Fixing tool for slicing crystal ingot
By designing a fixed tool for ingot slices and using the clamp structure with the chute and slide rail, the problem of edge-swelling during ingot slices is solved, and a higher quality slice effect is achieved.
Patent Information
- Application Number
- CN202422115144.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-29
- Publication Date
- 2025-08-19
- Estimated Expiration
- 2034-08-29
AI Technical Summary
The existing method of ingot slice fixing leads to the problem of rising and collapse of the edges during cutting, affecting the quality of the slice.
A fixed tool is designed, including a tool body, a first clamping member and a second clamping member. Through the cooperation of the slide groove and the slide rail, the second clamping member can move relative to the tool body, and the fixing member is used to clamp the crystal ingot between the two clamping members to provide clamping force to prevent edge collapse.
It effectively improves the edge collapse problem caused by the slicing during the slicing process, and improves the quality and stability of the slicing.
Smart Images
Figure CN223236686U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductors, and in particular to a fixing tool for slicing crystal ingots. Background Art
[0002] A wafer is a circular thin slice obtained after a series of precision processing such as slicing, grinding, polishing, and cleaning of a crystal ingot. It is the basic material in semiconductor manufacturing.
[0003] The slicing process is to fix the wafer on a fixed tool and cut the ingot into multiple slices that meet the thickness requirements by wire cutting.
[0004] Currently, ingots are typically glued to a fixed block before slicing. Some methods also secure the ingot by providing V-shaped grooves in the fixed block. However, these existing methods can lead to edge expansion and chipping of the ingot when slicing, affecting the quality of the slices. Utility Model Content
[0005] The purpose of the utility model is to provide a fixing fixture for slicing crystal ingots, which can fix the crystal ingots and improve the problem of edge collapse caused by expansion of the ingots during the slicing process.
[0006] The embodiment of the present utility model is achieved as follows:
[0007] The utility model provides a fixing tool for slicing a crystal ingot, comprising a tool body, a first clamping piece, a second clamping piece and a fixing piece;
[0008] The tooling body is configured to carry a crystal ingot;
[0009] The first clamping member and the second clamping member are both mounted on the tool body and arranged opposite to each other, and at least one of the first clamping member and the second clamping member is movable relative to the tool body;
[0010] The fixing member is configured to fixedly connect the first clamping member and the second clamping member to the tool body, so as to clamp the ingot between the first clamping member and the second clamping member.
[0011] In an optional embodiment, the first clamping member is fixedly mounted on the tool body, and the second clamping member is movably mounted on the tool body, and the second clamping member can move relative to the tool body to move closer to or away from the first clamping member;
[0012] The fixing member is provided on the second clamping member, and the fixing member can fix the second clamping member and the tool body.
[0013] In an optional embodiment, the tool body is provided with a slide groove, and the second clamping member is provided with a slide rail, and the slide rail is embedded in the slide groove and can move relative to the slide groove.
[0014] In an optional embodiment, the slide grooves are provided on both sides of the tool body in the width direction;
[0015] The second clamping member is provided with an avoidance groove, and two opposite sides of the avoidance groove are provided with sliding rails corresponding to the sliding groove.
[0016] In an optional embodiment, both side walls of the avoidance groove on which the slide rail is provided are provided with first threaded holes;
[0017] The fixing member is a screw, which is installed in the first threaded hole. Rotating the screw can make the end of the screw abut against the side wall of the tool body.
[0018] In an optional embodiment, the slide groove is provided at one end of the tool body away from the first clamping member, and the slide groove extends along the length direction of the tool body and passes through the top wall of the tool body;
[0019] The slide rail is arranged on one side of the second clamping member, and the slide rail is inserted into the slide groove.
[0020] In an optional embodiment, the fixing member is a bolt;
[0021] The second clamping member is provided with a through hole along the length direction of the slide rail;
[0022] A mounting portion is provided on one side of the slide groove close to the first clamping member, and the mounting portion is provided with a second threaded hole;
[0023] The bolt is inserted into the through hole and installed in the second threaded hole.
[0024] In an optional embodiment, self-adhesive glue is provided on opposite sides of the first clamping member and the second clamping member.
[0025] In an optional embodiment, a glue injection groove is provided on the side wall of the first clamping member and the side opposite to the second clamping member.
[0026] In an optional embodiment, the glue injection groove includes a main flow channel and a branch flow channel;
[0027] The main channel is arranged along the vertical direction, and one end of the branch channel is communicated with the main channel and extends toward both sides of the main channel.
[0028] The beneficial effects of the fixing fixture for ingot slicing provided by the embodiment of the utility model are:
[0029] The present application installs the first clamping member and the second clamping member on the tooling body and arranges them relative to each other, and enables at least one of the first clamping member and the second clamping member to move relative to the tooling body. In this way, when the crystal ingot is fixed, the crystal ingot is carried on the tooling body, and the first clamping member and / or the second clamping member are moved to clamp the crystal ingot from both ends of the crystal ingot, and then the first clamping member and / or the second clamping member are fixed by the fixing member. In this way, the first clamping member and the second clamping member can provide clamping force to the crystal ingot from both ends, thereby improving the problem of edge collapse caused by expansion of the slice during slicing. BRIEF DESCRIPTION OF THE DRAWINGS
[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.
[0031] Figure 1 A schematic structural diagram of a fixing fixture for ingot slicing provided by an embodiment of the present utility model;
[0032] Figure 2 A schematic diagram of a fixed tooling for ingot slicing provided by an embodiment of the present invention after the ingot is clamped;
[0033] Figure 3 A schematic diagram of an exploded structure of a fixing fixture for ingot slicing provided by an embodiment of the present utility model;
[0034] Figure 4 A schematic diagram of another fixing fixture structure for ingot slicing provided by an embodiment of the present utility model;
[0035] Figure 5 for Figure 4 A schematic structural diagram of another perspective of a fixing fixture for ingot slicing is shown;
[0036] Figure 6 for Figure 4 The figure shows a schematic structural diagram of a second clamping member of a fixing fixture for ingot slicing.
[0037] Icons: 100-fixing fixture for ingot slicing; 110-fixing fixture body; 111-slide groove; 113-mounting portion; 115-second threaded hole; 130-first clamping member; 150-second clamping member; 151-slide rail; 153-avoidance groove; 155-ear piece; 157-first threaded hole; 159-through hole; 170-fixing member; 171-screw; 173-bolt; 181-self-adhesive glue; 190-glue injection groove; 191-main channel; 193-branch channel. DETAILED DESCRIPTION
[0038] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.
[0039] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.
[0040] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.
[0041] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0042] Furthermore, terms such as "horizontal" and "vertical" do not necessarily mean that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.
[0043] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.
[0044] Please parameter Figure 1 This embodiment provides a fixing fixture 100 for slicing a crystal ingot, which can fix the crystal ingot and improve the problem of edge collapse caused by expansion of the ingot during the slicing process.
[0045] Please refer to Figure 1 、 Figure 2 and Figure 3 The fixture 100 for slicing a crystal ingot includes a fixture body 110, a first clamping member 130, a second clamping member 150, and a fixing member 170. The fixture body 110 is configured to support a crystal ingot. The first clamping member 130 and the second clamping member 150 are both mounted on the fixture body 110 and arranged relative to each other, and at least one of the first clamping member 130 and the second clamping member 150 can move relative to the fixture body 110. The fixing member 170 is configured to fixedly connect the first clamping member 130 and the second clamping member 150 to the fixture body 110 to clamp the crystal ingot between the first clamping member 130 and the second clamping member 150.
[0046] In this embodiment, the first clamping member 130 and the second clamping member 150 are both installed on the tooling body 110 and arranged relative to each other, and at least one of the first clamping member 130 and the second clamping member 150 can be moved relative to the tooling body 110. In this way, when the ingot is fixed, the ingot is carried on the tooling body 110, and the first clamping member 130 and / or the second clamping member 150 are moved to clamp the ingot from both ends of the ingot, and then the first clamping member 130 and / or the second clamping member 150 are fixed by the fixing member 170. In this way, the first clamping member 130 and the second clamping member 150 can provide clamping force to the ingot from both ends, thereby improving the problem of edge collapse caused by expansion of the slice during slicing.
[0047] It should be noted that a flat edge, also known as a positioning edge, is typically cut into the ingot before slicing. The ingot is supported on the upper surface of the tooling body 110 by the flat edge, preventing it from rolling when the first clamping member 130 and / or the second clamping member 150 are moved or fixed. Furthermore, to ensure a stable connection between the ingot and the tooling body 110, they are typically bonded together.
[0048] Please refer to Figure 1 、 Figure 2 and Figure 3 In this embodiment, the first clamping member 130 is fixedly mounted on the tool body 110, and the second clamping member 150 is movably mounted on the tool body 110. The second clamping member 150 can move relative to the tool body 110 to move closer to or away from the first clamping member 130. The fixing member 170 is provided on the second clamping member 150 and can fix the second clamping member 150 to the tool body 110.
[0049] In this embodiment, the first clamping member 130 is fixedly connected to the tool body 110, and the second clamping member 150 is movably installed on the tool body 110. In this way, when fixing the crystal ingot, only the second clamping member 150 needs to be adjusted to clamp the two ends of the crystal ingot, which is more convenient to operate.
[0050] Of course, in some other embodiments of the present application, the first clamping member 130 and the second clamping member 150 can also be movably installed on the tooling body 110, and fixing members 170 can be provided on the first clamping member 130 and the second clamping member 150, so as to fix the ingot from both ends by adjusting the first clamping member 130 and the second clamping member 150.
[0051] In this embodiment, the first clamping member 130 and the tool body 110 are integrally formed, generally by injection molding. Of course, in this embodiment, the first clamping member 130 and the tool body 110 can also be assembled into an integral structure by fasteners.
[0052] The tool body 110 is roughly in the shape of a long column, and the first clamping member 130 gradually increases in size toward the top, forming a roughly trapezoidal shape, but both sides of the corresponding hypotenuse are arc-shaped.
[0053] In this embodiment, the tool body 110 is provided with a slide groove 111 , and the second clamping member 150 is provided with a slide rail 151 . The slide rail 151 is embedded in the slide groove 111 and can move relative to the slide groove 111 .
[0054] In this embodiment, the second clamping member 150 slides relative to the tool body 110 by cooperating with the sliding groove 111 and the sliding rail 151 , which makes the movement more convenient.
[0055] Please refer to Figure 1 、 Figure 2 and Figure 3 In some embodiments, both sides of the tool body 110 in the width direction are provided with a slide groove 111. The second clamping member 150 is provided with an avoidance groove 153, and the two opposite sides of the avoidance groove 153 are provided with slide rails 151 corresponding to the slide groove 111.
[0056] In this embodiment, by providing the slide grooves 111 and corresponding slide rails 151 on both sides of the tool body 110 in the width direction, the force is more evenly distributed and the sliding is smoother. In addition, the upper surface of the tool body 110 is kept intact, thereby better supporting the ingot.
[0057] Furthermore, the second clamping member 150 comprises two parts: a lower rectangular portion and an upper abutting portion. The abutting portion has a shape corresponding to that of the first clamping member 130. The rectangular portion is wider than the tool body 110 in the width direction. An escape groove 153 is provided in the rectangular portion, forming two tabs 155 on either side of the tool body 110 in the width direction. The escape groove 153 is located between the two tabs 155. The slide rail 151 and the tab 155 are integrally formed.
[0058] Furthermore, the cross-section of the chute 111 is roughly an isosceles trapezoid, with its corresponding upper base on the outside and the lower base on the inside. This prevents the slide rail 151 from slipping out along the width direction. Furthermore, the end of the chute 111 penetrates the end surface of the tool body 110. The shape of the slide rail 151 matches that of the chute 111, allowing the second clamping member 150 to be mounted to the tool body 110 from the end thereof.
[0059] In this embodiment, first threaded holes 157 are provided on both side walls of the guide rail 151 provided in the avoidance groove 153, that is, the lug 155 is provided with a first threaded hole 157. The fixing member 170 is a screw 171, which is installed in the first threaded hole 157. Rotating the screw 171 can make the end of the screw 171 abut against the side wall of the tool body 110.
[0060] In this embodiment, screws 171 are provided and the second clamping member 150 is fixed by utilizing the lateral abutment of the screws 171 .
[0061] Generally, the first threaded hole 157 can be offset from the slide rail 151 so that the end of the screw 171 avoids the slide groove 111 and abuts against the side wall of the tooling body 110, thereby avoiding damage to the slide groove 111 due to abutment.
[0062] Please refer to Figure 4 、 Figure 5 and Figure 6 In some other embodiments of the present application, a slide groove 111 is provided at one end of the tool body 110 away from the first clamping member 130. The slide groove 111 extends along the length of the tool body 110 and passes through the top wall of the tool body 110. A slide rail 151 is provided on one side of the second clamping member 150 and is inserted into the slide groove 111.
[0063] In this embodiment, the slide rail 151 is arranged on one side of the second clamping member 150, and the slide groove 111 is arranged at the end. The two are plugged into each other, so that the structure is simpler.
[0064] Specifically, the slide slot 111 is disposed at the center of the tool body 110 in the width direction, with one end extending through the tool body 110 away from the first clamping member 130 and the other end extending to be flush with the first clamping member 130. The slide rail 151 is inserted into the slide slot 111 and can be pulled out or retracted through the slide slot 111 to adjust the distance between the first clamping member 130 and the second clamping member 150.
[0065] Furthermore, the slide rail 151 is a columnar structure with a trapezoidal cross section, and the cross section of the slide groove 111 is also rectangular correspondingly.
[0066] Please refer to Figure 4 、 Figure 5 and Figure 6 Specifically, in this embodiment, the fixing member 170 is a bolt 173. The second clamping member 150 is provided with a through hole 159 along the length direction of the slide rail 151. A mounting portion 113 is provided on the side of the slide 111 close to the first clamping member 130, and the mounting portion 113 is provided with a second threaded hole 115. The bolt 173 is inserted into the through hole 159 and installed in the second threaded hole 115. In this embodiment, the bolt 173 is installed in the above manner, so that the second clamping member 150 can be driven by the bolt 173 to move toward the first clamping member 130, thereby clamping the ingot between the first clamping member 130 and the second clamping member 150.
[0067] Please refer to Figure 1 In this embodiment, self-adhesive glue 181 is provided on opposite sides of the first clamping member 130 and the second clamping member 150. The self-adhesive glue 181 can be used to bond the two ends of the ingot.
[0068] Please refer to Figures 4 to 6 Of course, in other embodiments of the present application, the side walls of the first clamping member 130 and the second clamping member 150 on the opposite side are both provided with a glue injection groove 190 .
[0069] By setting up a glue injection groove 190, the present application can inject adhesive into the glue injection groove 190 after the first clamping member 130 and the second clamping member 150 clamp the crystal ingot stably, and use the adhesive to bond and fix the first clamping member 130 and the second clamping member 150 to the crystal ingot, thereby improving the stability of the bonding.
[0070] In this embodiment, the glue injection groove 190 includes a main channel 191 and branch channels 193. The main channel 191 is arranged along the vertical direction, and one end of the branch channel 193 is connected to the main channel 191 and extends toward both sides of the main channel 191.
[0071] In this embodiment, the glue injection groove 190 is configured as a main channel 191 and a branch channel 193. The main channel 191 can facilitate glue injection, while the branch channel 193 can increase the bonding area.
[0072] The main channel 191 can be arranged vertically with the opening at the upper end formed into a trumpet shape, and the phase gradually increases, which is convenient for glue injection. The branch channel 193 can be wavy in shape, or extend upward at an angle to form a glue overflow port to determine whether the glue is fully filled.
[0073] In summary, in this embodiment, the first clamping member 130 and the second clamping member 150 are both installed on the tooling body 110 and arranged relative to each other, and the second clamping member 150 can move relative to the tooling body 110. In this way, when the ingot is fixed, the ingot is supported on the tooling body 110, and the second clamping member 150 is moved so that the first clamping member 130 and the second clamping member 150 are clamped on the ingot from both ends of the ingot, and then the second clamping member 150 is fixed by the fixing member 170. In this way, the first clamping member 130 and the second clamping member 150 can provide clamping force to the ingot from both ends, thereby improving the problem of edge collapse caused by expansion of the slice during slicing.
[0074] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.
Claims
1. A fixture for slicing an ingot, characterized in that: It comprises a tool body (110), a first clamping member (130), a second clamping member (150) and a fixing member (170); The tooling body (110) is configured to carry a crystal ingot; The first clamping member (130) and the second clamping member (150) are both mounted on the tooling body (110) and arranged relative to each other, and at least one of the first clamping member (130) and the second clamping member (150) is movable relative to the tooling body (110); The fixing member (170) is configured to fixedly connect the first clamping member (130) and the second clamping member (150) to the tooling body (110) so as to clamp the crystal ingot between the first clamping member (130) and the second clamping member (150).
2. The fixture for ingot slicing according to claim 1, characterized in that: The first clamping member (130) is fixedly mounted on the tooling body (110), and the second clamping member (150) is movably mounted on the tooling body (110), and the second clamping member (150) is movable relative to the tooling body (110) to move closer to or farther away from the first clamping member (130); The fixing member (170) is provided on the second clamping member (150), and the fixing member (170) can fix the second clamping member (150) and the tool body (110).
3. The fixture for ingot slicing according to claim 2, characterized in that: The tool body (110) is provided with a slide groove (111), and the second clamping member (150) is provided with a slide rail (151). The slide rail (151) is embedded in the slide groove (111) and can move relative to the slide groove (111).
4. The fixing fixture for ingot slicing according to claim 3, characterized in that: The sliding grooves (111) are provided on both sides of the tool body (110) in the width direction; The second clamping member (150) is provided with an avoidance groove (153), and two opposite sides of the avoidance groove (153) are both provided with slide rails (151) corresponding to the slide groove (111).
5. The fixing fixture for ingot slicing according to claim 4, characterized in that: The two side walls of the avoidance groove (153) on which the slide rail (151) is arranged are both provided with first threaded holes (157); The fixing member (170) is a screw (171), and the screw (171) is installed in the first threaded hole (157). Rotating the screw (171) can cause the end of the screw (171) to abut against the side wall of the tooling body (110).
6. The fixture for ingot slicing according to claim 3, characterized in that: The sliding groove (111) is provided at one end of the tool body (110) away from the first clamping member (130), and the sliding groove (111) extends along the length direction of the tool body (110) and passes through the top wall of the tool body (110); The slide rail (151) is arranged on one side of the second clamping member (150), and the slide rail (151) is inserted into the slide groove (111).
7. The fixture for ingot slicing according to claim 6, characterized in that: The fixing member (170) is a bolt (173); The second clamping member (150) is provided with a through hole (159) along the length direction of the slide rail (151); A mounting portion (113) is provided on one side of the slide groove (111) close to the first clamping member (130), and the mounting portion (113) is provided with a second threaded hole (115); The bolt (173) is inserted into the through hole (159) and installed in the second threaded hole (115).
8. The fixture for slicing an ingot according to any one of claims 1 to 7, characterized in that: Self-adhesive glue (181) is provided on opposite sides of the first clamping member (130) and the second clamping member (150).
9. The fixing fixture for ingot slicing according to any one of claims 1 to 7, characterized in that: The side walls of the first clamping member (130) and the second clamping member (150) on the opposite side are both provided with glue injection grooves (190).
10. The fixing fixture for ingot slicing according to claim 9, characterized in that: The glue injection groove (190) includes a main flow channel (191) and a branch flow channel (193); The main channel (191) is arranged along the vertical direction, and one end of the branch channel (193) is communicated with the main channel (191) and extends toward both sides of the main channel (191).