Substrate correction mechanism and substrate transfer device

Abstract

The utility model discloses a substrate correcting mechanism and a substrate transfer device, the substrate correcting mechanism comprises a correcting assembly and a plurality of sensing columns used for sensing a glass substrate, the correcting assembly comprises a rack and a first driving component arranged on the rack, two groups of correcting components are movably arranged on the rack, and the first driving component is arranged on the rack. Each group of correction components comprises two correction rods, the first driving component is in transmission connection with the two groups of correction rods so as to drive the two correction rods in the same group to move close to or away from each other, and the movement directions of the two groups of correction rods are perpendicular to each other; the multiple induction columns are arranged on the correction rods and distributed side by side in the length direction of the correction rods, and when the two correction rods moving relatively move close to each other to clamp the glass substrate, the induction columns abut against the edge of the glass substrate. According to the substrate correction mechanism and the substrate transfer device, correction and damage detection of the glass substrate can be effectively completed, and the smoothness of overall processing operation of the glass substrate can be guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of electronic display substrate conveying equipment, in particular to a substrate correction mechanism and a substrate transfer device. Background Art

[0002] In the manufacturing process of electronic displays, glass substrates need to be transferred and transported. However, conventional transfer devices generally only have the function of transporting the glass substrates and are unable to perform operations such as inspection or correction on the glass substrates. As a result, conventional transfer devices are prone to causing the glass substrates to shift during the transport process, or the glass substrates are already shifted when they are placed on the transfer device. The transfer device directly transfers and transports the shifted glass substrates, which is prone to collisions and damage. As a result, the broken parts of the glass substrates cannot be effectively processed when entering other processing steps, resulting in ineffective processing in many steps and a waste of resources. Moreover, the broken glass substrates are processed in various steps, and the broken glass fragments remain in the processing equipment, causing contamination of the processing equipment, affecting the normal processing of subsequent glass substrates, and even causing damage to the equipment.

[0003] In some existing technologies, such as Figure 1 and Figure 2 As shown, in order to solve the problem of the glass substrate 1' being offset, a plurality of push rods 2' are provided in the transfer device. Specifically, two push rods 2' are provided on both sides of the glass substrate 1'. The two push rods 2' on both sides move relative to each other to achieve the effect of clamping and correcting the glass substrate 1'. However, as Figure 1 and Figure 2 As shown, when a glass substrate 1' is significantly deflected during transport or placement on the transfer device, or deflected perpendicularly to the direction of motion of the push rods 2', the push rods 2' on both sides are unable to adjust the glass substrate 1' to the predetermined position 3'. Furthermore, existing transfer devices are unable to detect whether a glass substrate is damaged, leading to problems such as ineffective processing of damaged glass substrates and contamination of processing equipment. Utility Model Content

[0004] The purpose of the present utility model is to provide a substrate correction mechanism and a substrate transfer device, which can effectively complete the correction and damage detection of glass substrates, ensure the normal transfer operation of glass substrates, and can promptly discard or repair damaged glass substrates to avoid subsequent accidents, which is conducive to ensuring the smoothness of the overall glass substrate processing operation.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] A substrate correction mechanism is provided, comprising a correction assembly and a plurality of sensing columns for sensing a glass substrate. The correction assembly comprises a frame and a first driving member disposed on the frame. Two groups of correction components are movably disposed on the frame, each group of correction components comprising two correction rods. The first driving member is respectively in transmission connection with the two groups of correction rods to drive the two correction rods in the same group to move toward or away from each other, with the movement directions of the two groups of correction rods being perpendicular to each other. The plurality of sensing columns are disposed on the correction rods and are distributed in parallel along the length direction of the correction rods. When the two relatively moving correction rods move toward each other to clamp the glass substrate, the sensing columns abut against the edge of the glass substrate.

[0007] In one embodiment, the frame includes a horizontal beam and a vertical beam arranged perpendicular to each other, and a group of correction components are respectively provided on the horizontal beam and the vertical beam, and a slide rail for the correction rod to slide is respectively provided on the horizontal beam and the vertical beam, and a slider is slidably provided on the slide rail, and the correction rod is provided on the slider.

[0008] In one embodiment, the first driving member includes a turntable, a first connecting arm and a second connecting arm, the turntable is rotatably arranged at the connection between the horizontal beam and the vertical beam, one end of the first connecting arm is fixedly connected to the slider, the other end of the first connecting arm is hinged to the second connecting arm, and the end of the second connecting arm away from the first connecting arm is hinged to the turntable.

[0009] In one embodiment, the substrate correction mechanism further includes a second driving member, which is in driving connection with the turntable to drive the turntable to rotate.

[0010] In one embodiment, the substrate correction mechanism further includes a third driving member, which is disposed between the second driving member and the frame and is in driving connection with the frame to drive the frame to move closer to or away from the glass substrate.

[0011] In one embodiment, the second driving component is a rotary motor, and the third driving component is a hydraulic cylinder. The cylinder body of the hydraulic cylinder is in driving connection with the output shaft of the rotary motor to drive the hydraulic cylinder to rotate, and the output shaft of the hydraulic cylinder is connected to the turntable.

[0012] In one embodiment, the second driving member is disposed on an external fixing device, a linear track is provided on the external fixing device, a length direction of the linear track is parallel to the driving direction of the hydraulic cylinder, and the frame is slidably connected to the linear track.

[0013] In one embodiment, the correction component further includes a correction bracket, the correction rod is disposed on the correction bracket, and one end of the correction bracket away from the correction rod is rotatably connected to the slider.

[0014] In one embodiment, a plurality of connecting rods are provided on the correction rod corresponding to the sensing columns, and the plurality of sensing columns are rotatably connected to the plurality of connecting rods in a one-to-one correspondence.

[0015] On the other hand, a substrate transfer device is provided, comprising the above-mentioned substrate correction mechanism, and further comprising a base and a cover plate, wherein a transfer chamber is provided in the base, a rotating platform is provided in the transfer chamber, a conveying support frame for carrying a glass substrate is provided on the rotating platform, and a feed port and a discharge port are provided on the side of the transfer chamber, wherein the feed port and the discharge port are respectively connected to external processing equipment;

[0016] The cover plate covers the upper portion of the transfer chamber to close the transfer chamber, and the substrate correction mechanism is arranged on a side of the cover plate facing the transfer chamber.

[0017] Beneficial effects of the utility model:

[0018] The present invention provides a substrate correction mechanism, which comprises a correction assembly, wherein a first drive member and two groups of correction members are provided on a frame of the correction assembly. The two correction rods of each group of correction members move relatively close to each other to clamp the glass substrate from opposite sides of the glass substrate, i.e., the four correction rods respectively clamp the four sides of the glass substrate, thereby achieving clamping and positioning of the glass substrate in four directions. The four correction rods are synchronously driven by the first drive member, which can effectively ensure that the four correction rods clamp and correct the glass substrate to a preset position, effectively ensuring the precise positioning of the glass substrate. In addition, the correction rods are provided with a plurality of sensing columns for sensing the glass substrate. When the correction rods clamp the glass substrate, the plurality of sensing columns respectively abut against the four sides of the glass substrate, and the plurality of sensing columns sense and detect the sides of the glass substrate, thereby detecting whether the sides of the glass substrate are damaged, thereby achieving detection of glass substrate damage. Through this mechanism, the correction and damage detection of the glass substrate can be effectively completed, the position of the glass substrate can be adjusted in time to ensure the normal transfer operation of the glass substrate, and the damage of the glass substrate can be detected in time. If the glass substrate is damaged, the damaged glass substrate can be discarded or repaired in time to avoid subsequent accidents, which is conducive to ensuring the smoothness of the overall processing operation of the glass substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural diagram of a substrate correction mechanism in the background art;

[0020] Figure 2It is a schematic diagram of the correction of a glass substrate by a substrate correction mechanism in the background art;

[0021] Figure 3 is a bottom view of a substrate correction mechanism in one embodiment;

[0022] Figure 4 is a side structural diagram of a substrate correction mechanism in one embodiment;

[0023] Figure 5 is a schematic diagram of a positioning rod correcting a glass substrate in one embodiment;

[0024] Figure 6 is a schematic diagram of a portion of the internal structure of a substrate transfer device in one embodiment;

[0025] Figure 7 1 is a schematic diagram of the top view of the base in one embodiment.

[0026] Figure 1-2 middle:

[0027] 1′, glass substrate; 2′, ejector pin; 3′, preset position.

[0028] Figures 3 to 5 middle:

[0029] 1. Glass substrate; 2. Correction assembly; 21. Frame; 211. Crossbeam; 212. Vertical beam; 22. First driving member; 221. Turntable; 222. First connecting arm; 223. Second connecting arm; 23. Correction rod; 24. Slide rail; 25. Slider; 26. Correction bracket; 27. Bearing; 28. Connecting rod; 3. Induction column; 4. Rotating motor; 5. Hydraulic cylinder; 6. Linear rail; 7. Base; 71. Transfer chamber; 72. Rotating platform; 73. Conveying support frame; 74. Feed port; 75. Discharge port; 8. Cover plate; 9. Vacuum chamber. DETAILED DESCRIPTION

[0030] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0031] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0032] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0033] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0034] like Figure 3 and Figure 4 As shown, a substrate correction mechanism of this embodiment includes a correction assembly 2 and a plurality of sensing columns 3 for sensing a glass substrate 1. The correction assembly 2 includes a frame 21 and a first driving member 22 disposed on the frame 21. Two groups of correction components are movably disposed on the frame 21. Each group of correction components includes two correction rods 23. The first driving member 22 is respectively connected to the two groups of correction rods 23 for driving the two correction rods 23 in the same group to move toward or away from each other, with the movement directions of the two groups of correction rods 23 being perpendicular to each other. The plurality of sensing columns 3 are disposed on the correction rods 23 and are distributed in parallel along the length direction of the correction rods 23. When the two relatively moving correction rods 23 move toward each other to clamp the glass substrate 1, the sensing columns 3 abut against the edge of the glass substrate 1.

[0035] In this embodiment, a correction assembly 2 is provided, wherein a first driving member 22 and two sets of correction members are disposed on a frame 21 of the correction assembly 2. The two correction rods 23 of each set of correction members move toward each other to clamp the glass substrate 1 from opposite sides of the glass substrate 1. Specifically, the four correction rods 23 clamp the four sides of the glass substrate 1, thereby clamping and positioning the glass substrate 1 in four directions. The four correction rods 23 are synchronously driven by the first driving member 22, effectively ensuring that the four correction rods 23 clamp and correct the glass substrate 1 to a predetermined position, effectively ensuring precise positioning of the glass substrate 1. Furthermore, the correction rods 23 are provided with a plurality of sensing posts 3 for sensing the glass substrate 1. When the correction rods 23 clamp the glass substrate 1, the plurality of sensing posts 3 respectively abut against the four sides of the glass substrate 1. The plurality of sensing posts 3 sense the sides of the glass substrate 1, thereby detecting whether the sides of the glass substrate 1 are damaged, thereby detecting damage to the glass substrate 1. Through this mechanism, the correction and damage detection of the glass substrate 1 can be effectively completed, the position of the glass substrate 1 can be adjusted in time, the normal transfer operation of the glass substrate 1 can be ensured, and the damage of the glass substrate 1 can be detected in time. If the glass substrate 1 is damaged, the damaged glass substrate 1 can be discarded or repaired in time to avoid subsequent accidents, which is conducive to ensuring the smoothness of the overall processing operation of the glass substrate 1.

[0036] In one embodiment, the frame 21 includes a horizontal beam 211 and a vertical beam 212 arranged perpendicular to each other. A set of correction members is disposed on each of the horizontal beam 211 and the vertical beam 212. Each of the horizontal beam 211 and the vertical beam 212 is provided with a slide rail 24 for sliding correction rods 23. A slider 25 is slidably mounted on the slide rail 24. The correction rods 23 are mounted on the slider 25 and slide along the slide rail 24. In other words, the horizontal beam 211 and the vertical beam 212 combine to form a cross-shaped frame 21. The four correction rods 23 of the two sets of correction members move synchronously toward or away from the center of the cross-shaped frame 21 to achieve clamping or loosening of the glass substrate 1.

[0037] In one embodiment, the first driving member 22 includes a turntable 221, a first connecting arm 222, and a second connecting arm 223. The turntable 221 is rotatably arranged at the connection between the horizontal beam 211 and the vertical beam 212. One end of the first connecting arm 222 is fixedly connected to the slider 25, and the other end of the first connecting arm 222 is hinged to the second connecting arm 223. The end of the second connecting arm 223 away from the first connecting arm 222 is hinged to the turntable 221. Specifically, by rotating the turntable 221, the turntable 221 drives one end of the second connecting arm 223 to rotate, and the other end of the second connecting arm 223 drives the first connecting arm 222 to slide toward or away from the center of the turntable 221, thereby driving the correction rod 23 to move toward or away from the center of the turntable 221, that is, the center of the frame 21, through the first connecting arm 222.

[0038] In one embodiment, the substrate correction mechanism further includes a second driving member, which is in transmission connection with the turntable 221 to drive the turntable 221 to rotate. Furthermore, the substrate correction mechanism further includes a third driving member, which is disposed between the second driving member and the frame 21 and is in transmission connection with the frame 21 to drive the frame 21 to move toward or away from the glass substrate 1. When performing a correction operation, the third driving member drives the positioning rod to move to a horizontal plane corresponding to the glass substrate 1, so that the positioning rod can achieve clamping correction of the glass substrate 1.

[0039] In one embodiment, the second driving component is a rotary motor 4, and the third driving component is a hydraulic cylinder 5. The cylinder body of the hydraulic cylinder 5 is drivingly connected to the output shaft of the rotary motor 4 to drive the hydraulic cylinder 5 to rotate. The output shaft of the hydraulic cylinder 5 is connected to the turntable 221. Furthermore, the second driving component is mounted on an external fixed device, which is provided with a linear track 6. The length of the linear track 6 is parallel to the driving direction of the hydraulic cylinder 5, and the frame 21 is slidably connected to the linear track 6.

[0040] Specifically, the rotary motor 4 drives the hydraulic cylinder 5 to rotate and synchronously drives the turntable 221 to rotate. The hydraulic cylinder 5 drives the turntable 221 to perform linear reciprocating motion to drive the frame 21 to perform lifting motion, so as to drive the correction rod 23 provided on the frame 21 to move to a horizontal position corresponding to the glass substrate 1, so as to facilitate the clamping and correction operation of the substrate.

[0041] In addition to this embodiment, other structures and connection methods of the second driving member and the third driving member can also be adopted. For example, the second driving member is set to be linear motion driven, and the third driving member is set to be rotational motion driven. As long as the second driving member and the third driving member can cooperate to achieve the lifting movement of the frame 21 close to or away from the glass substrate 1 and the rotation of the turntable 221, such designs all fall within the scope of protection of the present utility model.

[0042] In one embodiment, the correction member further includes a correction bracket 26, the correction rod 23 is disposed on the correction bracket 26, and the end of the correction bracket 26 away from the correction rod 23 is rotatably connected to the slider 25 via a bearing 27. Specifically, Figure 5 As shown, when the correction rods 23 move toward the glass substrate 1, if the glass substrate 1 deviates, the correction rods 23 first partially contact the glass substrate 1. At this time, since the correction rods 23 are rotatably connected to the slider 25, the correction rods 23 can slowly rotate until they are flush with the side of the glass substrate 1. After clamping the glass substrate 1, the correction rods 23 are driven to move toward the center of the frame 21. The four correction rods 23 then slowly correct the position of the glass substrate 1 to be straight, which is beneficial to reduce direct rigid collision between the correction rods 23 and the glass substrate 1, and avoid damage to the glass substrate 1 caused by the correction rods 23.

[0043] In one embodiment, the calibration rod 23 is provided with a plurality of connecting rods 28 corresponding to the sensing columns 3. The plurality of sensing columns 3 are rotatably connected to the plurality of connecting rods 28 one by one. Therefore, when the calibration rod 23 is clamped on the glass substrate 1, the sensing columns 3 can roll relative to the edge of the glass substrate 1, thereby reducing friction between the sensing columns 3 and the glass substrate 1 and preventing the sensing columns 3 from causing wear on the glass substrate 1.

[0044] On the other hand, Figure 6 and Figure 7 As shown, a substrate transfer device is also provided, comprising the aforementioned substrate correction mechanism, a base 7, and a cover plate 8. A transfer chamber 71 is provided within the base 7, a rotating platform 72 is provided within the transfer chamber 71, and a conveying support frame 73 for carrying the glass substrate 1 is provided on the rotating platform 72. A feed port 74 and a discharge port 75 are provided on the side of the transfer chamber 71, and the feed port 74 and the discharge port 75 are respectively connected to external processing equipment. The feed port 74 receives substrates processed by the previous processing equipment, performs correction and inspection, and then activates the rotating platform 72 to rotate the glass substrate 1 to the corresponding position according to the processing requirements. The glass substrate 1 is then output from the corresponding discharge port 75 to the next processing equipment for further processing. In actual operation, multiple discharge ports 75 are provided to correspond to different processing steps, and the corresponding glass substrate 1 is transferred to the corresponding processing equipment for processing through the multiple discharge ports 75.

[0045] The cover plate 8 is covered on the upper part of the transfer chamber 71 to close the transfer chamber 71 , and the substrate correction mechanism is arranged on the side of the cover plate 8 facing the transfer chamber 71 so that the substrate correction mechanism can perform correction and detection operations on the glass substrate 1 placed in the transfer chamber 71 .

[0046] Furthermore, the transfer device of the base 7 is also provided with a vacuum pumping component (not shown) for vacuuming the transfer chamber 71, wherein a vacuum chamber 9 is provided at the feed port 74. Before the glass substrate 1 enters the transfer chamber 71, it is first transported to the vacuum chamber 9 for vacuuming, and then the glass substrate 1 is transported from the feed port 74 to the transfer chamber 71 that has been vacuumed, so as to provide a vacuum transfer environment for the glass substrate 1, thereby meeting the need for providing transfer operations for vacuum operations on the glass substrate 1.

[0047] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A substrate correction mechanism, characterized in that: include: A correction assembly, the correction assembly comprising a frame and a first driving member disposed on the frame, two groups of correction members movably disposed on the frame, each group of correction members comprising two correction rods, the first driving member being in driving connection with the two groups of correction rods, respectively, to drive the two correction rods of the same group to move toward or away from each other, with the movement directions of the two groups of correction rods being perpendicular to each other; A plurality of sensing columns for sensing the glass substrate are provided on the correction rod and are arranged in parallel along the length direction of the correction rod. When the two relatively moving correction rods move relatively close to each other to clamp the glass substrate, the sensing columns abut against the edge of the glass substrate.

2. The substrate correction mechanism according to claim 1, wherein: The frame includes a horizontal beam and a vertical beam arranged perpendicular to each other, a group of correction components are respectively provided on the horizontal beam and the vertical beam, and a slide rail for the correction rod to slide is respectively provided on the horizontal beam and the vertical beam, a slider is slidably provided on the slide rail, and the correction rod is provided on the slider.

3. The substrate correction mechanism according to claim 2, wherein: The first driving member includes a turntable, a first connecting arm and a second connecting arm. The turntable is rotatably arranged at the connection between the horizontal beam and the vertical beam. One end of the first connecting arm is fixedly connected to the slider, the other end of the first connecting arm is hinged to the second connecting arm, and the end of the second connecting arm away from the first connecting arm is hinged to the turntable.

4. The substrate correction mechanism according to claim 3, characterized in that: It also includes a second driving member, which is in driving connection with the turntable to drive the turntable to rotate.

5. The substrate correction mechanism according to claim 4, characterized in that: The system further includes a third driving member, which is disposed between the second driving member and the frame and is in driving connection with the frame to drive the frame to move closer to or away from the glass substrate.

6. The substrate correction mechanism according to claim 5, characterized in that: The second driving component is a rotary motor, and the third driving component is a hydraulic cylinder. The cylinder body of the hydraulic cylinder is in driving connection with the output shaft of the rotary motor to drive the hydraulic cylinder to rotate, and the output shaft of the hydraulic cylinder is connected to the turntable.

7. The substrate correction mechanism according to claim 6, wherein: The second driving member is arranged on an external fixing device, and a linear track is provided on the external fixing device. The length direction of the linear track is parallel to the driving direction of the hydraulic cylinder, and the frame is slidably connected to the linear track.

8. The substrate correction mechanism according to any one of claims 2 to 7, characterized in that: The correction component further includes a correction bracket, the correction rod is arranged on the correction bracket, and one end of the correction bracket away from the correction rod is rotatably connected to the slider.

9. The substrate correction mechanism according to any one of claims 1 to 7, characterized in that: The correction rod is provided with a plurality of connecting rods corresponding to the sensing columns, and the plurality of sensing columns are rotatably connected to the plurality of connecting rods in a one-to-one correspondence.

10. A substrate transfer device, characterized in that: The substrate correction mechanism according to any one of claims 1 to 9 further comprises: A base, wherein a transfer chamber is provided in the base, a rotating platform is provided in the transfer chamber, a conveying support frame for carrying the glass substrate is provided on the rotating platform, and a feed port and a discharge port are provided on the side of the transfer chamber, and the feed port and the discharge port are respectively connected to external processing equipment; A cover plate is covered on the upper portion of the transfer chamber to close the transfer chamber, and the substrate correction mechanism is arranged on a side of the cover plate facing the transfer chamber.

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