Substrate slice cleaning device

Abstract

The utility model discloses a substrate slice cleaning device which comprises a water tank, a support, a driving assembly and a plurality of jig assemblies, the driving assembly is installed on the support, and the jig assemblies are suspended in the water tank; the driving assembly comprises a first driving part and a gear disc, the jig assembly comprises a gear part and a jig structure, the first driving part and the gear disc are installed on the support, an output shaft of the first driving part is connected with the gear disc, the gear part is meshed with the gear disc, and the jig structure is connected with the gear part. The jig structures are connected with the gear piece so that the first driving piece can drive the multiple jig structures to synchronously rotate in situ. According to the utility model, the plurality of jig components are synchronously driven, so that a plurality of substrate slices can be cleaned at the same time, the cleaning efficiency is greatly improved, and the rotating speed and the mode of the jig structure are consistent, so that each substrate slice can obtain the same cleaning condition and quality, and the cleaning consistency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate sheet cleaning, in particular to a substrate sheet cleaning device. Background Art

[0002] In the field of semiconductor manufacturing and microelectronics processing, traditional substrate cleaning is mostly carried out using a single rotation method, that is, only one substrate can be cleaned at a time. This method has low efficiency and difficulty in ensuring uniform cleaning of multiple substrates. Utility Model Content

[0003] The technical problem to be solved by the utility model is that the conventional cleaning of substrate sheets is carried out in a single rotation mode, which makes it difficult to ensure the uniformity of cleaning of a plurality of substrate sheets.

[0004] In order to solve the above technical problems, the utility model provides a substrate cleaning device, comprising a water tank, a bracket, a drive assembly and a plurality of fixture assemblies, wherein the drive assembly is mounted on the bracket, and the fixture assembly is suspended in the water tank;

[0005] The drive assembly includes a first drive member and a gear plate, and the fixture assembly includes a gear member and a fixture structure. The first drive member and the gear plate are installed on the bracket, and the output shaft of the first drive member is connected to the gear plate. The gear member is engaged with the gear plate, and the fixture structure is connected to the gear member, so that the first drive member drives multiple fixture structures to rotate synchronously in situ.

[0006] In some embodiments, the bracket includes two spaced-apart support columns and a support plate, both ends of the support plate are respectively connected to the support columns, the first driving member is installed on the side of the support plate facing the sink, the gear plate is installed on the side of the support plate facing away from the sink, the output shaft of the first driving member passes through the support plate and is connected to the gear plate, and the jig structure passes through the support plate and is connected to the gear member.

[0007] In some embodiments, the support plate includes a first mounting plate and two support beams, the opposite sides of the first mounting plate are respectively connected to the support beams, the end of the support beam away from the first mounting plate is connected to the corresponding support column, and the first driving member and the gear plate are installed on the first mounting plate.

[0008] In some embodiments, a plurality of the fixture assemblies are spaced apart around the axis of the gear plate.

[0009] In some embodiments, the fixture structure includes a clamp and a connecting shaft, the clamp is connected to the connecting shaft, and an end of the connecting shaft away from the clamp passes through the bracket and is connected to the gear component.

[0010] In some embodiments, the connecting shaft has a limiting portion, and the limiting portion is disposed between the bracket and the gear component.

[0011] In some embodiments, the clamp includes a first limiting plate and a second limiting plate, the first limiting plate and the second limiting plate are cooperatively connected to fix the substrate sheet, and the first limiting plate is connected to the gear member through the connecting shaft.

[0012] In some embodiments, the clamp also includes multiple fixing parts, the first limiting plate has a first through hole for the circulation of the cleaning liquid and multiple first mounting holes for the installation of the fixing parts, and the second limiting plate has a second through hole corresponding to the first through hole and a second mounting hole corresponding to the first mounting hole.

[0013] In some embodiments, a side of the first limiting plate facing the second limiting plate is recessed to form a first groove for mounting the substrate sheet, wherein the width of the first groove is greater than the first through hole, and the thickness of the first groove is greater than the thickness of the substrate sheet.

[0014] In some embodiments, the first limiting plate is formed with a first notch and a second groove, the second limiting plate is formed with a second notch, and the first notch, the second groove and the second notch together constitute an installation port for installing the substrate.

[0015] Compared with the prior art, the substrate cleaning device according to the embodiment of the present invention has the following advantages:

[0016] In the embodiment of the utility model, the output shaft of the first driving member rotates to drive the gear plate to rotate. The gears on the gear plate mesh with the gear parts in each jig assembly, so that multiple gear parts rotate synchronously. Since the gear parts are connected to the jig structure, each jig structure and the substrate sheet fixed thereon will also rotate synchronously in situ with the operation of the driving assembly. By synchronously driving multiple jig assemblies, it is possible to clean multiple substrate sheets at the same time, greatly improving the cleaning efficiency. The rotation speed and mode of the jig structure are consistent, so that each substrate sheet can obtain the same cleaning conditions and quality, improving the consistency of cleaning, and solving the problems of low efficiency and cleaning consistency of the traditional single rotation cleaning method. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic structural diagram of a substrate cleaning device provided by an embodiment of the present utility model;

[0018] Figure 2 It is a structural diagram of the drive assembly and the fixture assembly provided by an embodiment of the present utility model;

[0019] Figure 3 It is a structural diagram of a fixture assembly provided by an embodiment of the present utility model;

[0020] Figure 4 The embodiment of the present utility model provides Figure 3 A partial enlarged view of the circled portion A;

[0021] Figure 5 This is a schematic structural diagram of a bracket provided by an embodiment of the present utility model;

[0022] In the figure, 1. water tank; 2. bracket; 21. support column; 22. support plate; 221. first mounting plate; 222. support beam; 3. drive assembly; 31. first drive member; 32. gear plate; 4. fixture assembly; 41. gear member; 42. fixture structure; 421. clamp; 4211. first limiting plate; 42111. first through hole; 42112. first groove; 42113. first notch; 42114. second groove; 4212. second limiting plate; 42121. second through hole; 42122. second mounting hole; 42123. second notch; 422. connecting shaft; 423. limiting part. DETAILED DESCRIPTION

[0023] The following embodiments are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0024] like Figure 1 and Figure 2 As shown, the utility model provides a substrate sheet cleaning device, including a water tank 1, a bracket 2, a drive assembly 3 and multiple jig assemblies 4, the bracket 2 provides a stable installation platform for the drive assembly 3 and the jig assembly 4, the drive assembly 3 is installed on the bracket 2, and the jig assembly 4 is suspended in the water tank 1; the drive assembly 3 includes a first drive member 31 and a gear plate 32, the jig assembly 4 includes a gear member 41 and a jig structure 42, the first drive member 31 and the gear plate 32 are installed on the bracket 2, and the output shaft of the first drive member 31 is connected to the gear plate 32, the gear plate 32 receives and converts the power transmitted by the first drive member 31, the gear member 41 is engaged with the gear plate 32, and the jig structure 42 is connected to the gear member 41, and the rotational motion of the first drive member 31 is transmitted to the jig structure 42, so as to drive the multiple jig structures 42 to rotate synchronously in situ through the first drive member 31.

[0025] In this embodiment, the output shaft of the first driving member 31 rotates to drive the gear plate 32 to rotate. The gears on the gear plate 32 mesh with the gear members 41 in each jig assembly 4, so that multiple gear members 41 rotate synchronously. Since the gear members 41 are connected to the jig structure 42, each jig structure 42 and the substrate sheet fixed thereon will also rotate synchronously in situ with the operation of the driving assembly 3. By synchronously driving multiple jig assemblies 4, it is possible to clean multiple substrate sheets at the same time, greatly improving the cleaning efficiency. The rotation speed and mode of the jig structure 42 are consistent, so that each substrate sheet can obtain the same cleaning conditions and quality, improving the consistency of cleaning, and solving the problems of low efficiency and cleaning consistency of the traditional single rotation cleaning method.

[0026] like Figure 5 As shown, the bracket 2 includes two spaced support columns 21 and a support plate 22. Both ends of the support plate 22 are respectively connected to the support columns 21, providing a support frame for the installation of the drive assembly 3 and the fixture assembly 4 to ensure the stability of the device; the first drive member 31 is installed on the side of the support plate 22 facing the sink 1, and the gear plate 32 is installed on the side of the support plate 22 facing away from the sink 1. The output shaft of the first drive member 31 passes through the support plate 22 and is connected to the gear plate 32, and the fixture structure 42 passes through the support plate 22 and is connected to the gear member 41.

[0027] Based on the above structure, the jig assembly 4 of this embodiment can be suspended in the water tank 1, and at the same time receive power from the first driving member 31 through gear transmission to achieve synchronous rotation, thereby ensuring the flexibility and stability of the jig assembly 4, and also ensuring that the substrate sheet can be fully and evenly cleaned during the cleaning process.

[0028] In some embodiments, the support plate 22 includes a first mounting plate 221 and two support beams 222. The opposite sides of the first mounting plate 221 are respectively connected to the support beams 222 to form a stable frame structure. The end of the support beam 222 away from the first mounting plate 221 is connected to the corresponding support column 21, thereby enhancing the stability and load-bearing capacity of the entire bracket 2. The first driving member 31 and the gear plate 32 are installed on the first mounting plate 221.

[0029] In this embodiment, the combination of first mounting plate 221 and support beam 222 forms a "plate + beam" composite support structure. This structure enhances the overall rigidity and stability of the cleaning device, particularly during dynamic cleaning, effectively resisting the various forces generated by rotation and maintaining smooth operation of the device. Furthermore, first mounting plate 221 allows the first drive member 31 and gear plate 32 to be centrally mounted thereon, facilitating a compact layout.

[0030] In some embodiments, multiple jig assemblies 4 are spaced apart around the axis of the gear disc 32, that is, multiple jig assemblies 4 are distributed in a ring shape around the central axis of the gear disc 32, and a certain distance is maintained between each other, so that each jig assembly 4 is meshed with the central gear disc 32 through the gear member 41 thereon. When the gear disc 32 rotates, the gear members 41 on each jig assembly 4 meshed with it will also drive the jig assembly 4 to rotate synchronously, ensuring that the substrate sheet installed on each jig assembly 4 can maintain a consistent rotation speed and direction during the cleaning process, ensuring that all substrate sheets receive the same cleaning force and time, thereby improving the consistency and quality of the cleaning effect. In addition, the layout method of spacing around the axis maximizes the utilization rate of the cleaning space, and can process a larger number of substrate sheets at the same time in the limited space of the water tank 1, thereby improving the cleaning efficiency and production capacity.

[0031] See also Figure 3 The fixture structure 42 includes a clamp 421 and a connecting shaft 422 . The clamp 421 is connected to the connecting shaft 422 , and one end of the connecting shaft 422 away from the clamp 421 passes through the bracket 2 and is connected to the gear member 41 .

[0032] The clamp 421 of this embodiment is used to clamp the substrate sheet to ensure that the substrate sheet does not fall off during the cleaning process. The connecting shaft 422 serves as an intermediary part connecting the clamp 421 and the gear part 41. It effectively transmits the rotational power generated by the drive component 3 from one side of the bracket 2 to the clamp 421 part of the fixture structure 42, so that the clamp 421 can carry the substrate sheet thereon for synchronous rotation to achieve the cleaning operation.

[0033] In some embodiments, the connecting shaft 422 has a limiting portion 423 , and the limiting portion 423 is disposed between the bracket 2 and the gear member 41 .

[0034] The stopper 423 of this embodiment ensures the accurate positioning of the fixture 421 assembly during rotation by limiting the range of movement of the connecting shaft 422. This prevents mechanical interference or substrate misalignment caused by excessive movement, thereby ensuring precise control of the cleaning process. Furthermore, during the cleaning process, high-speed rotation generates significant centrifugal force. The stopper 423 effectively prevents the connecting shaft 422 from dislodging due to external impact or wear and tear after long-term use, thereby enhancing the stability and safety of the entire system.

[0035] In some embodiments, the fixture 421 includes a first limiting plate 4211 and a second limiting plate 4212, and the first limiting plate 4211 and the second limiting plate 4212 are connected in cooperation to fix the substrate sheet. The first limiting plate 4211 and the second limiting plate 4212 of this embodiment can be connected in cooperation with each other to form a closed or semi-closed space to accommodate and fasten the substrate sheet, ensuring that during the cleaning process, even in the face of high-speed rotation or water flow impact, the substrate sheet can still be kept in the space to prevent it from falling off during the cleaning process and avoid damage. In addition, the first limiting plate 4211 is connected to the gear member 41 through the connecting shaft 422, so that the entire fixture 421 (including the fixed substrate sheet) can be driven by the drive assembly 3 to achieve synchronous rotation. This not only ensures the efficiency of the cleaning process, but also ensures that all substrate sheets are cleaned under the same conditions at the same time, thereby improving the consistency and repeatability of the cleaning effect.

[0036] In some embodiments, the clamp 421 also includes multiple fixing parts, the first limiting plate 4211 has a first through hole 42111 for the circulation of cleaning liquid, and the second limiting plate 4212 has a second through hole 42121 corresponding to the first through hole 42111, ensuring that the cleaning liquid can fully contact the surface of the substrate to achieve the purpose of cleaning.

[0037] In addition, the first limiting plate 4211 has a plurality of first mounting holes for installing the fixing parts, and the second limiting plate 4212 has a plurality of second mounting holes 42122 arranged corresponding to the first mounting holes, providing an interface for the installation of the fixing parts, ensuring that the fixing parts can be accurately installed in the predetermined position to achieve a firm clamping of the substrate sheet.

[0038] See also Figure 4 The first limiting plate 4211 is recessed on one side toward the second limiting plate 4212 to form a first groove 42112 for mounting the substrate. The width of the first groove 42112 is greater than the first through hole 42111, and the thickness of the first groove 42112 is greater than the thickness of the substrate.

[0039] Based on the above structure, when the substrate sheet is placed in the first groove 42112, a certain gap is left between its two sides and the wall surface of the first groove 42112, so that when the cleaning liquid passes through the first through hole 42111, it still has enough space to diffuse in the first groove 42112, ensuring that the cleaning liquid can fully contact a wider area of the substrate sheet, thereby improving the comprehensiveness of cleaning.

[0040] In some embodiments, the first limiting plate 4211 is formed with a first notch 42113 and a second groove 42114, and the second limiting plate 4212 is formed with a second notch 42123. The first notch 42113, the second groove 42114 and the second notch 42123 together constitute an installation port for installing the substrate.

[0041] Based on the above structure, the first notch 42113 and the second groove 42114 on a limit plate cooperate with the second notch 42123 on the second limit plate 4212 to jointly define a precise installation space or "installation port". The installation port is set to provide an entry or exit path for the insertion or removal of the substrate sheet, so that the operator can easily insert the substrate sheet into the installation port and remove it just as easily after cleaning, reducing the difficulty and time of operation, and also reducing the risk of damage to the substrate sheet due to improper operation.

[0042] In summary, an embodiment of the present invention provides a substrate sheet cleaning device, which rotates the first driving member 31, and its output shaft drives the gear plate 32 to rotate. The gear on the gear plate 32 is engaged with the gear member 41 in each fixture assembly 4, so that multiple gear members 41 rotate synchronously. Since the gear member 41 is connected to the fixture structure 42, each fixture structure 42 and the substrate sheet fixed thereon will also rotate synchronously in situ with the operation of the driving assembly 3. By synchronously driving multiple fixture assemblies 4, it is possible to clean multiple substrate sheets at the same time, greatly improving the cleaning efficiency, and the rotation speed and mode of the fixture structure 42 are consistent, so that each substrate sheet can obtain the same cleaning conditions and quality, thereby improving the consistency of cleaning and solving the problems of low efficiency and cleaning consistency of the traditional single rotation cleaning method.

[0043] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and replacements can be made without departing from the technical principles of the present invention. These improvements and replacements should also be regarded as the scope of protection of the present invention.

Claims

1. A substrate cleaning device, characterized in that: It includes a water tank, a bracket, a driving assembly and a plurality of fixture assemblies, wherein the driving assembly is mounted on the bracket, and the fixture assembly is suspended in the water tank; The drive assembly includes a first drive member and a gear plate, and the fixture assembly includes a gear member and a fixture structure. The first drive member and the gear plate are installed on the bracket, and the output shaft of the first drive member is connected to the gear plate. The gear member is engaged with the gear plate, and the fixture structure is connected to the gear member, so that the first drive member drives multiple fixture structures to rotate synchronously in situ.

2. The substrate cleaning device according to claim 1, wherein: The bracket includes two support columns and a support plate arranged at intervals, both ends of the support plate are respectively connected to the support columns, the first driving member is installed on the side of the support plate facing the water tank, and the gear plate is installed on the side of the support plate facing away from the water tank. The output shaft of the first driving member passes through the support plate and is connected to the gear plate, and the fixture structure passes through the support plate and is connected to the gear member.

3. The substrate cleaning device according to claim 2, wherein: The support plate includes a first mounting plate and two support beams. The opposite sides of the first mounting plate are respectively connected to the support beams. The end of the support beam away from the first mounting plate is connected to the corresponding support column. The first driving member and the gear plate are installed on the first mounting plate.

4. The substrate cleaning device according to claim 1, wherein: A plurality of the fixture assemblies are arranged at intervals around the axis of the gear plate.

5. The substrate cleaning device according to claim 1, wherein: The fixture structure includes a clamp and a connecting shaft, the clamp is connected to the connecting shaft, and one end of the connecting shaft away from the clamp passes through the bracket and is connected to the gear component.

6. The substrate cleaning device according to claim 5, wherein: The connecting shaft has a limiting portion, and the limiting portion is arranged between the bracket and the gear component.

7. The substrate cleaning device according to claim 5, wherein: The clamp includes a first limiting plate and a second limiting plate, the first limiting plate and the second limiting plate are cooperatively connected to fix the substrate sheet, and the first limiting plate is connected to the gear member through the connecting shaft.

8. The substrate cleaning device according to claim 7, wherein: The clamp also includes multiple fixing parts, the first limiting plate has a first through hole for the circulation of cleaning liquid and multiple first mounting holes for installing the fixing parts, the second limiting plate has a second through hole corresponding to the first through hole and a second mounting hole corresponding to the first mounting hole.

9. The substrate cleaning device according to claim 8, wherein: A side of the first limiting plate facing the second limiting plate is recessed to form a first groove for mounting the substrate. The width of the first groove is greater than the first through hole, and the thickness of the first groove is greater than the thickness of the substrate.

10. The substrate cleaning device according to claim 8, wherein: The first limiting plate is formed with a first notch and a second groove, and the second limiting plate is formed with a second notch. The first notch, the second groove and the second notch together constitute an installation opening for installing the substrate.

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