Automatic tray cleaning and baking equipment

Abstract

The utility model provides automatic tray cleaning and baking equipment which comprises a shell, a containing cavity is formed in the shell, a carrying mechanism, a plurality of cleaning grooves and a plurality of baking grooves are arranged in the containing cavity, the tops of the cleaning grooves and the tops of the baking grooves are movably connected with a cover body, and a plurality of ultrasonic emitters are arranged at the top of the shell. The ultrasonic transmitter corresponds to the cleaning tank in position, a plurality of heating rods, a plurality of bubbling pipes and a plurality of ultrasonic vibration plates are arranged in the cleaning tank, an air inlet and an air outlet are formed in the inner wall of the baking tank, and the shell is connected with a control cabinet. A plurality of cleaning tanks and a plurality of baking tanks are arranged, tray carriers are carried among the tank bodies through the carrying mechanism, the cleaning and baking processes of trays can be completed in one device, the process is efficient, manual carrying is not needed, operators do not need to undertake safety risks, the control process is efficient, simple and unified through the arrangement of the control cabinet, and the practicability is high. And the labor cost is greatly reduced.

Description

Technical Field

[0001] The utility model relates to semiconductor production technology, in particular to automatic cleaning and baking equipment for a tray. Background Art

[0002] In existing LED production, tray fixtures are required during the dry etching process. The trays include quartz trays, SIC trays, aluminum trays and other different materials.

[0003] After use, the pallets need to be cleaned and baked. During the cleaning process, the pallets are placed in a cleaning tank, which is then filled with water and treated with ultrasonic and heating methods to assist in cleaning. After cleaning, the pallets are placed in a baking device where they are dried by hot air.

[0004] Existing cleaning and baking equipment typically has separate washing and baking tanks, with a small number of tanks. When handling large numbers of pallets, manual timing for cleaning and baking is required, resulting in low efficiency. Furthermore, the equipment's tanks are large and the baking temperatures are high, making manual handling of pallets between tanks inefficient and posing safety risks to both the pallets and workers. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of the present invention is to provide an automatic tray cleaning and baking device, aiming to solve the problems of low efficiency and safety risks of the tray cleaning and baking device in the existing technology.

[0006] In order to achieve the above purpose, the present invention is implemented through the following technical solutions:

[0007] A tray automatic cleaning and baking device comprises a shell, a accommodating cavity is provided inside the shell, a conveying mechanism, a plurality of cleaning slots and a plurality of baking slots are provided in the accommodating cavity, the conveying mechanism is used to carry a carrier equipped with trays, the tops of the plurality of cleaning slots and the plurality of baking slots are movably connected to a cover body so that the cleaning slots or the baking slots can be covered when the trays are cleaned or baked, a plurality of ultrasonic emitters are provided on the top of the shell, the ultrasonic emitters correspond to the positions of the cleaning slots, a plurality of heating rods, a plurality of bubbling tubes and a plurality of ultrasonic vibration plates are provided inside the cleaning slots, the baking slots are used to bake the trays, and the shell is connected to a control cabinet, which is used to supply power and control the loading and unloading, cleaning and baking processes.

[0008] Compared with the prior art, the beneficial effect of the present invention is that by setting up a plurality of the cleaning tanks and a plurality of the baking tanks, and using the conveying mechanism to convey the tray carrier between the tank bodies, the cleaning and baking processes of the tray can be completed in one device. The process is efficient and does not require manual handling, and the operator does not need to bear safety risks. The cleaning process is equipped with a plurality of the ultrasonic transmitters, a plurality of the heating rods, a plurality of the bubbling tubes and a plurality of the ultrasonic vibration plates. Not only can effective cleaning be achieved through ultrasonic waves and heating, the bubbling tubes further improve the cleaning performance of the cleaning tank; by setting up the control cabinet, the intelligence level of loading and unloading, cleaning and baking is improved, the control process is efficient, simple and unified, and the labor cost is greatly reduced.

[0009] Furthermore, the ultrasonic vibration plate is located on the inner wall of the cleaning tank, several of the heating rods and several of the bubbling tubes are located at the bottom of the cleaning tank, a liquid level sensor and several spray pipes are set on the inner wall of the cleaning tank, and the bottom of the cleaning tank is connected to the water inlet pipe and the first drain pipe.

[0010] Furthermore, an overflow groove is opened at the top of the inner wall of the cleaning tank, and an overflow port is opened at the bottom of the overflow groove. The overflow port is connected to the second drain pipe to discharge the water overflowing into the overflow groove through the overflow port and the second drain pipe.

[0011] Furthermore, a slope is provided at the bottom of the cleaning tank, and the slope is used to drain water into the first drain pipe.

[0012] Furthermore, an air inlet and an exhaust port are provided on the inner wall of the baking tank, the air inlet is connected to an air inlet pipe, the air inlet pipe is used to connect to a blower, and the exhaust port is connected to an exhaust pipe.

[0013] Furthermore, a louver fan and a filter are provided on the air inlet.

[0014] Furthermore, the transport mechanism includes a first guide rail, a second guide rail and a mechanical gripper, the inner side wall of the shell is connected to the first guide rail, the first guide rail is slidably connected to the second guide rail, the second guide rail is slidably connected to the mechanical gripper, the mechanical gripper is used to grab the carrier, the first guide rail is provided with a first driving device, the first driving device is used to drive the second guide rail to slide on the first guide rail, the second guide rail is provided with a second driving device, the second driving device is used to drive the mechanical gripper to slide on the second guide rail.

[0015] Furthermore, several of the cleaning troughs and several of the baking troughs are arranged at staggered intervals, the shell is provided with loading and unloading ports, the cleaning trough abuts one end of the loading and unloading device, the end of the loading and unloading device facing away from the cleaning trough abuts the loading and unloading ports, the outer wall of the shell is connected to the transfer device, the transfer device is adapted to the loading and unloading device, and corresponds to the position of the loading and unloading ports.

[0016] Furthermore, the shell is provided with loading and unloading observation ports, several tank body observation ports and several maintenance ports, the loading and unloading observation ports correspond to the positions of the loading and unloading ports, and the tank body observation ports and the maintenance ports both correspond to the positions of the cleaning tank or the baking tank.

[0017] Furthermore, a plurality of buttons and a plurality of timers are provided on the control cabinet, and the timers correspond to the cleaning tanks or the baking tanks. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a structural diagram of the automatic tray cleaning and baking equipment in an embodiment of the present utility model;

[0019] Figure 2 This is a partial structural diagram of the automatic tray cleaning and baking device in an embodiment of the present utility model;

[0020] Figure 3 This is a partial structural diagram of the transport mechanism in the automatic tray cleaning and baking equipment in an embodiment of the present utility model;

[0021] Figure 4 This is a schematic diagram from another perspective of a partial structure of the automatic tray cleaning and baking device in an embodiment of the present utility model;

[0022] Figure 5 This is a schematic structural diagram from a first perspective of a cleaning tank and a baking tank in the automatic tray cleaning and baking device according to an embodiment of the present invention;

[0023] Figure 6 This is a schematic structural diagram from a second perspective of the cleaning tank and baking tank in the automatic tray cleaning and baking equipment according to an embodiment of the present invention;

[0024] Description of main component symbols:

[0025]

[0026]

[0027] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0028] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be provided below with reference to the accompanying drawings. The drawings illustrate several embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the present invention.

[0029] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.

[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of this invention are intended only to describe specific embodiments and are not intended to limit the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0031] See also Figures 1 to 6The tray automatic cleaning and baking device in the embodiment of the present invention includes a shell 100, a receiving cavity is provided inside the shell 100, a conveying mechanism, a plurality of cleaning slots 300 and a plurality of baking slots 400 are provided in the receiving cavity, the plurality of cleaning slots 300 and the plurality of baking slots 400 are arranged at staggered intervals, the shell 100 is provided with a loading and unloading port 110, the cleaning slot 300 abuts one end of the loading and unloading device 230, the end of the loading and unloading device 230 facing away from the cleaning slot 300 abuts the loading and unloading port 110, and the outer wall of the shell 100 is connected to the transfer device 17 0, the transfer device 170 is adapted to the loading and unloading device 230, and corresponds to the position of the loading and unloading port 110, the shell 100 is provided with a loading and unloading observation port 120, a plurality of tank observation ports 150 and a plurality of maintenance ports 160, the loading and unloading observation port 120 corresponds to the position of the loading and unloading port 110, the tank observation port 150 and the maintenance port 160 both correspond to the position of the cleaning tank 300 or the baking tank 400, and a plurality of ultrasonic transmitters 130 are provided on the top of the shell 100, and the ultrasonic transmitter 130 corresponds to the position of the cleaning tank 300.Preferably, the shell 100 is a rectangular parallelepiped with a length of 5m, a height of 2.5m and a width of 2.4m. Two cleaning tanks 300 and two baking tanks 400 are arranged inside the shell 100. The four tanks have the same volume and are in the shape of a cube. The side length of the tank is 1.2m. The top of the shell 100 is made of transparent material. The loading and unloading ports 110 are arranged on the side walls of the short sides of the shell 100. A rolling area is arranged on the top of the loading and unloading device 230. The rolling area is 100cm long and 65cm wide for the loading and unloading of trays and their carriers. Seven rollers are arranged in the rolling area, each of which is 55 cm long and 4 cm in diameter. The interval between adjacent rollers is 14 cm. The rollers are used to drive the carrier to move on the loading and unloading device 230. Specifically, the rolling friction caused by the rollers causes less loss to the carrier than the sliding friction. Baffles 231 are arranged on both sides of the rollers. The length of the baffles 231 is 100 cm, the height is 4 cm, and the width is 1.5 cm. The baffles 231 can prevent the carrier from leaving the rolling area and always keep it in the loading and unloading device 230. 0, a plurality of supporting legs are provided at the bottom of the loading and unloading device 230, and the transfer device 170 adapted and docked with the loading and unloading device 230 is a cart with a plurality of rollers on the top. The transfer device 170 facilitates the operator to transfer the tray to be cleaned and baked or the tray to be cleaned and baked and the carrier thereof to other locations. The number of the plurality of trough observation ports 150 is 4, corresponding to the four troughs. The trough observation port 150 is a flat push observation window, specifically corresponding to the upper position of the trough, for observing the trough and the carrier entering or leaving In the case of the trough body, the trough body observation port 150 is 120 cm long and 70 cm wide, with 2 cm chamfers on all four sides. The maintenance port 160 is provided with a double-opening panel for maintenance of the trough body. Four maintenance ports 160 are respectively provided on the opposite side walls of the shell 100. The maintenance ports 160 are 120 cm long and 110 cm wide, with 2 cm chamfers on all four sides. Four ultrasonic transmitters 130 are provided directly above each cleaning tank 300, that is, eight ultrasonic transmitters 130 are provided on the top of the shell 100. It can be understood that after the tray is used in the semiconductor production process, it is transported to the loading and unloading device 230 through the transfer device 170, completes the entire cleaning and baking process inside the shell 100, and then is transported out through the loading and unloading device 230. During the conversion process of cleaning and baking, the operator does not need to be in a high-temperature environment. The multiple cleaning tanks 300 and the baking tanks 400 form an integrated cleaning and baking system, which greatly saves manpower, improves work efficiency, and ensures the safety of the operator.

[0032] The transport mechanism is used to transport the carrier equipped with the pallet, and includes a first guide rail 200, a second guide rail 210, and a mechanical gripper 220. The inner side wall of the housing 100 is connected to the first guide rail 200, the first guide rail 200 is slidably connected to the second guide rail 210, the second guide rail 210 is slidably connected to the mechanical gripper 220, and the mechanical gripper 220 is used to grab the carrier. The first guide rail 200 is provided with a first driving device 201, and the first driving device 201 is used to drive the second guide rail 210 to slide on the first guide rail 200. The second guide rail 210 is provided with a second driving device 211, and the second driving device 211 is used to drive the mechanical gripper 220 to slide on the second guide rail 210. Preferably, refer to Figure 2 and Figure 3 , the first guide rail 200 is a horizontal guide rail with a length of 450cm, a width of 30cm, and a height of 30cm, connected to the inner wall of the shell 100, and the second guide rail 210 is a vertical guide rail with a length of 200cm and a width of 30cm. The second guide rail 210 is connected to the first guide rail 200 by a slider, and the mechanical gripper 220 includes a steel block and a claw. The steel block is a rectangular parallelepiped with a length of 40cm and a width and height of 5cm. The claw is welded on the lower surface of the steel block, and the claw is I-shaped as a whole. The claw includes four conical hooks, and the bottom of the hook is warped upward for grabbing the carrier. The first driving device 201 and the second driving device 202 are both powered by motors. It can be understood that the conveying mechanism is more flexible in conveying the carrier. The automatic cleaning and baking equipment for trays can complete the automatic cleaning and automatic baking of a large number of trays without manual labor, with high work efficiency and saving manpower and material resources.

[0033] The tops of the plurality of cleaning tanks 300 and the plurality of baking tanks 400 are movably connected to the cover 500 so as to cover the cleaning tank 300 or the baking tank 400 when cleaning or baking the tray. The interior of the cleaning tank 300 is provided with a plurality of heating rods 350, a plurality of bubbling tubes 360 and a plurality of ultrasonic vibration plates 320. The ultrasonic vibration plates 320 are located on the inner side wall of the cleaning tank 300. The plurality of heating rods 350 and the plurality of bubbling tubes 360 are located at the bottom of the cleaning tank 300. A liquid level sensor 340 and several spray pipes 330 are set on the inner wall of the cleaning tank 300. The bottom of the cleaning tank 300 is connected to the water inlet pipe 303 and the first drain pipe 301. An overflow tank 310 is set at the top of the inner wall of the cleaning tank 300. An overflow port is set at the bottom of the overflow tank 310. The overflow port is connected to the second drain pipe 302 to discharge the water overflowing into the overflow tank 310 through the overflow port and the second drain pipe 302. A slope is set at the bottom of the cleaning tank 300, and the slope is used to discharge the water into the first drain pipe 301. Preferably, the connection between the cover body 500 and the trough body is a push-pull type. The use of the cover body 500 can reduce the heat loss in the trough body and separate several of the cleaning troughs 300 and several of the baking troughs 400 to avoid mutual influence. The upper surface of the cover body 500 is square with a side length of 1.3m. Extensions are provided on the opposite sides of the cover body 500, and the extensions face the trough body to improve the sealing of the cover body 500 to the trough body on both sides of the trough body. A telescopic rod is provided on the central axis of the cover body 500, and the telescopic rod is connected to the cylinder to provide power for the cover body 500 to slide back and forth at the top of the trough body.

[0034] Furthermore, six heating rods 350 and three bubbling tubes 360 are provided at the bottom of the cleaning tank 300. The height of the heating rods 350 from the bottom surface of the cleaning tank 300 is 20 cm. The heating rods 350 are 65 cm long and 4 cm in diameter. The interval between adjacent heating rods 350 is 20 cm. The bubbling tubes 360 are 90 cm long and 2 cm in diameter. Several bubbling holes with a diameter of 0.5 cm are provided on the bubbling tubes 360. The interval between adjacent bubbling holes is 6 cm. Nitrogen is passed through the bubbling tubes 360 and controlled by a pneumatic valve. The bubbling tubes 360 are used to remove dirt from the surface of the tray through bubbles after ultrasonic cleaning. The length and width of the ultrasonic vibration plate 320 are both 70 cm. The ultrasonic vibration plate 320 is connected to the ultrasonic transmitter 130. Ultrasonic waves are beneficial for vibrating out dirt on the tray. Two spray pipes 330 are provided on the inner wall of the cleaning tank 300. Several spray holes are opened on the spray pipe 330. The interval between adjacent spray holes is 15 cm. The length of the spray pipe 330 is 1 m and the diameter is 2 cm. The spray pipe 330 is beneficial to make the dirt be washed more cleanly and thoroughly. The overflow groove 310 surrounds the inner wall of the cleaning tank 300. When the liquid level sensor 340 fails, the excess cleaning water can be discharged through the overflow groove 310 to prevent the cleaning water from overflowing and affecting the interior of the equipment. The overflow port is located on the side where the cleaning tank 300 is connected to the cover body 500. The first drain pipe 301 is provided with a pneumatic valve, and the water inlet pipe 303 is connected to the main water inlet pipe of the equipment. The main water inlet pipe is provided with a starter and a manual valve, which can realize automatic water replenishment and manual water replenishment. The distance between the liquid level sensor 340 and the top of the cleaning tank 300 is 10 cm. It can be understood that the cleaning tank 300 has a strong cleaning performance.

[0035] The baking slot 400 is used to bake the tray. An air inlet 410 and an exhaust port 420 are provided on the inner wall of the baking slot 400. The air inlet 410 is connected to an air inlet pipe 401, which is used to connect to a blower. The exhaust port 420 is connected to an exhaust pipe 402. A louver fan and a filter are provided on the air inlet 410. Preferably, the air inlet 410 is rectangular, 50 cm long and 40 cm wide. The blower is used to provide heated air into the baking slot 400. The exhaust port 420 is a circular hole with a diameter of 20 cm. A check valve is provided on the exhaust pipe 402. An aluminum panel is provided inside the baking slot 400. It is understood that the louver fan and the filter can even out and adjust the air direction, so that the tray is heated more evenly. The baking slot 400 has excellent heating efficiency and requires a short baking time.

[0036] The housing 100 is connected to a control cabinet 140, which is used to supply power and control the loading and unloading, cleaning, and baking processes. The control cabinet 140 is provided with several buttons 141 and several timers, each corresponding to the cleaning tank 300 or the baking tank 400. Preferably, the control cabinet 140 is provided with start, stop, and pause buttons. Four timers are provided on the control cabinet 140, one corresponding to each of the four tanks, for setting the heating, bubbling, ultrasonic, and baking times. The control cabinet 140 is also provided with a display screen. As can be understood, the control cabinet 140 enables intelligent control of each detailed cleaning and baking process, eliminating the need for manual monitoring and improving the operational efficiency of the automatic tray cleaning and baking equipment.

[0037] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0038] The above-described embodiments merely represent several implementation methods of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A tray automatic cleaning and baking device, characterized in that: The utility model comprises a shell, wherein a accommodating cavity is arranged inside the shell, and a conveying mechanism, a plurality of cleaning slots and a plurality of baking slots are arranged inside the accommodating cavity, the conveying mechanism is used to convey a carrier equipped with a tray, the tops of the plurality of cleaning slots and the plurality of baking slots are movably connected to a cover body, so that the cleaning slots or the baking slots can be covered when the trays are cleaned or baked, a plurality of ultrasonic emitters are arranged on the top of the shell, the ultrasonic emitters correspond to the positions of the cleaning slots, a plurality of heating rods, a plurality of bubbling tubes and a plurality of ultrasonic vibration plates are arranged inside the cleaning slots, the baking slots are used to bake the trays, and the shell is connected to a control cabinet, which is used to supply power and control the loading and unloading, cleaning and baking processes.

2. The automatic tray cleaning and baking equipment according to claim 1, characterized in that: The ultrasonic vibration plate is located on the inner wall of the cleaning tank, several heating rods and several bubbling tubes are located at the bottom of the cleaning tank, a liquid level sensor and several spray pipes are set on the inner wall of the cleaning tank, and the bottom of the cleaning tank is connected to the water inlet pipe and the first drain pipe.

3. The automatic tray cleaning and baking equipment according to claim 1, characterized in that: An overflow groove is opened at the top of the inner wall of the cleaning tank, and an overflow port is opened at the bottom of the overflow groove. The overflow port is connected to the second drain pipe to discharge the water overflowing into the overflow groove through the overflow port and the second drain pipe.

4. The automatic tray cleaning and baking equipment according to claim 2, characterized in that: A slope is provided at the bottom of the cleaning tank, and the slope is used to drain water into the first drain pipe.

5. The automatic tray cleaning and baking equipment according to claim 1, characterized in that: An air inlet and an air exhaust port are provided on the inner wall of the baking tank. The air inlet is connected to an air inlet pipe, the air inlet pipe is used to connect to a blower, and the exhaust port is connected to an exhaust pipe.

6. The automatic tray cleaning and baking equipment according to claim 5, characterized in that: A louver fan and a filter are arranged on the air inlet.

7. The automatic tray cleaning and baking equipment according to claim 1, characterized in that: The conveying mechanism includes a first guide rail, a second guide rail and a mechanical gripper. The inner side wall of the shell is connected to the first guide rail, the first guide rail is slidably connected to the second guide rail, the second guide rail is slidably connected to the mechanical gripper, and the mechanical gripper is used to grab the carrier. The first guide rail is provided with a first driving device, and the first driving device is used to drive the second guide rail to slide on the first guide rail. The second guide rail is provided with a second driving device, and the second driving device is used to drive the mechanical gripper to slide on the second guide rail.

8. The automatic tray cleaning and baking equipment according to claim 1, characterized in that: Several of the cleaning slots and several of the baking slots are arranged in a staggered manner, and the shell has a loading and unloading port. The cleaning slot abuts one end of the loading and unloading device, and the end of the loading and unloading device facing away from the cleaning slot abuts the loading and unloading port. The outer wall of the shell is connected to the transfer device, and the transfer device is adapted to the loading and unloading device and corresponds to the position of the loading and unloading port.

9. The automatic tray cleaning and baking equipment according to claim 1, characterized in that: The shell is provided with a loading and unloading observation port, a plurality of tank body observation ports and a plurality of maintenance ports. The loading and unloading observation port corresponds to the position of the loading and unloading port, and the tank body observation port and the maintenance port both correspond to the position of the cleaning tank or the baking tank.

10. The automatic tray cleaning and baking equipment according to claim 1, characterized in that: The control cabinet is provided with a plurality of buttons and a plurality of timers, and the timers correspond to the cleaning tanks or the baking tanks.

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