Conveying and supporting mechanism of sputter coating workpiece cage frame

Abstract

The utility model relates to the technical field of coating, in particular to a conveying and supporting mechanism of a sputter coating workpiece cage frame. The conveying and supporting mechanism of the sputter coating workpiece cage frame comprises a conveying frame, and a plurality of limiting blocks are arranged on the conveying frame; the cage frame is separably arranged on the conveying frame, and the limiting block is embedded into a limiting opening in the bottom of the cage frame; the cage frame comprises a supporting plate, a mounting ring, a cylindrical shaft, a guide shaft sleeve and a material plate; the guide shaft sleeve is arranged on the cylinder shaft, and a first guide surface is arranged at an opening of the guide shaft sleeve; a driving disc and a driven disc are oppositely arranged in the coating chamber, and second guide surfaces are arranged on the driving disc and the driven disc; and the driving disc and the driven disc can enter the corresponding guide shaft sleeves along the first guide surfaces. The first guide face and the second guide face can be matched, the driven disc and the driving disc can enter the corresponding guide shaft sleeves along the first guide face, alignment between the cage frame and the driven disc and alignment between the cage frame and the driving disc are more efficient, and production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a conveying and supporting mechanism of a sputtering film coating workpiece cage. Background Art

[0002] Sputtering is the process of bombarding a target material with ions. The process of dislodging atoms from the target is called sputtering. The deposition of these atoms on the substrate to form a film is called sputtering. This process typically involves gas discharge to generate ionized gas. The resulting positive ions, under the influence of an electric field, bombard a cathode target at high speed, knocking atoms or molecules from the target away. These atoms or molecules then fly to the substrate, where they deposit as a thin film.

[0003] Sputtering is widely used for coating the housings of various electronic products. During coating, the product is typically placed in a cage, which is then transported to a coating chamber for coating. Coating is typically performed in multiple passes, so the cage often needs to be switched between different coating chambers to complete multiple coating cycles.

[0004] The cage rotates during coating, enabling coating of different products. Since most cages are driven by a drive shaft, aligning the drive shaft with the power source is difficult when switching between different coating chambers. This may require multiple alignments, affecting production efficiency.

[0005] For example, Chinese patent application number: CN202321034357.2 discloses a process chamber cage structure for a coating machine and a coating machine, which specifically discloses that "the driving shaft of the driving device passes through the first turntable and the second turntable in sequence, and is fixedly connected to the first turntable and the second turntable; the plurality of fixing parts include the fixing parts arranged on the first turntable and the fixing parts arranged on the second turntable, and the fixing parts arranged on the first turntable correspond one to one with the fixing parts arranged on the second turntable, and the products to be coated or the tooling plates carrying the products to be coated are fixed to the corresponding fixing parts on the first turntable and the fixing parts on the second turntable." This design is driven by a driving shaft to rotate, so when the cage is switched between different coating chambers, it is more difficult to align the driving shaft with the power source, and multiple alignments may be required, affecting production efficiency. Utility Model Content

[0006] In view of this, the present invention aims to address the deficiencies in the prior art, and its main purpose is to provide a conveying and supporting mechanism for a sputtering coating workpiece cage, which makes it easier to align the cage and the power source, thereby improving production efficiency and overcoming the shortcomings of the prior art.

[0007] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0008] The present application provides a conveying support mechanism for a sputtering coating workpiece cage, comprising a conveying frame, on which a plurality of limit blocks are provided;

[0009] The cage is detachably arranged on the conveying frame, and the limiting block is embedded in the limiting opening at the bottom of the cage;

[0010] The cage includes a support plate, a mounting ring, a cylindrical shaft, a guide sleeve, and a material plate; the guide sleeve is arranged on the cylindrical shaft, and a first guide surface is arranged at the opening of the guide sleeve; the first end of the support plate is arranged on the guide sleeve, and the second end of the support plate is arranged on the material plate; the mounting ring is arranged on the support plate;

[0011] A driving disc and a driven disc are arranged opposite to each other in the coating chamber, and a second guide surface is provided on both the driving disc and the driven disc;

[0012] The driven disc can support the cage, and the driving disc and the driven disc can enter the corresponding guide sleeves along the first guide surface.

[0013] Preferably, the limiting block of the conveying rack has an arc, and a third guiding surface is provided on one inner wall of the limiting opening, and the limiting block can be embedded in the limiting opening along the third guiding surface.

[0014] Preferably, a limiting frame is further provided in the coating chamber, and the limiting frame is located on the movement track of the conveying frame, and the limiting frame can stop the conveying frame.

[0015] Preferably, a belt is provided between the driving disc and the first driving motor, and the first driving motor drives the driving disc to rotate; the driven disc is connected to the output end of the first cylinder, and the first cylinder drives the driven disc to move up and down.

[0016] Preferably, mounting rings are provided at the bottom and the top of the support plate, and mounting rings are provided at the middle end and the second end of the support plate.

[0017] Preferably, the plurality of material plates are connected together to form a circular ring shape, and the material plates can be magnetized.

[0018] Preferably, the conveying frame is arranged on a conveying trolley, which includes a frame, a first conveying wheel arranged on the top of the frame, a first transmission shaft is set between two rows of first conveying wheels to connect, and a second drive motor drives the first conveying wheels to rotate.

[0019] Preferably, the conveying trolley is arranged on the conveying guide rail, and the conveying trolley also includes a second conveying wheel and a third drive motor arranged on the frame; the third drive motor is connected to the second transmission shaft, the second conveying wheel is connected to the second transmission shaft, and the third drive motor drives the second conveying wheel to move on the conveying guide rail.

[0020] Compared to existing technologies, this utility model offers significant advantages and beneficial effects. Specifically, as can be seen from the above technical solution, a first guide surface is provided at the opening of the guide sleeve, and a second guide surface is provided on both the driving and driven discs. The first and second guide surfaces are designed to work in conjunction with each other. Therefore, when the driven disc lifts the cage upward, the driven disc follows the first guide surface and enters the corresponding first guide sleeve; the driving disc follows the first guide surface and enters the corresponding second guide sleeve. This design simplifies and effectively aligns the cage with the driven and driving discs, significantly improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the cage frame in use according to an embodiment of the present invention.

[0022] Figure 2 It is a schematic diagram of the coordination of the cage frame and the conveying frame according to an embodiment of the present utility model.

[0023] Figure 3 This is a schematic diagram of the cage before loading according to an embodiment of the present invention.

[0024] Figure 4 It is a partial structural decomposition diagram of an embodiment of the present utility model.

[0025] Figure 5 It is a schematic diagram of the limited state of the conveyor frame in an embodiment of the present utility model.

[0026] Description of the accompanying drawings:

[0027] 10. Conveyor rack; 11. Limit block; 20. Cage; 21. Support plate; 22. Mounting ring; 23. Limit opening; 24. Third guide surface; 25. Cylindrical shaft; 26. Guide bushing; 27. First guide surface; 28. Material plate; 30. Coating chamber; 31. First drive motor; 32. Drive disk; 33. First cylinder; 34. Driven disk; 35. Second guide surface; 36. Second cylinder; 37. Limit rack; 40. Conveyor trolley; 41. Frame; 42. First conveyor wheel; 43. First transmission shaft; 44. Second drive motor; 45. Second conveyor wheel; 46. Third drive motor; 47. Conveyor guide rail; 48. Second transmission shaft. DETAILED DESCRIPTION

[0028] In order to further illustrate the technical means and effects adopted by the present invention to achieve the predetermined purpose of the utility model, the following is a detailed description of the specific implementation method, structure, characteristics and effects of the present invention in combination with the accompanying drawings and preferred embodiments.

[0029] Please refer to Figures 1 to 5As shown, it shows the specific structure of the preferred embodiment of the present utility model, which is a conveying and supporting mechanism for a sputtering coating workpiece cage.

[0030] The driving disc 32 and the driven disc 34 can enter the corresponding guide sleeve 26 along the first guide surface 27, so that the alignment of the cage 20 and the driving source is simpler, which helps to improve production efficiency.

[0031] The present application provides a conveying support mechanism for a sputtering coating workpiece cage, comprising a conveying frame 10, on which a plurality of limit blocks 11 are provided; a cage 20 is detachably provided on the conveying frame 10, and the limit blocks 11 are embedded in the limit opening 23 at the bottom of the cage 20; the cage 20 comprises a support plate 21, a mounting ring 22, a cylindrical shaft 25, a guide sleeve 26, and a material plate 28; the guide sleeve 26 is provided on the cylindrical shaft 25, and a first stop is provided at the opening of the guide sleeve 26. The first end of the support plate 21 is mounted on the guide sleeve 26, and the second end of the support plate 21 is mounted on the material plate 28. The mounting ring 22 is mounted on the support plate 21. A driving disc 32 and a driven disc 34 are positioned relative to each other within the coating chamber 30, and each of the driving disc 32 and the driven disc 34 is provided with a second guiding surface 35. The driven disc 34 can support the cage 20, and the driving disc 32 and the driven disc 34 can enter the corresponding guide sleeve 26 along the first guiding surface 27. The limit block 11 can be made of a smooth plastic or metal block. The combination of multiple limit blocks 11 and multiple limit openings 23 can restrain the cage 20 on the conveyor frame 10, allowing the cage 20 to land directly at the center of the conveyor frame 10 when it falls, making the cage 20 and the conveyor frame 10 very convenient and quick. The connections between the support plate 21, mounting ring 22, cylindrical shaft 25, guide sleeves 26, and material plate 28 can be assembled using one or more of screws, snaps, and welding. In this embodiment, there are two guide sleeves 26: one at the top of the cylindrical shaft 25 and the second at the bottom. Each guide sleeve 26 has a first guide surface 27 at its opening. The drive plate 32 and the driven plate 34 are each provided with a second guide surface 35. The first and second guide surfaces 27, 35 have inclined cross-sections and mate with each other. Therefore, when the driven disk 34 lifts the cage 20 upward, it follows the first guide surface 27 and enters the corresponding guide sleeve 26 at the bottom; the driving disk 32 follows the first guide surface 27 and enters the corresponding guide sleeve 26 at the bottom. This makes alignment between the cage 20, the driven disk 34, and the driving disk 32 simpler and more efficient, effectively improving production efficiency. When the driven disk 34 falls, the cage 20 follows the third guide surface 24 in the limit opening 23 and fits into the limit block 11, making it very convenient to directly align the cage 20 with the center of the conveyor frame 10.

[0032] Preferably, the stopper 11 of the conveyor frame 10 has a curvature, and a third guide surface 24 is provided on one inner wall of the stop opening 23. The stopper 11 can be inserted into the stop opening 23 along the third guide surface 24. The curvature of the stopper 11 facilitates the rotation of the cage 20. When the cage 20 falls, the stopper 11 can be inserted into the stop opening 23 along the third guide surface 24, allowing the cage 20 to be directly aligned with the center of the conveyor frame 10, ensuring that the cage 20 is always positioned at the center of the conveyor frame 10.

[0033] Preferably, a limit frame 37 is further provided within the coating chamber 30. This limit frame 37 is located along the motion trajectory of the conveyor frame 10 and can stop the conveyor frame 10. The limit frame 37 is driven by a second air cylinder 36 to enable up and down movement. When the conveyor frame 10 reaches a set position, the limit frame 37 rises to stop the conveyor frame 10, and the driven plate 34 then lifts the cage frame 20, allowing coating to proceed.

[0034] Preferably, a belt is provided between the drive disc 32 and the first drive motor 31 , which drives the drive disc 32 to rotate. The driven disc 34 is connected to the output end of the first cylinder 33 , which drives the driven disc 34 up and down. The power of the first drive motor 31 is transmitted to the drive disc 32 via the belt. When the driven disc 34 and the drive disc 32 are pressed against their respective guide sleeves 26 , the drive disc 32 drives the cylindrical shaft 25 to rotate, and the cage 20 rotates accordingly.

[0035] Preferably, mounting rings 22 are provided at both the bottom and top of the support plate 21, and at both the middle and second ends of the support plate 21. Multiple support plates 21 are provided, with at least two safety rings. The mounting rings 22 enhance the stability and strength of the cage 20 and prevent deformation. Multiple material plates 28 are connected together to form a circular ring shape, and the material plates 28 can be magnetized. The material plates 28 are secured to the outermost mounting ring 22 by screws or welding, ensuring that the entire cage 20 is highly strong and resistant to deformation.

[0036] Preferably, the conveyor rack 10 is mounted on a conveyor carriage 40, which includes a frame 41 and first conveyor wheels 42 mounted on top of the frame 41. A first transmission shaft 43 is provided between two rows of first conveyor wheels 42, and a second drive motor 44 drives the first conveyor wheels 42 to rotate. The power of the second drive motor 44 is transmitted to the first transmission shaft 43, which drives the two rows of first conveyor wheels 42 to rotate. The first conveyor wheels 42 transport the conveyor rack 10 and the cage 20 into the coating chamber 30.

[0037] Preferably, the transport trolley 40 is mounted on a transport rail 47 and further includes a second transport wheel 45 and a third drive motor 46 mounted on a frame 41. The third drive motor 46 is connected to a second transmission shaft 48, and the second transport wheel 45 is connected to the second transmission shaft 48. The third drive motor 46 drives the second transport wheel 45 to move along the transport rail 47. The third drive motor 46 drives the second transport wheel 45 to rotate via the second transmission shaft 48. The second transport wheel 45 transports the transport trolley 40 to the loading port of the coating chamber 30.

[0038] In summary, the key design features of the present invention lie in the first guide surface 27 provided at the opening of the guide sleeve 26, and the second guide surface 35 provided on both the driving disc 32 and the driven disc 34. When the driven disc 34 lifts the cage 20 upward, the driven disc 34 and the driving disc 32 can follow the corresponding first guide surface 27 and enter the corresponding guide sleeve 26. This design simplifies and facilitates alignment of the cage 20 and the drive source, helping to improve production efficiency.

[0039] The above description is merely a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any person skilled in the art can make some changes or modifications to equivalent embodiments using the technical contents disclosed above without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A conveying and supporting mechanism for a sputtering coating workpiece cage, characterized in that: It includes a conveying frame, on which a plurality of limit blocks are provided; The cage is detachably arranged on the conveying frame, and the limiting block is embedded in the limiting opening at the bottom of the cage; The cage includes a support plate, a mounting ring, a cylindrical shaft, a guide sleeve, and a material plate; the guide sleeve is arranged on the cylindrical shaft, and a first guide surface is arranged at the opening of the guide sleeve; the first end of the support plate is arranged on the guide sleeve, and the second end of the support plate is arranged on the material plate; the mounting ring is arranged on the support plate; A driving disc and a driven disc are arranged opposite to each other in the coating chamber, and a second guide surface is provided on both the driving disc and the driven disc; The driven disc can support the cage, and the driving disc and the driven disc can enter the corresponding guide sleeves along the first guide surface.

2. The conveying and supporting mechanism of a sputtering coating workpiece cage according to claim 1, characterized in that: The limiting block of the conveying frame has an arc, and a third guiding surface is provided on one inner wall of the limiting opening. The limiting block can be embedded in the limiting opening along the third guiding surface.

3. The conveying and supporting mechanism of a sputtering coating workpiece cage according to claim 1, characterized in that: A limiting frame is further provided in the coating chamber. The limiting frame is located on the motion track of the conveying frame and can stop the conveying frame.

4. The conveying and supporting mechanism of a sputtering coating workpiece cage according to claim 1, characterized in that: A belt is provided between the driving disc and the first driving motor, and the first driving motor drives the driving disc to rotate; The driven plate is connected to the output end of the first cylinder, and the first cylinder drives the driven plate to move up and down.

5. The conveying and supporting mechanism of a sputtering coating workpiece cage according to claim 1, characterized in that: The bottom and the top of the support plate are both provided with mounting rings, and the middle end and the second end of the support plate are both provided with mounting rings.

6. The conveying and supporting mechanism of a sputtering coating workpiece cage according to claim 1, characterized in that: When multiple material plates are connected together, they form a circular ring shape, and the material plates can be magnetized.

7. The conveying and supporting mechanism of a sputtering coating workpiece cage according to claim 1, characterized in that: The conveying frame is arranged on the conveying trolley, which includes a frame and a first conveying wheel arranged on the top of the frame. A first transmission shaft is set between two rows of first conveying wheels to connect them, and a second drive motor drives the first conveying wheels to rotate.

8. The conveying and supporting mechanism of a sputtering coating workpiece cage according to claim 7, characterized in that: The conveying trolley is arranged on the conveying guide rail, and the conveying trolley also includes a second conveying wheel and a third drive motor arranged on the frame; the third drive motor is connected to the second transmission shaft, the second conveying wheel is connected to the second transmission shaft, and the third drive motor drives the second conveying wheel to move on the conveying guide rail.

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