Special gas equipment pipeline tail end monitoring device

Abstract

The utility model discloses a special gas equipment pipeline tail end monitoring device which comprises a gas inlet pipe and a gas outlet pipe, the gas inlet pipe is communicated with a special gas steel cylinder, the gas outlet pipe is communicated with special gas equipment, at least two gas supply pipes are communicated between the gas inlet pipe and the gas outlet pipe, and pneumatic valves and hand valves are arranged on the gas supply pipes. The air outlet pipe is communicated with an emptying pipe and a tail end pressure sensor; according to the special gas equipment pipeline tail end monitoring device, the tail end pressure sensor is additionally arranged on the gas outlet pipe, so that under the condition that the PMV is turned off by mistake, pressure drop information can be quickly obtained through the reading value of the pressure sensor, a worker is prompted to open the PMV, and loss expansion is avoided; in addition, the auxiliary pipe, the manual valve and the one-way valve are additionally arranged, so that workers can manually open the manual valve to recycle and discharge the special gas in the gas outlet pipeline under the condition of process accidents or equipment power failure, and potential safety hazards are eliminated.

Description

Technical Field

[0001] The utility model relates to gas equipment technology, in particular to a terminal monitoring device for a special gas equipment pipeline. Background Art

[0002] Specialty gases are essential process raw materials in the semiconductor industry. However, their unique properties can also be destructive to valves within specialty gas equipment. Highly corrosive gases, such as Cl2, BCl3, F2, ClF3, B2H6, HF, and WF6, are typical examples of these gases, which can easily corrode valves. This can manifest itself primarily as internal leakage in the valves, and valve damage requires replacement. However, once semiconductor equipment is operational, it is difficult to shut down, and restarting it requires significant manpower and expense. Therefore, valve replacement in specialty gas equipment is often performed after testing and replacement, while the other gas cylinder remains available.

[0003] Since the special gas equipment has an A / B side automatic switching mode, take the internal leakage of LPI1 (A side pneumatic valve) as an example: when the B side is in normal use, PMV1 (A side manual valve) must be closed and the PMV1 (A side manual valve) must be tested for internal leakage. If there is no abnormality, the LPI1 (A side pneumatic valve) can be removed; after the replacement is completed, the new valve needs to be pressure tested and tested for internal leakage. During this process, the PMV (manual valve) is always in a closed state. The test time ranges from 8 to 72 hours, according to the manufacturer's own standards. After the entire test is completed, due to shift changes or time issues, other personnel will most likely take over to complete the remaining work. At this time, there is often a problem of being ignored by the handover personnel due to the failure to hand over the manual valve status.

[0004] Currently, all specialty gas supply equipment does not monitor the pressure of the pipeline at the end of the equipment during the supply process. Without visual confirmation, it is impossible to confirm whether the PMV (manual valve) is open. In addition, all domestic equipment will display the manual valve as open by default on the host computer and human-machine interface when in the supply state. If the manual valve is actually closed at this time, a serious process accident will occur. For expensive wafers, the loss is undoubtedly huge. Taking the peak price of 300mm wafers with a 27nm process as an example, if the specialty gas process is interrupted simultaneously on multiple devices, the economic loss will be in the tens of millions or even higher. Utility Model Content

[0005] In order to solve the defects of the above-mentioned prior art, the utility model provides a special gas equipment pipeline end monitoring device, which adds a pressure sensor at the end. In the case that the PMV is mistakenly closed, the pressure drop information can be quickly obtained through the reading of the pressure sensor to prompt the worker to open the PMV to avoid further losses.

[0006] In order to achieve the above technical objectives, the present invention adopts the following technical solutions: a special gas equipment pipeline end monitoring device, including an air inlet pipe and an air outlet pipe, the air inlet pipe is connected to the special gas cylinder, the air outlet pipe is connected to the special gas equipment, and at least two air supply pipes are connected between the air inlet pipe and the air outlet pipe, and the air supply pipe is provided with a pneumatic valve and a hand valve, and the air outlet pipe is connected to an exhaust pipe and an end pressure sensor.

[0007] Preferably, the air outlet pipe is connected to an auxiliary pipe, the auxiliary pipe is connected to the exhaust pipe, and a manual valve is provided on the auxiliary pipe.

[0008] Preferably, a one-way valve is provided on the auxiliary pipe, and the one-way valve is located between the manual valve and the drain pipe.

[0009] Preferably, the air intake pipe is provided with an inlet pressure sensor, and the air supply pipe is provided with a supply pressure sensor.

[0010] In summary, the present invention has achieved the following technical effects:

[0011] The utility model provides a monitoring device for the end of the pipeline of special gas equipment, which adds an end pressure sensor to the outlet pipe. In the case that the PMV is mistakenly closed, the pressure drop information can be quickly obtained through the reading of the pressure sensor, so as to prompt the workers to open the PMV to avoid the expansion of losses. In addition, auxiliary pipes, manual valves and one-way valves are added. In the event of a process accident or equipment power outage, workers can manually open the manual valve to recover and discharge the special gas in the outlet pipe, eliminating safety hazards. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the structure of the pipeline end monitoring device for special gas equipment of the utility model;

[0013] Explanation of the markings in the accompanying drawings in the specification: 1. Inlet pipe; 2. Inlet pressure sensor; 4. Air supply pipe; 5. Pneumatic valve; 6. Manual valve; 7. Outlet pipe; 8. Exhaust pipe; 9. Auxiliary pipe; 10. Terminal pressure sensor; 11. Manual valve; 12. One-way valve. DETAILED DESCRIPTION

[0014] The present invention will be described in further detail below with reference to the accompanying drawings.

[0015] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed. However, as long as they are within the scope of the claims of the present invention, they are protected by patent law.

[0016] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0017] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0018] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, indirect connection through an intermediate medium, internal communication between two components, or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0019] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0020] Example 1:

[0021] like Figure 1As shown, a terminal monitoring device for a special gas equipment pipeline includes an air inlet pipe 1 and an air outlet pipe 7. The air inlet pipe 1 is connected to a special gas cylinder, and the air outlet pipe 7 is connected to the special gas equipment. At least two air supply pipes are connected between the air inlet pipe 1 and the air outlet pipe 7. A pneumatic valve 5 and a manual valve 6 are provided on the air supply pipe. The air outlet pipe 7 is connected to an exhaust pipe 8 and a terminal pressure sensor 10.

[0022] The air outlet pipe 7 is connected to an auxiliary pipe 9 , which is connected to an exhaust pipe 8 . A manual valve 11 is provided on the auxiliary pipe 9 . A one-way valve 12 is provided on the auxiliary pipe 9 . The one-way valve 12 is located between the manual valve 11 and the exhaust pipe 8 .

[0023] The air inlet pipe 1 is provided with an inlet pressure sensor 2, and the air supply pipe is provided with an air supply pressure sensor.

[0024] The utility model provides a terminal monitoring device for special gas equipment pipeline, which adds a terminal pressure sensor 10 to the outlet pipe 7. In the case that the PMV is mistakenly closed, the pressure drop information can be quickly obtained through the reading of the pressure sensor, so as to prompt the workers to open the PMV to avoid the expansion of losses. In addition, an auxiliary pipe 9, a manual valve 11 and a one-way valve 12 are added. In the event of a process accident or equipment power outage, the workers can manually open the manual valve 11 to recover and discharge the special gas in the outlet pipe 7, thereby eliminating safety hazards.

[0025] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention are within the scope of the technical solution of the present invention.

Claims

1. A monitoring device for the end of a pipeline of a special gas equipment, characterized in that: It includes an air inlet pipe and an air outlet pipe, the air inlet pipe is connected to the special gas cylinder, the air outlet pipe is connected to the special gas equipment, at least two air supply pipes are connected between the air inlet pipe and the air outlet pipe, the air supply pipe is provided with a pneumatic valve and a hand valve, and the air outlet pipe is connected to an exhaust pipe and a terminal pressure sensor.

2. A pipeline terminal monitoring device for special gas equipment according to claim 1, characterized in that: The air outlet pipe is connected with an auxiliary pipe, the auxiliary pipe is connected with an exhaust pipe, and a manual valve is provided on the auxiliary pipe.

3. A pipeline terminal monitoring device for special gas equipment according to claim 1, characterized in that: A one-way valve is provided on the auxiliary pipe, and the one-way valve is located between the manual valve and the drain pipe.

4. A pipeline terminal monitoring device for special gas equipment according to claim 1, characterized in that: The air inlet pipe is provided with an inlet pressure sensor, and the air supply pipe is provided with an air supply pressure sensor.

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