably connected to the transmission line body;

[0012] The driving module is connected to the transmission line body and can drive the transmission line body to move up and down along the guide rail.

[0013] Furthermore, the driving module includes:

[0014] A driving shaft connected to the bottom of the transmission line body;

[0015] a driving gear, disposed at an end of the driving shaft;

[0016] A rack is arranged along the guide rail and is externally meshed with the driving gear. The driving shaft can drive the driving gear to roll along the rack.

[0017] Furthermore, a fixed baffle is provided at one end of the transmission line body away from the multi-layer conveying line body.

[0018] Furthermore, a clamping device is provided at one end of the transmission line of the second lifting mechanism away from the fixed baffle, for holding the material frame against the fixed baffle.

[0019] Furthermore, a blocking cylinder is provided at the bottom of the transmission line body of the second lifting mechanism to prevent the transmission line body from falling during loading.

[0020] Furthermore, a plurality of lifting trays are provided on each layer of the multi-layer conveyor line body along the transmission direction, and a lifting cylinder is provided at the bottom of the lifting tray.

[0021] Furthermore, alignment detection sensors are provided on both sides of each layer of the multi-layer conveyor line body, and the alignment detection sensors are provided corresponding to the lifting trays.

[0022] Furthermore, a baffle is provided on a side of the jacking tray close to the second jacking mechanism.

[0023] The advantages and positive effects of the utility model are as follows: due to the adoption of the above technical solution, automatic sorting of the reflux material frames is realized, the material frames are classified and transmitted, and the production efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of a material frame sorting and reflow device according to an embodiment of the present utility model.

[0025] Figure 2 It is a schematic diagram of the first lifting mechanism of a material frame sorting and reflow device in an embodiment of the present utility model.

[0026] Figure 3 This is a schematic diagram of the second lifting mechanism of a material frame sorting and reflow device in an embodiment of the present utility model.

[0027] Figure 4 This is another schematic diagram of the second lifting mechanism of a material frame sorting and reflow device in an embodiment of the present utility model.

[0028] Figure 5 This is a schematic diagram of a multi-layer conveyor line of a material frame sorting and reflow device according to an embodiment of the present utility model.

[0029] Figure 6 This is another schematic diagram of a multi-layer conveyor line of a material frame sorting and reflow device according to an embodiment of the present invention.

[0030] In the picture:

[0031] 10. Multi-layer conveyor line 11. Double-layer bracket 12. Lifting tray

[0032] 13. Lifting cylinder 14. Alignment detection sensor 15. Baffle

[0033] 16. Rotating cylinder 20, first lifting mechanism 21, transmission line body

[0034] 211, fixed baffle 212, first beam sensor 213, second beam sensor

[0035] 22, guide rail 23, drive module 231, drive shaft

[0036] 232, driving gear 233, rack 234, motor

[0037] 24, slider 25, mounting bracket 26, first positioning sensor

[0038] 27. Second positioning sensor 28. Bending end 30. Second lifting mechanism

[0039] 31. Third positioning sensor 32. Clamping device 33. Blocking cylinder

[0040] 34, holding cylinder 35, light curtain 40, first sensor

[0041] 50, second sensor 60, material frame 61, insert plate DETAILED DESCRIPTION

[0042] An embodiment of the present utility model provides a material frame sorting and reflow device, and the embodiment of the present utility model is described below with reference to the accompanying drawings.

[0043] In the description of the embodiments of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "setting" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be a communication between the internal parts of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood based on specific circumstances.

[0044] like Figure 1 As shown, an embodiment of the present invention is a material frame sorting and reflow device, comprising a multi-layer conveyor line body 10, a first lifting mechanism 20 and a second lifting mechanism 30. The multi-layer conveyor line body 10 is used to classify and transport the material frames 60, and different types of material frames 60 are transported on different layers of the multi-layer conveyor line body 10. The first lifting mechanism 20 is arranged at one end of the multi-layer conveyor line body 10, and is used to transport different types of material frames 60 to different layers of the multi-layer conveyor line body 10. The first lifting mechanism 20 is provided with a detection device for detecting the type of the material frame 60. The second lifting mechanism 30 is arranged at the other end of the multi-layer conveyor line body 10, and is used to receive different types of material frames 60 transported by the multi-layer conveyor line body 10. The second lifting mechanism 30 is provided with a detection device, which can detect the type of the received material frame 60, and ensure that different types of crystal rods can be loaded into the corresponding material frame, which is more conducive to the loading of various crystal rods. The specific form of the multi-layer conveyor line body 10 is not limited, and can be belt transmission or chain transmission. In this embodiment, the multi-layer conveyor line 10 is a chain-type conveyor comprising two identically structured linear layers arranged one above the other. These layers are secured to a double-layer support 11. The two layers transport two different types of material frames 60. The side panels of these two types of material frames 60 have detection locations, one with a through-hole and the other without. A detection device determines the type of material frame 60 by detecting the presence of the through-hole, thereby sorting the material frames 60.

[0045] Specifically, such as Figure 1 、 Figure 2 and Figure 3As shown, the detection device includes a first sensor 40 and a second sensor 50. The first sensor 40 is used to detect the presence of a material frame 60, and the second sensor 50 is used to detect the type of material frame 60. The first sensor 40 and the second sensor 50 on the first lifting mechanism 20 are installed on the same side of the first lifting mechanism 20. The first sensor 40 on the second lifting mechanism 30 is installed at the end away from the multi-layer conveyor line 10. The second sensor 50 on the second lifting mechanism 30 is installed on the side of the second lifting mechanism 30 and the same side as the second sensor 50 on the first lifting mechanism 20. When the robot places the material frame 60 on the first lifting mechanism 20, the robot precisely positions the material frame 60 so that the detection position is relative to the second sensor 50. The first sensor 40 and the second sensor 50 are both proximity sensors. When the first sensor 40 detects that the material frame 60 is placed on the first lifting mechanism 20, the second sensor 50 detects whether there is a through hole at the detection position of the material frame 60, sorts the material frame 60, and then transports it to the corresponding layer of the multi-layer conveyor line 10. When a crystal ingot needs to be loaded onto the second lifting mechanism 30, a material frame 60 is selected based on the type of the crystal ingot, and the second lifting mechanism 30 moves to the corresponding layer of the multi-layer conveyor 10. When the material frame 60 is transferred to the second lifting mechanism 30, the detection device on the second lifting mechanism 30 further detects and confirms the type of the material frame 60 before loading.

[0046] Specifically, such as Figure 2 、 Figure 3 and Figure 4As shown, the first lifting mechanism 20 and the second lifting mechanism 30 both include a transmission line body 21, a guide rail 22 and a drive module 23. A detection device is installed on the transmission line body 21. The guide rails 22 are relatively arranged on both sides of the transmission line body 21 and are slidably connected to the transmission line body 21. The drive module 23 is connected to the transmission line body 21 and can drive the transmission line body 21 to move up and down along the guide rails 22. In this embodiment, the transmission line body 21 is a roller line body, and the transmission line body 21 is arranged along the conveying direction of the multi-layer conveyor line body 10. Vertical mounting brackets 25 are provided on both sides of the transmission line body 21, and vertical guide rails 22 are fixed on the mounting brackets 25. Sliders 24 are used to slide the two sides of the transmission line body 21 with the guide rails 22. The drive module 23 is connected to the transmission line body 21 to drive the transmission line body 21 to move up and down along the guide rails 22, so that the transmission line body 21 can be docked with different layers of the multi-layer conveyor line body 10. A first positioning sensor 26 is fixed to the upper layer of the multi-layer conveyor line body 10 on the mounting bracket 25, and a second positioning sensor 27 is fixed to the lower layer of the multi-layer conveyor line body 10, which are used to position the transmission line body 21. Since the robot needs to place the crystal rod in the material frame 60 on the second lifting mechanism 30 for loading, a third positioning sensor 31 is fixed to the mounting bracket 25 of the second lifting mechanism 30. The third positioning sensor 31 is installed between the first positioning sensor 26 and the second positioning sensor 27, and is used to position the transmission line body 21 when loading the crystal rod. The first positioning sensor 26, the second positioning sensor 27 and the third positioning sensor 31 are all proximity sensors, which are installed on the same side of the transmission line body 21. A bending end 28 is fixed to the side of the transmission line body 21 close to the first positioning sensor 26, the second positioning sensor 27 and the third positioning sensor 31. The position of the transmission line body 21 is detected by detecting the position of the bending end 28.

[0047] Specifically, the drive module 23 includes a drive shaft 231, a drive gear 232, and a rack 233. The drive shaft 231 is mounted at the bottom of the transmission line body 21 via a bearing. A motor 234 is connected to the drive shaft 231, and the motor 234 can drive the drive shaft 231 to rotate. Drive gears 232 are mounted at both ends of the drive shaft 231. A vertical rack 233 is fixed on the mounting bracket 25 relative to the position of the drive gear 232 along the guide rail 22, and the rack 233 is externally meshed with the drive gear 232. The drive shaft 231 can drive the drive gear 232 to roll along the rack 233, thereby driving the transmission line body 21 to move up and down along the guide rail 22.

[0048] Preferably, a fixed baffle 211 is provided at one end of the transmission line 21 away from the multi-layer conveyor line 10. The fixed baffle 211 on the transmission line 21 of the first lifting mechanism 20 is used to prevent the material frame 60 from falling from the end. When the robot places the material frame 60 on the first lifting mechanism 20, it can accurately position the material frame 60 so that the detection position of the material frame 60 is aligned with the second sensor 50 on the first lifting mechanism 20. When the material frame 60 is transferred to the transmission line 21 on the second lifting mechanism 30, the fixed baffle 211 is provided to limit the material frame 60 so that the detection position of the material frame 60 is aligned with the second sensor 50 on the second lifting mechanism 30. In order to ensure that the fixed baffle 211 on the second lifting mechanism 30 limits the position of different types of material frames 60, so that the detection position of different types of material frames 60 can all be aligned with the second sensor 50 on the second lifting mechanism 30, the detection position of the material frame 60 and the contact side of the material frame 60 with the fixed baffle 211 need to be the same distance.

[0049] Preferably, Figure 3 and Figure 4 As shown, in order to prevent the material frame 60 from moving when the manipulator loads the material onto the material frame 60 on the second lifting mechanism 30, a clamping device 32 is provided at the end of the transmission line body 21 of the second lifting mechanism 30 away from the fixed baffle 211, which is used to hold the material frame 60 against the fixed baffle 211 to prevent the material frame 60 from moving during the loading process. In this embodiment, the clamping device 32 is a rotary clamping cylinder, and the piston rod can rotate 90 degrees to the left or right while extending and retracting. The rotary clamping cylinder is a prior art and will not be described in detail here. Horizontally arranged rotary clamping cylinders are symmetrically installed on both sides of the transmission line body 21 of the second lifting mechanism 30. The rotary clamping cylinders on both sides can simultaneously rotate 90 degrees toward the inside of the transmission line body 21 to hold the material frame 60 against the fixed baffle 211. When the material frame 60 on the transmission line 21 of the second lifting mechanism 30 contacts the fixed baffle 211, the first sensor 40 installed at the end of the second lifting mechanism 30 detects the material frame 60, the second sensor 50 detects the type of the material frame 60, and the clamping device 32 holds the material frame 60 against the fixed baffle 211.

[0050] Preferably, a blocking cylinder 33 is provided at the bottom of the transmission line body 21 of the second lifting mechanism 30 to prevent the transmission line body 21 from falling when loading the crystal ingot. The transmission line body 21 of the second lifting mechanism 30 receives the material frame 60. When loading the material frame 60, it needs to be lowered to the loading position. When the third positioning sensor 31 detects the material frame 60, the transmission line body 21 stops descending. The blocking cylinder 33 is set at the bottom of the material frame 60 at the loading position and is fixed to the mounting bracket 25. When the material frame 60 descends to the loading position, the blocking cylinder 33 extends to prevent the transmission line body 21 from falling during the loading process. In this embodiment, the blocking cylinders 33 are symmetrically fixed on both sides of the mounting bracket 25. In order to further enhance the stability of the transmission line body 21 during loading, a supporting cylinder 34 can be provided on the side of the transmission line body 21 of the second lifting mechanism 30. The supporting cylinder 34 is fixed to the mounting bracket 25. When the material frame 60 descends to the upper material position, the abutting cylinder 34 extends out to abut one side of the transmission line body 21 .

[0051] Preferably, first through-beam sensors 212 are installed on both sides of the transmission line 21 of the second lifting mechanism 30 to detect the presence of the insert plate 61 in the material frame. Because crystal ingots vary in length, insert plates 61 are required at both ends to secure them in the material frame 60. First through-beam sensors 212 are fixed on both sides of the transmission line 21 to detect the presence of the insert plate 61, preventing it from being missed and affecting subsequent processes.

[0052] Preferably, a light curtain 35 is provided at one end of the second lifting mechanism 30 away from the multi-layer conveyor line body 10 to prevent people from approaching and reduce safety hazards.

[0053] Preferably, Figure 1 、 Figure 2 、 Figure 3 and Figure 4 As shown, a second through-beam sensor 213 is provided at the end of the first and second lifting mechanisms 20, 30 near the multi-layer conveyor body 10 to detect the material frame 60 and prevent the material frame 60 from getting stuck at the end of the first and second lifting mechanisms 20, 30 near the multi-layer conveyor body 10, thereby ensuring transmission continuity. The second through-beam sensor 213 is fixedly mounted on both sides of the transmission line 21. A second through-beam sensor 213 is also provided at the end of the multi-layer conveyor body 10 to prevent the material frame 60 from getting stuck.

[0054] Preferably, Figure 5 and Figure 6As shown, a plurality of lifting trays 12 are provided on each layer of the multi-layer conveyor line body 10 along the conveying direction, and a lifting cylinder 13 is provided at the bottom of the lifting tray 12. In this embodiment, the lifting cylinder 13 is fixed on the double-layer bracket 11, and the lifting cylinder 13 can drive the lifting tray 12 to move up and down. Since the multi-layer conveyor line body 10 is always in operation, and the first lifting mechanism 20 needs to transfer the material frame 60 to different layers according to the type of the material frame 60, vacancies are likely to appear on the multi-layer conveyor line body 10. For example, when the first lifting mechanism 20 transports the material frame 60 to the upper layer of the multi-layer conveyor line body 10, although the lower layer of the multi-layer conveyor line body 10 does not receive the material frame 60, it is also moving, so vacancies will appear on the lower layer of the multi-layer conveyor line body 10. In order to allow multiple material frames 60 to be buffered on the multi-layer conveyor line body 10, a lifting tray 12 is provided. When a vacant space appears on the multi-layer conveyor line 10, a lifting tray 12 can be used to lift the material frame 60 at the front end of the vacant space and separate it from the conveyor line. When the subsequent material frame 60 is transferred to the vacant space, the lifting tray 12 is dropped so that the material frame 60 can be continuously cached on the conveyor line.

[0055] Preferably, in order to ensure that the lifting tray 12 can accurately lift the material frame 60, that is, the lifting is performed only when the material frame 60 is located above the lifting tray 12, alignment detection sensors 14 are provided on both sides of each layer of the multi-layer conveyor line body 10. The alignment detection sensors 14 are provided corresponding to the lifting tray 12. The alignment detection sensors 14 are provided on one side of the lifting tray 12 and are arranged at equal intervals to prevent the material frame 60 from being lifted by the lifting tray 12 when it is at the intersection of adjacent lifting trays 12.

[0056] Preferably, a baffle 15 is provided on the side of the lifting tray 12 near the second lifting mechanism 30. In this embodiment, a rotary cylinder 16 is fixed to the bottom of the lifting tray 12 near the second lifting mechanism 30, and the baffle 15 is mounted on the movable end of the rotary cylinder 16. When a material frame 60 is loaded onto the second lifting mechanism 30, the rotary cylinder 16 rotates to cause the baffle 15 to block the material frame 60 on the multi-layer conveyor line body 10. The rotary cylinder 16 is conventional, and its specific structure is not described here.

[0057] The advantages and positive effects of the utility model are:

[0058] 1. By setting up a multi-layer conveyor line body, a first lifting mechanism, a second lifting mechanism and a detection device, automatic sorting of the material frame return is realized, the material frame is classified and transmitted, and production efficiency is improved.

[0059] 2. By setting a clamping device, the material frame is fixed on the second lifting mechanism, which facilitates the loading of the crystal ingot and prevents the material frame from moving during the crystal ingot loading process.

[0060] 3. By setting up a lifting tray and a lifting cylinder, the material frame can be transported continuously, which is more conducive to the caching of multiple material frames.

[0061] The above embodiments of the present invention are described in detail. However, the above contents are only preferred embodiments of the present invention and should not be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A material frame sorting and reflow device, characterized in that: include: Multi-layer conveyor line, used for classified transmission of material frames; a first lifting mechanism, disposed at one end of the multi-layer conveyor line body, for transferring different types of material frames to different layers of the multi-layer conveyor line body; a detection device is provided on the first lifting mechanism for detecting the type of the material frame; The second lifting mechanism is arranged at the other end of the multi-layer conveyor line body and is used to receive the material frame conveyed by the multi-layer conveyor line body. The second lifting mechanism is provided with the detection device.

2. The material frame sorting and reflow device according to claim 1, characterized in that: The detection device includes a first sensor and a second sensor, wherein the first sensor is used to detect the presence or absence of the material frame, and the second sensor is used to detect the type of the material frame.

3. A material frame sorting and reflowing device according to claim 1 or 2, characterized in that: The first lifting mechanism and the second lifting mechanism both include: a transmission line body, wherein the detection device is provided on the transmission line body; Guide rails are arranged on both sides of the transmission line body and are slidably connected to the transmission line body; The driving module is connected to the transmission line body and can drive the transmission line body to move up and down along the guide rail.

4. The material frame sorting and reflowing device according to claim 3, characterized in that: The driving module includes: A driving shaft connected to the bottom of the transmission line body; a driving gear, disposed at an end of the driving shaft; A rack is arranged along the guide rail and is externally meshed with the driving gear. The driving shaft can drive the driving gear to roll along the rack.

5. The material frame sorting and reflowing device according to claim 3, characterized in that: A fixed baffle is provided at one end of the transmission line body away from the multi-layer conveying line body.

6. The material frame sorting and reflowing device according to claim 5, characterized in that: A clamping device is provided at one end of the transmission line of the second lifting mechanism away from the fixed baffle, for holding the material frame against the fixed baffle.

7. A material frame sorting and reflow device according to any one of claims 4 to 6, characterized in that: A blocking cylinder is provided at the bottom of the transmission line body of the second lifting mechanism to prevent the transmission line body from falling during loading.

8. A material frame sorting and reflow device according to any one of claims 1-2 and 4-6, characterized in that: A plurality of lifting trays are provided on each layer of the multi-layer conveyor line body along the transmission direction, and a lifting cylinder is provided at the bottom of the lifting tray.

9. The material frame sorting and reflowing device according to claim 8, characterized in that: Position detection sensors are provided on both sides of each layer of the multi-layer conveyor line body, and the position detection sensors are provided corresponding to the lifting trays.

10. The material frame sorting and reflowing device according to claim 8, characterized in that: A baffle is provided on one side of the jacking tray close to the second jacking mechanism.

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