Machining device for quartz aluminum clamp lower disc

Abstract

The utility model discloses a processing device for a quartz aluminum clamp lower disc, which comprises a processing substrate, a limiting piece, a fixing piece and an aluminum clamp, the end face of the processing substrate is provided with a limiting groove, and the groove-shaped structure of the limiting groove is as follows: the periphery is arc-shaped, the four opposite angles are right-angle sides, and the right-angle sides are arc-shaped sides. A limiting groove is formed in the middle of the aluminum clamp, containing grooves are evenly formed in the inner circumferential direction of the limiting groove and the center of the limiting groove, the limiting pieces are fixed and limited in the groove area through fixing pieces, the fixing pieces are installed in the groove area through bolts, and the adjacent end faces of the aluminum clamp are limited and fixed through the limiting pieces and the fixing pieces. Limiting installation of flatness standard processing of the reference plane of the aluminum clamp is achieved, and the problems that in the prior art, glue is adopted for positioning the aluminum clamp, and low-efficiency processing and material waste of the glue procedure are avoided are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of calibration of a rope-type length measuring sensor, in particular to a processing device for a lower plate of a quartz aluminum fixture. Background Art

[0002] Wafer clamps are the most important auxiliary tools for electroplating processing. They are used in semiconductor manufacturing processes such as etching, grinding, deposition, and filling to clamp and limit the wafers, thereby improving the processing accuracy and quality assurance of semiconductors.

[0003] At present, the preferred fixture is aluminum. After the aluminum fixture is roughed, it will be deformed due to stress factors. Before finishing, the base surface of the product needs to be processed for subsequent finishing clamping and product flatness assurance.

[0004] Existing technologies address the deformation problem of aluminum products by using glue to bond them together, making them immune to external forces. This ensures that the resulting reference surface of the product will not be flattened after removal due to external forces. However, this method significantly reduces processing efficiency and increases glue costs.

[0005] For this reason, it is necessary to provide a processing device for the lower plate of the quartz aluminum fixture. Utility Model Content

[0006] To address the above-mentioned problems in the existing technology, the present invention provides a processing device for the lower plate of a quartz aluminum fixture. The device aims to secure the product to the fixture through the cooperation of a stopper and a fixing member, and to lock it with bolts to prevent it from loosening during the processing process. This greatly improves production efficiency and reduces costs.

[0007] In order to achieve the above-mentioned purpose, the utility model is realized through the following technical solutions: a processing device for the lower plate of a quartz aluminum fixture, comprising a processing substrate, a limiting part, a fixing part, and an aluminum fixture, a limiting groove is provided on the end surface of the processing substrate, and the groove structure of the limiting groove is set as follows: arc-shaped edges are formed on all sides, and four diagonal edges are set as right-angled edges, placement grooves are distributed in the inner circumferential direction of the limiting groove and in the center of the limiting groove, and the placement grooves are evenly distributed, positioning holes are distributed in the inner circumferential direction of the limiting groove and in the circumferential direction of the placement groove at the center, and the positioning holes are evenly distributed, and the surface of the processing substrate located at any two adjacent arc-shaped edges is provided with The groove area has screw holes provided inside the groove area, and an aluminum clamp is placed and installed inside the limiting groove. The shape and structure of the aluminum clamp matches the limiting groove setting. Positioning columns are provided on the end faces of the aluminum clamp corresponding to the positions of the positioning holes. The positioning columns are plugged into the positioning holes to position the aluminum clamp and the limiting groove. A limiting part is placed and installed on the side of the groove area adjacent to the limiting groove. The end face of the limiting part is in contact with the limiting groove and one end face of the aluminum clamp. A fixing part is provided on the side of the groove area away from the limiting groove. The fixing part is fixed in the groove area by bolts to fix the limiting part and position the aluminum clamp in the limiting groove.

[0008] Preferably, one end surface of the limiting member is configured as an arc-shaped structure 1, and the arc-shaped structure 1 overlaps and abuts against the arc-shaped end surface of one side of the aluminum clamp.

[0009] Preferably, one end surface of the limiting member is configured as a planar structure, and the planar structure is configured to overlap with the end surface of the fixing member.

[0010] Preferably, positioning holes are provided between the placement grooves distributed in the circumferential direction of the limiting groove.

[0011] Preferably, the surface of the fixing piece is provided with a countersunk hole.

[0012] In summary, the utility model provides a processing device for the lower plate of a quartz aluminum clamp. In order to fix the aluminum clamp inside the limiting groove, a groove area is opened on the surface of a processing substrate at any two adjacent arc-shaped edges of the limiting groove. The groove area is connected to the limiting groove. A limiting part is provided on one side of the groove area close to the limiting groove. One end face of the limiting part is in contact with the limiting groove and one end face of the aluminum clamp. The limiting part is fixed and limited by a fixing part inside the groove area. The fixing part is installed in the groove area by a bolt, so that the adjacent end faces of the aluminum clamp are limited and fixed by the limiting part and the fixing part, and the limited installation of the flatness of the reference plane of the aluminum clamp is achieved, which solves the problem of the existing technology of using glue to position the aluminum clamp, and avoids the inefficient processing and material waste of the gluing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1This is a schematic diagram of the processing substrate structure of the utility model;

[0014] Figure 2 This is a schematic diagram of the aluminum fixture structure of the utility model;

[0015] Figure 3 This is a schematic diagram of the structure of the aluminum fixture of the utility model installed on the processing base plate;

[0016] Figure 4 This is a schematic diagram of the structure of the limiter of the utility model;

[0017] Figure 5 This is a schematic diagram of the fixing structure of the utility model;

[0018] In the figure: processing base plate 1, limiting part 2, fixing part 3, aluminum fixture 4, limiting groove 5, placement groove 6, positioning hole 7, groove area 11, screw hole 12, positioning column 13, arc structure 14, countersunk hole 15. DETAILED DESCRIPTION

[0019] The present invention will be further described below with reference to the accompanying drawings.

[0020] like Figures 1 to 5 As shown:

[0021] The utility model is a processing device for the lower plate of a quartz aluminum fixture, comprising a processing substrate 1, a limiting member 2, a fixing member 3, and an aluminum fixture 4. A limiting groove 5 is provided on the end surface of the processing substrate 1. The groove structure of the limiting groove 5 is configured as follows: arc-shaped edges are formed on all sides, and four diagonal portions are configured as right-angled edges. Placement grooves 6 are distributed in the inner circumferential direction of the limiting groove 5 and in the center of the limiting groove 5, and the placement grooves 6 are evenly distributed. Positioning holes 7 are distributed in the inner circumferential direction of the limiting groove 5 and in the circumferential direction of the placement groove 6 at the center, and the positioning holes 7 are evenly distributed. The surface of the processing substrate 1 located at any two adjacent arcuate edges is provided with a groove area 11, and screw holes are provided inside the groove area 11. 12. An aluminum clamp 4 is placed and installed inside the limiting groove 5. The shape and structure of the aluminum clamp 4 matches the setting of the limiting groove 5. A positioning column 13 is provided on the end surface of the aluminum clamp 4 corresponding to the position of each positioning hole 7. The positioning column 13 is plugged into the positioning hole 7 to install and position the aluminum clamp 4 and the limiting groove 5. A limiting member 2 is placed and installed on the side of the groove area 11 adjacent to the limiting groove 5. The end face of the limiting member 2 is in contact with the limiting groove 5 and the end face of one side of the aluminum clamp 4. A fixing member 3 is provided on the side of the groove area 11 away from the limiting groove 5. The fixing member 3 is fixed in the groove area 11 by bolts to fix the limiting member 2 and to position the aluminum clamp 4 in the limiting groove 5.

[0022] In order to solve the problem that the datum plane processed by the product will not produce the problem of non-flatness due to external force after removal, glue is used to fix it. In order to improve the flatness of the datum plane, the limiter 2, the fixing part 3 and the groove area 11 are fixed and installed to position the aluminum fixture 4. The specific structure is: a limiting groove 5 is provided on the end face of the processing substrate 1, and the groove structure of the limiting groove 5 is set to be designed with the four long sides designed as arc sides and the four diagonal corners as right-angle sides to ensure that it matches the shape structure of the aluminum fixture 4, so as to achieve better limiting of the aluminum fixture 4 to achieve the flatness of the datum plane. In order to fix the aluminum fixture 4 in the limiting groove 5, a fixing part 2, a fixing part 3 and a groove area 11 are fixed and installed to position the aluminum fixture 4. A groove area 11 is formed on the surface of the processing substrate 1 at any two adjacent arcuate edges. The groove area 11 is connected to the limiting groove 5. A limiting member 2 is provided on one side of the groove area 11 close to the limiting groove 5. One end face of the limiting member 2 is in contact with the limiting groove 5 and one end face of the aluminum fixture 4. The limiting member 2 is fixed and limited by the fixing member 3 inside the groove area 11. The fixing member 3 is installed in the groove area 11 by bolts, so that the adjacent end faces of the aluminum fixture 4 are limited and fixed by the limiting member 2 and the fixing member 3, and the limited installation of the reference plane of the aluminum fixture 4 is achieved so that the flatness of the processing meets the standard. This solves the problem of the existing technology of using glue to position the aluminum fixture 4, and avoids the inefficient processing and material waste of the gluing process.

[0023] Since the depth of the placement groove 6 is consistent with the depth of the groove area 11, and the aluminum clamp 4 is placed in the limiting groove 5, the top plane of the aluminum clamp 4 is flush with the top of the groove area 11, so that after the reference plane is processed, the limiting part 2 and the fixing part 3 are disassembled and can be conveniently removed from the plane of the aluminum clamp 4 at the groove area 11, so that the aluminum clamp 4 can be easily removed, avoiding the problem of using tools or other methods to remove it, which causes the aluminum clamp 4 to be deformed.

[0024] At least in one embodiment, in order to achieve overlapping and limiting docking of the aluminum clamp 4 through the limiting member 2, the technical structure adopted is: one side end face of the limiting member 2 is set as an arc structure 14, and the arc structure 14 overlaps and abuts with the arc end face of one side of the aluminum clamp 4.

[0025] In at least one embodiment, in order to achieve the overlapped docking of the end faces of the limiting member 2 and the fixing member 3, a technical structure is adopted: one end face of the limiting member 2 is set as a planar structure, and the planar structure is set to overlap the end face of the fixing member 3.

[0026] In at least one embodiment, in order to achieve uniform positioning and installation of the aluminum fixture 4 and the processing substrate 1, a structure is adopted as follows: positioning holes 7 are provided between the placement grooves 6 distributed in the circumferential direction of the limiting groove 5.

[0027] In at least one embodiment, a countersunk hole 15 is provided on the surface of the fixing member 3, and the countersunk hole 15 and the screw hole 12 are installed by bolts to fix the fixing member 3 in the groove area 11, thereby fixing the fixing member 3 to the limit member 2, and then positioning and installing the aluminum clamp 4.

[0028] The embodiments of the present invention are only used to illustrate the present invention and do not limit the scope of the claims. Other substantially equivalent alternatives that can be thought of by those skilled in the art are all within the protection scope of the present invention.

Claims

1. A processing device for a quartz aluminum fixture lower plate, characterized in that: The invention comprises a processing substrate (1), a limiting member (2), a fixing member (3), and an aluminum fixture (4). The end surface of the processing substrate (1) is provided with a limiting groove (5). The groove structure of the limiting groove (5) is set as follows: the four sides are arc-shaped, and the four diagonal sides are set as right-angled sides. The inner circumferential direction of the limiting groove (5) and the center of the limiting groove (5) are both provided with placement grooves (6), and the placement grooves (6) are evenly distributed. The inner circumferential direction of the limiting groove (5) and the placement groove (6) at the center are both provided with positioning holes (7) in the circumferential direction, and the positioning holes (7) are evenly distributed. The surface of the processing substrate (1) located at any two adjacent arc sides is provided with a groove area (11), the interior of the groove area (11) is provided with a screw hole (12), and the aluminum fixture is placed and installed inside the limiting groove (5). (4) plate, the shape and structure of the aluminum fixture (4) plate matches the setting of the limiting groove (5), the end surface of the aluminum fixture (4) plate is provided with a positioning column (13) corresponding to the position of each positioning hole (7), the positioning column (13) is plugged into the positioning hole (7) and is used to install and position the aluminum fixture (4) plate and the limiting groove (5), the groove area (11) is adjacent to the limiting groove (5) and the side of the limiting groove (2) is placed and installed, the end face of the limiting component (2) is in contact with the limiting groove (5) and the end face of one side of the aluminum fixture (4) plate, and a fixing component (3) is provided on the side of the groove area (11) away from the limiting groove (5), and the fixing component (3) is fixedly installed in the groove area (11) by bolts, so as to fix the limiting component (2) and position the aluminum fixture (4) plate in the limiting groove (5).

2. A processing device for a quartz aluminum fixture lower plate according to claim 1, characterized in that: One end face of the limiting member (2) is provided as an arc-shaped structure 1 (14), and the arc-shaped structure 1 (14) overlaps and abuts against the arc-shaped end face of one side of the aluminum fixture (4) plate.

3. The processing device for the lower plate of a quartz aluminum fixture according to claim 1, characterized in that: One end face of the limiting member (2) is arranged as a plane structure, and the plane structure is arranged to overlap with the end face of the fixing member (3).

4. The processing device for the lower plate of a quartz aluminum fixture according to claim 1, characterized in that: Positioning holes (7) are provided between the placement grooves (6) distributed in the circumferential direction of the limiting groove (5).

5. The processing device for the lower plate of a quartz aluminum fixture according to claim 1, characterized in that: The surface of the fixing member (3) is provided with a countersunk hole (15).

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