Carrier plate cleaning equipment

Abstract

The utility model relates to the technical field of coating equipment, in particular to support plate cleaning equipment, and aims to solve the problems of cleaning and maintaining a support plate. The problem of cleaning and maintaining the carrier plate is solved. The carrier plate cleaning equipment comprises a gantry crane, a reaction tank, a spraying tank, a bubbling rinsing tank and an ultrasonic rinsing tank, wherein the reaction tank, the spraying tank, the bubbling rinsing tank and the ultrasonic rinsing tank are arranged below the gantry crane; the reaction tank, the spraying tank, the bubbling rinsing tank and the ultrasonic rinsing tank are arranged below the gantry crane; the hot air drying groove and the control electric box are arranged below the gantry crane; the device further comprises a plurality of hoisting frames used for loading the carrier plates. A film layer on the carrier plate is removed through the reaction of acid in the reaction tank, then acid liquor on the carrier plate is cleaned and removed through the spraying tank, the bubbling rinsing tank and the ultrasonic rinsing tank, finally, the carrier plate is dried through the hot air drying tank, and finally cleaning and maintaining of the carrier plate are completed.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a carrier plate cleaning device. Background Art

[0002] With the development of the photovoltaic industry, PVD equipment has been widely used in various fields, including solar energy, electronics, and optics. The magnetron sputtering coating process is an important coating preparation technology. Magnetron sputtering is a physical vapor deposition technique that uses the combined action of magnetic and electric fields to sputter atoms or molecules from the target surface, forming a thin film on the substrate surface. The carrier plate is a key component of the PVD equipment. Its function is to place the material on which the thin film is to be prepared, then transport it to the sputtering chamber via a transmission system, where a thin film is deposited on the surface of the material by the sputtering system. A thin film is also deposited on the rest of the carrier plate. The film layer thickens with increasing use, and when it reaches a certain thickness, the carrier plate requires cleaning and maintenance. Summary of the Invention

[0003] In view of this, the purpose of the present invention is to provide a carrier cleaning device to solve the problem of cleaning and maintaining the carrier.

[0004] Based on the above-mentioned purpose, the utility model provides a carrier cleaning equipment, including a gantry crane, a reaction tank arranged under the gantry crane, a spray tank arranged under the gantry crane, a bubbling rinsing tank arranged under the gantry crane, an ultrasonic rinsing tank arranged under the gantry crane, a hot air drying tank arranged under the gantry crane and a control electrical box; it also includes several lifting frames for loading carriers; the gantry crane is used to transport the lifting frames loaded with carriers; the reaction tank is provided with acid cleaning liquid for pickling the placed carriers; the spray tank is used to spray the placed carriers to remove the acid on the surface of the carriers; the bubbling rinsing tank is used to perform a first step rinsing on the placed carriers; the ultrasonic rinsing tank is used to perform a second step rinsing on the placed carriers; the hot air drying tank is used to dry the placed carriers; the control electrical box is connected to the gantry crane with electrical signals to control the operation of the gantry crane.

[0005] As a further improvement of the present application, the reaction tank is made of corrosion-resistant PP material, and the number of the reaction tanks is more than two.

[0006] As a further improvement of the present application, the spray tank, the bubbling rinsing tank, the ultrasonic cleaning tank and the hot air drying tank are all made of stainless steel; the reaction tank, the bubbling rinsing tank, the ultrasonic cleaning tank and the hot air drying tank are arranged side by side.

[0007] As a further improvement of the present application, the reaction tank includes a reaction tank body, a dosing pneumatic diaphragm pump arranged outside the reaction tank body, an acid drainage diaphragm pump arranged outside the reaction tank body, and a liquid level sensor arranged inside the reaction tank body; pickling liquid is added to the reaction tank body by the dosing pneumatic diaphragm pump, and pickling liquid is reduced from the outside of the reaction tank body by the acid drainage diaphragm pump. The liquid position in the reaction tank body is sensed by the liquid level sensor. When the liquid level is lower than a set low value, pickling liquid is added to the reaction tank body, and when the liquid level is higher than a set high value, pickling liquid is reduced from the outside of the reaction tank body.

[0008] As a further improvement of the present application, the substrate cleaning equipment further includes a waste solution storage barrel for storing waste liquid.

[0009] As a further improvement of the present application, a splash-proof reflux port is provided at the top of the reaction tank body.

[0010] As a further improvement of the present application, the spray trough includes a spray trough body, a spray liquid storage tank arranged outside the spray trough body, a spray pump arranged outside the spray trough body and a spray pipe arranged on the side of the inside of the spray trough body. The spray trough body, the spray pump and the spray pipe are connected through a conduit, and a plurality of fan-shaped nozzles are provided on the spray pipe, and the fan-shaped nozzles point to the inside of the spray trough body.

[0011] As a further improvement of the present application, the bubbling rinsing tank includes a bubbling rinsing tank body, a circulation pump arranged on the bubbling rinsing tank body and a vent pipe arranged in the bubbling rinsing tank body; a mounting groove is provided at the bottom of the bubbling rinsing tank body, and the vent pipe is arranged in the mounting groove to keep the bottom of the bubbling rinsing tank body flat; a cleaning liquid is provided in the bubbling rinsing tank body, the vent pipe is connected with the circulation pump, the vent pipe is arranged at the bottom of the bubbling rinsing tank body, and a number of air outlet holes are evenly provided on the vent pipe, the circulation pump pumps air into the vent pipe, and bubbles emerge from the air outlet.

[0012] As a further improvement of the present application, the ultrasonic rinsing tank includes an ultrasonic rinsing tank body and an ultrasonic generator arranged on the ultrasonic rinsing tank body; the ultrasonic generator includes an ultrasonic generator arranged outside the ultrasonic rinsing tank body and a vibrator arranged inside the ultrasonic rinsing tank body; the ultrasonic generator is connected to the vibrator, and the ultrasonic rinsing tank body contains a cleaning liquid; an installation groove is provided at the bottom of the ultrasonic rinsing tank body, and the vibrator is arranged in the installation groove to keep the bottom of the ultrasonic rinsing tank body flat.

[0013] As a further improvement of the present application, the hot air drying tank includes a drying tank body, an air heater and a blower arranged on the drying tank body, the blower blows air to the air heater, and the air heater heats the air and then guides it into the drying tank body.

[0014] The beneficial effects of the utility model are as follows: the film layer on the carrier is removed by the reaction of the acid in the reaction tank, and then the acid liquid on the carrier is removed by cleaning through the spray tank, the bubbling rinsing tank and the ultrasonic rinsing tank, and finally the carrier is dried by the hot air drying tank, thereby finally completing the cleaning and maintenance of the carrier. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1 This is a structural diagram of a carrier cleaning device according to an embodiment of the present utility model;

[0017] Figure 2 This is a schematic structural diagram of a reaction tank of a carrier cleaning device according to an embodiment of the present utility model;

[0018] Figure 3 This is a schematic structural diagram of a spray tank, a bubbling rinse tank, and an ultrasonic rinse tank of a substrate cleaning device according to an embodiment of the present invention;

[0019] Figure 4 This is a schematic diagram of the supplementary structure of a spray tank of a carrier cleaning device according to an embodiment of the present utility model;

[0020] Figure 5 This is a structural schematic diagram of a hot air drying tank and a hoisting frame of a carrier cleaning device according to an embodiment of the present utility model;

[0021] Figure 6 This is a schematic top view of the structure of a carrier cleaning device according to an embodiment of the present utility model.

[0022] The following are marked in the figure:

[0023] 1. Hoisting frame; 2. Gantry crane; 3. Reaction tank; 31. Reaction tank body; 32. Dosing pneumatic diaphragm pump; 33. Acid drainage diaphragm pump; 4. Waste solution storage barrel; 5. Spray tank; 51. Spray tank body; 52. Spray storage tank; 53. Spray pump; 54. Spray pipe; 6. Bubble rinsing tank; 61. Bubble rinsing tank body; 62. Circulation pump; 63. Ventilation pipe; 7. Ultrasonic rinsing tank; 71. Ultrasonic rinsing tank body; 72. Ultrasonic generator; 73. Vibrator; 8. Hot air drying tank; 81. Drying tank body; 82. Air heater; 83. Blower; 10. Control electrical box. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0025] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the usual meanings understood by people with ordinary skills in the field to which this utility model belongs. The "first", "second" and similar words used in this utility model do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative position relationships. When the absolute position of the object being described changes, the relative position relationship may also change accordingly.

[0026] like Figure 1As shown, a carrier cleaning device includes a gantry crane 2, a reaction tank 3 arranged below the gantry crane 2, a spray tank 5 arranged below the gantry crane 2, a bubbling rinsing tank 6 arranged below the gantry crane 2, an ultrasonic rinsing tank 7 arranged below the gantry crane 2, a hot air drying tank 8 arranged below the gantry crane 2 and a control box 10; it also includes a plurality of hoisting frames 1 for loading carriers; the gantry crane 2 is used to lift the hoisting frames loaded with carriers 1 for transport; the reaction tank 3 is provided with pickling liquid for pickling the placed carrier; the spray tank 5 is used to spray the placed carrier to remove the acid on the surface of the carrier; the bubbling rinsing tank 6 is used to perform the first step of rinsing on the placed carrier; the ultrasonic rinsing tank 7 is used to perform the second step of rinsing on the placed carrier; the hot air drying tank 8 is used to dry the placed carrier; the control electric box 10 is connected to the gantry crane 2 by electrical signals to control the operation of the gantry crane 2.

[0027] The gantry crane 2 first hoists the hoisting frame 1 loaded with the carrier plate into the reaction tank 3 for pickling. After the pickling is completed, the gantry crane 2 hoists the hoisting frame 1 into the spray tank 5 for spraying, preliminary cleaning, and partially removes the acid on the surface of the carrier plate. After the spraying is completed, the gantry crane 2 hoists the hoisting frame 1 into the bubbling rinsing tank 6 for the first step of rinsing. After the first step of rinsing is completed, the gantry crane 2 hoists the hoisting frame 1 into the ultrasonic rinsing tank 7 for the second step of rinsing. After the first step of rinsing is completed, the gantry crane 2 hoists the hoisting frame 1 into the hot air drying tank 8 for drying. After drying is completed, the gantry crane 2 hoists the hoisting frame 1 away to complete the carrier plate cleaning procedure.

[0028] To avoid participating in the reaction, the reaction tank 3 is made of corrosion-resistant PP material, and there are at least two reaction tanks 3. The spray tank 5, the bubbling rinsing tank 6, the ultrasonic cleaning tank 7, and the hot air drying tank 8 are all made of stainless steel; the reaction tank 3, the bubbling rinsing tank 6, the ultrasonic cleaning tank 7, and the hot air drying tank 8 are arranged side by side.

[0029] The reaction tank 3 includes a reaction tank body 31, a pneumatic diaphragm pump 32 for dosing disposed outside the reaction tank body 31, a diaphragm pump 33 for acid drainage disposed outside the reaction tank body 31, and a liquid level sensor disposed inside the reaction tank body 31. The pneumatic diaphragm pump 32 for dosing adds pickling liquid to the reaction tank body 31, while the diaphragm pump 33 for acid drainage removes pickling liquid from the reaction tank body 31. The liquid level sensor senses the liquid level in the reaction tank body 31. When the liquid level is below a set low value, pickling liquid is added to the reaction tank body 31. When the liquid level is above a set high value, pickling liquid is removed from the reaction tank body 31.

[0030] Specifically, the pickling solution is 68% nitric acid, and the stainless steel is 316L stainless steel. Compared to traditional 304 and 316 stainless steel, 316L stainless steel has a lower carbon content, generally less than or equal to 0.03%, while the carbon content of 304 and 316 stainless steel is generally less than or equal to 0.08%. The low carbon content can reduce the risk of intergranular corrosion, so 316L stainless steel has better corrosion resistance and high temperature resistance during the welding process.

[0031] The carrier cleaning device further includes a waste solution storage barrel 4 for storing waste liquid.

[0032] In order to reduce splashing, a splash-proof reflux port is provided at the top of the reaction tank body 31 .

[0033] The spray tank 5 includes a spray tank body 51, a spray liquid storage tank 52 disposed outside the spray tank body 51, a spray pump 53 disposed outside the spray tank body 51, and a spray pipe 54 disposed on the side of the interior of the spray tank body 51. The spray tank body 51, the spray pump 53, and the spray pipe 54 are connected by a conduit. The spray pipe 54 is provided with a plurality of fan-shaped nozzles, which point toward the interior of the spray tank body 51. The spray liquid stored in the spray tank body 51 is pumped out by the spray pump 53 and sprayed out through the fan-shaped nozzles to clean the carrier plate in the spray tank body 51.

[0034] The bubbling rinsing tank 6 includes a bubbling rinsing tank body 61, a circulating pump 62 arranged on the bubbling rinsing tank body 61 and a vent pipe 63 arranged in the bubbling rinsing tank body 61; a mounting groove is provided at the bottom of the bubbling rinsing tank body 61, and the vent pipe 63 is arranged in the mounting groove to keep the bottom of the bubbling rinsing tank body 61 flat; a cleaning liquid is provided in the bubbling rinsing tank body 61, and the vent pipe 63 is connected with the circulating pump 62. The vent pipe 63 is arranged at the bottom of the bubbling rinsing tank body 61, and a number of air outlet holes are evenly provided on the vent pipe 63. The circulating pump 62 pumps air into the vent pipe 63, and bubbles emerge from the air outlet holes.

[0035] The generation of bubbles drives the cleaning liquid to roll, thereby increasing the rinsing effect.

[0036] The ultrasonic rinsing tank 7 includes an ultrasonic rinsing tank body 71 and an ultrasonic generator arranged on the ultrasonic rinsing tank body 71; the ultrasonic generator includes an ultrasonic generator 72 arranged outside the ultrasonic rinsing tank body 71 and a vibrator 73 arranged inside the ultrasonic rinsing tank body 71; the ultrasonic generator 72 is connected to the vibrator 73, and the ultrasonic rinsing tank body 71 contains cleaning liquid; an installation groove is provided at the bottom of the ultrasonic rinsing tank body 71, and the vibrator 73 is arranged in the installation groove to keep the bottom of the ultrasonic rinsing tank body 71 flat.

[0037] Ultrasonic waves are generated to push the cleaning liquid to further clean the internal carrier.

[0038] The hot air drying tank 8 includes a drying tank body 81, an air heater 82 mounted on the drying tank body 81, and a blower 83. The blower 83 blows air toward the air heater 82, which heats the air and directs it into the drying tank body 81. This allows the carrier to dry. After drying, the carrier is removed.

[0039] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples. Within the scope of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.

[0040] The present invention is intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A carrier cleaning device, characterized in that: The invention comprises a gantry crane (2), a reaction tank (3) arranged below the gantry crane (2), a spray tank (5) arranged below the gantry crane (2), a bubbling rinsing tank (6) arranged below the gantry crane (2), an ultrasonic rinsing tank (7) arranged below the gantry crane (2), a hot air drying tank (8) arranged below the gantry crane (2), and a control electric box (10); Also included are several lifting frames (1) for loading carrier plates; The gantry crane (2) is used to transport the hoisting frame (1) loaded with the carrier plate; The reaction tank (3) is provided with an acid wash liquid for acid washing the placed carrier plate; The spray tank (5) is used to spray the placed carrier plate to remove the acid liquid on the surface of the carrier plate; The bubbling rinsing tank (6) is used to perform the first step of rinsing on the placed carrier plate; The ultrasonic rinsing tank (7) is used to perform a second step of rinsing on the placed carrier plate; The hot air drying tank (8) is used to dry the placed carrier plate; The control electric box (10) is connected to the gantry crane (2) via electrical signals to control the operation of the gantry crane (2).

2. The carrier cleaning device according to claim 1, characterized in that: The reaction tanks (3) are made of corrosion-resistant PP material, and the number of the reaction tanks (3) is more than two.

3. The carrier cleaning device according to claim 1, characterized in that: The spray tank (5), the bubbling rinsing tank (6), the ultrasonic rinsing tank (7) and the hot air drying tank (8) are all made of stainless steel; The reaction tank (3), the bubbling rinsing tank (6), the ultrasonic rinsing tank (7) and the hot air drying tank (8) are arranged side by side.

4. The carrier cleaning device according to claim 1, characterized in that: The reaction tank (3) comprises a reaction tank body (31), a dosing pneumatic diaphragm pump (32) arranged outside the reaction tank body (31), an acid drainage diaphragm pump (33) arranged outside the reaction tank body (31), and a liquid level sensor arranged inside the reaction tank body (31); Acid washing liquid is added to the reaction tank body (31) by the dosing pneumatic diaphragm pump (32), and the acid washing liquid is reduced to the outside of the reaction tank body (31) by the acid drainage diaphragm pump (33). The liquid position in the reaction tank body (31) is sensed by the liquid level sensor. When the liquid level is lower than a set low value, acid washing liquid is added to the reaction tank body (31), and when the liquid level is higher than a set high value, acid washing liquid is reduced to the outside of the reaction tank body (31).

5. The carrier cleaning device according to claim 4, characterized in that: The carrier cleaning device further comprises a waste solution storage barrel (4) for storing waste liquid.

6. The carrier cleaning device according to claim 4, characterized in that: A splash-proof reflux port is provided on the top of the reaction tank body (31).

7. The carrier cleaning device according to claim 1, characterized in that: The spray trough (5) comprises a spray trough body (51), a spray liquid storage tank (52) arranged outside the spray trough body (51), a spray pump (53) arranged outside the spray trough body (51), and a spray pipe (54) arranged on the inner side of the spray trough body (51). The spray trough body (51), the spray pump (53) and the spray pipe (54) are connected through a conduit. The spray pipe (54) is provided with a plurality of fan-shaped nozzles, and the fan-shaped nozzles point to the inside of the spray trough body (51).

8. The carrier cleaning device according to claim 1, characterized in that: The bubbling rinsing tank (6) comprises a bubbling rinsing tank body (61), a circulation pump (62) arranged on the bubbling rinsing tank body (61), and a vent pipe (63) arranged in the bubbling rinsing tank body (61); The bottom of the bubbling and rinsing tank body (61) is provided with a mounting groove, and the vent pipe (63) is arranged in the mounting groove to keep the bottom of the bubbling and rinsing tank body (61) flat; The bubbling and rinsing tank (61) is provided with a cleaning liquid, the vent pipe (63) is connected to the circulation pump (62), the vent pipe (63) is arranged at the bottom of the bubbling and rinsing tank (61), and a plurality of air outlet holes are evenly provided on the vent pipe (63). The circulation pump (62) pumps air into the vent pipe (63), and bubbles emerge from the air outlet holes.

9. The carrier cleaning device according to claim 1, characterized in that: The ultrasonic rinsing tank (7) comprises an ultrasonic rinsing tank body (71) and an ultrasonic generator arranged on the ultrasonic rinsing tank body (71); The ultrasonic generator includes an ultrasonic generator (72) arranged outside the ultrasonic rinsing tank (71) and a vibrator (73) arranged inside the ultrasonic rinsing tank (71); The ultrasonic generator (72) is connected to the vibrator (73), and the ultrasonic rinsing tank (71) contains a cleaning liquid; The bottom of the ultrasonic rinsing tank body (71) is provided with a mounting groove, and the vibrator (73) is arranged in the mounting groove to keep the bottom of the ultrasonic rinsing tank body (71) flat.

10. The carrier cleaning device according to claim 1, characterized in that: The hot air drying tank (8) comprises a drying tank body (81), an air heater (82) and a blower (83) arranged on the drying tank body (81); the blower (83) blows air toward the air heater (82); and the air heater (82) heats the air and then guides the air into the drying tank body (81).

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