Wear-resistant quartz boat convenient to assemble
Through the assembled quartz boat structure, the problem of difficult replacement of traditional quartz boat vulnerable parts is solved, the disassembly replacement of vulnerable parts and the service life of the vulnerable parts is achieved, and the safety of the silicon wafer is improved.
Patent Information
- Application Number
- CN202422525249.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-17
- Publication Date
- 2025-08-19
- Estimated Expiration
- 2034-10-17
AI Technical Summary
The existing quartz boats have partial wear and easy to break after long-term use, resulting in damage to the silicon wafer and it is difficult to replace vulnerable parts in traditional welded structures.
It adopts an assembled structure, including an end support plate, an intermediate support plate and a support rod. The support rod is inserted into the cannula. The support rod is divided into a bottom support rod and a side support rod. The vulnerable parts can be detached and replaced. A slot and an adjustment mechanism are provided on the support rod to adjust the position.
It extends the service life of the quartz boat, and replaces vulnerable parts, reduces wear and improves the safety of the silicon wafer.
Smart Images
Figure CN223240213U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of quartz boats, in particular to a wear-resistant quartz boat which is easy to assemble. Background Art
[0002] Quartz boats are made of quartz and are used to hold silicon wafers and other products. As carriers for silicon wafers and other products, the boats undergo various processing steps, including annealing. Existing quartz boats are typically made from quartz material, processed into individual components, which are then welded together to form a single structure. These boats can wear out over time, particularly at the support rods that hold the silicon wafers. These rods can break during use, damaging the wafers. Utility Model Content
[0003] In order to solve the above technical problems, the technical solution adopted by the present invention is: a wear-resistant quartz boat that is easy to assemble, comprising two end support plates and several middle support plates, the middle support plates are arranged in sequence between the two end support plates, and several support rods are provided between the middle support plate and the end support plates on both sides of the middle support plate or between the middle support plates, the support rods are all arranged horizontally, and several insert tubes are fixedly connected to the inner side of the end support plate and the two sides of the middle support plate, and the two ends of the support rods are respectively inserted into the insert tubes, and the support rods are divided into bottom support rods and side support rods, the number of bottom support rods between the middle support plate and the adjacent end support plate or the middle support plate is at least one, the number of side support rods between the middle support plate and the adjacent end support plate or the middle support plate is at least two, the height of the side support rods is higher than the height of the bottom support rods, and the end support plates, the middle support plates and the support rods are respectively made of quartz material.
[0004] As a preferred embodiment of the above technical solution, the support rods on both sides of the intermediate support plate correspond one to one, the corresponding support rods on both sides of the intermediate support plate are fixedly connected, the intubations on both sides of the intermediate support plate correspond one to one, and the intubations are connected to the corresponding intubations on the other side of the intermediate support plate.
[0005] As a preferred embodiment of the above technical solution, the support rod is provided with a plurality of slots arranged at even intervals.
[0006] As a preferred embodiment of the above technical solution, a plurality of externally threaded tubes are fixedly connected to the outer side of the end support plate, an adjustment tube is threadedly connected to the externally threaded tube, an internal adjustment rod is fixedly connected to the adjustment tube, the externally threaded tubes correspond one to one with the inserting tubes on the inner side of the end support plate, the externally threaded tubes are connected to the corresponding inserting tubes on the inner side of the end support plate, and the internal adjustment rod is movably inserted into the externally threaded tubes.
[0007] As a preferred embodiment of the above technical solution, a through hole is provided on the end support plate, and a handle is provided above the through hole.
[0008] The beneficial effects of the present invention are as follows: the wear-resistant quartz boat of the present invention is easy to assemble and adopts an assembled structure. Compared with the traditional quartz boat formed by one-piece welding, the vulnerable parts can be replaced and the service life of the quartz boat is longer. BRIEF DESCRIPTION OF THE DRAWINGS
[0009] Figure 1 It is a structural diagram of the utility model;
[0010] Figure 2 It is a schematic diagram of the cross-sectional structure of the end support plate. DETAILED DESCRIPTION
[0011] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.
[0012] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0013] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.
[0014] like Figure 1-2As shown, a wear-resistant quartz boat that is easy to assemble includes two end support plates 1 and several intermediate support plates 2. The intermediate support plates 2 are sequentially arranged between the two end support plates 1. Several support rods 3 are arranged between the intermediate support plates 2 and the end support plates 1 on either side of the intermediate support plates 2, or between the intermediate support plates 2. The support rods 3 are all arranged horizontally. Several inserts 4 are fixedly connected to the inner side of the end support plates 1 and the sides of the intermediate support plates 2. The ends of the support rods 3 are respectively inserted into the inserts 4. The support rods 3 are divided into bottom support rods 8 and side support rods 9. There is at least one bottom support rod 8 between an intermediate support plate 2 and an adjacent end support plate 1 or intermediate support plate 2, and at least two side support rods 9 between an intermediate support plate 2 and an adjacent end support plate 1 or intermediate support plate 2. The side support rods 9 are taller than the bottom support rods 8. The end support plates 1, intermediate support plates 2, and support rods 3 are all made of quartz material. The bottom support rods 8 support the silicon wafer at the bottom, and the side support rods 9 support one side of the silicon wafer at the side. The detachable connection and assembly between the support rod 3, the two end support plates 1, and the intermediate support plates 2 allows for regular replacement of worn parts. The intermediate support plates 2 provide central support, reducing deformation of the support rod 3. The interior of the cannula 4 is frosted, ensuring a certain degree of friction between the support rod 3 and the cannula 4 when inserted, preventing it from sliding easily within the cannula 4.
[0015] Furthermore, the support rods 3 on both sides of the middle support plate 2 correspond to each other, and the corresponding support rods 3 on both sides of the middle support plate 2 are fixedly connected. The insertion tubes 4 on both sides of the middle support plate 2 correspond to each other, and the insertion tubes 4 are connected to the corresponding insertion tubes 4 on the other side of the middle support plate 2. During assembly, the support rods 3 are passed through the insertion tubes 4 of the middle support plate 2, and the two ends are then connected to the insertion tubes 4 on the upper support plate 1.
[0016] Furthermore, the support rod 3 is provided with a plurality of evenly spaced slots 10. The slots 10 can be annular or arcuate. Rotating the support rod 3 adjusts the angle of the slots 10, reducing the impact of worn areas on the silicon wafer. Regularly rotating the support rod 3 to adjust the angle of the slots 10 can also reduce localized wear on the support rod 3 and extend the service life of the entire quartz boat.
[0017] Furthermore, a plurality of externally threaded tubes 11 are fixedly connected to the outer side of the end support plate 1. Adjustment tubes 12 are threadedly connected to the externally threaded tubes 11. The adjustment tubes 12 are fixedly connected to internal adjustment rods 13. The externally threaded tubes 11 correspond one-to-one with the insertion tubes 4 on the inner side of the end support plate 1. The externally threaded tubes 11 are connected to the corresponding insertion tubes 4 on the inner side of the end support plate 1. The internal adjustment rods 13 are movably inserted into the externally threaded tubes 11. Rotating the externally threaded tubes 11 drives the position of the internal adjustment rods 13 in the externally threaded tubes 11. The internal adjustment rods 13 extend into the corresponding insertion tubes 4, forming a limit for the ends of the support rods 3 located in the insertion tubes 4, thereby adjusting the positions of the support rods 3 and fixing them. This allows the slots 10 on different support rods 3 to correspond one-to-one, allowing the silicon wafer to be inserted into the corresponding slots 10.
[0018] Furthermore, the end support plate 1 is provided with a through hole 14, and a handle 15 is provided above the through hole 14. The through hole 14 reduces the impact of the end support plate 1 on the silicon wafer near the end support plate 1 during processes such as annealing. The handle 15 facilitates the movement of the entire quartz boat.
[0019] It is worth mentioning that the technical features such as quartz materials involved in this utility model patent application should be regarded as prior art. The specific structure, working principle and possible control method and spatial layout method of these technical features can be selected by conventional means in the field and should not be regarded as the inventive point of this utility model patent. This utility model patent will not be further elaborated.
[0020] The above describes in detail the preferred specific embodiments of the present invention. It should be understood that ordinary technicians in this field can make many modifications and changes based on the concept of the present invention without creative work. Therefore, any technical solutions that can be obtained by technicians in this technical field through logical analysis, reasoning or limited experiments based on the concept of the present invention on the basis of existing technologies should be within the scope of protection determined by the claims.
Claims
1. The wear-resistant quartz boat is easy to assemble, characterized by: The cam is connected to the support rails of the second embodiment of the present invention, and the cam is connected to the support rails of the second embodiment of the present invention. The cams are connected to the support rails of the second embodiment of the present invention, and the support rails are connected to the support rails of the second embodiment of the present invention.
2. The wear-resistant quartz boat that is easy to assemble according to claim 1, characterized in that: The support rods on both sides of the middle support plate correspond to each other, and the corresponding support rods on both sides of the middle support plate are fixedly connected. The intubations on both sides of the middle support plate correspond to each other, and the intubations are connected to the corresponding intubations on the other side of the middle support plate.
3. The wear-resistant quartz boat that is easy to assemble according to claim 1, characterized in that: The support rod is provided with a plurality of evenly spaced slots.
4. The wear-resistant quartz boat that is easy to assemble as claimed in claim 3, characterized in that: The outer side of the end support plate is fixedly connected with a plurality of external threaded tubes, and the external threaded tubes are threadedly connected with adjustment tubes, and the adjustment tubes are fixedly connected with internal adjustment rods. The external threaded tubes correspond one to one with the inserting tubes on the inner side of the end support plate, and the external threaded tubes are connected to the corresponding inserting tubes on the inner side of the end support plate, and the internal adjustment rods are movably inserted into the external threaded tubes.
5. The wear-resistant quartz boat that is easy to assemble according to claim 1, characterized in that: The end support plate is provided with a through hole, and a handle is provided above the through hole.