Position adjusting device for silicon carbide crystal growth crucible or heat preservation piece

Abstract

The embodiment of the utility model provides a position adjusting device for a silicon carbide crystal growth crucible or a heat preservation piece, and relates to the technical field of silicon carbide semiconductor preparation, the device comprises an operating part, a connecting part and a clamping part, and the operating part comprises a fixing disc; the fixed disc is provided with an operating piece and a plurality of laser distance measuring sensors; a first switch electrically connected with the laser distance measuring sensor is arranged on the operating piece; the clamping part comprises an upper protection plate and at least two clamping pieces movably connected with the upper protection plate; the upper protection plate is fixedly connected with one end of the connecting part away from the operating part; a second switch is further arranged on the operating part; the second switch is coupled with the clamping pieces through the connecting assembly and used for controlling the at least two clamping pieces to move inwards so as to clamp the crucible or the heat preservation piece or move outwards so as to loosen the crucible or the heat preservation piece. Through linkage of centering distance measurement and the transmission clamping device, stable optimization of grabbing, taking and placing operation of the crucible and the heat preservation part by an operator is achieved, and error control over centering operation of the crucible and the heat preservation part is achieved.

Description

Technical Field

[0001] The present application relates to the technical field of silicon carbide conductor preparation, and in particular to a position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component. Background Art

[0002] Silicon carbide (SiC) is a typical wide-bandgap semiconductor material and represents the third generation of semiconductor materials, following silicon and gallium arsenide. Its exceptional properties, including high thermal conductivity, high breakdown field strength, and high saturation electron mobility, have made it a popular material for the fabrication of high-temperature, high-frequency, high-power, and radiation-resistant devices.

[0003] Among the typical silicon carbide production methods, the most commonly used method is to grow silicon carbide crystals using physical vapor transport (PVT). The commonly used heating method in the PVT method is induction heating. When using induction heating, the graphite crucible generates heat in the alternating electromagnetic field and is the heating element in the system. In the silicon carbide growth system, since the temperature of the crucible wall is the highest, the temperature of the area closer to the center of the crucible in the horizontal direction is lower. The powder in the high-temperature zone sublimates and decomposes, and driven by the temperature gradient, it reaches the surface of the seed crystal in the low-temperature zone for recrystallization. Ideally, the crucible and insulation should be placed in the center of the furnace to avoid different distances between the crucible and the induction coil, which will lead to an asymmetric thermal field.

[0004] However, due to the heavy weight of the crystal growth crucible and insulation, it is difficult for operators to ensure that they are centered during the loading and unloading process. This can easily lead to thermal field asymmetry, resulting in large variations in the thickness of the growing crystal edges, and other problems, seriously affecting the utilization rate of the crystal. In addition, large variations in crystal edge thickness lead to uneven stress distribution in the crystal, making the crystal prone to cracking in areas of stress concentration.

[0005] To address these issues, a common approach is to add a crucible rotation mechanism to induction heating equipment. This mechanism rotates the crucible or insulation during crystal growth to improve the consistency of crystal thickness. However, these improved devices are complex, expensive, and lack stability in the rotating components, hindering their widespread commercialization. Utility Model Content

[0006] The embodiments of the present application provide a position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component to solve the problem that the existing device has a complex structure and is difficult to ensure that the crucible or the heat-insulating component is centered.

[0007] The present application provides a position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component, comprising:

[0008] operating member; the operating member is connected to the clamping member via a connecting member, wherein,

[0009] The operating component includes a fixed disk; an operating member is provided on a side of the fixed disk away from the clamping member; a plurality of laser ranging sensors are evenly distributed around the circumference of the fixed disk; and a first switch electrically connected to the laser ranging sensor is provided on the operating member;

[0010] The clamping component includes an upper protective plate and at least two clamping members movably connected to the upper protective plate; the upper protective plate is fixedly connected to an end of the connecting component away from the operating component;

[0011] The operating member is also provided with a second switch; the second switch is coupled to the clamping member through a connecting assembly, and is used to control at least two of the clamping members to move inward to clamp the crucible or the heat preservation member, or to move outward to release the crucible or the heat preservation member.

[0012] In some feasible embodiments, the connecting component includes:

[0013] A first connecting member; one end of the first connecting member is connected to the fixing plate, and the other end is provided with an elastic fixing member;

[0014] A second connecting member is sleeved inside the first connecting member and is slidably connected to the first connecting member; the second connecting member has a plurality of positioning holes evenly distributed along the sliding direction; the elastic fixing member is plugged into any one of the positioning holes to achieve the fixation of the first connecting member and the second connecting member.

[0015] In some feasible embodiments, a housing is provided on a side of the fixing plate close to the connecting component;

[0016] A transmission toothed belt and a transmission gear that are meshed and connected are provided in the housing; the transmission gear is connected to the first connecting member; and the transmission toothed belt is connected to the second connecting member via a toothed belt fixing tray.

[0017] In some feasible embodiments, the connection component includes:

[0018] a driving member disposed inside the fixed disk, the driving member being electrically connected to the second switch;

[0019] A transmission rod is provided in the connecting member; one end of the transmission rod is connected to the output end of the driving member, and the other end passes through the upper protective plate and is fixedly connected to the transmission disc provided in the upper protective plate;

[0020] The transmission disc is uniformly provided with at least two guide holes along the circumference; the guide holes are provided with a proximal end and a distal end, and the distance between the guide holes and the center of the transmission disc gradually decreases from the distal end to the proximal end;

[0021] The clamping member includes an arc-shaped portion, an L-shaped rod and a slider; one end of the L-shaped rod is connected to the arc-shaped portion, and the other end slides through the upper protective plate and is fixedly connected to the slider; the slider is slidably arranged in the guide hole.

[0022] In some feasible embodiments, the upper protective plate is provided with an inward protrusion; the L-shaped rod passes through the protrusion.

[0023] In some feasible embodiments, an elastic layer is provided on the inner side of the arc-shaped portion.

[0024] In some feasible embodiments, the transmission rod is a telescopic rod.

[0025] In some feasible embodiments, a display screen is provided on the top surface of the fixed disk; the display screen is electrically connected to the laser ranging sensor and is used to display the distance value measured by the laser ranging sensor.

[0026] In some feasible embodiments, a communication component electrically connected to the laser ranging sensor is further included, and the communication component is used to establish a communication connection with an external terminal.

[0027] In some feasible embodiments, the driving member is a motor, and the output end of the motor is connected to the transmission rod;

[0028] Alternatively, the driving member is a pneumatic cylinder or a hydraulic cylinder, and a gear rack structure connected to the pneumatic cylinder or the hydraulic cylinder, the gear rack structure includes a gear and a rack that are meshed with each other, the rack is connected to the output end of the pneumatic cylinder or the hydraulic cylinder, and the gear is connected to the transmission rod.

[0029] The present application provides a position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component, which realizes stable optimization of the operator's grasping and placing operations of the crucible and the heat-insulating component, as well as error control of the centering operation of the crucible and the heat-insulating component through the linkage of the centering distance measurement and the transmission clamping device. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solution of the present application, the following is a brief introduction to the drawings required for use in the embodiments. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0031] Figure 1 A schematic structural diagram of a position adjustment device provided in this application in one embodiment;

[0032] Figure 2 for Figure 1 A cross-sectional view of a connecting component in the position adjustment device shown in one embodiment;

[0033] Figure 3 for Figure 1 A schematic structural diagram of a clamping component in a position adjustment device shown in FIG.

[0034] Figure 4 for Figure 3 The schematic diagram of the position of the clamping component before the clamping action is shown;

[0035] Figure 5 for Figure 3 The schematic diagram of the position of the clamping component during the clamping action is shown;

[0036] Figure 6 for Figure 1 A schematic structural diagram of an operating component in a position adjustment device shown in FIG.

[0037] Figure 7 for Figure 1 The diagram shows the structure of the operating component in the position adjustment device under another embodiment.

[0038] In the picture:

[0039] 1-operating component; 11-fixed disk; 111-housing; 112-display screen; 113-communication component; 12-operating component; 13-laser ranging sensor; 14-first switch; 15-second switch; 2-connecting component; 21-first connecting member; 22-elastic fixing member; 23-second connecting member; 24-positioning hole; 25-transmission toothed belt; 26-transmission gear; 27-toothed belt fixing tray; 3-clamping component; 31-upper protective plate; 311-protrusion; 32-clamping member; 321-arc-shaped portion; 322-L-shaped rod; 323-slider; 33-transmission rod; 34-transmission disk; 341-guide hole. DETAILED DESCRIPTION

[0040] It should be noted that in the present application, the position adjustment device disclosed in this embodiment can be used to perform operations such as clamping and position adjustment on the crucible or the thermal insulation part, wherein the crucible refers to a container for holding raw materials, and the thermal insulation part refers to a structural part arranged around the crucible during the heating process to ensure temperature uniformity and stability. The position adjustment device of the present application can not only clamp and move the crucible to adjust the position, but also clamp, move and adjust the position of the thermal insulation part; if the crucible and the thermal insulation part are combined into one, they can also be clamped and moved at the same time, which is not limited in this embodiment.

[0041] When the crucible and the insulation piece are placed in the silicon carbide single crystal growth equipment (hereinafter referred to as the equipment) by the operator, the operator often places them in a relatively central position of the equipment based on personal experience, so that the heated material can obtain a more uniform heating effect. However, due to the errors in human operation itself, and the distance between the crucible and the insulation piece and the distance from the induction coil have a significant impact on the growth of the crystal, in order to solve the above problems, it is necessary to ensure that the crucible or the insulation piece is centered. Therefore, some embodiments of the present application provide the following position adjustment device, which is described in detail below.

[0042] See also Figure 1 The present application provides a position adjustment device for a silicon carbide crystal growth crucible or a heat preservation member, specifically comprising:

[0043] Operating component 1; The operating component 1 is a component provided for the operator to hold and control, and the operating component 1 includes a fixed disk 11; an operating member 12 is provided on the side of the fixed disk 11 away from the clamping member 3; the operating member 12 can be in the shape of a handle, which is convenient for the operator to hold the operating member 12 to perform operations such as picking up and placing, rotating, moving horizontally, and pressing buttons. A plurality of laser ranging sensors 13 are evenly distributed around the circumference of the fixed disk 11; for example, a laser ranging sensor 13 can be set in the four directions of front, back, left, and right of the fixed disk 11, respectively, for measuring the distance between the device and the insulation member (or induction coil) in the four directions of front, back, left, and right; a first switch 14 electrically connected to the laser ranging sensor 13 is provided on the operating member 12; the first switch 14 is used to control the opening and closing of the laser ranging sensor 13, for example, when the first switch 14 is manually operated once, the four laser ranging sensors 13 are turned on at the same time and measure four distance values, and when the first switch 14 is manually operated again, the four laser ranging sensors 13 are turned off at the same time.

[0044] In this embodiment, the laser distance sensor can be a small laser distance meter. Each laser distance meter can measure the gap value between the heat preservation part and the crucible in one direction, assisting the operator to adjust the crucible and heat preservation part at a controllable distance, and optimizing the problem of large errors in manual adjustment. The range of the laser distance sensor is 0.03mm-80m, and the accuracy is D is the measured distance.

[0045] The operating component 1 is connected to the clamping component 3 via the connecting component 2. The connecting component 2 has the function of connecting the operating component 1 and the clamping component 3. By adjusting the length of the connecting component 2, the distance between the operating component 1 and the clamping component 3 can be controlled, so that different operators can use the device of this embodiment to perform clamping operations on crucibles or insulation components of different depths. Furthermore, in a preferred embodiment, the connecting component 2 can be configured as a retractable structure. In this way, in different scenarios, the distance between the operating component 1 and the clamping component 3 can be adjusted to meet different position adjustment requirements.

[0046] In this embodiment, the operating component 1, the connecting component 2 and the clamping component 3 can also be integrally formed and used as a setting tool.

[0047] The clamping member 3 is used to provide a clamping force for the crucible or the heat-insulating member. Figure 1 In the illustrated embodiment, the clamping component 3 includes an upper protective plate 31 and at least two clamping members 32 movably connected to the upper protective plate 31; wherein, the upper protective plate 31 can be a structure with a groove, and when the clamping component 3 supports the crucible or the thermal insulation component, the upper protective plate 31 can cover or mostly cover the outside of the crucible or the thermal insulation component to provide protection for the crucible or the thermal insulation component; the upper protective plate 31 is fixedly connected to the end of the connecting component 2 away from the operating component 1; its connection form can be a threaded connection or other methods.

[0048] The operating member 12 is also provided with a second switch 15; the second switch 15 is coupled to the clamping member 32 through a connecting assembly, and is used to control at least two of the clamping members 32 to move inward to clamp the crucible or the heat-insulating member, or to move outward to release the crucible or the heat-insulating member. The second switch 15 can be an electrically controlled switch, and the connecting assembly responds to the command of the electrically controlled switch to transmit the driving force to the clamping member 32 and move the clamping member 32 inward or outward, thereby achieving the technical effect of clamping or releasing the crucible or the heat-insulating member. The operation mode of the second switch 15 can be that when the operator manually operates the second switch 15 once, the clamping member 32 moves inward to clamp the crucible or the heat-insulating member, and when the operator manually operates the second switch 15 again, the clamping member 32 moves outward to release the crucible or the heat-insulating member.

[0049] It can be seen from the above technical solution that the working process of the position adjustment device provided in this embodiment can be divided into two working conditions:

[0050] In the first operating condition, the position of the crucible or insulation component already in the device is adjusted. In this operating condition, the operator can hold the operating component 1, first insert the position adjustment device deep into the device, align the clamping component 3 with the crucible or insulation component to be clamped, and then operate the second switch 15 to clamp the crucible or insulation component; the operator continues to operate the first switch 14 to obtain the corresponding distance value of the crucible or insulation component at this time. Based on the measured distance value, the operator holds the operating component 1 again to complete the overall movement of the position adjustment device and the crucible or insulation component until the corresponding distance value meets the requirement. The operator then operates the second switch 15 again to release the crucible or insulation component from the position adjustment device and remove the position adjustment device from the device.

[0051] In the second working condition, the process of placing a crucible or insulation piece that is not in the equipment is carried out. In this working condition, the operator can hold the operating component 1, align the clamping component 3 with the crucible or insulation piece to be clamped, and then operate the second switch 15 to clamp the crucible or insulation piece; then gradually deepen the position adjustment device into the equipment, and during the deepening process, operate the first switch 14 to obtain the real-time corresponding distance value of the crucible or insulation piece during the deepening process. According to the measured distance value, the operator holds the operating component 1 while deepening and adjusting the position until the crucible or insulation piece is placed in the equipment at the corresponding distance value. The operator operates the second switch 15 again to make the position adjustment device release the crucible or insulation piece, and remove the position adjustment device from the equipment.

[0052] It can be seen that the position adjustment device provided in this embodiment clamps the crucible or the heat preservation component through the clamping component 3, and at the same time realizes the centering operation according to the feedback of the set laser ranging sensor, thereby ensuring the symmetrical distribution of the temperature field during the growth of the silicon carbide crystal and improving the stress uniformity and crystal utilization rate of the single crystal.

[0053] Furthermore, since some operators have long arms and some have short arms, it is difficult for them to reach the specified position or depth by holding the operating component 1. In some feasible embodiments, the connecting component 2 can be configured as a retractable structure. For details, see Figure 1 It can be seen that the connecting component 2 includes:

[0054] A first connecting member 21; one end of the first connecting member 21 is connected to the fixing plate 11, and the other end is provided with an elastic fixing member 22;

[0055] A second connecting member 23 is sleeved inside the first connecting member 21 and slidably connected to the first connecting member 21; the second connecting member 23 has multiple positioning holes 24 evenly distributed along the sliding direction; the elastic fixing member 22 is plugged into any one of the positioning holes 24 to achieve the fixation of the first connecting member 21 and the second connecting member 23.

[0056] In this embodiment, the nesting relationship between the first connecting member 21 and the second connecting member 23 can be reversed; when the first connecting member 21 and the second connecting member 23 slide relative to each other, the overall length of the connecting member 2 can be adjusted, thereby adjusting the distance between the operating member 1 and the clamping member 3. Once the desired length is adjusted, the relative position of the first connecting member 21 and the second connecting member 23 can be fixed using the elastic fixing member 22 and the positioning hole 24.

[0057] In combination with the working process of the above two working conditions, when the connecting component 2 is in a retractable state, the above two working conditions can also add a step, that is, before the operator is about to use the position adjustment device, the length of the connecting component 2 can be adjusted first, that is, fixed, according to the depth of the equipment and the length of the operator's arm, and then other operations can be performed.

[0058] Furthermore, in order to make the adjustment of the connecting component 2 more stable, Figure 2 In the embodiment shown, a structure providing stable movement may be added. For example, a housing 111 is provided on the side of the fixing plate 11 close to the connecting component 2. The housing 111 may be a columnar structure for accommodating some transmission components.

[0059] A toothed belt 25 and a transmission gear 26 are meshed together within the housing 111. The transmission gear 26 is connected to the first connecting member 21. The toothed belt 25 is connected to the second connecting member 23 via a toothed belt mounting plate 27. When the first connecting member 21 and the second connecting member 23 move relative to each other, the toothed belt 25 and the transmission gear 26 simultaneously engage and transmit power. Due to the action of the teeth, a certain pressure torque is generated, which can cause the connecting member 2 to stably extend or contract.

[0060] For further information, see Figure 3 In a feasible embodiment, the connection component includes:

[0061] A driving member is arranged inside the fixed disk 11, and the driving member is electrically connected to the second switch 15; there can be various forms of the driving member, for example, the driving member can be a motor, and the output end of the motor is connected to the transmission rod 33; when the motor is turned on by the second switch 15, the output shaft of the motor rotates, which will drive the transmission rod 33 to rotate together; for example, the driving member can also be a cylinder or a hydraulic cylinder, and a gear rack structure connected to the cylinder or hydraulic cylinder, the gear rack structure includes a gear and a rack that are meshed with each other, the rack is connected to the output end of the cylinder or hydraulic cylinder, and the gear is connected to the transmission rod 33; when the cylinder or hydraulic cylinder is turned on by the second switch 15, the output end of the cylinder or hydraulic cylinder will push the rack to move along the paving direction, the rack will drive the gear to rotate, and the rotating gear further drives the transmission rod 33 to rotate.

[0062] Any of the above methods can realize the self-rotation of the transmission rod 33, and the transmission rod 33 is arranged in the connecting component 2; one end of the transmission rod 33 is connected to the output end of the driving member, and the other end passes through the upper protective plate 31 and is fixedly connected to the transmission disk 34 arranged in the upper protective plate 31; the self-rotation of the transmission rod 33 will drive the transmission disk 34 to rotate along the preset direction.

[0063] The transmission disc 34 has at least two guide holes 341 evenly distributed along the circumference; the guide holes 341 have a proximal end and a distal end, and the distance between the guide holes 341 and the center of the transmission disc 34 gradually decreases from the distal end to the proximal end; for example Figure 4 In the illustrated embodiment, the distance between the distal end of the guide hole 341 and the center of the transmission disk 34 is H1, and the distance between the proximal end of the guide hole 341 and the center of the transmission disk 34 is H2, where H1 is greater than H2.

[0064] The clamping member 32 includes an arc-shaped portion 321, an L-shaped rod 322 and a slider 323; one end of the L-shaped rod 322 is connected to the arc-shaped portion 321, and the other end slides through the upper protective plate 31 and is fixedly connected to the slider 323; the slider 323 is slidably set in the guide hole 341.

[0065] In the above embodiment, the clamping process of the crucible or the heat-insulating member can be realized by Figure 4 and Figure 5 To explain:

[0066] See also Figure 4, is the state of the clamping component 3 before the clamping action. The slider 323 is at the distal end of the guide hole 341 at this time. When the operator operates the second switch 15, under the action of the connecting component, the transmission rod 33 will drive the transmission plate 34 to rotate (rotating in the counterclockwise direction shown in the figure). At this time, the transmission plate 34 will produce a relative displacement with the slider 323, that is, the slider 323 gradually moves to the proximal end of the guide hole 341 as the transmission plate 34 rotates. In the process of the slider 323 moving toward the proximal end of the guide hole 341, due to the different distances between the distal end and the proximal end and the center of the transmission plate 34, the slider 323 will move in the direction close to the center of the transmission plate 34, and finally reach Figure 5 As shown in the position, the slider 323 is located at the proximal end of the guide hole 341. During the movement of the slider 323, it moves a total distance H1-H2 toward the center of the transmission disk 34, and the L-shaped rod 322 and the arc-shaped portion 321 connected to the slider 323 are all driven inward by the same distance. Therefore, for the arc-shaped portion 321, during the rotation of the transmission disk 34, it produces an inward gathering (clamping) movement and narrows the clamping range, thereby achieving the technical effect of clamping the crucible or insulation component located therein.

[0067] It should be noted that, according to the specific shapes and sizes of the crucible and the heat insulation component, the difference between H1 and H2 can be designed accordingly to achieve different clamping effects. At the same time, in order to adapt to crucibles of different shapes, the number of arc-shaped portions 321 is not limited to the two shown in the accompanying drawings, and can also be set to three, four or other numbers. When set to two, the arc-shaped portion is two centrosymmetrical semi-rings. When set to more, the arc-shaped portion is an arc-shaped ring within a certain angle range. It should be understood that when there are multiple arc-shaped portions, the corresponding other components are also set to multiple groups, which is not specifically limited in this embodiment.

[0068] It should also be noted that the length setting of the guide hole 341 should at least enable the arc portion 321 to contact the crucible or the insulation component and provide a certain clamping force on the crucible or the insulation component. In actual applications, it is also possible that the clamping effect is achieved before the slider 323 reaches the proximal end of the guide hole 341. In this scenario, the transmission disk 34 should not continue to rotate to avoid damage to the crucible or the insulation component due to excessive clamping force.

[0069] Further, in Figure 3 In the illustrated embodiment, to increase the structural strength of the clamping member 3 and the stability of the movement of the L-shaped rod 322, the upper protective plate 31 is provided with an inward protrusion 311; the L-shaped rod 322 passes through the protrusion 311. This ensures the stability of the L-shaped rod 322.

[0070] Furthermore, because the insulation is a graphite felt structure, its physical properties are brittle, easily deformed, and its outer wall is smooth. Under conditions where the lateral pressure of the clamping member 3 is low, the insulation may fall off; under conditions where the clamping member 3 is hard and the lateral pressure is high, the insulation may be damaged. To prevent impact caused by excessive pressure when the arc-shaped portion 321 contacts the crucible or insulation, in some embodiments, an elastic layer is provided on the inner side of the arc-shaped portion 321. The elastic layer can be made of any elastic material, such as natural rubber, and is adhered to the side of the arc-shaped portion 321 that contacts the crucible or insulation. In addition, the elastic layer can also have a certain friction coefficient to improve friction and stability during grasping.

[0071] Further, by Figure 2 As shown, when the connecting component 2 is a telescopic structure, the transmission rod 33 can also be a telescopic rod; it can be in the form of an electric telescopic rod or a mechanical telescopic rod. When it is an electric telescopic rod, it can be configured to extend and retract according to the operator's operating instructions; when it is a mechanical telescopic rod, it can be designed to be adjusted in conjunction with the operator's adjustment of the connecting component 2.

[0072] Further, by Figure 6 In the illustrated embodiment, a display screen 112 is provided on the top surface of the fixed disk 11 to facilitate the operator viewing the measurement results of the laser ranging sensor 13. The display screen 112 is electrically connected to the laser ranging sensor 13 and is used to display the distance values measured by the laser ranging sensor 13. The display screen 112 can display the current distance values of the device in four directions (using four laser ranging sensors as an example), allowing the operator to view the values directly from the top of the device while holding it.

[0073] Furthermore, in some other embodiments, the form of viewing the measurement results can be changed to viewing on a mobile phone or a computer, for example Figure 7 As shown, the device further includes a communication component 113 electrically connected to the laser ranging sensor 13, and is used to establish a communication connection with an external terminal (e.g., a mobile phone, a control and management platform, etc.). The communication component 113 can be any device such as Bluetooth, a signal transceiver, etc. that can establish communication with the terminal according to a certain protocol, and is not limited here.

[0074] It can be seen from the above technical solution that the present application provides a position adjustment device for a silicon carbide crystal growth crucible or a heat preservation part. Through the linkage of the centering distance measurement and the transmission clamping device, the operator can achieve stable optimization of the grasping and placing operations of the crucible and the heat preservation part, as well as error control of the centering operation of the crucible and the heat preservation part.

[0075] The above specific implementation methods further illustrate the purpose, technical solutions and beneficial effects of this application in detail. It should be understood that the above are only specific implementation methods of this application and are not intended to limit the scope of protection of this application. Any modifications, equivalent replacements, improvements, etc. made on the basis of the technical solutions of this application should be included in the scope of protection of this application.

Claims

1. A position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component, characterized in that: The invention comprises an operating component (1); the operating component (1) is connected to a clamping component (3) via a connecting component (2), wherein: The operating component (1) comprises a fixed disk (11); an operating component (12) is provided on a side of the fixed disk (11) away from the clamping component (3); a plurality of laser distance sensors (13) are uniformly distributed around the circumference of the fixed disk (11); and a first switch (14) electrically connected to the laser distance sensor (13) is provided on the operating component (12); The clamping component (3) comprises an upper protective plate (31) and at least two clamping members (32) movably connected to the upper protective plate (31); the upper protective plate (31) is fixedly connected to an end of the connecting component (2) away from the operating component (1); The operating member (12) is also provided with a second switch (15); the second switch (15) is coupled to the clamping member (32) through a connecting assembly, and is used to control at least two of the clamping members (32) to move inward to clamp the crucible or the heat-insulating member, or to move outward to release the crucible or the heat-insulating member.

2. A position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component according to claim 1, characterized in that: The connecting component (2) comprises: A first connecting member (21); one end of the first connecting member (21) is connected to the fixing plate (11), and the other end is provided with an elastic fixing member (22); A second connecting member (23) is sleeved inside the first connecting member (21) and slidably connected to the first connecting member (21); the second connecting member (23) is evenly distributed with a plurality of positioning holes (24) along the sliding direction; the elastic fixing member (22) is plugged into any one of the positioning holes (24) to achieve the fixation of the first connecting member (21) and the second connecting member (23).

3. A position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component according to claim 2, characterized in that: A housing (111) is provided on one side of the fixing plate (11) close to the connecting component (2); A toothed transmission belt (25) and a transmission gear (26) are provided in the housing (111) in meshing connection; the transmission gear (26) is connected to the first connecting member (21); and the toothed transmission belt (25) is connected to the second connecting member (23) via a toothed belt fixing tray (27).

4. A position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component according to claim 1, characterized in that: The connection component includes: a driving member disposed inside the fixed disk (11), the driving member being electrically connected to the second switch (15); a transmission rod (33) passing through the connecting component (2); one end of the transmission rod (33) is connected to the output end of the driving member, and the other end passes through the upper protective plate (31) and is fixedly connected to a transmission disc (34) provided in the upper protective plate (31); The transmission disc (34) is uniformly distributed with at least two guide holes (341) along the circumference; the guide holes (341) are provided with a proximal end and a distal end, and the distance between the guide holes (341) and the center of the transmission disc (34) gradually decreases from the distal end to the proximal end; The clamping member (32) comprises an arc-shaped portion (321), an L-shaped rod (322) and a slider (323); one end of the L-shaped rod (322) is connected to the arc-shaped portion (321), and the other end slides through the upper protective plate (31) and is fixedly connected to the slider (323); the slider (323) is slidably arranged in the guide hole (341).

5. A position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component according to claim 4, characterized in that: The upper protection plate (31) is provided with an inwardly facing protrusion (311); the L-shaped rod (322) passes through the protrusion (311).

6. A position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component according to claim 4, characterized in that: An elastic layer is provided on the inner side of the arc-shaped portion (321).

7. The position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component according to claim 4, characterized in that: The transmission rod (33) is a telescopic rod.

8. The position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component according to claim 1, characterized in that: A display screen (112) is provided on the top surface of the fixed disk (11); the display screen (112) is electrically connected to the laser distance sensor (13) and is used to display the distance value measured by the laser distance sensor (13).

9. The position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component according to claim 1, characterized in that: It also includes a communication component (113) electrically connected to the laser distance sensor (13), and the communication component (113) is used to establish a communication connection with an external terminal.

10. The position adjustment device for a silicon carbide crystal growth crucible or a heat-insulating component according to claim 4, characterized in that: The driving member is a motor, and the output end of the motor is connected to the transmission rod (33); Alternatively, the driving member is a pneumatic cylinder or a hydraulic cylinder, and a gear rack structure connected to the pneumatic cylinder or the hydraulic cylinder, wherein the gear rack structure comprises a gear and a rack that are meshed with each other, the rack is connected to the output end of the pneumatic cylinder or the hydraulic cylinder, and the gear is connected to the transmission rod (33).

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