Direct flushing type cleaning device

Abstract

The utility model relates to the technical field of semiconductors, and discloses a direct flushing type cleaning device which comprises a flushing cover and a flushing box, the flushing cover is connected with the flushing box, the flushing cover is provided with a water inlet, the flushing box is provided with at least two flushing grooves extending in the first direction, and the adjacent flushing grooves are arranged at intervals in the second direction. The flushing groove comprises a first through groove and a second through groove which are sequentially communicated in the first direction, the first through groove and the second through groove are correspondingly arranged in the second direction, the end, away from the second through groove, of the first through groove is communicated with the water inlet, the end, away from the first through groove, of the second through groove is provided with a water outlet, and the width a of the first through groove is larger than the width b of the second through groove. A product placing position is arranged at the end, facing the first through groove, of the second through groove. According to the direct flushing type cleaning device, the number of products placed in the device is increased, and the cleaning efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a direct-wash cleaning device. Background Art

[0002] Currently, in the precision manufacturing process of semiconductor integrated circuits (ICs), wafer quality is directly related to the performance and reliability of the entire circuit. Therefore, wafers undergo a rigorous cleaning process on the production line to ensure their surfaces are clean and free of impurities. Faced with the wafer cleaning requirements of semiconductor integrated circuit (IC) manufacturing, traditional straight-tank rinsers have shown significant limitations in practical applications.

[0003] Because wafers are placed horizontally in a straight-tank rinsing device, the number of wafers that can be placed in the device is limited. This increases production costs and time, and affects cleaning efficiency. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. The utility model provides a direct-wash cleaning device, which increases the number of products placed in the device and improves the cleaning efficiency.

[0005] In order to achieve the above-mentioned object, the utility model provides a direct-wash cleaning device, comprising a flushing cover and a flushing box, the flushing cover being connected to the flushing box, the flushing cover being provided with a water inlet, the flushing box being provided with at least two flushing slots extending along a first direction, adjacent flushing slots being spaced apart along a second direction, the flushing slots comprising a first through slot and a second through slot being sequentially connected along the first direction, the first through slot and the second through slot being correspondingly arranged in positions in the second direction, an end of the first through slot away from the second through slot being connected to the water inlet, an end of the second through slot away from the first through slot being provided with a drain outlet, a width a of the first through slot being greater than a width b of the second through slot, and an end of the second through slot facing the first through slot being provided with a product placement position;

[0006] The first direction intersects with the second direction.

[0007] As a preferred solution, the flushing box includes a flushing upper box and a flushing lower box, the first through groove is arranged on the flushing upper box, the second through groove is arranged on the flushing lower box, the flushing upper box is connected to the opposite surface of the flushing lower box, and the upper end of the flushing upper box is connected to the flushing cover.

[0008] As a preferred embodiment, the opposite surfaces of the second through groove in the third direction are respectively the first side surface and the second side surface, the opposite surfaces of the first through groove in the third direction are respectively the third side surface and the fourth side surface, the first side surface and the third side surface are respectively located on the same side of the flushing groove, and the first side surface protrudes from the third side surface toward the second side surface, the second side surface and the fourth side surface are respectively located on the same side of the flushing groove, and the second side surface protrudes from the fourth side surface toward the first side surface.

[0009] As a preferred solution, the first side surface and the second side surface are respectively provided with rounded supporting surfaces at one end facing the first through slot, and the two rounded supporting surfaces define the product placement position.

[0010] As a preferred solution, the width c of the flushing groove in the second direction is set to 1mm-2mm, and the length d of the first through groove in the third direction is set to 110mm-112mm.

[0011] As a preferred solution, a water storage cavity is provided on a side of the flushing cover facing the flushing box, the water storage cavity is communicated with the water inlet, and each of the flushing troughs is respectively communicated with the water storage cavity.

[0012] As a preferred solution, it further includes a support frame, and the flushing cover is telescopically connected to the support frame along the first direction.

[0013] As a preferred solution, the support frame is connected to a lifting drive member, the flushing cover and the flushing box are arranged opposite to each other along a first direction, and the flushing cover is connected to the support frame through the lifting drive member.

[0014] As a preferred solution, the lower end of the flushing box in the first direction is connected to a support block, and the drain outlet is at a set distance from the lower end surface of the support block in the first direction.

[0015] As a preferred solution, the flushing cover and the flushing upper box are connected to form an integral body.

[0016] Compared with the prior art, the present invention provides a flushing cleaning device with the following advantages: a water inlet is used to connect to a flushing water source, and the flushing water flows into the flushing trough from the water inlet. The flushing trough is provided with a first through-trough and a second through-trough that are sequentially connected along a first direction, the diameter of the first through-trough being larger than the diameter of the second through-trough, the second through-trough being located below the first through-trough, the width of the second through-trough being smaller than the width of the first through-trough, and the width of the second through-trough being smaller than the diameter of the product, and a product placement position is provided at one end of the second through-trough toward the first through-trough, thereby supporting and limiting the product through the product placement position, preventing the product from falling along the flushing trough during the flushing process, and ensuring that the product remains in the product placement position during the flushing process. The water inlet is located at the upper end of the first through-channel. Flushing water enters the first through-channel and flows along it. Since the first through-channel is connected to the second through-channel, the flushing water then enters the second through-channel and is discharged from the drain outlet. Since the flushing products are placed vertically, the device occupies a small space overall. Multiple flushing products can be placed at the same time for simultaneous flushing, improving cleaning efficiency. The surface of the flushing products to be cleaned is aligned with the flow direction of the flushing water. The impact force of the water flow can effectively remove dirt, impurities, or residue on the surface. This directional impact force creates a continuous cleaning action, avoiding relative stagnation or backflow between the water flow and the surface to be cleaned, thereby improving cleaning speed and effectiveness. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present utility model.

[0018] Figure 2 This is a structural cross-sectional view of an embodiment of the utility model in which the first through groove and the second through groove are connected.

[0019] Figure 3 It is a cross-sectional view of the overall structure of an embodiment of the present utility model.

[0020] Figure 4 It is a structural schematic diagram of the first through slot and the second through slot of an embodiment of the utility model for placing products.

[0021] Figure 5 It is a structural schematic diagram of the flushing upper box according to an embodiment of the utility model.

[0022] Figure 6 It is a structural schematic diagram of the flushing lower box according to an embodiment of the utility model.

[0023] In the picture:

[0024] 10. Flushing cover; 11. Water inlet; 12. Water storage chamber; 13. Product;

[0025] 20. Flushing box; 21. Flushing trough; 22. First through-slot; 23. Third side; 24. Fourth side; 25. Second through-slot; 26. First side; 27. Second side; 28. Drain; 29. Flushing upper box; 30. Flushing lower box; 31. Rounded support surface; 32. Product placement area; 33. Support block;

[0026] 40. Support frame; 41. Lifting drive member;

[0027] X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0028] The following embodiments are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0029] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like used in the present invention to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0030] In the description of the present invention, it should be understood that the terms "connected," "connected," "fixed," etc. used in the present invention should be interpreted broadly. For example, the terms may refer to fixed connection, detachable connection, or integration; mechanical connection, welding connection; direct connection, indirect connection through an intermediate medium, internal communication between two elements, or interaction between two elements, unless otherwise explicitly defined. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0031] like Figures 1 to 6As shown, a washdown cleaning device according to a preferred embodiment of the present invention includes a wash cover 10 and a wash box 20. The wash cover 10 is connected to the wash box 20. The wash cover 10 is provided with a water inlet 11. The wash box 20 is provided with at least two wash slots 21 extending along a first direction X. Adjacent wash slots 21 are spaced apart along a second direction Y. The wash slots 21 include a first through slot 22 and a second through slot 25 that are sequentially connected along the first direction X. The first through slot 22 and the second through slot 25 are correspondingly arranged at positions in the second direction Y. An end of the first through slot 22 away from the second through slot 25 is connected to the water inlet 11. An end of the second through slot 25 away from the first through slot 22 is provided with a drain outlet 28. The width a of the first through slot 22 is greater than the width b of the second through slot 25. An end of the second through slot 25 facing the first through slot 22 is provided with a product placement position 32.

[0032] The first direction X and the second direction Y intersect.

[0033] In the washdown cleaning device of the present invention, the water inlet 11 is used to be connected to a flushing water source, and the flushing water flows into the flushing trough 21 from the water inlet 11. The flushing trough 21 is provided with a first through-trough 22 and a second through-trough 25 that are sequentially connected along a first direction X. The diameter of the first through-trough 22 is larger than the diameter of the second through-trough 25. The second through-trough 25 is located below the first through-trough 22. The width of the second through-trough 25 is smaller than the width of the first through-trough 22. The width of the second through-trough 25 is smaller than the diameter of the product 13. A product placement position 32 is provided at one end of the second through-trough 25 facing the first through-trough 22. The product 13 is supported and limited by the product placement position 32, preventing the product 13 from falling along the flushing trough 21 during the flushing process and ensuring that the product 13 remains in the product placement position 32 during the flushing process. The water inlet 11 is located at the upper end of the first through-groove 22. The flushing water flows into the first through-groove 22 and flows along the first through-groove 22. Since the first through-groove 22 is connected to the second through-groove 25, the flushing water flows into the second through-groove 25 and is discharged from the drain 28. Since the flushing products 13 are placed vertically as a whole, the overall space occupied by the device is small. Multiple flushing products 13 can be placed at the same time for simultaneous flushing, improving cleaning efficiency. The surface to be cleaned of the flushing products 13 is consistent with the flow direction of the flushing water. The impact force of the water flow can effectively remove dirt, impurities or residues on the surface. This directional impact force can form a continuous cleaning action, avoiding relative stagnation or backflow between the water flow and the surface to be cleaned, thereby improving cleaning speed and effect.

[0034] As one embodiment, the first direction X is perpendicular to the second direction Y.

[0035] Further, such as Figures 1 to 6As shown, the flushing box 20 includes an upper flushing box 29 and a lower flushing box 30. The first through-slot 22 is provided in the upper flushing box 29, and the second through-slot 25 is provided in the lower flushing box 30. The upper flushing box 29 and the lower flushing box 30 are connected on opposite sides. The upper end of the upper flushing box 29 is connected to the flushing cover 10. After the lower portion of the product 13 is placed in the second through-slot 25 of the lower flushing box 30 for initial positioning, the upper portion of the product 13 is then inserted into the corresponding first through-slot 22 to complete the placement of the product 13. Based on the initial positioning, the insertion of the upper portion of the product 13 into the first through-slot 22 further ensures the overall stability of the product 13.

[0036] Further, such as Figure 4 As shown, the opposing sides of the second through groove 25 in the third direction Z are respectively the first side 26 and the second side 27, and the opposing sides of the first through groove 22 in the third direction Z are respectively the third side 23 and the fourth side 24. The first side 26 and the third side 23 are respectively located on the same side of the flushing groove 21, and the first side 26 protrudes from the third side 23 toward the second side 27. The second side 27 and the fourth side 24 are respectively located on the same side of the flushing groove 21, and the second side 27 protrudes from the fourth side 24 toward the first side 26. By arranging the first side 26 to protrude from the third side 23 and the second side 27 to protrude from the fourth side 24, the flushing product 13 can be supported on both sides of the third direction Z, thereby improving the support stability and placement reliability of the product 13. The flushing water flows along the third side 23 and the fourth side 24 respectively, which can fully flush the connection between the first through groove 22 and the second through groove 25, promote the discharge of dirt, avoid secondary contamination during the flushing process, and ensure the cleaning effect.

[0037] As one embodiment, the first direction X, the second direction Y and the third direction Z are perpendicular to each other.

[0038] As one embodiment, Figure 4 As shown, the distance that the first side surface 26 protrudes relative to the third side surface 23 is equal to the distance that the second side surface 27 protrudes relative to the fourth side surface 24, so that the force applied to the product 13 is more uniform, thereby improving the supporting stability and placement reliability of the product 13.

[0039] Further, such as Figure 2 and Figure 4 As shown, the first side surface 26 and the second side surface 27 are each provided with a rounded support surface 31 at one end facing the first through slot 22. The two rounded support surfaces 31 define a product placement position 32. The rounded support surfaces 31 prevent the product 13 from directly contacting sharp edges, thereby reducing the risk of damage to the product 13 due to collision during placement or removal.

[0040] Further, such as Figures 2 to 3As shown, the width c of the rinsing groove 21 in the second direction Y is set to 1mm-2mm, and the length d of the first through groove 22 in the third direction Z is set to 110mm-112mm. The products 13 to be rinsed are placed in a relatively narrow and long space for rinsing, reducing the space required to store the rinsing liquid, rinsing the products 13 with a smaller amount of water, and reducing cleaning costs. The narrow and long space ensures sufficient contact between the products 13 and the rinsing liquid, improving the cleaning effect.

[0041] Further, such as Figures 2 to 4 As shown, the flushing cover 10 has a water storage chamber 12 on the side facing the flushing box 20. The water storage chamber 12 is connected to the water inlet 11, and each flushing slot 21 is connected to the water storage chamber 12. High-pressure liquid is rapidly distributed throughout the device through the multiple flushing slots 21 connected to the water storage chamber 12, ensuring that each flushing slot 21 receives sufficient flushing liquid, thereby improving cleaning efficiency. Because the flushing liquid is evenly distributed from the water storage chamber 12 to each flushing slot 21, the cleaning pressure in each flushing slot 21 is relatively balanced, ensuring that the surface of the product 13 is evenly cleaned, avoiding the problem of insufficient or excessive cleaning in some areas, and thus optimizing the cleaning effect.

[0042] Furthermore, a support frame 40 is included, and the flushing cover 10 and the support frame 40 are telescopically connected along the first direction X, so that the flushing cover 10 and the flushing box 20 can move closer to or farther away from each other to realize opening or closing of the flushing cover 10 and the flushing box 20.

[0043] Further, such as Figures 1 to 2 As shown, the support frame 40 is connected to a lifting drive member 41, the flushing box 20 is connected to the support frame 40, and the flushing cover 10 and the flushing box 20 are arranged opposite to each other along the first direction X. The flushing cover 10 is connected to the support frame 40 by the lifting drive. The flushing cover 10 and the flushing box 20 are controlled by the lifting drive member 41 to move closer to or farther away from each other, so as to realize opening or closing of the flushing cover 10 and the flushing box 20, which is more convenient to operate.

[0044] Further, such as Figures 1 to 2 As shown, the lower end of the flushing box 20 in the first direction X is connected to a support block 33, and the drain outlet 28 and the lower end surface of the support block 33 in the first direction X have a set distance. Through the setting of the support block 33, the drain outlet 28 has a certain distance from the ground to prevent wastewater from flowing back into the flushing tank 21 and causing secondary pollution.

[0045] Further, such as Figure 1 and Figure 3 As shown, the flushing cover 10 and the flushing upper box 29 are connected to form a whole, which reduces the assembly steps of the flushing cover 10, the flushing upper box 29 and the flushing lower box 30 and improves the efficiency of the flushing operation.

[0046] In summary, the embodiment of the present invention provides a flushing cleaning device, wherein the water inlet 11 is used to be connected to a flushing water source, and the flushing water flows into the flushing trough 21 from the water inlet 11. The flushing trough 21 is provided with a first through-trough 22 and a second through-trough 25 which are connected in sequence along a first direction X. The diameter of the first through-trough 22 is larger than the diameter of the second through-trough 25. The second through-trough 25 is located below the first through-trough 22. The width of the second through-trough 25 is smaller than the width of the first through-trough 22. The width of the second through-trough 25 is smaller than the diameter of the product 13. A product placement position 32 is provided at one end of the second through-trough 25 facing the first through-trough 22. The product 13 is supported and limited by the product placement position 32, thereby preventing the product 13 from falling along the flushing trough 21 during the flushing process and ensuring that the product 13 remains in the product placement position 32 during the flushing process. The water inlet 11 is located at the upper end of the first through-groove 22. The flushing water flows into the first through-groove 22 and flows along the first through-groove 22. Since the first through-groove 22 is connected to the second through-groove 25, the flushing water flows into the second through-groove 25 and is discharged from the drain 28. Since the flushing products 13 are placed vertically as a whole, the overall space occupied by the device is small. Multiple flushing products 13 can be placed at the same time for simultaneous flushing, improving cleaning efficiency. The surface to be cleaned of the flushing products 13 is consistent with the flow direction of the flushing water. The impact force of the water flow can effectively remove dirt, impurities or residues on the surface. This directional impact force can form a continuous cleaning action, avoiding relative stagnation or backflow between the water flow and the surface to be cleaned, thereby improving cleaning speed and effect.

[0047] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and replacements can be made without departing from the technical principles of the present invention. These improvements and replacements should also be regarded as the scope of protection of the present invention.

Claims

1. A washdown cleaning device, characterized in that: The flushing box comprises a flushing cover and a flushing box, the flushing cover being connected to the flushing box, the flushing cover being provided with a water inlet, the flushing box being provided with at least two flushing slots extending along a first direction, adjacent flushing slots being spaced apart along a second direction, the flushing slots comprising a first through slot and a second through slot being sequentially connected along the first direction, the first through slot and the second through slot being correspondingly arranged in positions in the second direction, an end of the first through slot away from the second through slot being connected to the water inlet, an end of the second through slot away from the first through slot being provided with a drain outlet, a width a of the first through slot being greater than a width b of the second through slot, and an end of the second through slot facing the first through slot being provided with a product placement position; The first direction intersects with the second direction.

2. The washdown cleaning device according to claim 1, characterized in that: The flushing box includes an upper flushing box and a lower flushing box, the first through groove is provided on the upper flushing box, the second through groove is provided on the lower flushing box, the upper flushing box is connected to the opposite surface of the lower flushing box, and the upper end of the upper flushing box is connected to the flushing cover.

3. The washdown cleaning device according to claim 2, characterized in that: The opposite surfaces of the second through groove in the third direction are respectively the first side surface and the second side surface, and the opposite surfaces of the first through groove in the third direction are respectively the third side surface and the fourth side surface, the first side surface and the third side surface are respectively located on the same side of the flushing groove, and the first side surface protrudes from the third side surface toward the second side surface, the second side surface and the fourth side surface are respectively located on the same side of the flushing groove, and the second side surface protrudes from the fourth side surface toward the first side surface.

4. The washdown cleaning device according to claim 3, characterized in that: The first side surface and the second side surface are respectively provided with rounded supporting surfaces at one end facing the first through slot, and the two rounded supporting surfaces define the product placement position.

5. The washdown cleaning device according to claim 1, characterized in that: The width c of the flushing groove in the second direction is set at 1mm-2mm, and the length d of the first through groove in the third direction is set at 110mm-112mm.

6. The washdown cleaning device according to claim 1, characterized in that: A water storage cavity is provided on one side of the flushing cover facing the flushing box. The water storage cavity is communicated with the water inlet, and each of the flushing slots is communicated with the water storage cavity respectively.

7. The washdown cleaning device according to claim 1, characterized in that: It also includes a support frame, and the flushing cover is telescopically connected to the support frame along the first direction.

8. The washdown cleaning device according to claim 7, characterized in that: The support frame is connected to a lifting drive member, the flushing cover and the flushing box are arranged opposite to each other along a first direction, and the flushing cover is connected to the support frame through the lifting drive member.

9. The washdown cleaning device according to claim 1, characterized in that: The lower end of the flushing box in the first direction is connected to a support block, and the drain port is at a set distance from the lower end surface of the support block in the first direction.

10. The washdown cleaning device according to claim 2, characterized in that: The flushing cover is connected to the flushing upper box to form an integral body.

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