Online chip automatic cleaning device

Abstract

The utility model discloses an on-line automatic chip cleaning device which comprises a machine frame. The chip conveying modules drive chips to linearly move back and forth, the number of the chip conveying modules is two, the two chip conveying modules are arranged in parallel, and the two chip conveying modules are both installed on the rack; the chip cleaning module is used for wiping the upper surface of the product by using the dust-free paper sprayed with the atomized cleaning agent; and the visual detection module is used for detecting the cleanliness of the chip. According to the utility model, the conveying, cleaning, air-drying and checking functions of the chip are completed in the whole set of device, and the device is in on-line full-automatic operation with a production line, so that the automation degree of the production line is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to an online automatic chip cleaning device. Background Art

[0002] In the chip manufacturing process of the semiconductor industry, keeping the chips clean is an essential condition no matter which process they flow to. Currently, there are two methods for chip cleaning in the industry: wet cleaning and dry cleaning. Except for a few chips with special packaging materials that use dry cleaning methods such as laser, dry ice or plasma, wet cleaning methods are generally used, that is, soaking or rinsing with pure water or organic solvents. The specific implementation is to put the solvent in a tank, and then put the product into the tank for cleaning. After cleaning, the product is removed from the tank, air-dried, and manually inspected under a microscope. If there are products that do not meet the cleaning standards, they need to be manually wiped clean with a cotton swab or dust-free paper dipped in solvent. The biggest drawback of this process is that it can only be arranged with a separate cleaning station, and the product needs to circulate and be inspected in the tank before it can flow to the next process. It requires a lot of manpower to complete and is prone to missed inspections. At the same time, secondary contamination and other damage to the product may occur during the cleaning and turnover process.

[0003] Due to the huge output of chip production and the need for cleaning in various production links, the industry urgently needs an online cleaning equipment that does not require separate cleaning stations. It can be flexibly arranged at the required location on the production line and automatically run online with the production line to automatically complete cleaning and inspection work. Utility Model Content

[0004] The purpose of the present invention is to provide an online automatic chip cleaning device to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: an online chip automatic cleaning device, comprising a frame, and further comprising:

[0006] A chip conveying module, the chip conveying module drives the chip to move back and forth in a straight line, and there are two chip conveying modules, the two chip conveying modules are arranged in parallel, and the two chip conveying modules are both installed on the rack;

[0007] A chip cleaning module, which is used to wipe the upper surface of the product with dust-free paper sprayed with atomized cleaning agent;

[0008] A visual inspection module is used to inspect the cleanliness of the chip, and the visual inspection module is arranged on the rack.

[0009] Furthermore, it also includes:

[0010] A motion module 1 is provided on the frame, and drives the chip cleaning module to move linearly.

[0011] Furthermore, it also includes:

[0012] The motion module 2 is arranged on the frame, and the motion module 2 drives the visual detection module to move linearly.

[0013] Furthermore, it also includes:

[0014] Ion blowers, there are two ion blowers, both of which are arranged on the frame;

[0015] The two ion blowers correspond to the positions of the motion module 1 and the motion module 2 respectively.

[0016] Furthermore, the chip delivery module includes:

[0017] A linear module, the linear module being arranged on the frame;

[0018] A workbench, which is arranged on the linear module and is used to place chips;

[0019] A vacuum generator, wherein the vacuum generator is installed on a workbench;

[0020] Wherein, the workbench is provided with a plurality of positioning holes for placing chips;

[0021] The vacuum generator is used to generate negative pressure inside the positioning hole.

[0022] Furthermore, the chip cleaning module includes:

[0023] a mounting base plate, the mounting base plate being arranged on the frame;

[0024] a paper tape supply tray, the paper tape supply tray being rotatably mounted on the mounting base plate;

[0025] A paper tape recovery tray, the paper tape recovery tray being rotatably mounted on the mounting base plate and driven to rotate by a belt drive device;

[0026] a cleaning mechanism, the cleaning mechanism being disposed on the mounting substrate;

[0027] A conveying support roller, wherein the conveying support roller is provided in plurality, and each of the conveying support rollers is rotatably arranged on the mounting base plate;

[0028] Among them, the dust-free paper roll is arranged on the paper tape supply material tray, and one end of the dust-free paper roll passes around each conveying support roller and is connected to the paper tape recovery material tray.

[0029] Furthermore, the cleaning mechanism includes:

[0030] a mounting base, the mounting base being arranged on the mounting substrate;

[0031] a cylinder seat, the cylinder seat being movably arranged on the mounting base;

[0032] A lifting drive cylinder, wherein the lifting drive cylinder is mounted on the mounting base, and an output end of the lifting drive cylinder is connected to a cylinder seat;

[0033] A downward pressure cylinder, the downward pressure cylinder being arranged on the cylinder seat;

[0034] A support base, the support base is movably arranged on the mounting base, and the output end of the downward pressure cylinder is connected to the support base;

[0035] A cleaning head support block, the cleaning head support block is movably arranged on the support seat, and a plurality of spray holes are provided on the cleaning head support block, each of the spray holes faces the dust-free paper downward;

[0036] A gap fine-tuning device, the gap fine-tuning device is arranged on the support seat, and the gap fine-tuning device is used to adjust the gap between the cleaning head support block and the dust-free paper;

[0037] a solvent supply device, the solvent supply device being used to introduce a cleaning agent into the spray hole;

[0038] Wherein, a guide channel is provided on the cleaning head support block, and each of the spray holes is connected to the guide channel.

[0039] Furthermore, the solvent supply device includes:

[0040] a cleaning solvent storage tank, wherein the cleaning solvent storage tank is arranged on the frame;

[0041] a solvent tube, one end of which is connected to the diversion channel;

[0042] Wherein, the cleaning solvent storage tank is provided with a delivery pump, and the delivery pump delivers the cleaning agent in the cleaning solvent storage tank to the solvent pipe.

[0043] Furthermore, the visual detection module includes:

[0044] a mounting frame, the mounting frame being arranged on the frame;

[0045] A camera fixing seat, the camera fixing seat being movably arranged on the mounting frame;

[0046] An industrial camera, the industrial camera being mounted on the camera fixing seat and being connected to an industrial telecentric lens;

[0047] A coaxial light source, the coaxial light source is disposed on the mounting frame and is located directly below the industrial telecentric lens;

[0048] an annular light source, the annular light source being located directly below the coaxial light source and being disposed on the mounting frame;

[0049] A camera lifting module is provided on the mounting frame, and the camera lifting module drives the camera fixing seat to move up and down.

[0050] Furthermore, the camera lifting module includes:

[0051] a drive motor, the drive motor being mounted on the mounting frame;

[0052] an adjusting screw, the adjusting screw being rotatably mounted on the mounting frame;

[0053] An adjusting slider, wherein the adjusting slider is threadably engaged with the outside of the adjusting screw and is movably arranged on the mounting frame;

[0054] Wherein, the output end of the driving motor is connected to the adjusting screw, and the adjusting slider is fixedly connected to the camera fixing seat.

[0055] Compared with the prior art, the beneficial effects achieved by the present invention are as follows.

[0056] 1. The utility model can complete the functions of chip transportation, cleaning, air drying and inspection in the whole set of equipment, and can be connected with the production line for full automatic operation, thereby improving the degree of automation of the production line.

[0057] 2. Use dust-free paper strips in combination with spray solvent to clean the chip surface with an automatic wiping method. After wiping, the chip is passed through an ion blower to eliminate static electricity and air dry. The cleaning effect of the chip is inspected by an industrial camera, completely avoiding manual operation and greatly improving the cleaning qualification rate and operating efficiency.

[0058] 3. Two linear modules transport chips alternately to improve chip transportation efficiency.

[0059] 4. Spraying the cleaning agent through the spray hole makes it easy to accurately control the amount of cleaning agent used. Compared with the traditional soaking and rinsing process, the overall cleaning agent usage is reduced, and the used cleaning agent is rolled away and collected with the wiping dust-free paper, avoiding secondary contamination of the chip due to the reuse of the solvent. BRIEF DESCRIPTION OF THE DRAWINGS

[0060] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0061] Figure 1 It is a schematic diagram of the overall structure of the first embodiment of the present utility model.

[0062] Figure 2 It is a schematic diagram of another angle of the entire embodiment of the present invention.

[0063] Figure 3 It is a schematic diagram of the chip conveying module structure of the first embodiment of the present invention.

[0064] Figure 4 This is a schematic diagram of the cooperation between the positioning hole and the chip in the first embodiment of the present utility model.

[0065] Figure 5 This is a schematic diagram of the chip cleaning module structure of the first embodiment of the present invention.

[0066] Figure 6 This is a schematic structural diagram of the chip cleaning module according to the first embodiment of the present invention from another angle.

[0067] Figure 7 This is a schematic structural diagram of the cleaning head support block of the first embodiment of the present utility model.

[0068] Figure 8 This is a schematic diagram of the installation of the cleaning solvent storage tank in the second embodiment of the present utility model.

[0069] Figure 9 This is a structural diagram of the visual detection module of the third practical embodiment.

[0070] In the figure: 1. Rack; 2. Chip conveying module; 21. Linear module; 22. Workbench; 23. Positioning hole; 24. Vacuum generator; 3. Chip cleaning module; 31. Mounting substrate; 32. Paper tape supply tray; 33. Paper tape recovery tray; 34. Conveying support roller; 35. Cleaning mechanism; 351. Lifting drive cylinder; 352. Cylinder seat; 353. Pressing cylinder; 354. Support seat; 355. Cleaning head support block; 3551. Spray hole; 3552. Diversion channel; 356. Fine-tuning motor; 357, mounting base; 36, solvent supply device; 361, cleaning solvent storage tank; 362, solvent tube; 37, belt drive device; 4, visual inspection module; 41, mounting bracket; 42, camera lifting module; 421, drive motor; 422, adjusting screw; 423, adjusting slider; 43, camera fixing base; 44, industrial camera; 45, industrial telecentric lens; 46, coaxial light source; 47, ring light source; 5, motion module one; 6, motion module two; 7, ion blower. DETAILED DESCRIPTION

[0071] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0072] See also Figure 1-Figure 7The utility model provides a technical solution: an online chip automatic cleaning device, comprising a rack 1, two chip conveying modules 2 are arranged in parallel on the rack 1, the chips to be cleaned are used to be placed on the chip conveying module 2, and the chip conveying module 2 drives the chips to move back and forth in a straight line; a motion module 1 5 is provided on the rack 1, and a chip cleaning module 3 is connected to the motion module 1 5, and the chip cleaning module 3 is used to wipe the upper surface of the chip with a dust-free paper tape sprayed with an atomized cleaning agent; a motion module 2 6 is provided on the rack 1, and the motion module 2 6 is connected to a visual inspection module 4, and the visual inspection module 4 is used to detect the cleanliness of the chip; at the same time, two ion fans 7 are also provided on the rack 1, and the two ion fans 7 correspond to the positions of the motion module 1 5 and the motion module 2 6 respectively; the motion module 1 5 is used to drive the chip The chip cleaning module 3 moves in a straight line, and the motion module 15 drives the chip cleaning module 3 to move in a direction perpendicular to the chip conveying module 2. The two chip conveying modules 2 are also used to drive the chips wiped by the chip cleaning module 3 through two ion fans 7. The ion fans 7 remove static electricity and blow dry the wiped chips, and the visual inspection module 4 is used to inspect the chips one by one after the static removal and drying treatment. If a chip that does not meet the cleaning standards is found, the chip conveying module 2 will re-convey the chip that does not meet the cleaning standards to the bottom of the chip cleaning module 3. The chip cleaning module 3 wipes the chip again, and then blows it dry with the ion fan 7, and finally passes through the visual inspection module 4 again. If the chip is found to be substandard again, the above operation is repeated until the chip cleaning meets the standards.

[0073] The chip conveying module 2 includes a linear module 21, which is arranged on the frame 1; a workbench 22 is provided on the linear module 21, and a plurality of positioning holes 23 for placing chips are provided on the workbench 22, and the positioning holes 23 are adapted to the chips; a plurality of vacuum generators 24 are provided on the workbench 22, and the workbench 22 has a plurality of trays for placing chips, and a plurality of positioning holes 23 are provided on the trays, and the chips are used to fit in the positioning holes 23; the number of trays and vacuum generators 24 is equal and the positions correspond, and each vacuum generator 24 is used to generate negative pressure inside the positioning hole 23 on the corresponding tray. Specifically, a pipeline structure can be provided inside the workbench 22, and the vacuum generator 24 and the positioning hole 23 are connected through the pipeline structure; when the vacuum generator 24 generates negative pressure inside the positioning hole 23, the chip can be easily fixed in the positioning hole 23.

[0074] The chip cleaning module 3 includes a mounting base 31, which is fixedly mounted on the frame 1; a paper tape supply tray 32 is rotatably mounted on the mounting base 31, and the paper tape supply tray 32 is used to place a dust-free paper roll; a paper tape recovery tray 33 is also rotatably mounted on the mounting base 31; a belt transmission device is provided on the mounting base 31, and the belt driving device 37 adopts the existing technology, that is, it includes a pulley, a belt and a motor, etc., and the paper tape recovery tray 33 is driven to rotate through the belt driving device 37; a plurality of conveying support rollers 34 are provided on the mounting base 31, and each conveying support roller 34 is rotatably mounted on the mounting base 31. After the dust-free paper roll is placed and fixed on the paper tape supply tray 32, one end of the dust-free paper roll passes around each conveying support roller 34 in turn and is connected to the paper tape recovery tray 33; the rotation of the paper tape recovery tray 33 can drive the movement of the dust-free paper, and the paper tape recovery tray 33 can realize the winding of the dust-free paper.

[0075] The chip cleaning module 3 also includes a cleaning mechanism 35, which is used to spray a cleaning agent onto the dust-free paper located between the paper tape supply tray 32 and the paper tape recovery tray 33; the cleaning mechanism 35 includes a mounting base 357, which is mounted on the mounting substrate 31, and a lifting drive cylinder 351 is provided on the mounting base 357, and the output end of the lifting drive cylinder 351 is connected to a cylinder seat 352, and the cylinder seat 352 is movably provided on the mounting base 357, specifically, a linear guide rail is connected between the cylinder seat 352 and the mounting base 357; a downward pressure cylinder 353 is installed on the cylinder seat 352, and the output end of the downward pressure cylinder 353 is connected to a support seat 354, and the support seat 354 is connected to the mounting substrate 3 1; a cleaning head support block 355 is movably provided on the support seat 354, and a gap fine-tuning device is provided on the support seat 354, and the gap fine-tuning device is used to adjust the gap between the cleaning head support block 355 and the dust-free paper; specifically, the gap fine-tuning device includes a fine-tuning motor 356 installed on the support seat 354, and the output end of the fine-tuning motor 356 is connected to a screw rod, which is threadedly connected to the cleaning head support block 355, and since the cleaning head support block 355 is movably provided on the support seat 354, that is, the fine-tuning motor 356 drives the screw rod to rotate, thereby realizing the movement of the cleaning head support block 355, thereby realizing the fine-tuning of the distance between the cleaning head support block 355 and the support seat 354.

[0076] A plurality of spray holes 3551 are provided on the cleaning head support block 355. The plurality of spray holes 3551 are spaced apart along the length direction of the cleaning head support block 355, and each spray hole 3551 passes through the bottom of the cleaning head support block 355. At the same time, a guide channel 3552 is provided inside the cleaning head support block 355. Each spray hole 3551 is connected to the guide channel 3552, and the guide channel passes through one side of the cleaning head support block 355. The chip cleaning module 3 also includes a solvent supply device 36, which is used to introduce cleaning agent into the guide channel 3552, so that the spray hole 3551 can spray mist cleaning agent.

[0077] The chip cleaning module 3 is used to wipe the upper surface of the chip with the dust-free paper strip sprayed with atomized cleaning agent. Specifically, the two linear modules 21 alternately transport the chip to the position directly below the chip cleaning module 3. Since a motion module 5 is provided, it is convenient to drive the chip cleaning module 3 to be alternately located directly above the two linear modules 21; when the chip is directly below the chip cleaning module 3, the mist cleaning agent is sprayed onto the dust-free paper through the spray hole 3551, and the piston rod of the downward pressure cylinder 353 is extended, driving the cleaning head support block 355 to move downward and press the dust-free paper against the upper surface of the chip. At the same time, the paper tape recovery tray 33 is driven to rotate through the belt drive device 37, thereby driving the movement of the dust-free paper, so that the dust-free paper soaked with the cleaning agent can wipe the upper surface of the chip.

[0078] The lifting drive cylinder 351 is used to adjust the position of the cylinder seat 352, and the gap fine-tuning device is used to fine-tune the distance between the cleaning head support block 355 and the support seat 354, so as to facilitate the adjustment of the bottom of the cleaning head support block 355 to the appropriate position of the dust-free paper, and facilitate the precise control of the pressure generated by the cleaning head support block 355 on the dust-free paper when the downward pressure cylinder 353 performs the downward action, thereby helping to ensure the wiping effect of the dust-free paper on the chip.

[0079] In this embodiment, the functions of conveying, cleaning, air drying and detecting the chip can be completed in a set of devices, and since the two linear modules 21 convey the chips alternately, it is convenient to improve the conveying efficiency of the chips; a strip of dust-free paper is used in combination with a spray solvent, and the chip surface is cleaned by an automatic wiping method; in addition, the linear module 21, motion module 1 5 and motion module 2 6 in this embodiment are all linear module structures of the prior art, for example, the linear module disclosed in Chinese patent CN117537051A can be used.

[0080] Example 2

[0081] See also Figures 1-8This embodiment is based on the first embodiment. The solvent supply device 36 includes a cleaning solvent storage tank 361. The cleaning solvent storage tank 361 is arranged on the frame 1. A delivery pump is provided inside the cleaning solvent storage tank 361. A solvent pipe 362 is connected between the delivery pump and the guide channel 3552. That is, the cleaning agent stored in the cleaning solvent storage tank 361 is delivered to the guide channel through the delivery pump, so that the spray hole 3551 sprays the cleaning agent onto the dust-free paper; at the same time, the cleaning solvent storage tank 361 is provided with a liquid adding port.

[0082] Example 3

[0083] See also Figures 1-9 , this embodiment is based on the second embodiment, the visual inspection module 4 includes a mounting frame 41 fixedly set on the frame 1, and a camera fixing seat 43 is movably set on the mounting frame 41. Specifically, a linear guide rail is set between the camera fixing seat 43 and the mounting frame 41, so that the camera fixing seat 43 can move up and down; a camera lifting module 42 is set on the mounting frame 41, and the camera lifting module 42 includes a driving motor 421. The output end of the driving motor 421 is connected to the adjusting screw 422, and the adjusting screw 422 is rotatably set on the mounting frame 41; the external thread of the adjusting screw 422 is matched with the adjusting slider 423, and the adjusting slider 4 23 is movably set on the mounting frame 41 through a linear guide rail, and the adjusting slider 423 is fixedly connected to the camera fixing seat 43; an industrial camera 44 is installed on the camera fixing seat 43, and one end of the industrial camera 44 is connected to an industrial telecentric lens 45; at the same time, a coaxial light source 46 and an annular light source 47 are sequentially arranged directly below the industrial telecentric lens 45; when the chip moves to directly below the annular light source 47, the industrial camera 44 can detect the cleanliness of the chip; and by driving the adjusting screw 422 to rotate by the driving motor 421, the position of the camera fixing seat 43 can be adjusted, thereby realizing the up and down adjustment of the position of the industrial telecentric lens 45.

[0084] Since the two chip conveying modules 2 alternately convey chips to be cleaned by the chip cleaning module 3, in order to facilitate the visual inspection module 4 to inspect the chips on the two chip conveying modules 2, the motion module 2 6 can drive the visual inspection module 4 to move, thereby realizing that the visual inspection module 4 corresponds to the chips on different chip conveying modules 2.

[0085] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0086] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. An online chip automatic cleaning device, comprising a frame (1), characterized in that: Also includes: A chip conveying module (2), wherein the chip conveying module (2) drives the chip to move back and forth in a straight line, and the chip conveying module (2) has two, the two chip conveying modules (2) are arranged in parallel, and the two chip conveying modules (2) are both mounted on the frame (1); A chip cleaning module (3), wherein the chip cleaning module (3) is used to wipe the upper surface of the chip with dust-free paper sprayed with an atomized cleaning agent; A visual inspection module (4) detects the cleanliness of the chip, and the visual inspection module (4) is arranged on the rack (1).

2. The online chip automatic cleaning device according to claim 1, characterized in that: Also includes: A motion module (5) is provided on the frame (1), and the motion module (5) drives the chip cleaning module (3) to move linearly.

3. The online chip automatic cleaning device according to claim 2, characterized in that: Also includes: A second motion module (6), the second motion module (6) is arranged on the frame (1), and the second motion module (6) drives the visual detection module (4) to move linearly.

4. The online chip automatic cleaning device according to claim 3, characterized in that: Also includes: Ion blowers (7), there are two ion blowers (7), and both of the two ion blowers (7) are arranged on the frame (1); The two ion blowers (7) correspond to the positions of the motion module 1 (5) and the motion module 2 (6) respectively.

5. The online chip automatic cleaning device according to claim 1, characterized in that: The chip delivery module (2) comprises: A linear module (21), wherein the linear module (21) is arranged on the frame (1); A workbench (22), the workbench (22) being arranged on the linear module (21), and the workbench (22) being used for placing chips; a vacuum generator (24), wherein the vacuum generator (24) is installed on the workbench (22); Wherein, the workbench (22) is provided with a plurality of positioning holes (23) for placing chips; The vacuum generator (24) is used to generate negative pressure inside the positioning hole (23).

6. The online chip automatic cleaning device according to claim 1, characterized in that: The chip cleaning module (3) comprises: A mounting substrate (31), wherein the mounting substrate (31) is arranged on the frame (1); a paper tape supply tray (32), the paper tape supply tray (32) being rotatably mounted on the mounting base plate (31); a paper tape recovery tray (33), the paper tape recovery tray (33) being rotatably mounted on the mounting base plate (31), and the paper tape recovery tray (33) being driven to rotate by a belt drive device (37); a cleaning mechanism (35), the cleaning mechanism (35) being arranged on the mounting substrate (31); A conveying support roller (34), wherein the conveying support roller (34) is provided in plurality, and each of the conveying support rollers (34) is rotatably arranged on the mounting substrate (31); The dust-free paper roll is sleeved on the paper tape supply material tray (32), and one end of the dust-free paper roll passes around each conveying support roller (34) and is connected to the paper tape recovery material tray (33).

7. The online chip automatic cleaning device according to claim 6, characterized in that: The cleaning mechanism (35) comprises: A mounting base (357), the mounting base (357) being disposed on the mounting substrate (31); a cylinder seat (352), the cylinder seat (352) being movably disposed on the mounting base (357); A lifting drive cylinder (351), wherein the lifting drive cylinder (351) is mounted on the mounting base (357), and an output end of the lifting drive cylinder (351) is connected to a cylinder seat (352); A downward-pressing cylinder (353), wherein the downward-pressing cylinder (353) is arranged on the cylinder seat (352); A support seat (354), the support seat (354) is movably arranged on the mounting base plate (31), and the output end of the downward pressure cylinder (353) is connected to the support seat (354); A cleaning head support block (355), wherein the cleaning head support block (355) is movably arranged on the support seat (354), and a plurality of spray holes (3551) are arranged on the cleaning head support block (355), and each of the spray holes (3551) faces the dust-free paper downward; A gap fine-tuning device, the gap fine-tuning device is arranged on the support seat (354), and the gap fine-tuning device is used to adjust the gap between the cleaning head support block (355) and the dust-free paper; a solvent supply device (36), wherein the solvent supply device (36) is used to introduce a cleaning agent into the spray hole (3551); Wherein, a guide channel (3552) is provided on the cleaning head support block (355), and each of the spray holes (3551) is connected to the guide channel (3552).

8. The online automatic chip cleaning device according to claim 7, characterized in that: The solvent supply device (36) comprises: a cleaning solvent storage tank (361), wherein the cleaning solvent storage tank (361) is arranged on the frame (1); a solvent tube (362), one end of which is connected to the flow guide channel (3552); The cleaning solvent storage tank (361) is provided with a delivery pump, which delivers the cleaning agent in the cleaning solvent storage tank (361) to the solvent pipe (362).

9. The online automatic chip cleaning device according to claim 1, characterized in that: The visual detection module (4) comprises: A mounting frame (41), the mounting frame (41) being arranged on the frame (1); a camera fixing seat (43), the camera fixing seat (43) being movably arranged on the mounting frame (41); An industrial camera (44), the industrial camera (44) being mounted on the camera fixing seat (43), and the industrial camera (44) being connected to an industrial telecentric lens (45); A coaxial light source (46), the coaxial light source (46) being disposed on the mounting frame (41), and the coaxial light source (46) being located directly below the industrial telecentric lens (45); an annular light source (47), the annular light source (47) being located directly below the coaxial light source (46), and the annular light source (47) being disposed on the mounting frame (41); A camera lifting module (42) is provided on the mounting frame (41), and the camera lifting module (42) drives the camera fixing seat (43) to move up and down.

10. The online automatic chip cleaning device according to claim 9, characterized in that: The camera lifting module (42) comprises: a driving motor (421), wherein the driving motor (421) is mounted on the mounting frame (41); an adjusting screw (422), the adjusting screw (422) being rotatably mounted on the mounting frame (41); an adjusting slider (423), wherein the adjusting slider (423) is threadedly engaged with the outside of the adjusting screw (422), and the adjusting slider (423) is movably arranged on the mounting frame (41); The output end of the driving motor (421) is connected to the adjusting screw (422), and the adjusting slider (423) is fixedly connected to the camera fixing seat (43).

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