Vacuum pump cooling system

Abstract

The utility model relates to a vacuum pump cooling system which comprises a vacuum pump unit, a cooling device, a pipeline assembly and at least one control valve, the vacuum pump unit is connected with the cooling device through the pipeline assembly, and the vacuum pump unit comprises at least two vacuum pumps. The pipeline assembly comprises a first pipeline and at least one second pipeline; the first pipeline is used for communicating the cooling device with one of the vacuum pumps, and at least one control valve is mounted on the second pipeline to control connection and disconnection between the second pipeline and the first pipeline. According to the utility model, the problem of blow-by among a plurality of pipelines when a plurality of exhaust systems share one set of cooling device can be solved. Meanwhile, mutual interference of different vacuum pumps during working can be avoided, it is ensured that a single vacuum pump is not affected by high-temperature waste gas of another vacuum pump during working, then it is ensured that the vacuum pumps can provide the good vacuum degree during working, and the working efficiency of the vacuum pumps is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pump cooling systems, in particular to a vacuum pump cooling system. Background Art

[0002] During the preparation process of perovskite solar cells, a perovskite liquid film is formed on the substrate by a slit coater, and then the perovskite liquid film is crystallized and dried by a vacuum drying device, so that the perovskite liquid film is nucleated and crystallized. Specifically, during the coating process, the coating is evenly applied to the substrate by a dedicated coating head; then, the coated substrate needs to be transferred to a hot vacuum chamber dryer (Hot Vacuum Chamber Dryer, referred to as HVCD) to perform a vacuum crystallization drying operation so that the solvent in the coating slurry can evaporate as quickly as possible to achieve rapid crystallization. Both the slit coater and the vacuum drying equipment need to use a vacuum pump when working. During the operation of the slit coater, the vacuum pump needs to be coordinated with the liquid medicine cabinet to transport the coating liquid from the liquid medicine cabinet to the coater; when the vacuum drying equipment is working, a high vacuum environment needs to be created by the vacuum pump in conjunction with the evaporation chamber. Since the temperature of the gas discharged when the vacuum pump is working is relatively high, it needs to be cooled before it can be discharged to the exhaust at the factory end. The cooling system design is relatively complex and costly. If there are no special requirements, multiple vacuum pumps can share a single exhaust cooling system. Therefore, the vacuum pumps of the slit coater and the vacuum drying equipment share a cooling system.

[0003] However, a defect of the existing technology is that when the vacuum pump of the slit coater and the vacuum pump of the vacuum drying equipment share the same cooling system, since the pipeline from the vacuum pump of the slit coater to the cooling system is long, the vacuum exhaust gas of the vacuum pump of the vacuum drying equipment will be mixed into the pipeline between the cooling system and the vacuum pump of the slit coater, which has a negative impact on the exhaust gas of the vacuum pump of the slit coater, thus causing the problem of gas cross-talk. Utility Model Content

[0004] To this end, the technical problem to be solved by the present invention is to overcome the shortcomings of the existing technology and provide a vacuum pump cooling system, which can improve the problem that when the vacuum pump of the slit coater and the vacuum pump of the vacuum drying equipment share the same cooling system, the air cross-talk problem of the exhaust pipe of the vacuum drying equipment affects the exhaust of the slit coater, and is used to solve the air cross-talk problem between the exhaust pipes when multiple exhaust systems share a cooling system.

[0005] In order to solve the above technical problems, the utility model provides a vacuum pump cooling system, comprising:

[0006] A vacuum pump unit, a cooling device, a pipeline assembly and at least one control valve, wherein the vacuum pump unit is connected to the cooling device through the pipeline assembly, the vacuum pump unit includes at least two vacuum pumps, and the pipeline assembly includes a first pipeline and at least one second pipeline; the first pipeline is used to connect the cooling device with one of the vacuum pumps, at least one second pipeline is used to connect the first pipeline with another vacuum pump, and at least one control valve is installed on the second pipeline to control the connection between the second pipeline and the first pipeline.

[0007] In one embodiment of the present invention, the cooling device includes a cooling tank having an air inlet and an air outlet. The air inlet is connected to the pipeline assembly, and the air outlet is used to discharge the cooled gas.

[0008] In one embodiment of the present invention, one end of the first pipe is connected to one of the vacuum pumps, and the other end of the first pipe is connected to the air inlet end.

[0009] In one embodiment of the present invention, the vacuum pump unit includes a first vacuum pump and a second vacuum pump, the first vacuum pump is connected to the first pipeline, and the second vacuum pump is connected to the second pipeline.

[0010] In one embodiment of the present invention, the control valve is mounted on the second pipeline at one end close to the first pipeline.

[0011] In one embodiment of the present invention, the length of the second pipe is greater than the length of the first pipe.

[0012] In one embodiment of the present invention, the control valve includes a one-way valve.

[0013] In one embodiment of the present invention, a support assembly is further included, wherein the support assembly includes a plurality of support frames for supporting the second pipe, and the plurality of support frames are arranged at intervals along the extension direction of the second pipe.

[0014] In one embodiment of the present invention, the first vacuum pump is configured to be connected to a vacuum drying device.

[0015] In one embodiment of the present invention, the second vacuum pump is configured to be connected to a coating machine.

[0016] The above technical solution of the utility model has the following advantages compared with the prior art:

[0017] The vacuum pump cooling system described in the present invention is provided with a vacuum pump unit, a cooling device, a pipe assembly and at least one control valve. Specifically, the vacuum pump unit is connected to the cooling device through the pipe assembly, wherein the vacuum pump unit includes at least two vacuum pumps, the pipe assembly includes a first pipe and at least one second pipe, the first pipe is used to connect the cooling device with one of the vacuum pumps, and the at least one second pipe is used to connect the first pipe with the other vacuum pump. The control valve is assembled on the second pipe to control the connection and disconnection between the second pipe and the first pipe, thereby preventing the gas in the first pipe and the second pipe from flowing into each other, avoiding the problem of cross-flow between the first pipe and the second pipe. The utility model can cool the exhaust gas of different vacuum pumps by connecting different vacuum pumps to the same cooling device, and can solve the problem of cross-flow between multiple pipes when multiple exhaust systems share a set of cooling devices. At the same time, it can also avoid mutual interference between different vacuum pumps when working, ensuring that a single vacuum pump will not be affected by the high-temperature exhaust gas of another vacuum pump when working, thereby ensuring that the vacuum pump can provide a better vacuum degree when working, and effectively improving the working efficiency of the vacuum pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to make the content of the utility model easier to understand, the utility model is further described in detail below based on the specific embodiments of the utility model in conjunction with the accompanying drawings, wherein:

[0019] Figure 1 It is a schematic diagram of the overall structure of the preferred embodiment of the utility model from the first perspective.

[0020] Figure 2 yes Figure 1 A magnified view of the local structure of the middle A.

[0021] Figure 3 It is a second perspective schematic diagram of the overall structure of the preferred embodiment of the present utility model.

[0022] Figure 4 yes Figure 3 A magnified view of the local structure.

[0023] Explanation of the reference numerals in the specification: 1. Cooling device; 10. Cooling tank; 11. Support seat; 12. Air inlet end; 13. Air outlet end; 2. Pipe assembly; 21. First pipeline; 22. Second pipeline; 3. Control valve; 41. First vacuum pump; 42. Second vacuum pump; 50. Support frame. DETAILED DESCRIPTION

[0024] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0025] The perovskite cell production process mainly includes three steps: thin film preparation, laser etching, and packaging. Since the quality of the thin film will directly affect the photoelectric conversion efficiency and stability of the perovskite cell, thin film preparation is a key link. In order to achieve uniform preparation of the perovskite layer, the liquid is continuously and evenly squeezed onto the substrate through a slit coating method to form a uniform and dense perovskite film. After that, the substrate coated with the perovskite film is placed in a vacuum drying device for drying and crystallization, thereby forming a high-quality film. The vacuum drying device provides a low-pressure and high-temperature environment, which accelerates the drying and crystallization speed of the perovskite film during the perovskite cell preparation process, thereby improving the cell production efficiency and performance.

[0026] Reference Figure 1 、 Figure 2 ,as well as Figure 3 As shown, the present invention discloses a vacuum pump cooling system, comprising a vacuum pump unit, a cooling device 1, a pipe assembly 2, and at least one control valve 3, wherein the vacuum pump unit is connected to the cooling device 1 via the pipe assembly 2. The vacuum pump unit comprises at least two vacuum pumps, and the pipe assembly 2 comprises a first pipe 21 and at least one second pipe 22;

[0027] The first pipe 21 is used to connect the cooling device 1 with one of the vacuum pumps, at least one second pipe 22 is used to connect the first pipe 21 and another vacuum pump, and at least one control valve 3 is installed on the second pipe 22 to control the connection and disconnection between the second pipe 22 and the first pipe 21.

[0028] It can be seen from this that the vacuum pump cooling system to be protected by the present invention is provided with a vacuum pump unit, a cooling device, a pipe assembly and at least one control valve. Specifically, the vacuum pump unit is connected to the cooling device through a pipe assembly, wherein the vacuum pump unit includes at least two vacuum pumps, the pipe assembly includes a first pipe and at least one second pipe, the first pipe is used to connect the cooling device with one of the vacuum pumps, and the at least one second pipe is used to connect the first pipe with another vacuum pump. The control valve is assembled on the second pipe to control the connection and disconnection between the second pipe and the first pipe, thereby preventing the gas in the first pipe and the second pipe from flowing into each other, avoiding the problem of cross-flow between the first pipe and the second pipe. The present invention can achieve cooling of the exhaust gas of different vacuum pumps by connecting different vacuum pumps to the same cooling device, and can solve the problem of cross-flow between multiple pipes when multiple exhaust systems share a set of cooling devices. At the same time, it can also avoid mutual interference between different vacuum pumps when working, ensuring that a single vacuum pump will not be affected by the high-temperature exhaust gas of another vacuum pump when working, thereby ensuring that the vacuum pump can provide a better vacuum degree when working, and effectively improving the working efficiency of the vacuum pump.

[0029] Furthermore, combined with Figure 1 、 Figure 3 as well as Figure 4 As shown, the cooling device 1 includes a cooling tank 10 and a support base 11 for supporting the cooling tank. The cooling tank has an air inlet end 12 and an air outlet end 13. The air inlet end 12 is connected to the pipeline assembly 2. The gas to be cooled can enter the cooling tank through the air inlet end 12. The air outlet end 13 is used to discharge the cooled gas.

[0030] Specifically, one end of the first pipe 21 is connected to one of the vacuum pumps, and the other end of the first pipe 21 is connected to the air inlet end 12. With this arrangement, the high-temperature exhaust gas discharged by the vacuum pump can enter the cooling tank through the first pipe 21 for cooling.

[0031] In this embodiment, the vacuum pump unit includes a first vacuum pump 41 and a second vacuum pump 42 . The first pipe 21 is configured to be connected to the first vacuum pump 41 , and the second pipe 22 is configured to be connected to the second vacuum pump 42 .

[0032] In terms of details, combined Figure 2 From the perspective of FIG. 2 , in order to prevent the gas in the first pipeline 21 from entering the second pipeline 22 , the control valve 3 is assembled on the second pipeline 22 at one end close to the first pipeline 21 , so that when the control valve 3 is in a locked state, the gas in the first pipeline 21 can be effectively prevented from entering the second pipeline.

[0033] Specifically, in actual manufacturing processes, to avoid interference between different processes, a certain distance is often maintained between the first vacuum pump 41 and the second vacuum pump 42. This distance can be designed and adjusted based on actual operational requirements. Furthermore, since the first pipe 21 directly connects the first vacuum pump 41 to the cooling device 1, and the second pipe 22 connects to the first pipe 21, the first pipe 21 serves as the main pipe and is designed to be shorter, allowing high-temperature exhaust gas to enter the cooling tank 10 more quickly. Consequently, there is a length difference between the first pipe 21 and the second pipe 22, with the second pipe 22 being longer than the first pipe 21.

[0034] refer to Figure 1 、 Figure 2 as well as Figure 3 As shown, in this embodiment, the control valve 3 includes a one-way valve.

[0035] Of course, in some other embodiments, the type of the control valve 3 is not limited to a one-way valve, and can be replaced with other types of valve bodies as needed.

[0036] Furthermore, combining Figure 1 and Figure 3 as well as Figure 4 As shown, since the length of the second pipe 22 is relatively long, in order to support the second pipe 22, the vacuum pump cooling system also includes a support assembly, and the support assembly includes a plurality of support frames 50 for supporting the second pipe 22. The plurality of support frames 50 are arranged at intervals along the extension direction of the second pipe 22, and the second pipe 22 is fixedly installed on the plurality of support frames 50.

[0037] It should be noted that in some other embodiments, the vacuum pump unit may also include multiple vacuum pumps, one of which is configured to be connected to the cooling device 1 via the first pipe 21; the remaining vacuum pumps are configured to be connected to the second pipe 22, and the number of second pipes 22 is the same as the number of the remaining vacuum pumps, so that each of the remaining vacuum pumps is configured to be connected to one second pipe 22. Furthermore, the number of the control valves 3 is configured to be the same as the number of the second pipes 22, so that each second pipe 22 is equipped with a control valve 3. This configuration allows each second pipe 22 to be controlled from the first pipe 21.

[0038] In this embodiment, the first vacuum pump 41 is connected to the vacuum drying equipment, and the second vacuum pump 42 is connected to the coating machine. This arrangement effectively prevents air cross-contamination in the exhaust duct when the vacuum pumps of the coating machine and the vacuum drying equipment share the same cooling system, thereby ensuring that the operation of the vacuum pumps of the coating machine and the vacuum drying equipment are not affected, and that they can achieve a good vacuum level.

[0039] In the description of the embodiments of the present invention, it should be noted that, unless otherwise specified or limited, the terms "disposed" and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0040] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0041] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0042] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. Vacuum pump cooling system, characterized by: include: A vacuum pump unit, a cooling device, a pipeline assembly and at least one control valve, wherein the vacuum pump unit is connected to the cooling device through the pipeline assembly, the vacuum pump unit includes at least two vacuum pumps, and the pipeline assembly includes a first pipeline and at least one second pipeline; the first pipeline is used to connect the cooling device with one of the vacuum pumps, at least one second pipeline is used to connect the first pipeline with another vacuum pump, and at least one control valve is installed on the second pipeline to control the connection between the second pipeline and the first pipeline.

2. The vacuum pump cooling system according to claim 1, characterized in that: The cooling device comprises a cooling tank having an air inlet end and an air outlet end. The air inlet end is connected to the pipeline assembly, and the air outlet end is used to discharge the cooled gas.

3. The vacuum pump cooling system according to claim 2, characterized in that: One end of the first pipeline is connected to one of the vacuum pumps, and the other end of the first pipeline is connected to the air inlet end.

4. The vacuum pump cooling system according to any one of claims 1 to 3, characterized in that: The vacuum pump unit includes a first vacuum pump and a second vacuum pump, wherein the first vacuum pump is connected to the first pipeline, and the second vacuum pump is connected to the second pipeline.

5. The vacuum pump cooling system according to claim 4, characterized in that: The control valve is assembled on the second pipeline and is close to one end of the first pipeline.

6. The vacuum pump cooling system according to claim 4, characterized in that: The length of the second pipe is greater than the length of the first pipe.

7. The vacuum pump cooling system according to claim 4, characterized in that: The control valve includes a one-way valve.

8. The vacuum pump cooling system according to claim 4, characterized in that: It also includes a support assembly, which includes a plurality of support frames for supporting the second pipe, and the plurality of support frames are arranged at intervals along the extension direction of the second pipe.

9. The vacuum pump cooling system according to claim 4, characterized in that: The first vacuum pump is configured to be connected to a vacuum drying device.

10. The vacuum pump cooling system according to claim 9, characterized in that: The second vacuum pump is configured to be connected to a coating machine.

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