Graphite boat cooling device

Abstract

The utility model relates to a graphite boat cooling device which comprises a mounting rack, a cooling liquid circulating mechanism and a blowing mechanism, the mounting rack is provided with a cooling cavity, the cooling liquid circulating mechanism is connected to the mounting rack and extends into the cooling cavity, and the blowing mechanism is arranged on the mounting rack and used for blowing air into the cooling cavity. When a graphite boat outlet pipe is stored on a temporary storage rack, the graphite boat cooling device can be arranged in a graphite boat, the cooling liquid circulating mechanism rapidly takes away heat through flowing cooling liquid, and meanwhile, the air blowing mechanism blows air into the cooling cavity, so that air flowing in the graphite boat is greatly accelerated, the temperature of the graphite boat and the temperature of a silicon wafer on the graphite boat are rapidly reduced, and the service life of the graphite boat is prolonged. And the cooling time is shortened, so that the production efficiency of a production line is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, in particular to a graphite boat cooling device. Background Art

[0002] During the solar cell manufacturing process, silicon wafers often require coating. In coating processes like PECVD (plasma-enhanced chemical vapor deposition), graphite boats are used to carry the wafers to be coated. After exiting the furnace, the boats must cool before loading and unloading. Traditionally, these boats are placed on a dedicated cooling platform and cooled by fans installed on the platform. This simple cooling method results in slow cooling rates and low production efficiency. Utility Model Content

[0003] Based on this, it is necessary to provide a graphite boat cooling device to solve the problem that the traditional cooling method of the graphite boat is single and the cooling rate is slow.

[0004] The solution provided by this utility model is as follows:

[0005] A graphite boat cooling device, comprising:

[0006] A mounting frame having a cooling cavity;

[0007] a coolant circulation mechanism connected to the mounting frame and extending into the cooling cavity; and

[0008] A blower mechanism is provided on the mounting frame and is used for blowing air into the cooling cavity.

[0009] In one embodiment, the mounting frame includes a first mounting component, a second mounting component, and a connecting component, the first mounting component and the second mounting component are arranged opposite to each other and spaced apart, the first mounting component, the second mounting component, and the connecting component cooperate to form the cooling cavity, and the air blowing mechanism is arranged on the second mounting component;

[0010] The graphite boat cooling device further includes an exhaust mechanism, which is disposed on the first mounting component and is used to exhaust air out of the cooling cavity.

[0011] In one embodiment, there are multiple air extraction mechanisms; and / or

[0012] There are multiple air blowing mechanisms.

[0013] In one embodiment, there are multiple air exhaust mechanisms and multiple air blower mechanisms, and the multiple air exhaust mechanisms are distributed in an array, and the multiple air blower mechanisms are distributed in an array.

[0014] In one embodiment, the graphite boat cooling device further includes an air filtering mechanism, and the air filtering mechanism covers the air outlet of the exhaust mechanism.

[0015] In one embodiment, the air filtering mechanism includes a graphene filter.

[0016] In one embodiment, the cooling liquid circulation mechanism includes a connecting plate and a plurality of liquid cooling plates, the connecting plate is connected to the mounting frame, the plurality of liquid cooling plates are respectively connected to the connecting plate and at least partially extend into the cooling cavity, the liquid cooling plate is vertically arranged, and the plurality of liquid cooling plates are arranged side by side and at intervals.

[0017] In one embodiment, the graphite boat cooling device further includes a driving mechanism, and the driving mechanism is connected to the mounting frame to drive the mounting frame to move.

[0018] In one embodiment, the graphite boat cooling device further includes a guide mechanism, and the mounting frame is movably connected to the guide mechanism and can move along the guide mechanism.

[0019] In one embodiment, the guide mechanism includes a first slide rail and a second slide rail that are arranged opposite to and in parallel with each other, and the first slide rail and the second slide rail are respectively slidably engaged with the mounting bracket.

[0020] Compared with the traditional solution, the above graphite boat cooling device has the following beneficial effects:

[0021] The graphite boat cooling device is equipped with a mounting frame with a cooling chamber, on which are mounted a coolant circulation mechanism and a blower mechanism. The coolant circulation mechanism extends into the cooling chamber, and the blower mechanism is used to blow air into the cooling chamber. When the graphite boat outlet tube is stored on a temporary storage rack, the graphite boat cooling device can be installed inside the graphite boat. The coolant circulation mechanism quickly removes heat through the flowing coolant, while the blower mechanism blows air into the cooling chamber. This greatly accelerates air flow within the graphite boat, quickly reducing the temperature of the graphite boat and the silicon wafers on it, shortening cooling time, and effectively improving production line efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic structural diagram of a graphite boat cooling device according to one embodiment;

[0023] Figure 2 for Figure 1 A top view of the graphite boat cooling device shown;

[0024] Figure 3 for Figure 1 A left side view of the graphite boat cooling device shown;

[0025] Figure 4 for Figure 1 Front view of the graphite boat cooling device shown.

[0026] Description of reference numerals:

[0027] 100. Graphite boat cooling device; 110. Mounting frame; 111. First mounting component; 1112. Exhaust port; 112. Second mounting component; 1122. Air outlet; 113. Connecting component; 114. Cooling chamber; 120. Coolant circulation mechanism; 121. Connecting plate; 122. Liquid cooling plate; 130. Driving mechanism; 140. Guide mechanism; 141. First slide rail; 142. Second slide rail; 150. Air filtering mechanism. DETAILED DESCRIPTION

[0028] To make the above-mentioned objects, features, and advantages of the present invention more clearly understood, the following detailed description of specific embodiments of the present invention is provided in conjunction with the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meanings as those commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of this invention are for the purpose of describing specific embodiments only and are not intended to limit this invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0030] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. In the description of this utility model, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0032] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0033] The utility model provides a graphite boat cooling device, which can be used for cooling graphite boats used in coating processes such as PECVD.

[0034] like Figures 1 to 4 As shown, a graphite boat cooling device 100 according to an embodiment includes a mounting frame 110 , a coolant circulation mechanism 120 , and a blower mechanism (not shown in the figure).

[0035] The mounting frame 110 has a cooling cavity 114. The cooling liquid circulation mechanism 120 is connected to the mounting frame 110 and extends into the cooling cavity 114. The blower mechanism is provided on the mounting frame 110 and is used to blow air into the cooling cavity 114.

[0036] When the graphite boat is stored on a temporary storage rack after exiting the pipe, the above-mentioned graphite boat cooling device 100 can be arranged inside the graphite boat, and the coolant circulation mechanism 120 quickly takes away the heat through the flowing coolant. At the same time, the blower mechanism blows air into the cooling cavity 114, which greatly accelerates the air flow inside the graphite boat, quickly reduces the temperature of the graphite boat and the silicon wafers thereon, and reduces the cooling time, thereby effectively improving the production efficiency of the production line.

[0037] In one example, the mounting frame 110 includes a first mounting component 111, a second mounting component 112, and a connecting component 113. The first mounting component 111 and the second mounting component 112 are disposed opposite each other and spaced apart. The first mounting component 111, the second mounting component 112, and the connecting component 113 cooperate to form a cooling cavity 114.

[0038] Furthermore, the graphite boat cooling device 100 further includes an exhaust mechanism (not shown). The exhaust mechanism is mounted on the first mounting member 111 and is used to draw air out of the cooling chamber 114. A blower mechanism is mounted on the second mounting member 112 and is used to blow air into the cooling chamber 114.

[0039] In the above example, the exhaust mechanism and the blower mechanism provided on both sides of the coolant circulation mechanism 120 exhaust air out of the cooling chamber 114 and blow air into the cooling chamber 114, which more effectively circulates air inside the graphite boat, quickly reduces the temperature of the graphite boat and the silicon wafers thereon, reduces the cooling time, and thus effectively improves the production efficiency of the production line.

[0040] The exhaust mechanism is, for example, a fan. The first mounting component 111 is provided with an exhaust port 1112 , and the exhaust mechanism is in communication with the exhaust port 1112 on the first mounting component 111 .

[0041] In one example, the first installation component 111 is a plate-shaped structure and is disposed horizontally.

[0042] Optionally, the number of exhaust mechanisms is not limited to one, and multiple exhaust mechanisms may be installed on the first mounting component 111. In one example, the number of exhaust mechanisms installed on the first mounting component 111 is 2 to 20, specifically 3, 5, 8, 10, 12, 16, 20, etc.

[0043] In one example, there are multiple exhaust mechanisms, and the exhaust mechanisms are arranged in an array, for example, the exhaust mechanisms are arranged in a 2×2 array, a 2×3 array, a 3×3 array, a 3×4 array, a 2×4 array, a 3×4 array, etc.

[0044] The air blowing mechanism is, for example, a fan. The second mounting component 112 is provided with an air blowing port 1122 , and the air blowing mechanism is communicated with the air blowing port 1122 on the first mounting component 111 .

[0045] In one example, the second installation component 112 is a plate-shaped structure and is disposed horizontally.

[0046] Optionally, the number of air blowing mechanisms is not limited to one, and multiple air blowing mechanisms may be installed on the first mounting component 111. In one example, the number of air blowing mechanisms installed on the first mounting component 111 is 2 to 20, specifically 3, 5, 8, 10, 12, 16, 20, etc.

[0047] In one example, there are multiple blower mechanisms, and the blower mechanisms are arranged in an array, for example, a 2×2 array, a 2×3 array, a 3×3 array, a 3×4 array, a 2×4 array, a 3×4 array, etc.

[0048] In one example, the number of the exhaust mechanisms is the same as the number of the blower mechanisms. Further, there are multiple exhaust mechanisms and multiple blower mechanisms, and the positions of the multiple exhaust mechanisms and the multiple blower mechanisms correspond to each other and are relatively arranged.

[0049] In the specific example shown in the figure, the number of the exhaust mechanisms and the number of the blower mechanisms are both 8, and both are distributed in a 2×4 array. The positions of the exhaust mechanisms and the blower mechanisms correspond one to one and are relatively arranged.

[0050] In one example, the first mounting component 111 is located above the second mounting component 112. Accordingly, the air exhaust mechanism is located above the air blowing mechanism.

[0051] like Figures 1 to 4 As shown, in one example, the coolant circulation mechanism 120 includes a connecting plate 121 and a plurality of liquid cooling plates 122. The connecting plate 121 is connected to the mounting frame 110. The plurality of liquid cooling plates 122 are respectively connected to the connecting plate 121 and at least partially extend into the cooling cavity 114. The liquid cooling plates 122 are arranged vertically, and the plurality of liquid cooling plates 122 are arranged side by side and at intervals. In this way, the contact area between the coolant and the flowing air can be increased, and the water cooling heat dissipation area can be increased. The spacing between adjacent liquid cooling plates 122 is also conducive to rapid convection of air, effectively improving the heat dissipation cooling rate.

[0052] In one example, the graphite boat cooling device 100 includes at least two cooling liquid circulation mechanisms 120 respectively connected to two ends of the mounting frame 110 .

[0053] like Figure 3 As shown, in one example, the graphite boat cooling device 100 further includes a drive mechanism 130. The drive mechanism 130 is connected to the mounting frame 110 to drive the mounting frame 110 to move. For example, the drive mechanism 130 drives the mounting frame 110 to move horizontally. The coolant circulation mechanism 120, the exhaust mechanism, and the blower mechanism disposed on the mounting frame 110 also move accordingly. Alternatively, the drive mechanism 130 may be connected to at least one of the first mounting member 111, the second mounting member 112, and the connecting member 113.

[0054] When the graphite boat is stored on the temporary storage rack, the driving mechanism 130 drives the mounting rack 110 to move into the interior of the graphite boat, and the coolant circulation mechanism 120, the exhaust mechanism and the blower mechanism enter the interior of the graphite boat for cooling.

[0055] In one example, the drive mechanism 130 is a motor-screw transmission assembly. This motor-screw transmission assembly can flexibly adjust the distance the mounting bracket 110 moves based on conditions such as the position and size of the graphite boat being cooled. More specifically, the motor-screw transmission assembly includes a drive motor, a screw, and a ball nut holder. The drive motor is connected to the screw, which mates with the ball nut holder, which is connected to the mounting bracket 110. Thus, the drive motor drives the screw to rotate, thereby driving the mounting bracket 110 to move.

[0056] like Figure 1 and Figure 3 As shown, in one example, the graphite boat cooling device 100 further includes a guide mechanism 140. The mounting frame 110 is movably connected to the guide mechanism 140 and can move along the guide mechanism 140. The guide mechanism 140 can be, but is not limited to, a slide rail. The guide mechanism 140 extends in a horizontal direction.

[0057] In one example, the guide mechanism 140 includes a first slide rail 141 and a second slide rail 142. The first slide rail 141 and the second slide rail 142 are arranged opposite and parallel to each other. For example, the first slide rail 141 and the second slide rail 142 both extend horizontally. The first slide rail 141 and the second slide rail 142 are respectively slidably engaged with the mounting bracket 110.

[0058] like Figures 1 to 4 As shown, in one example, the graphite boat cooling device 100 further includes an air filter mechanism 150. Air filter mechanism 150 covers the exhaust port of the exhaust mechanism. By installing air filter mechanism 150 at the exhaust port of the exhaust mechanism, air filter mechanism 150 filters dust from the air during airflow, purifying the air and preventing contamination of the silicon wafers.

[0059] In one example, the air filtering mechanism 150 is a mesh structure.

[0060] In one example, the air filtering mechanism 150 includes a graphene filter, which can better absorb graphite dust.

[0061] In one example, the air filtering mechanism 150 is disposed on a side of the first mounting component 111 facing the second mounting component 112 , covering the air intake port 1112 .

[0062] In one example, the air filtering mechanism 150 is detachably connected to the first mounting component 111 .

[0063] The graphite boat cooling device 100 is provided with a mounting frame 110 having a cooling chamber 114. A coolant circulation mechanism 120 and a blower mechanism are mounted on the mounting frame 110. The coolant circulation mechanism 120 extends into the cooling chamber 114, and the blower mechanism is used to blow air into the cooling chamber 114. When the graphite boat is stored on a temporary storage rack, the graphite boat cooling device 100 can be installed inside the boat. The coolant circulation mechanism 120 quickly removes heat through the flowing coolant, while the blower mechanism blows air into the cooling chamber 114. This greatly accelerates air flow within the boat, quickly reduces the temperature of the boat and the silicon wafers thereon, and reduces cooling time, thereby effectively improving production line efficiency.

[0064] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0065] The above-described embodiments merely represent several implementation methods of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present utility model patent shall be based on the appended claims, and the specification may be used to interpret the content of the claims.

Claims

1. A graphite boat cooling device (100), characterized in that: include: A mounting frame (110) having a cooling cavity (114); A cooling liquid circulation mechanism (120) connected to the mounting frame (110) and extending into the cooling cavity (114); as well as A blower mechanism is provided on the mounting frame (110), and is used for blowing air into the cooling cavity (114).

2. The graphite boat cooling device (100) according to claim 1, characterized in that: The mounting frame (110) comprises a first mounting component (111), a second mounting component (112), and a connecting component (113); the first mounting component (111) and the second mounting component (112) are arranged opposite to each other and spaced apart; the first mounting component (111), the second mounting component (112), and the connecting component (113) cooperate to form the cooling cavity (114); and the air blowing mechanism is arranged on the second mounting component (112); The graphite boat cooling device (100) further includes an exhaust mechanism, which is arranged on the first mounting component (111) and is used to exhaust air outward from the cooling cavity (114).

3. The graphite boat cooling device (100) according to claim 2, characterized in that: There are multiple ventilation mechanisms; and / or There are multiple air blowing mechanisms.

4. The graphite boat cooling device (100) according to claim 3, characterized in that: There are multiple air exhaust mechanisms and multiple air blowing mechanisms, and the multiple air exhaust mechanisms are distributed in an array, and the multiple air blowing mechanisms are distributed in an array.

5. The graphite boat cooling device (100) according to claim 2, characterized in that: The graphite boat cooling device (100) further comprises an air filtering mechanism (150), wherein the air filtering mechanism (150) covers the air outlet of the air exhaust mechanism.

6. The graphite boat cooling device (100) according to claim 5, characterized in that: The air filtering mechanism (150) includes a graphene filter.

7. The graphite boat cooling device (100) according to claim 1, characterized in that: The cooling liquid circulation mechanism (120) includes a connecting plate (121) and a plurality of liquid cooling plates (122), wherein the connecting plate (121) is connected to the mounting frame (110), and the plurality of liquid cooling plates (122) are respectively connected to the connecting plate (121) and at least partially extend into the cooling cavity (114), and the liquid cooling plates (122) are vertically arranged, and the plurality of liquid cooling plates (122) are arranged side by side and at intervals.

8. The graphite boat cooling device (100) according to any one of claims 1 to 7, characterized in that: The graphite boat cooling device (100) further includes a driving mechanism (130), wherein the driving mechanism (130) is connected to the mounting frame (110) to drive the mounting frame (110) to move.

9. The graphite boat cooling device (100) according to claim 8, characterized in that: The graphite boat cooling device (100) further includes a guide mechanism (140), and the mounting frame (110) is movably connected to the guide mechanism (140) and is capable of moving along the guide mechanism (140).

10. The graphite boat cooling device (100) according to claim 9, characterized in that: The guide mechanism (140) comprises a first slide rail (141) and a second slide rail (142) that are arranged opposite to and in parallel, and the first slide rail (141) and the second slide rail (142) are respectively slidably engaged with the mounting frame (110).

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