Flexible carrying table and carrying device

Abstract

The utility model discloses a flexible carrying table and a bearing device, the flexible carrying table comprises a detachable wafer carrying disc and a flexible carrying table base, the flexible carrying table base is provided with a plurality of flexible bearing mechanisms for bearing the detachable wafer carrying disc, and the detachable wafer carrying disc comprises an annular adapter ring with a plurality of mounting holes; one end of each connecting arm is mounted in the corresponding mounting hole, the other end of each connecting arm is provided with a wafer supporting block, and the connecting arms are arranged in the radial direction of the connecting ring and extend in the same direction. According to the utility model, the structure is simple, the rapid replacement of the wafer bearing structure is realized, the flexible contact between carriers is also realized, the extra buffer allowance is provided for the wafer in operation, and the safety is better.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor equipment, and in particular relates to a flexible carrier and a carrier device. Background Art

[0002] Existing mechanisms often use a fixed platform, which is fixed and locked to a base, rigidly fastened to the platform. Wafers placed on the platform are unrelieved, potentially causing damage due to pressure. Changing wafer sizes requires removing the fastening screws, replacing the stage, and then re-tightening the platform, which is quite cumbersome.

[0003] Therefore, in order to solve the above technical problems, it is necessary to provide a flexible carrier and a carrying device.

[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as an admission or any form of suggestion that the information constitutes the prior art already known to those skilled in the art. Utility Model Content

[0005] The purpose of the utility model is to provide a flexible carrier and a carrying device, which can.

[0006] In order to achieve the above-mentioned purpose, the technical solution provided by a specific embodiment of the present invention is as follows:

[0007] The flexible carrier includes a detachable wafer carrier and a flexible carrier base. The flexible carrier base is provided with several flexible bearing mechanisms for carrying the detachable wafer carrier.

[0008] The detachable wafer carrier includes: an annular adapter ring with several mounting holes; a connecting arm with one end mounted to the mounting hole, and a wafer support block is provided at the other end of the connecting arm. The connecting arms are all arranged along the radial direction of the connecting ring and extend in the same direction (toward the center or outside of the ring at the same time).

[0009] In one or more embodiments of the present invention, the wafer support block includes a horizontal portion and a rib provided on the horizontal portion for limiting the position of the wafer, and the angle formed by the clamping surface between the rib and the horizontal portion is 100-145°.

[0010] In one or more embodiments of the present invention, the horizontal portion is further provided with a magnetic device, which includes a magnetic attraction portion formed on the horizontal portion and a magnet cooperated with the magnetic attraction portion to be restricted to the connecting arm.

[0011] In one or more embodiments of the present invention, the horizontal portion is formed with a mounting groove for mounting a magnetic device.

[0012] In one or more embodiments of the present invention, the installation slot passes through the horizontal portion, and a sealing plate is formed at the other end of the installation slot relative to the horizontal clamping surface to limit the magnet in the slot.

[0013] In one or more embodiments of the present invention, a limiting mechanism for limiting the flexible carrying mechanism is provided on the flexible carrier base, and the flexible carrying mechanism includes:

[0014] A guide rod and a guide sleeve fixedly mounted on one end of the guide rod, the guide rod being cooperatively mounted in a limiting hole of a limiting mechanism, a limiting portion being disposed at the other end of the guide rod and being exposed outside the limiting hole and having at least a portion with a diameter greater than the inner diameter of the limiting hole, and a first space being formed between the guide sleeve and the guide rod;

[0015] The elastic device is arranged in the first space and sleeved on the outside of the guide rod.

[0016] In one or more embodiments of the present invention, the elastic device is a spring or a rubber elastic member.

[0017] In one or more embodiments of the present invention, screw holes are respectively provided at both ends of the guide rod, and the guide sleeve is connected to the screw hole at one end of the guide rod by screws.

[0018] In one or more embodiments of the present invention, the screw hole at the other end of the guide rod is further provided with a screw and / or a gasket matching the screw, and the diameter of the end of the screw or the gasket is larger than the inner diameter of the limiting hole.

[0019] In one or more embodiments of the present invention, the carrying device includes a body and a flexible carrier arranged on the body.

[0020] Compared with the existing technology, the flexible carrier and the supporting device of the present invention, on the one hand, realize the rapid replacement and quick change of the structure. When the wafer size is changed, the detachable wafer carrier can be removed as a whole and replaced with a carrier of the new specification. During maintenance, the wafer support block can also be quickly removed and replaced without the need for special tools. It is quick and convenient. The existing technology requires the carrier to be disassembled and special tools such as wrenches to be used, which is time-consuming and labor-intensive. On the other hand, flexible contact is achieved between the detachable wafer carrier and the flexible carrier base, so that it has a certain compression margin to offset the external force on the wafer caused by factors such as the handling accuracy of the mechanism, thereby reducing the possibility of wafer damage. The existing mechanism is a rigid carrier. When the wafer needs to face down and the robot absorbs the back of the wafer and places it on the carrier, or when the wafer is taken from the wafer carrier, due to factors such as handling accuracy, machine vibration, and wafer thickness differences, the robot will have a certain overpressure. The overpressure is borne on the wafer, which increases the risk of wafer breakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 This is a schematic diagram of the partial structure of the flexible carrier in one embodiment of the present utility model;

[0023] Figure 2 This is a schematic structural diagram of a detachable wafer carrier in one embodiment of the present invention;

[0024] Figure 3 This is a structural diagram of a connecting arm in one embodiment of the present utility model;

[0025] Figure 4 This is a schematic diagram of the partial structure of the flexible stage base in one embodiment of the present utility model;

[0026] Figure 5 Schematic diagram of the structure of the flexible bearing mechanism in one embodiment of the present invention. DETAILED DESCRIPTION

[0027] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the following will be combined with the drawings of the embodiments of the present invention to clearly and completely describe the technical solutions of the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0028] like Figure 1-5 As shown, the flexible carrier in one embodiment of the present invention comprises a removable wafer carrier 1 and a flexible carrier base 2. The removable wafer carrier rests on the carrier base under its own weight. The adapter ring of the removable wafer carrier 1 has a plurality of positioning holes, three or more in number, which align with the flexible support structure on the flexible carrier base 2 to provide support.

[0029] In one embodiment of the present invention, Figure 2 As shown, the removable wafer carrier may include:

[0030] There are three positioning holes on the adapter ring 11, which cooperate with the three flexible bearing mechanisms on the flexible carrier base 2 to complete the carrier positioning. The adapter ring 11 is provided with a mounting hole, and one end of the connecting arm 12 is locked to the adapter ring 11 by a threaded connection. The connecting arm 12 in the figure is facing the inside of the adapter ring 11. The wafer support block 13 is arranged at the other end of the connecting arm 12. The specific setting position can be determined according to the size matching requirements of the wafer. The wafer support block 13 includes a horizontal portion and a rib arranged on the horizontal portion for limiting the position of the wafer. The angle formed by the clamping surface between the rib and the horizontal portion is: 100-145°, and the wafer can be confined to the bottom of the space defined by the bending portion. The wafer support block 13 can be made of materials such as high-purity quartz, ceramics or SiC.

[0031] In one embodiment of the present invention, the horizontal portion is further provided with a magnetic device 14, which may be a permanent magnet, etc. The magnetic device includes a magnetically conductive magnetic portion formed on the horizontal portion and a magnet restricted to the connecting arm. The magnetic portion 15 is engaged with the horizontal clamping surface to form an exposed surface (in this case, the horizontal portion may be formed with an engaging hole, etc.), which is used to utilize the magnet to generate a magnetic attraction and adsorb with the magnetic portion 15.

[0032] Furthermore, the horizontal portion is formed with a mounting groove for mounting a magnetic device, and a magnet can be embedded in the mounting groove of the connecting arm 12. The mounting groove can pass through the horizontal portion, and a sealing plate 16 is formed at the other end of the mounting groove relative to the horizontal clamping surface to confine the magnet in the mounting groove and prevent it from falling out.

[0033] Furthermore, the magnetic attraction portion 15 can be a magnetic metal part, which is attracted to the magnet by magnetic force to restrict the wafer support block 13 to the connecting arm 12. Therefore, the wafer support block can be directly taken out for cleaning and maintenance, and can be directly put back after cleaning without the need for special tools.

[0034] The flexible platform base is provided with a limiting mechanism for limiting the flexible bearing mechanism. The flexible bearing mechanism includes: a guide rod and a guide sleeve fixedly mounted on one end of the guide rod. The guide rod is cooperatively mounted within a limiting hole of the limiting mechanism. A limiting portion is provided at the other end of the guide rod, and the limiting portion is exposed outside the limiting hole and has a diameter greater than the inner diameter of the limiting hole. A first space is formed between the guide sleeve and the guide rod. An elastic device is disposed within the first space and mounted on the outside of the guide rod. Screw holes are also provided at each end of the guide rod, and the guide sleeve is connected to the screw hole at one end of the guide rod via screws. A screw and / or a gasket that cooperates with the screw is also provided in the screw hole at the other end of the guide rod. The diameter of the end of the screw or the gasket is greater than the inner diameter of the limiting hole.

[0035] In one embodiment of the present invention, Figure 4 As shown, the flexible stage base may include:

[0036] The flexible carrier base 21 can be a plate structure as shown in the figure (the plate structure shown in the figure only shows the part related to the innovation of this solution, and does not show other parts connected to the body. This display does not affect the implementation of the solution of this utility model). The limiting mechanism 22 is fixed to the flexible carrier base 21, such as a linear bearing, and the two can be connected by a thread. The guide rod 26 can slide up and down inside the linear bearing, and the linear bearing plays a guiding role. The lower end of the guide rod 26 can have a boss or be limited by a fixed screw 28 connected by a thread. The guide sleeve 25 is fixedly arranged at the upper end of the guide rod 26. The first space formed between the guide sleeve 25 and the guide rod 26 is used to accommodate an elastic device that realizes the elastic operation of the guide rod 26 along the linear bearing. Along the two ends of the direction of freedom of elastic movement, the elastic device respectively contacts the guide sleeve 25 and the plate structure of the flexible carrier base 21. Specifically, a guide hole (which can be regarded as one end open and one end closed) is formed in the guide sleeve 25, and the diameter of the guide hole is larger than the outer diameter of the spring 24. Furthermore, the inner wall of the closed end of the guide hole has a stepped surface that fits with the upper end surface of the spring, serving as an upper retaining edge of the spring 24. Correspondingly, a recessed groove is provided on the plate structure at the lower end of the spring, thereby serving as a lower retaining edge of the spring. A gasket 23 is provided in the recessed groove, and the gasket 23 and the spring 24 are both sleeved on the outside of the guide rod 26. Due to the movement restriction of the guide rod, the spring 24 is pre-compressed in the initial state, so that the guide sleeve 25 is subjected to an upward pre-pressure. When the detachable wafer carrier 1 is placed on the flexible carrier base 2, the gravity of the detachable wafer carrier 1 and the pre-pressure of the spring offset each other to achieve force balance.

[0037] Furthermore, as shown in the figure, the guide sleeve 25 and the upper end of the guide rod 26 can be connected by screws 27, and the lower end of the guide rod 26 can be threadedly connected to a fixing screw 28 with a boss, thereby limiting the upper and lower ends of the guide rod. The upper and lower limits ensure that the guide rod 26 can only slide within a certain range relative to the linear bearing 22 and will not fall out.

[0038] Furthermore, the outer upper end diameter of the guide sleeve 25 is finely machined to match the limiting hole on the detachable wafer carrier 1 accurately, and is provided with a positioning step for supporting the detachable wafer carrier 1 .

[0039] When the transport arm carries the wafer and places it on the connecting arm 12, the pressure generated by the weight of the wafer is transmitted to the guide sleeve 25 through the detachable wafer carrier 1, causing the spring 24 to be compressed and the guide sleeve 25 to descend with the detachable wafer carrier 1, thereby reducing the pressure of the arm on the wafer and reducing the risk of wafer damage.

[0040] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0041] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A flexible carrier, characterized in that: It includes a detachable wafer carrier and a flexible carrier base, wherein the flexible carrier base is provided with a plurality of flexible bearing mechanisms for bearing the detachable wafer carrier. The detachable wafer carrier includes: an annular adapter ring with a plurality of mounting holes; a connecting arm with one end mounted to the mounting hole, and a wafer support block is provided at the other end of the connecting arm. The connecting arms are all arranged along the radial direction of the connecting ring and extend in the same direction.

2. The flexible stage according to claim 1, wherein: The wafer support block includes a horizontal portion and a rib arranged on the horizontal portion for limiting the position of the wafer. The angle formed by the clamping surface between the rib and the horizontal portion is 100-145°.

3. The flexible stage according to claim 2, characterized in that: The horizontal portion is further provided with a magnetic device, which includes a magnetic attraction portion formed on the horizontal portion and a magnet cooperated with the magnetic attraction portion to be restricted to the connecting arm.

4. The flexible stage according to claim 3, wherein: The horizontal portion is formed with a mounting groove for mounting the magnetic device.

5. The flexible stage according to claim 4, characterized in that: The installation slot passes through the horizontal portion, and a sealing plate is formed at the other end of the installation slot relative to the horizontal clamping surface to limit the magnet in the slot.

6. The flexible stage according to claim 1, wherein: The flexible platform base is provided with a limiting mechanism for limiting the flexible bearing mechanism, and the flexible bearing mechanism includes: A guide rod and a guide sleeve fixedly sleeved on one end of the guide rod, the guide rod being cooperatively arranged in the limiting hole of the limiting mechanism, a limiting portion being provided at the other end of the guide rod and being exposed outside the limiting hole and having at least a portion of its diameter larger than the inner diameter of the limiting hole, and a first space being formed between the guide sleeve and the guide rod; The elastic device is arranged in the first space and sleeved on the outside of the guide rod.

7. The flexible stage according to claim 6, characterized in that: The elastic device is a spring or a rubber elastic member.

8. The flexible carrier according to claim 6, characterized in that: Screw holes are respectively provided at both ends of the guide rod, and the guide sleeve is connected to the screw hole at one end of the guide rod by screws.

9. The flexible carrier according to claim 8, characterized in that: The screw hole at the other end of the guide rod is further provided with a screw and / or a gasket matching the screw, and the diameter of the end of the screw or the gasket is larger than the inner diameter of the limiting hole.

10. A carrying device comprising a body and a flexible carrier according to any one of claims 1 to 9 arranged on the body.

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