External vapor deposition equipment

Abstract

The utility model relates to an optical fiber preform preparation process, in particular to external vapor deposition equipment which comprises a deposition cavity. The deposition cavity comprises a cavity body, a deposition nozzle, an exhaust outlet, a protective cover body and a clamping mechanism. A communication opening is formed in the side face, opposite to the opening, of the cavity. And a deposition nozzle which is communicated with a communication port and opposite to the opening is arranged in the cavity and is used for spraying deposition raw materials. The exhaust outlet is formed in the opening of the cavity, is opposite to the deposition nozzle and is used for exhausting gas in the deposition cavity. And the protective cover body is detachably connected with the opening of the cavity and the air outlet, so that the opening of the cavity and the air outlet are closed. And the clamping mechanism is used for clamping the deposition body, so that the deposition body is positioned between the deposition spray head and the exhaust outlet. The protective cover body is convenient to disassemble and assemble, so that the protective cover body is convenient to clean, and high cleanliness can be achieved, so that corrosion of deposition raw materials to the protective cover body is inhibited, and the service life of external vapor deposition equipment is prolonged.

Description

Technical Field

[0001] The utility model relates to a preparation process of an optical fiber preform rod, in particular to an external vapor deposition device. Background Art

[0002] Optical fiber preforms are often deposited using external vapor deposition (EVD). This process requires EVD equipment. Powder often accumulates on the top of the deposition chamber, and this powder is corrosive and carries heat, leading to impurities accumulating on top of the chamber.

[0003] Currently, dust deposits on the top of the deposition chamber are typically simply cleaned during regular inspections. Once the dust corrodes the chamber roof to a certain extent, the external vapor deposition equipment is discarded. This results in a generally short lifespan for external vapor deposition equipment. Utility Model Content

[0004] The purpose of the utility model is to provide an external vapor deposition device with a long service life.

[0005] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions:

[0006] An external vapor deposition apparatus, characterized in that it comprises a deposition chamber, wherein the deposition chamber comprises:

[0007] The cavity is constructed in a box shape with a single-side opening, and a communication port is formed on the surface of the cavity opposite to the opening;

[0008] a deposition nozzle, disposed on a surface of the cavity opposite to the opening and connected to the communication port, for spraying deposition raw materials toward the interior of the cavity;

[0009] An exhaust port is provided at the opening of the cavity and is arranged opposite to the deposition nozzle, with one end of the exhaust port extending into the opening of the cavity and the other end connected to the air collecting port of the exhaust system;

[0010] a protective cover body, detachably connected to the opening of the cavity and the exhaust port, so that the opening of the cavity and the exhaust port are closed and connected;

[0011] The clamping mechanism is used for clamping the deposition body so that the deposition body is positioned between the deposition nozzle and the exhaust port.

[0012] Optionally, the deposition chamber is provided with a plurality of groups of deposition nozzles and exhaust ports that are respectively arranged opposite to each other.

[0013] Optionally, the opening of the cavity is constructed into a rectangle, having two oppositely arranged first sides and two oppositely arranged second sides, and the exhaust outlet is constructed into a rectangular barrel shape, having two oppositely arranged third sides and two oppositely arranged fourth sides, and the outer walls of the third sides of the two exhaust outlets are respectively connected to the inner walls of the two first sides of the cavity, and the protective cover includes a plurality of protective hinges, and the outer walls of the two fourth sides of any exhaust outlet are respectively detachably connected to the two oppositely arranged protective hinges, and any protective hinge can be detachably connected to the fourth side of the exhaust outlet, and at the same time can be detachably connected to another protective hinge or the inner wall of the second side of the cavity.

[0014] Optionally, the protective hinge includes a first hinge and a second hinge connected to each other, the angle between the first hinge and the second hinge is an obtuse angle, a group of first mounting holes is formed on the end of the first hinge away from the second hinge, a group of first screw holes that match the first mounting holes are directly or indirectly provided on the inner wall of the second side surface of the cavity, a group of first mounting holes are detachably connected to a group of first screw holes or another group of first mounting holes through a group of first bolts, a group of second mounting holes are formed on the end of the second hinge away from the first hinge, a group of second screw holes that match the first mounting holes are directly or indirectly provided on the outer wall of the fourth side surface of the exhaust outlet, a group of second mounting holes are detachably connected to a group of second screw holes or another group of second mounting holes through a group of second bolts.

[0015] Optionally, the structures of all the protective hinges are the same.

[0016] Optionally, the first hinge and the second hinge of the protective hinge are both constructed in a flat plate shape;

[0017] A first connecting portion is provided on the inner walls of the two second side surfaces of the cavity, the two first connecting portions are arranged opposite to each other and extend upwardly toward the interior of the cavity, and a group of first screw holes is provided on the first connecting portions near the cavity;

[0018] A second connecting portion is provided on the outer walls of the two fourth side surfaces of the air outlet, the two second connecting portions are arranged opposite to each other and extend downwardly toward the exterior of the air outlet, and a group of second screw holes is provided on the second connecting portions near the air outlet;

[0019] The protective cover body also includes a transfer member, which has two interconnected transfer pages. A group of the first screw holes is respectively provided on the two transfer pages, and there is an angle between the two transfer pages. Any of the transfer pages can be detachably connected to the first folding pages of the two protective hinges.

[0020] Optionally, a sealing strip is provided at the edge of the protective hinge.

[0021] Optionally, the first hinge includes a first blocking area connected to the second hinge and a first fixing area away from the second hinge, a group of first mounting holes is formed in the first fixing area, and the first fixing area and the first blocking area form an included angle, the first screw hole is formed on the inner wall of the second side surface of the cavity, and adjacent protective hinges are detachably connected via a transfer space having two groups of second screw holes;

[0022] and / or

[0023] The second hinge includes a second blocking area connected to the first hinge and a second fixed area away from the first hinge, a group of second mounting holes are formed in the second fixed area, and the second fixed area has an angle with the second blocking area, and the second screw hole is formed on the outer wall of the fourth side of the exhaust port.

[0024] Optionally, a medium channel is embedded in the protective cover, and the medium channel is used for the circulation of heat exchange medium, and the medium inlet and the medium outlet of the medium channel are both arranged on the side of the protective cover away from the deposition nozzle.

[0025] Optionally, a plurality of mutually separated medium channels are embedded in the protective cover, the heat exchange medium is compressed air, and the medium inlet of the medium channel is connected to the compressed air source or the medium outlet of another medium channel.

[0026] The beneficial effect of the present invention is that the protective cover can be removed from the fixed cavity and exhaust port for deep cleaning, which facilitates more thorough cleaning of the protective cover, thereby inhibiting the corrosion of the protective cover by deposited dust, and thereby extending the service life of the external vapor deposition equipment.

[0027] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and to implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a schematic structural diagram of the deposition chamber shown in Example 1 of the present utility model;

[0029] Figure 2 This is a structural diagram of the protective hinge shown in the second embodiment of the present utility model;

[0030] Figure 3This is a structural diagram of the protective hinge shown in Example 3 of the present utility model.

[0031] Legend: 101-deposition body, 102-first bolt, 103-second bolt, 1-cavity, 11-second side, 12-first connecting part, 121-first screw hole, 13-injection bottom surface, 131-connecting port, 2-deposition nozzle, 21-injection inlet, 3-exhaust outlet, 31-fourth side, 32-second connecting part, 321-second screw hole, 4-protective cover, 41-protective hinge, 42-first folding page, 421-first mounting hole, 422-first fixing area, 423-first blocking area, 43-second folding page, 431-second mounting hole, 432-second fixing area, 433-second blocking area, 44-medium channel, 441-medium inlet, 442-medium outlet, 45-sealing strip, 46-transfer part, 461-transfer page. DETAILED DESCRIPTION

[0032] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0033] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0034] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0035] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0036] See Figure 1 The external vapor deposition equipment protected by the present utility model application includes a deposition chamber, which includes a chamber 1, a deposition nozzle 2, an exhaust port 3, a protective cover 4 and a clamping mechanism. The chamber 1 is a box-shaped body with a single-sided opening, and a connecting port 131 is formed on the side of the chamber 1 opposite to the opening. The deposition nozzle 2 is arranged on the side of the chamber 1 opposite to the opening, and is connected to the connecting port 131, and is used to spray deposition raw materials toward the inside of the chamber 1. The exhaust port 3 is arranged at the opening of the chamber 1 and is opposite to the deposition nozzle 2. One end of the exhaust port 3 extends into the opening of the chamber 1, and the other end is connected to the air collecting port of the exhaust system, which is used to discharge the gas in the deposition chamber. The protective cover 4 is detachably connected to the opening of the chamber 1 and the exhaust port 3, so that the opening of the chamber 1 and the exhaust port 3 are closed and connected, which helps to maintain a positive pressure state in the deposition chamber. The clamping mechanism is used to clamp the deposition body 101 so that the deposition body 101 is positioned between the deposition nozzle 2 and the air outlet, so that the powdered deposition raw material sprayed by the deposition nozzle 2 is deposited on the deposition body 101 .

[0037] By making the protective cover 4 easy to disassemble and install, the protective cover 4 is easy to clean and can achieve a higher cleanliness level, thereby inhibiting the corrosion of the protective cover 4 by the deposition raw materials, extending the service life of the external vapor deposition equipment, and helping to improve the purity of the deposition raw materials in the deposition chamber and improve product quality.

[0038] Please refer to the following examples for details.

[0039] Example 1:

[0040] The external vapor deposition equipment shown in a preferred embodiment of the present application includes a shell and a deposition chamber. The shell is provided with an external air inlet and an air outlet for the circulation of gas. Filters are provided on the external air inlet and the air outlet to ensure that the gas entering the interior of the shell is clean air. The deposition chamber is sleeved in the shell, so that an external chamber is formed between the deposition chamber and the shell. A variety of functional systems are provided in the external chamber, such as an air source system for providing compressed air, a feeding system for providing deposition raw materials, a displacement system for driving the deposition body 101 to move, and an exhaust system for discharging gas in the deposition chamber. In this embodiment, the deposition body 101 is a core rod for preparing an optical fiber preform, and the exhaust system includes a fan to attract gas into the air collecting port and discharge it through the air outlet of the shell.

[0041] See Figure 1 The deposition chamber includes a chamber body 1, a deposition nozzle 2, an exhaust port 3, a protective cover body 4 and a clamping mechanism.

[0042] The cavity 1 is constructed as a rectangular box-shaped structure with an open top, having an injection bottom surface 13, two oppositely arranged first side surfaces and two oppositely arranged second side surfaces 11. Both second side surfaces 11 of the cavity 1 are provided with a first connecting portion 12 facing the interior of the cavity 1 and inclined upward. The two first connecting portions 12 are both constructed in the shape of long strips and are oppositely arranged, and their long sides are fixedly connected to the two second side surfaces 11 of the cavity 1 by welding. A group of first screw holes 121 arranged in a direction parallel to the second side surface 11 of the cavity 1 are formed on the first connecting portion 12, and the first screw holes 121 are threaded holes. Two connecting ports 131 arranged in a direction parallel to the first side surface of the cavity 1 are provided on the injection bottom surface 13 of the cavity 1, and the distance between the two connecting ports 131 is approximately twice the distance between any connecting port 131 and the adjacent second side surface 11.

[0043] The deposition nozzle 2 is positioned vertically upward and fixedly connected to the inner wall of the ejection bottom surface 13 of the chamber 1. The two deposition nozzles 2 completely cover the two communication ports 131 of the chamber 1, allowing gas from the external chamber to enter the deposition chamber only through the deposition nozzles 2. The injection inlet 21 of the deposition nozzle 2 is connected to the outlets of the gas source system and the feed system through the communication ports 131, thereby ejecting powdered deposition raw materials carried by compressed air upward. The simultaneous operation of the two deposition nozzles 2 helps improve production efficiency.

[0044] The clamping mechanism is arranged above the deposition nozzle 2 and is used to clamp the deposition body 101 from both axial ends of the deposition body 101 so that the deposition body 101 is parallel to the second side surface 11 of the cavity 1 and the middle part is located directly above the deposition nozzle 2. The clamping mechanism is connected to the moving mechanism. The moving mechanism is arranged below the deposition chamber and includes a support arm and a rotating shaft. The support arm is located in the outer chamber and can be controlled to move along the axial direction of the deposition body 101, thereby driving the deposition body 101 to move so that any axial position on the deposition body 101 can be controllably corresponded to the deposition nozzle 2. The rotating shaft is arranged parallel to the axial direction of the deposition body 101, one end of which is supported by the support arm, and the other end extends into the deposition chamber and is connected to the clamping mechanism. The rotating shaft can rotate in a controllable manner, thereby driving the deposition body 101 to rotate along the axial direction.

[0045] The exhaust port 3 is constructed as a rectangular straight barrel structure with two ends open. The exhaust port 3 is arranged vertically, one end of which is connected to the air collecting port of the exhaust system, and the other end extends into the opening of the cavity 1. The two exhaust ports 3 are respectively arranged directly above the two deposition nozzles 2. The exhaust ports 3 have two oppositely arranged third side surfaces and two oppositely arranged fourth side surfaces 31. The outer walls of the two fourth side surfaces 31 of each exhaust port 3 are fixedly connected to the inner walls of the two second side surfaces 11 of the cavity 1 by welding. The outer walls of the two third side surfaces of the exhaust port 3 are welded with a long strip of second connecting portion 32. The long side of the second connecting portion 32 is connected to the exhaust port 3, and the short side is inclined downward. A group of second screw holes 321 arranged in a direction parallel to the third side surface of the exhaust port 3 are formed on the second connecting portion 32. The second screw holes 321 are threaded holes.

[0046] The protective cover body 4 includes a plurality of protective hinges 41 of the same structure and a transfer member 46. The protective hinges 41 have the same structure for easy installation and storage. The protective hinge 41 includes a first hinge 42 and a second hinge 43 that are connected to each other, and the angle between the first hinge 42 and the second hinge 43 is an obtuse angle. A group of first mounting holes 421 are formed at one end of the first hinge 42 away from the second hinge 43. The first mounting holes 421 are threaded holes and have the same specifications as the first screw holes 121. A group of second mounting holes 431 are formed at one end of the second hinge 43 away from the first hinge 42. The second mounting holes 431 are also threaded holes and have the same specifications as the second screw holes 321.

[0047] The two protective hinges 41 are supported above the first connecting portion 12 and the second connecting portion 32, respectively, and are simultaneously and removably connected to the cavity 1 and the exhaust port 3 via a set of first bolts 102 engaging the first screw holes 121 and a set of second bolts 103 engaging the second screw holes 321. The side edges of the protective hinges 41 abut against the inner wall of the first side of the cavity 1. The second hinges 43 of the other two protective hinges 41 are supported above the second connecting portion 32 of the two exhaust ports 3, respectively, near the third side of the other exhaust port 3. The edges of the first hinges 42 of the two protective hinges 41 contact each other. The transfer member 46 has two interconnected transfer members 461, each of which is provided with a set of first screw holes 121, and the two transfer members 461 are angled apart. The transfer member 46 is positioned below two adjacent protective hinges 41 and is simultaneously and removably connected to the first hinges 42 of the two abutting protective hinges 41 via two sets of first bolts 102.

[0048] A sealing strip 45 surrounds the edge of the protective hinge 41. The sealing strip 45 is made of silicone, connected end to end and surrounds each protective hinge 41, and is partially embedded in the side of the protective hinge 41, which helps to improve the sealing between the protective hinge 41 and the inner wall of the first side of the cavity 1.

[0049] A medium channel 44 is also embedded in the protective hinge 41. The medium channels 44 inside the same protective hinge 41 are interconnected as a whole, and the medium channels 44 inside different protective hinges 41 are separated from each other. The medium channel 44 in this embodiment extends back and forth along a serpentine shape and is not connected to the first mounting hole 421 and the second mounting hole 431. A medium inlet 441 and a medium outlet 442 connected to the medium channel 44 are provided on the side of the protective hinge 41 away from the deposition nozzle 2. The medium inlet 441 is provided on the first hinge 42 and is perpendicular to the first hinge 42, and the medium outlet 442 is provided on the second hinge 43 and is perpendicular to the second hinge 43. The medium inlet 441 of any protective hinge 41 is connected to the gas source system through a hose, and the medium channels 44 of each protective hinge 41 are connected in series through a hose. The compressed gas flows through all the protective hinges 41 and enters the external chamber, and reaches the outside of the external vapor deposition equipment through the air outlet. Using compressed gas as the heat exchange medium helps to cool the protective cover 4, thereby inhibiting the corrosion of the protective cover 4 by the deposited raw materials, and the cost is low.

[0050] In this embodiment, both first and second side surfaces 11 of the chamber 1 are provided with viewing windows that match the height of the deposition body 101. Corresponding windows are also provided on the housing. These viewing windows are made of borosilicate glass, making it easier for operators to observe the working conditions within the deposition chamber.

[0051] The displacement system also includes a laser sensor and a load-bearing module. The laser sensor, located in the outer chamber and aligned with the deposition body 101, senses the axial movement of the deposition body 101. The load-bearing module senses changes in the weight of the deposition body 101, allowing operators to assess the deposition status based on the weight of the deposition body 101.

[0052] The beneficial effect of the present invention is that by making the protective cover 4 easy to remove, the difficulty of cleaning the protective cover 4 is reduced and the cleaning effect of the protective cover 4 is improved. By dissipating heat from the protective cover 4 in real time, the deposition of deposition material on the protective cover 4 and the corrosion of the protective cover 4 by the deposition material are suppressed, thereby extending the service life of the external vapor deposition equipment.

[0053] Example 2:

[0054] The only difference between this embodiment and the first embodiment is that the first connecting portion 12 is not provided on the cavity 1 in this embodiment, and the first screw hole 121 is horizontally formed on the inner wall of the second side surface 11 of the cavity 1. Figure 2As shown, the protective hinge 41 in this embodiment does not have a sealing strip 45. Its first hinge 42 includes a first blocking area 423 connected to the second hinge 43 and a first fixing area 422 separated from the second hinge 43. A set of first mounting holes 421 is formed in the first fixing area 422, with an angle between the first fixing area 422 and the first blocking area 423. The first fixing area 422 is vertically arranged, and the first blocking area 423 is inclined upward. In this embodiment, no intermediate member 46 is provided. The two mutually contacting protective hinges 41 are connected by a set of first bolts 102 to connect the two sets of first mounting holes 421.

[0055] Example 3:

[0056] The only difference between this embodiment and the first embodiment is that the second connection portion 32 is not provided on the air outlet 3 in this embodiment, and the second screw hole 321 is horizontally formed on the inner wall of the fourth side surface 31 of the air outlet 3. Figure 3 As shown, the protective hinge 41 in this embodiment does not have a sealing strip 45. The second hinge 43 includes a second blocking area 433 connected to the first hinge 42 and a second fixing area 432 separated from the first hinge 42. A set of second mounting holes 431 are formed in the second fixing area 432, and an angle is formed between the second fixing area 432 and the second blocking area 433. The second fixing area 432 is vertically arranged, and the first blocking area 423 is inclined downward.

[0057] Example 4:

[0058] The only difference between this embodiment and the first embodiment is that this embodiment includes two protective hinges 41 with different structures. The structure of the protective hinge 41 connecting the cavity 1 and the exhaust port 3 in this embodiment is the same as that of the protective hinge 41 in the first embodiment, but no sealing strip 45 is provided. The structure of the protective hinge 41 connecting the exhaust port 3 and the other protective hinge 41 in this embodiment is the same as that of the protective hinge 41 in the second embodiment. In this embodiment, no intermediate member 46 is provided. The two mutually conflicting protective hinges 41 are connected to the two sets of first mounting holes 421 via a set of first bolts 102.

[0059] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0060] The above-described embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present utility model patent shall be determined by the appended claims.

Claims

1. An external vapor deposition apparatus, characterized in that The invention comprises a deposition chamber, wherein the deposition chamber comprises: The cavity (1) is constructed in a box shape with a single-side opening, and a communication port (131) is formed on the surface of the cavity (1) opposite to the opening; A deposition nozzle (2) is provided on a surface of the cavity (1) opposite to the opening and is in communication with the communication port (131), and is used for spraying deposition raw materials toward the interior of the cavity (1); An exhaust port (3) is arranged at the opening of the cavity (1) and is arranged opposite to the deposition nozzle (2), with one end of the exhaust port extending into the opening of the cavity (1) and the other end connected to the air collecting port of the exhaust system; A protective cover (4) is detachably connected to the opening of the cavity (1) and the exhaust port (3), so that the opening of the cavity (1) and the exhaust port (3) are closed and connected; The clamping mechanism is used for clamping the deposition body (101) so that the deposition body (101) is positioned between the deposition nozzle (2) and the exhaust port.

2. The external vapor deposition apparatus according to claim 1, wherein The deposition chamber is provided with a plurality of groups of deposition nozzles (2) and exhaust ports (3) that are respectively arranged opposite to each other.

3. The external vapor deposition apparatus according to claim 2, wherein The opening of the cavity (1) is constructed in a rectangular shape, having two oppositely arranged first side surfaces and two oppositely arranged second side surfaces (11); the exhaust port (3) is constructed in a rectangular barrel shape, having two oppositely arranged third side surfaces and two oppositely arranged fourth side surfaces (31); wherein the first side surface is parallel to the third side surface; the outer walls of the third side surfaces of the two exhaust ports (3) are respectively connected to the inner walls of the two first side surfaces of the cavity (1); the protective cover (4) includes a plurality of protective hinges (41); the outer walls of the two fourth side surfaces (31) of any exhaust port (3) are respectively detachably connected to the two oppositely arranged protective hinges (41); any protective hinge (41) can be detachably connected to the fourth side surface (31) of the exhaust port (3), and at the same time can be detachably connected to another protective hinge (41) or the inner wall of the second side surface (11) of the cavity (1).

4. The external vapor deposition apparatus according to claim 3, wherein The protective hinge (41) includes a first hinge (42) and a second hinge (43) connected to each other, the angle between the first hinge (42) and the second hinge (43) is an obtuse angle, a group of first mounting holes (421) is formed at one end of the first hinge (42) away from the second hinge (43), a group of first screw holes (121) that match the first mounting holes (421) are directly or indirectly provided on the inner wall of the second side surface (11) of the cavity (1), and the group of first mounting holes (421) are connected to the group of first screw holes (121) by a group of first bolts (102). The first screw hole (121) or another group of the first mounting holes (421) are detachably connected, a group of second mounting holes (431) is formed at one end of the second folding leaf (43) away from the first folding leaf (42), a group of second screw holes (321) that match the first mounting holes (421) are directly or indirectly provided on the outer wall of the fourth side surface (31) of the exhaust port (3), and a group of the second mounting holes (431) are detachably connected to a group of the second screw holes (321) or another group of the second mounting holes (431) through a group of second bolts (103).

5. The external vapor deposition apparatus according to claim 4, wherein All the protective hinges (41) have the same structure.

6. The external vapor deposition apparatus according to claim 5, wherein The first folding leaf (42) and the second folding leaf (43) of the protective hinge (41) are both constructed in a flat plate shape; A first connecting portion (12) is provided on the inner walls of the two second side surfaces (11) of the cavity (1), the two first connecting portions (12) are arranged opposite to each other, and their extending directions are toward the upper interior of the cavity (1), and a group of first screw holes (121) is provided at a position of the first connecting portion (12) close to the cavity (1); A second connecting portion (32) is provided on the outer walls of the two fourth side surfaces (31) of the air outlet (3), the two second connecting portions (32) are arranged opposite to each other, and their extending directions are toward the exterior and downward of the air outlet (3), and a group of second screw holes (321) is provided at a position of the second connecting portion (32) close to the air outlet (3); The protective cover (4) further comprises a transfer member (46), wherein the transfer member (46) comprises two transfer pages (461) connected to each other, wherein a group of the first screw holes (121) are respectively provided on the two transfer pages (461), and an angle is formed between the two transfer pages (461), and any one of the transfer pages (461) can be detachably connected to the first folding pages (42) of the two protective hinges (41).

7. The external vapor deposition apparatus according to claim 6, wherein A sealing strip (45) is provided at the edge of the protective hinge (41).

8. The external vapor deposition apparatus according to claim 5, wherein The first hinge (42) includes a first blocking area (423) connected to the second hinge (43) and a first fixing area (422) away from the second hinge (43); a group of first mounting holes (421) is formed in the first fixing area (422), and an angle is formed between the first fixing area (422) and the first blocking area (423); the first screw hole (121) is formed on the inner wall of the second side surface (11) of the cavity (1); and adjacent protective hinges (41) are detachably connected through a transfer room having two groups of second screw holes (321); and / or The second hinge (43) includes a second blocking area (433) connected to the first hinge (42) and a second fixing area (432) away from the first hinge (42); a group of second mounting holes (431) are formed in the second fixing area (432), and an angle is formed between the second fixing area (432) and the second blocking area (433); and the second screw hole (321) is formed on the outer wall of the fourth side surface (31) of the exhaust port (3).

9. The external vapor deposition apparatus according to any one of claims 1 to 7, wherein: The protective cover (4) is embedded with a medium channel (44), the medium channel (44) is used for the circulation of heat exchange medium, and the medium inlet (441) and the medium outlet (442) of the medium channel (44) are both arranged on the side of the protective cover (4) away from the deposition nozzle (2).

10. The external vapor deposition apparatus according to claim 9, wherein The protective cover (4) is embedded with a plurality of mutually separated medium channels (44), the heat exchange medium is compressed air, and the medium inlet (441) of the medium channel (44) is connected to the air source of the compressed air or the medium outlet (442) of another medium channel (44).

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